TWI821649B - 耐火材 - Google Patents

耐火材 Download PDF

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Publication number
TWI821649B
TWI821649B TW110112699A TW110112699A TWI821649B TW I821649 B TWI821649 B TW I821649B TW 110112699 A TW110112699 A TW 110112699A TW 110112699 A TW110112699 A TW 110112699A TW I821649 B TWI821649 B TW I821649B
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TW
Taiwan
Prior art keywords
refractory material
less
sic
sic particles
particle diameter
Prior art date
Application number
TW110112699A
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English (en)
Chinese (zh)
Other versions
TW202210414A (zh
Inventor
古宮山常夫
松葉浩臣
臼杵裕樹
Original Assignee
日商日本碍子股份有限公司
日商Ｎｇｋ阿德列克股份有限公司
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Publication of TW202210414A publication Critical patent/TW202210414A/zh
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Publication of TWI821649B publication Critical patent/TWI821649B/zh

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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/66—Monolithic refractories or refractory mortars, including those whether or not containing clay
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/2407—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/36—Arrangements of heating devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/428—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Glass Compositions (AREA)
  • Compositions Of Oxide Ceramics (AREA)
TW110112699A 2020-09-07 2021-04-08 耐火材 TWI821649B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-150060 2020-09-07
JP2020150060 2020-09-07

Publications (2)

Publication Number Publication Date
TW202210414A TW202210414A (zh) 2022-03-16
TWI821649B true TWI821649B (zh) 2023-11-11

Family

ID=80490949

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110112699A TWI821649B (zh) 2020-09-07 2021-04-08 耐火材

Country Status (5)

Country Link
JP (1) JP7167367B2 (ja)
KR (1) KR20220033050A (ja)
CN (1) CN115956064A (ja)
TW (1) TWI821649B (ja)
WO (1) WO2022049818A1 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10310474A (ja) * 1997-05-08 1998-11-24 Tokai Konetsu Kogyo Co Ltd ＳｉＣ−Ｓｉ複合セラミックス材
JP2000130951A (ja) * 1998-10-28 2000-05-12 Ngk Insulators Ltd プラズマ・ディスプレイ・パネル用基板焼成炉及びそれに用いる炉内部材
JP2003090685A (ja) * 2001-07-13 2003-03-28 Ngk Insulators Ltd 基板上に形成された機能膜材料の熱処理炉

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Publication number Priority date Publication date Assignee Title
US4154787A (en) * 1977-07-25 1979-05-15 Coors Porcelain Company Method for manufacturing silicon carbide bodies
US4795673A (en) * 1978-01-09 1989-01-03 Stemcor Corporation Composite material of discontinuous silicon carbide particles and continuous silicon matrix and method of producing same
CA1158259A (en) * 1980-07-17 1983-12-06 Francis J. Frechette Composite material of silicon carbide and silicon and methods of producing
JPS605550B2 (ja) * 1980-11-21 1985-02-12 京セラ株式会社 炭化珪素焼結体の製法
JPS60138913A (ja) * 1983-12-26 1985-07-23 Toshiba Ceramics Co Ltd 半導体拡散炉管の製造方法
JPH0597520A (ja) * 1991-10-04 1993-04-20 Sumitomo Metal Ind Ltd 炭化珪素質材料の製造方法
DE4243864C2 (de) * 1991-12-24 1996-04-18 Schunk Ingenieurkeramik Gmbh Verfahren zur Herstellung von Formkörpern aus Siliciumcarbid
WO1993025859A1 (en) * 1992-06-08 1993-12-23 Ngk Insulators, Ltd. Shelf plate having anti-spalling, anti-creep and oxidation resistant properties
JPH06263538A (ja) * 1993-03-05 1994-09-20 Shin Etsu Chem Co Ltd 炭化珪素質部材の製造方法
JPH0867581A (ja) * 1994-08-30 1996-03-12 Sumitomo Metal Ind Ltd 半導体用治工具及びその製造方法
JP3270798B2 (ja) * 1994-12-27 2002-04-02 京セラ株式会社 炭化珪素質焼結体の製造方法
JPH1171178A (ja) * 1997-08-25 1999-03-16 Bridgestone Corp 耐熱性部材
JPH11171671A (ja) * 1997-12-10 1999-06-29 Tokai Konetsu Kogyo Co Ltd 板状ＳｉＣ−Ｓｉ系複合セラミックスの製造方法
JP3688138B2 (ja) * 1998-09-29 2005-08-24 東芝セラミックス株式会社 半導体熱処理用シリコン含浸炭化珪素質材料及びこれを用いたウェーハボート
JP4183108B2 (ja) * 1999-12-20 2008-11-19 日本碍子株式会社 リング付き炉内搬送用ローラーとその製造方法
JP3830733B2 (ja) * 2000-06-05 2006-10-11 株式会社東芝 粒子分散シリコン材料およびその製造方法
DE60125798T2 (de) * 2000-09-29 2007-10-18 Goodrich Corp. Verbundwerkstoffe mit keramischer matrix auf borcarbidbasis
JP4376479B2 (ja) * 2001-09-03 2009-12-02 昭和電工株式会社 Ｓｉ−ＳｉＣ複合材の製造方法
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DE102005060304B4 (de) * 2005-12-16 2008-12-18 Schunk Ingenieurkeramik Gmbh Verfahren zum Herstellen von Formkörpern aus nichtsilicatischer technischer Keramik
JP4847237B2 (ja) * 2006-07-11 2011-12-28 イビデン株式会社 複合セラミック粉末とその製造方法
JP4327190B2 (ja) * 2006-10-11 2009-09-09 日本碍子株式会社 Ｓｉ−ＳｉＣ質焼結体及びその製造方法
JP4612608B2 (ja) * 2006-10-31 2011-01-12 株式会社東芝 シリコン／炭化ケイ素複合材料の製造方法
JP2008156169A (ja) * 2006-12-25 2008-07-10 Bridgestone Corp 炭化ケイ素顆粒、これを用いた炭化ケイ素焼結体の製造方法および炭化ケイ素焼結体
CN101323524B (zh) * 2008-04-15 2011-04-06 西安交通大学 一种定向排列孔碳化硅多孔陶瓷的制备方法
WO2012071353A1 (en) * 2010-11-22 2012-05-31 Saint-Gobain Ceramics & Plastics, Inc. Infiltrated silicon carbide bodies and methods of making
SG11201500713PA (en) * 2012-08-02 2015-02-27 3M Innovative Properties Co Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof
JP6182082B2 (ja) * 2013-03-15 2017-08-16 日本碍子株式会社 緻密質複合材料、その製法及び半導体製造装置用部材
CN104387073B (zh) * 2014-10-09 2016-03-09 奉化市中立密封件有限公司 基于反应烧结法制造超细高韧性碳化硅陶瓷材料的方法
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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10310474A (ja) * 1997-05-08 1998-11-24 Tokai Konetsu Kogyo Co Ltd ＳｉＣ−Ｓｉ複合セラミックス材
JP2000130951A (ja) * 1998-10-28 2000-05-12 Ngk Insulators Ltd プラズマ・ディスプレイ・パネル用基板焼成炉及びそれに用いる炉内部材
JP2003090685A (ja) * 2001-07-13 2003-03-28 Ngk Insulators Ltd 基板上に形成された機能膜材料の熱処理炉

Also Published As

Publication number Publication date
JP7167367B2 (ja) 2022-11-08
KR20220033050A (ko) 2022-03-15
JPWO2022049818A1 (ja) 2022-03-10
TW202210414A (zh) 2022-03-16
CN115956064A (zh) 2023-04-11
WO2022049818A1 (ja) 2022-03-10

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