JP7683714B2 - 圧電振動デバイス - Google Patents

圧電振動デバイス Download PDF

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Publication number
JP7683714B2
JP7683714B2 JP2023549508A JP2023549508A JP7683714B2 JP 7683714 B2 JP7683714 B2 JP 7683714B2 JP 2023549508 A JP2023549508 A JP 2023549508A JP 2023549508 A JP2023549508 A JP 2023549508A JP 7683714 B2 JP7683714 B2 JP 7683714B2
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Japan
Prior art keywords
sealing member
piezoelectric vibration
vibration device
piezoelectric
vibrator
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JP2023549508A
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English (en)
Japanese (ja)
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JPWO2023048051A1 (https=
JPWO2023048051A5 (https=
Inventor
和也 藤野
学 大西
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Daishinku Corp
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Daishinku Corp
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Publication of JPWO2023048051A5 publication Critical patent/JPWO2023048051A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2023549508A 2021-09-22 2022-09-14 圧電振動デバイス Active JP7683714B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021154811 2021-09-22
JP2021154811 2021-09-22
PCT/JP2022/034441 WO2023048051A1 (ja) 2021-09-22 2022-09-14 圧電振動デバイス

Publications (3)

Publication Number Publication Date
JPWO2023048051A1 JPWO2023048051A1 (https=) 2023-03-30
JPWO2023048051A5 JPWO2023048051A5 (https=) 2024-06-11
JP7683714B2 true JP7683714B2 (ja) 2025-05-27

Family

ID=85720681

Family Applications (1)

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JP2023549508A Active JP7683714B2 (ja) 2021-09-22 2022-09-14 圧電振動デバイス

Country Status (5)

Country Link
US (1) US20250040441A1 (https=)
JP (1) JP7683714B2 (https=)
CN (1) CN117546415A (https=)
TW (1) TWI835299B (https=)
WO (1) WO2023048051A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026048374A1 (ja) * 2024-08-30 2026-03-05 株式会社大真空 リッド、デバイス、およびデバイスの製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007243915A (ja) 2005-11-02 2007-09-20 Matsushita Electric Ind Co Ltd 電子部品パッケージ
JP2008060991A (ja) 2006-08-31 2008-03-13 Kyocera Kinseki Corp 圧電デバイス
JP2016036182A (ja) 2007-10-30 2016-03-17 京セラ株式会社 弾性波装置および弾性波モジュール
JP2018061145A (ja) 2016-10-06 2018-04-12 日本電波工業株式会社 圧電デバイス
WO2018097132A1 (ja) 2016-11-24 2018-05-31 株式会社大真空 圧電振動デバイスおよびそれを備えたＳｉＰモジュール
JP2020141264A (ja) 2019-02-28 2020-09-03 株式会社大真空 圧電振動デバイス

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69718693T2 (de) * 1996-03-08 2003-11-27 Matsushita Electric Industrial Co., Ltd. Elektronisches Bauteil und Herstellungsverfahren
JP5757793B2 (ja) * 2011-06-10 2015-07-29 株式会社大真空 圧電振動デバイスの製造装置
WO2014077278A1 (ja) * 2012-11-16 2014-05-22 株式会社 大真空 圧電振動デバイス
WO2019188675A1 (ja) * 2018-03-28 2019-10-03 株式会社大真空 圧電振動デバイス

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007243915A (ja) 2005-11-02 2007-09-20 Matsushita Electric Ind Co Ltd 電子部品パッケージ
JP2008060991A (ja) 2006-08-31 2008-03-13 Kyocera Kinseki Corp 圧電デバイス
JP2016036182A (ja) 2007-10-30 2016-03-17 京セラ株式会社 弾性波装置および弾性波モジュール
JP2018061145A (ja) 2016-10-06 2018-04-12 日本電波工業株式会社 圧電デバイス
WO2018097132A1 (ja) 2016-11-24 2018-05-31 株式会社大真空 圧電振動デバイスおよびそれを備えたＳｉＰモジュール
JP2020141264A (ja) 2019-02-28 2020-09-03 株式会社大真空 圧電振動デバイス

Also Published As

Publication number Publication date
WO2023048051A1 (ja) 2023-03-30
CN117546415A (zh) 2024-02-09
JPWO2023048051A1 (https=) 2023-03-30
TW202329620A (zh) 2023-07-16
US20250040441A1 (en) 2025-01-30
TWI835299B (zh) 2024-03-11

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