JPWO2023048051A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2023048051A5
JPWO2023048051A5 JP2023549508A JP2023549508A JPWO2023048051A5 JP WO2023048051 A5 JPWO2023048051 A5 JP WO2023048051A5 JP 2023549508 A JP2023549508 A JP 2023549508A JP 2023549508 A JP2023549508 A JP 2023549508A JP WO2023048051 A5 JPWO2023048051 A5 JP WO2023048051A5
Authority
JP
Japan
Prior art keywords
piezoelectric vibration
vibration device
main surface
sealing member
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023549508A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023048051A1 (https=
JP7683714B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/034441 external-priority patent/WO2023048051A1/ja
Publication of JPWO2023048051A1 publication Critical patent/JPWO2023048051A1/ja
Publication of JPWO2023048051A5 publication Critical patent/JPWO2023048051A5/ja
Application granted granted Critical
Publication of JP7683714B2 publication Critical patent/JP7683714B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2023549508A 2021-09-22 2022-09-14 圧電振動デバイス Active JP7683714B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021154811 2021-09-22
JP2021154811 2021-09-22
PCT/JP2022/034441 WO2023048051A1 (ja) 2021-09-22 2022-09-14 圧電振動デバイス

Publications (3)

Publication Number Publication Date
JPWO2023048051A1 JPWO2023048051A1 (https=) 2023-03-30
JPWO2023048051A5 true JPWO2023048051A5 (https=) 2024-06-11
JP7683714B2 JP7683714B2 (ja) 2025-05-27

Family

ID=85720681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023549508A Active JP7683714B2 (ja) 2021-09-22 2022-09-14 圧電振動デバイス

Country Status (5)

Country Link
US (1) US20250040441A1 (https=)
JP (1) JP7683714B2 (https=)
CN (1) CN117546415A (https=)
TW (1) TWI835299B (https=)
WO (1) WO2023048051A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026048374A1 (ja) * 2024-08-30 2026-03-05 株式会社大真空 リッド、デバイス、およびデバイスの製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69718693T2 (de) * 1996-03-08 2003-11-27 Matsushita Electric Industrial Co., Ltd. Elektronisches Bauteil und Herstellungsverfahren
JP4811232B2 (ja) 2005-11-02 2011-11-09 パナソニック株式会社 電子部品パッケージ
JP2008060991A (ja) 2006-08-31 2008-03-13 Kyocera Kinseki Corp 圧電デバイス
WO2009057699A1 (ja) 2007-10-30 2009-05-07 Kyocera Corporation 弾性波装置
JP5757793B2 (ja) * 2011-06-10 2015-07-29 株式会社大真空 圧電振動デバイスの製造装置
WO2014077278A1 (ja) * 2012-11-16 2014-05-22 株式会社 大真空 圧電振動デバイス
JP2018061145A (ja) 2016-10-06 2018-04-12 日本電波工業株式会社 圧電デバイス
CN109716646A (zh) * 2016-11-24 2019-05-03 株式会社大真空 压电振动器件以及具备其的sip模块
WO2019188675A1 (ja) * 2018-03-28 2019-10-03 株式会社大真空 圧電振動デバイス
JP6780718B2 (ja) 2019-02-28 2020-11-04 株式会社大真空 圧電振動デバイス

Similar Documents

Publication Publication Date Title
US11342899B2 (en) Crystal resonator device
US12028042B2 (en) Piezoelectric resonator device having a through hole and through electrode for conduction with an external electrode terminal
US11362641B2 (en) Piezoelectric resonator device
JPWO2023048051A5 (https=)
JP7683714B2 (ja) 圧電振動デバイス
JP4916775B2 (ja) 圧電発振器
CN116137518A (zh) 振动器件
TWI824717B (zh) 壓電振動裝置
CN116137519A (zh) 振动器件
CN110999079A (zh) 压电振子
JP2013168893A (ja) 圧電振動デバイス
TWI894621B (zh) 壓電振動裝置
JP6100586B2 (ja) 圧電発振器及び圧電デバイス
JPWO2023053836A5 (https=)
JP5158337B2 (ja) 圧電デバイス
JP2011182017A (ja) モジュール
JP6863215B2 (ja) Ｍｅｍｓ発振器
JP5122902B2 (ja) 圧電発振器
JP2006340035A (ja) 圧電デバイス
JP2008141417A (ja) 圧電発振器
JP2007036970A (ja) 圧電デバイス