CN117546415A - 压电振动器件 - Google Patents

压电振动器件 Download PDF

Info

Publication number
CN117546415A
CN117546415A CN202280044307.4A CN202280044307A CN117546415A CN 117546415 A CN117546415 A CN 117546415A CN 202280044307 A CN202280044307 A CN 202280044307A CN 117546415 A CN117546415 A CN 117546415A
Authority
CN
China
Prior art keywords
vibrator
piezoelectric
vibration device
frame
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280044307.4A
Other languages
English (en)
Chinese (zh)
Inventor
藤野和也
大西学
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Large Vacuum Of Co
Original Assignee
Large Vacuum Of Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Large Vacuum Of Co filed Critical Large Vacuum Of Co
Publication of CN117546415A publication Critical patent/CN117546415A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
CN202280044307.4A 2021-09-22 2022-09-14 压电振动器件 Pending CN117546415A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021154811 2021-09-22
JP2021-154811 2021-09-22
PCT/JP2022/034441 WO2023048051A1 (ja) 2021-09-22 2022-09-14 圧電振動デバイス

Publications (1)

Publication Number Publication Date
CN117546415A true CN117546415A (zh) 2024-02-09

Family

ID=85720681

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280044307.4A Pending CN117546415A (zh) 2021-09-22 2022-09-14 压电振动器件

Country Status (5)

Country Link
US (1) US20250040441A1 (https=)
JP (1) JP7683714B2 (https=)
CN (1) CN117546415A (https=)
TW (1) TWI835299B (https=)
WO (1) WO2023048051A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026048374A1 (ja) * 2024-08-30 2026-03-05 株式会社大真空 リッド、デバイス、およびデバイスの製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69718693T2 (de) * 1996-03-08 2003-11-27 Matsushita Electric Industrial Co., Ltd. Elektronisches Bauteil und Herstellungsverfahren
JP4811232B2 (ja) 2005-11-02 2011-11-09 パナソニック株式会社 電子部品パッケージ
JP2008060991A (ja) 2006-08-31 2008-03-13 Kyocera Kinseki Corp 圧電デバイス
WO2009057699A1 (ja) 2007-10-30 2009-05-07 Kyocera Corporation 弾性波装置
JP5757793B2 (ja) * 2011-06-10 2015-07-29 株式会社大真空 圧電振動デバイスの製造装置
WO2014077278A1 (ja) * 2012-11-16 2014-05-22 株式会社 大真空 圧電振動デバイス
JP2018061145A (ja) 2016-10-06 2018-04-12 日本電波工業株式会社 圧電デバイス
CN109716646A (zh) * 2016-11-24 2019-05-03 株式会社大真空 压电振动器件以及具备其的sip模块
WO2019188675A1 (ja) * 2018-03-28 2019-10-03 株式会社大真空 圧電振動デバイス
JP6780718B2 (ja) 2019-02-28 2020-11-04 株式会社大真空 圧電振動デバイス

Also Published As

Publication number Publication date
WO2023048051A1 (ja) 2023-03-30
JPWO2023048051A1 (https=) 2023-03-30
JP7683714B2 (ja) 2025-05-27
TW202329620A (zh) 2023-07-16
US20250040441A1 (en) 2025-01-30
TWI835299B (zh) 2024-03-11

Similar Documents

Publication Publication Date Title
US11342899B2 (en) Crystal resonator device
JP4795602B2 (ja) 発振器
US20140151105A1 (en) Base substrate, resonator, oscillator, sensor, electronic device, electronic apparatus, and moving object
JP2009213061A (ja) 発振器および電子機器
JP2013050321A (ja) 物理量検出器及び電子機器
EP2355342A2 (en) Piezoelectric vibrator and oscillator using the same
JPWO2020122179A1 (ja) 圧電振動デバイス
JP7683714B2 (ja) 圧電振動デバイス
US6876264B2 (en) Surface-mount crystal oscillator
JPWO2023048051A5 (https=)
JP2008263564A (ja) 温度補償型圧電発振器
JP5838694B2 (ja) 物理量検出器、物理量検出デバイス及び電子機器
JP4916775B2 (ja) 圧電発振器
JP5240931B2 (ja) 圧電振動子及び圧電発振器
CN110999079A (zh) 压电振子
JP5157315B2 (ja) 圧電デバイスの製造方法、圧電デバイスおよび電子機器
US20240396521A1 (en) Piezoelectric vibration device
CN116137518A (zh) 振动器件
JP5468240B2 (ja) 表面実装用とした温度補償水晶発振器
JP4890914B2 (ja) 水晶振動片の支持部構造
JPH0259648B2 (https=)
TWI894621B (zh) 壓電振動裝置
JP6863215B2 (ja) Ｍｅｍｓ発振器
JP5302733B2 (ja) 圧電振動子及び圧電発振器
JP2023108260A (ja) 振動デバイス

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination