TWI835299B - 壓電振動裝置 - Google Patents

壓電振動裝置 Download PDF

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Publication number
TWI835299B
TWI835299B TW111135396A TW111135396A TWI835299B TW I835299 B TWI835299 B TW I835299B TW 111135396 A TW111135396 A TW 111135396A TW 111135396 A TW111135396 A TW 111135396A TW I835299 B TWI835299 B TW I835299B
Authority
TW
Taiwan
Prior art keywords
vibrator
piezoelectric vibration
vibration device
frame
closing member
Prior art date
Application number
TW111135396A
Other languages
English (en)
Chinese (zh)
Other versions
TW202329620A (zh
Inventor
藤野和也
大西学
Original Assignee
日商大真空股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商大真空股份有限公司 filed Critical 日商大真空股份有限公司
Publication of TW202329620A publication Critical patent/TW202329620A/zh
Application granted granted Critical
Publication of TWI835299B publication Critical patent/TWI835299B/zh

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
TW111135396A 2021-09-22 2022-09-19 壓電振動裝置 TWI835299B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021154811 2021-09-22
JP2021-154811 2021-09-22

Publications (2)

Publication Number Publication Date
TW202329620A TW202329620A (zh) 2023-07-16
TWI835299B true TWI835299B (zh) 2024-03-11

Family

ID=85720681

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111135396A TWI835299B (zh) 2021-09-22 2022-09-19 壓電振動裝置

Country Status (5)

Country Link
US (1) US20250040441A1 (https=)
JP (1) JP7683714B2 (https=)
CN (1) CN117546415A (https=)
TW (1) TWI835299B (https=)
WO (1) WO2023048051A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026048374A1 (ja) * 2024-08-30 2026-03-05 株式会社大真空 リッド、デバイス、およびデバイスの製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI575870B (zh) * 2011-06-10 2017-03-21 大真空股份有限公司 Manufacture of piezoelectric vibrating device
TWI591960B (zh) * 2012-11-16 2017-07-11 Daishinku Corp Piezoelectric vibration device
WO2018097132A1 (ja) * 2016-11-24 2018-05-31 株式会社大真空 圧電振動デバイスおよびそれを備えたＳｉＰモジュール
US20200373906A1 (en) * 2018-03-28 2020-11-26 Daishinku Corporation Piezoelectric vibration device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69718693T2 (de) * 1996-03-08 2003-11-27 Matsushita Electric Industrial Co., Ltd. Elektronisches Bauteil und Herstellungsverfahren
JP4811232B2 (ja) 2005-11-02 2011-11-09 パナソニック株式会社 電子部品パッケージ
JP2008060991A (ja) 2006-08-31 2008-03-13 Kyocera Kinseki Corp 圧電デバイス
WO2009057699A1 (ja) 2007-10-30 2009-05-07 Kyocera Corporation 弾性波装置
JP2018061145A (ja) 2016-10-06 2018-04-12 日本電波工業株式会社 圧電デバイス
JP6780718B2 (ja) 2019-02-28 2020-11-04 株式会社大真空 圧電振動デバイス

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI575870B (zh) * 2011-06-10 2017-03-21 大真空股份有限公司 Manufacture of piezoelectric vibrating device
TWI591960B (zh) * 2012-11-16 2017-07-11 Daishinku Corp Piezoelectric vibration device
WO2018097132A1 (ja) * 2016-11-24 2018-05-31 株式会社大真空 圧電振動デバイスおよびそれを備えたＳｉＰモジュール
CN109716646A (zh) * 2016-11-24 2019-05-03 株式会社大真空 压电振动器件以及具备其的sip模块
US20200373906A1 (en) * 2018-03-28 2020-11-26 Daishinku Corporation Piezoelectric vibration device

Also Published As

Publication number Publication date
WO2023048051A1 (ja) 2023-03-30
CN117546415A (zh) 2024-02-09
JPWO2023048051A1 (https=) 2023-03-30
JP7683714B2 (ja) 2025-05-27
TW202329620A (zh) 2023-07-16
US20250040441A1 (en) 2025-01-30

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