TWI821649B - Refractory materials - Google Patents
Refractory materials Download PDFInfo
- Publication number
- TWI821649B TWI821649B TW110112699A TW110112699A TWI821649B TW I821649 B TWI821649 B TW I821649B TW 110112699 A TW110112699 A TW 110112699A TW 110112699 A TW110112699 A TW 110112699A TW I821649 B TWI821649 B TW I821649B
- Authority
- TW
- Taiwan
- Prior art keywords
- refractory material
- less
- sic
- sic particles
- particle diameter
- Prior art date
Links
- 239000011819 refractory material Substances 0.000 title claims abstract description 71
- 239000002245 particle Substances 0.000 claims abstract description 79
- 239000011148 porous material Substances 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 14
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000010304 firing Methods 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 42
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 34
- 238000005452 bending Methods 0.000 description 10
- 238000001125 extrusion Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 3
- 230000014759 maintenance of location Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/66—Monolithic refractories or refractory mortars, including those whether or not containing clay
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
- F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
- F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
- F27B9/2407—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace)
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/428—Silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
Abstract
一種耐火材,上述耐火材為以SiC粒子作為骨材主體,且上述SiC粒子間含有金屬Si的Si-SiC質耐火材。另外,作為骨材的SiC粒子的平均粒子徑為15µm以下,觀察耐火材的剖面時,在100×100µm的範圍內存在100個以上0.05µm以上25µm以下的氣孔。A refractory material. The refractory material is a Si-SiC refractory material with SiC particles as the main body and metal Si contained between the SiC particles. In addition, the average particle diameter of the SiC particles as the aggregate is 15 µm or less. When the cross-section of the refractory material is observed, there are more than 100 pores of 0.05 µm to 25 µm in the range of 100×100 µm.
Description
本申請主張基於2020年9月7日申請的日本特許申請第2020-150060 號的優先權。該申請的全部內容通過引用併入本文。本說明書揭示了關於耐火材的技術。特別是揭示了一種關於在SiC粒子間含有金屬Si的Si-SiC質耐火材的技術。This application claims priority based on Japanese Patent Application No. 2020-150060 filed on September 7, 2020. The entire contents of this application are incorporated herein by reference. This manual discloses technology related to refractory materials. In particular, a technology regarding a Si-SiC refractory material containing metallic Si between SiC particles is disclosed.
特開2004-18332號公報(以下稱為特許文獻1)中,揭示了關於Si-SiC質的耐火材(矽/碳化矽複合材料)的技術。特許文獻1的耐火材由平均粒徑為0.01~2µm的SiC粒子、平均粒徑為0.1~10µm的SiC粒子及SiC粒子間分散的金屬Si構成。Japanese Patent Application Publication No. 2004-18332 (hereinafter referred to as Patent Document 1) discloses technology regarding Si-SiC refractory materials (silicon/silicon carbide composite materials). The refractory material in
SiC-SiC質(Si含浸SiC)為在作為骨材的SiC粒子間分散金屬Si,提高耐火材的韌性及機械強度等特性。但是,為了耐火材的輕薄化或高耐久化(長壽命化),還需要進一步提高特性。本說明書的目的在於提供一種Si-SiC質的耐火材中高強度的耐火材。SiC-SiC (Si-impregnated SiC) disperses metal Si between SiC particles as an aggregate to improve the toughness and mechanical strength of the refractory material. However, in order to make refractory materials thinner and more durable (longer life), it is necessary to further improve the characteristics. The purpose of this specification is to provide a high-strength refractory material among Si-SiC refractory materials.
本說明書中揭示的耐火材可以是以SiC粒子作為骨材主體,並且在此SiC粒子間包含金屬Si的Si-SiC質。此外,作為骨材的SiC粒子的平均粒子徑為10μm以下,觀察耐火材的剖面時,在100μm×100μm的範圍內存在100個以上0.05μm以上25μm以下的氣孔。另外,此耐火材可形成輥、燒成用載具(setter)及加熱爐用樑(beam)。 The refractory material disclosed in this specification may be a Si-SiC material with SiC particles as the main body and metal Si contained between the SiC particles. In addition, the average particle diameter of the SiC particles as the aggregate is 10 μm or less, and when the cross section of the refractory material is observed, there are 100 or more pores of 0.05 μm or more and 25 μm or less in the range of 100 μm × 100 μm. In addition, this refractory material can be formed into rollers, sintering setters, and heating furnace beams.
本說明書所揭示的耐火材,可作為加熱爐的構成部件或者加熱爐內用的部件而利用。具體而言,可作為加熱爐的壁材、樑、連續式加熱爐的輥、載置被燒成物(被加熱物)的燒成用載具等而利用。 The refractory material disclosed in this specification can be used as a component of a heating furnace or as a component within a heating furnace. Specifically, it can be used as a wall material of a heating furnace, a beam, a roller of a continuous heating furnace, a baking carrier on which an object to be burned (object to be heated) is placed, and the like.
耐火材可以是以SiC粒子作為骨材主體,並且在SiC粒子間包含金屬Si的Si-SiC質的耐火材。通過將耐熱性優異的SiC粒子作為骨材的主體,可以提高耐火材的耐熱性。另外,「以SiC粒子作為骨材主體」是指骨材的總質量中占有SiC粒子的比例為50質量%以上。即,構成耐火材的骨材也可以含有SiC粒子以外的粒子。另外,骨材中占有SiC粒子的比例可為60質量%以上、70質量%以上、80質量%以上、90質量%以上或95質量%以上。另外,除了作為骨材的SiC粒子之外,耐火材還可以含有例如B4C粒子及C粒子。 The refractory material may be a Si-SiC refractory material with SiC particles as the main body and metal Si contained between the SiC particles. By using SiC particles with excellent heat resistance as the main body of the aggregate, the heat resistance of the refractory material can be improved. In addition, "with SiC particles as the main body of the aggregate" means that the proportion of SiC particles in the total mass of the aggregate is 50 mass % or more. That is, the aggregate constituting the refractory material may contain particles other than SiC particles. In addition, the proportion of SiC particles in the aggregate may be 60 mass% or more, 70 mass% or more, 80 mass% or more, 90 mass% or more, or 95 mass% or more. In addition to SiC particles as aggregates, the refractory material may also contain, for example, B 4 C particles and C particles.
SiC粒子的平均粒子徑可以為15μm以下。藉此,可緻密化耐火材的構造(組織構造),並提高耐火材的機械強度。骨材(SiC粒子)的平均粒子徑可以為10μm以下、7μm以下、5μm以下、3μm以下或1μm以下。另外,骨材的最小粒子徑可以為0.05μm以上。在製造耐火材時,可抑制骨材(粒子)的凝聚。此外,骨材的最大粒子徑可為15μm以下。可抑制耐火材的組織構造內骨材本身成為缺陷,並抑制耐火材的機械強度的降低。SiC粒子的粒徑(平均粒子徑、最小粒子徑、最大粒子徑)可以通過利用掃描式電子顯微鏡(SEM)等觀察耐火材的剖面來確認。The average particle diameter of the SiC particles may be 15 μm or less. Thereby, the structure (structural structure) of the refractory material can be densified and the mechanical strength of the refractory material can be improved. The average particle diameter of the aggregate (SiC particles) may be 10 μm or less, 7 μm or less, 5 μm or less, 3 μm or less, or 1 μm or less. In addition, the minimum particle diameter of the aggregate may be 0.05 μm or more. When manufacturing refractory materials, it can inhibit the aggregation of aggregates (particles). In addition, the maximum particle diameter of the aggregate may be 15 μm or less. It can prevent the aggregate itself from becoming defects in the structure of the refractory material and prevent the mechanical strength of the refractory material from decreasing. The particle diameter (average particle diameter, minimum particle diameter, maximum particle diameter) of SiC particles can be confirmed by observing the cross-section of the refractory material using a scanning electron microscope (SEM) or the like.
耐火材可在耐火材的剖面中100μm×100μm的範圍內存在100個以上0.05μm以上25μm以下的氣孔。換而言之,小尺寸的氣孔(0.05μm以上25μm以下的氣孔)可以分散地存在於耐火材的內部。可抑制耐火材的內部中存在大尺寸的氣孔(例如大於50μm的氣孔),提高耐火材的機械強度。即,通過抑制可能成為破壞起點的大尺寸的氣孔在耐火材的內部中存在,提高耐火材的機械強度。另外,氣孔的大小與骨材的粒徑一樣,可以通過利用掃描式電子顯微鏡等觀察耐火材的剖面來確認。具體而言,氣孔的尺寸可以通過觀察耐火材的剖面中100×100μm的範圍,並測定出現在該範圍內的氣孔的最大直徑來確認。The refractory material may have more than 100 pores ranging from 0.05 μm to 25 μm in the range of 100 μm × 100 μm in the cross section of the refractory material. In other words, small-sized pores (pores of 0.05 μm to 25 μm) can be dispersedly present inside the refractory material. It can suppress the existence of large-sized pores (for example, pores larger than 50 μm) inside the refractory material and improve the mechanical strength of the refractory material. That is, the mechanical strength of the refractory material is improved by suppressing the presence of large-sized pores that may be the starting point of destruction in the interior of the refractory material. In addition, the size of the pores is the same as the particle size of the aggregate, and can be confirmed by observing the cross section of the refractory material using a scanning electron microscope or the like. Specifically, the size of the pores can be confirmed by observing a range of 100×100 μm in the cross section of the refractory material and measuring the maximum diameter of the pores appearing within this range.
此外,耐火材的氣孔率(視孔隙度)可以為1%以下。 藉此,提高了耐火材的機械強度。耐火材的氣孔率(視孔隙度)可以為0.8%以下、0.6%以下或0.5%以下。另外,耐火材的氣孔率可以根據JIS R2205-1992進行測定。In addition, the porosity (apparent porosity) of the refractory material may be 1% or less. This improves the mechanical strength of the refractory material. The porosity (apparent porosity) of refractory materials can be 0.8% or less, 0.6% or less, or 0.5% or less. In addition, the porosity of the refractory material can be measured in accordance with JIS R2205-1992.
如上所述,本說明書所揭示的耐火材在SiC粒子間含有金屬Si。耐火材中占有金屬Si的比例可以為20質量%以上60質量%以下。如果耐火材中占有金屬Si的比例為60質量%以下,在耐火材的製造過程(主要是燒成工程)中可抑制內部裂紋的產生。另外,耐火材中占有金屬Si的比例可為55質量%以下、50質量%以下、45質量%以下、40質量%以下或35質量%以下。此外,如果耐火材中占有金屬Si的比例為20質量%以上,金屬Si可充分填充SiC粒子間的間隙(視孔隙度的增加得到抑制)。耐火材中占有金屬Si的比例可以為30質量%以上或40質量%以上。 As described above, the refractory material disclosed in this specification contains metallic Si between SiC particles. The proportion of metal Si in the refractory material may be 20 mass% or more and 60 mass% or less. If the proportion of metal Si in the refractory material is 60% by mass or less, the occurrence of internal cracks during the manufacturing process of the refractory material (mainly the firing process) can be suppressed. In addition, the proportion of metallic Si in the refractory material may be 55 mass% or less, 50 mass% or less, 45 mass% or less, 40 mass% or less, or 35 mass% or less. In addition, if the proportion of metal Si in the refractory material is 20 mass % or more, metal Si can fully fill the gaps between SiC particles (an increase in apparent porosity is suppressed). The proportion of metal Si in the refractory material may be 30 mass% or more or 40 mass% or more.
第1圖示出了加熱爐(未示出)中使用的輥10。輥10為具有貫通孔12的圓筒狀,並由Si-SiC質形成。輥10是耐火材的一示例。輥10由粒徑為0.4~15μm、平均粒子徑為3.0μm的SiC粒子作為骨材而構成。此外,SiC粒子間存在金屬Si。另外,骨材(SiC粒子)的粒徑通過取得輥10的中央部分的剖面的SEM圖像,並測定圖像內的存在於100μm×100μm的範圍內的骨材的形狀而算出。此外,骨材(SiC粒子)及骨材間的物質(金屬Si)通過使用EDS對所取得的SEM圖像進行元素分析來識別。
Figure 1 shows a
在所取得的SEM圖像的100μm×100μm的範圍內,確認到722個0.05μm以上25μm以下的氣孔,未確認到大於15μm的氣孔。輥10的氣孔率(視孔隙度)為0.5%。根據JIS R1601-2008對輥10進行彎曲強度試驗的結果為448MPa。另外,輥10通過押出成型方法製造。由於押出成形法是公知的,故省略其說明。
In the range of 100 μm × 100 μm of the obtained SEM image, 722 pores ranging from 0.05 μm to 25 μm were confirmed, and no pores larger than 15 μm were confirmed. The porosity (apparent porosity) of
第2圖示出了加熱爐(未示出)中使用的載具14。載具14具有與輥10同樣的特性。載具14可以通過壓製方法製造。
Figure 2 shows the
第3圖示出了構成加熱爐(未示出)的樑16。如(A)和(B)所示,樑16為圓柱狀且實心的。樑16可以通過押出成型方法製造。
Figure 3 shows the
[實施例] [Example]
製造骨材(SiC粒子)的粒徑(平均粒子徑)不同的耐火材(試料1~9),進行彎曲強度的測定。第4圖示出了製造各試料時使用的骨材的粒徑。作為耐火材的具體製造方法,首先,使用第4圖所示的骨材,由押出成形機製造外徑38mm、內徑25mm、長度1000mm的圓筒狀(輥狀)的成形體,並在溫度100℃的大氣氣氛下乾燥24小時以上。接著,含浸金屬Si後,在惰性氣體(Ar)氣氛下以1600℃燒成,得到Si-SiC質的輥狀耐火材。Refractory materials (
對所得試料1~9進行彎曲強度的測定。彎曲強度根據JIS R1601-2008測定。第4圖示出了彎曲強度的測定結果。另外,在第4圖中,連同彎曲強度的測定結果,將彎曲強度為350MPa以上的試料表示為「◎」、300MPa以上且小於350MPa的試料表示為「〇」、200MPa以上且小於300MPa的試料表示為「△」、小於200MPa的試料表示為「×」。「◎」及「○」為合格等級。此外,對於試料1~9,除彎曲強度外,還進行了SiC粒子的粒徑(平均粒子徑、最小粒子徑、最大粒子徑)、在100μm×100μm範圍內的剖面觀察中的氣孔數、氣孔率、成形性和保形性的評價。The bending strength of the obtained
SiC粒子的粒徑(平均粒子徑、最小粒子徑、最大粒子徑)是通過用SEM觀察耐火材的剖面,並測定所有出現在100μm×100μm範圍內的SiC粒子而算出的。氣孔數是通過用SEM觀察耐火材的剖面,目視計數100μm×100μm範圍內的氣孔(0.05μm以上25μm以下的氣孔)。另外,氣孔率(視孔隙度)是根據JIS R2205-1992測定。另外,剖面的SEM觀察是使用Hitachi High-Technologies Corporation製造的TM4000進行。氣孔數及氣孔率的結果示於第4圖。The particle diameters (average particle diameter, minimum particle diameter, maximum particle diameter) of SiC particles are calculated by observing the cross section of the refractory material with an SEM and measuring all SiC particles appearing in the range of 100 μm × 100 μm. The number of pores is determined by observing the cross section of the refractory material with an SEM and visually counting the pores in the range of 100 μm × 100 μm (pores from 0.05 μm to 25 μm). In addition, porosity (apparent porosity) is measured in accordance with JIS R2205-1992. In addition, SEM observation of the cross section was performed using TM4000 manufactured by Hitachi High-Technologies Corporation. The results of the number of pores and porosity are shown in Figure 4.
對於成形性,目視觀察押出成形後的試料,將確認無異常的試料評價為「◎」,將確認有變形的試料評價為「○」,將確認有變形和分段(斷片)的試料評價為「△」,將在押出中由於分段頻繁發生而無法成形的試料評價為「×」。Regarding the formability, the samples after extrusion molding were visually observed, and the samples with no abnormality were evaluated as "◎", the samples with deformation were confirmed as "○", and the samples with deformation and segmentation (fragments) were evaluated as "◎" "△", samples that cannot be formed due to frequent segmentation during extrusion are evaluated as "×".
對於保形性,目視觀察押出成形後的試料,將在設計公差範圍內的試料評價為「◎」,將偏離設計公差小於2mm的試料評價為「○」,將偏離設計公差大於2mm的試料評價為「△」,將實質上無法測定(形狀未維持)的試料評價為「×」。For shape retention, the samples after extrusion molding were visually observed, and the samples within the design tolerance range were evaluated as "◎", the samples that deviated from the design tolerance by less than 2 mm were evaluated as "○", and the samples that deviated from the design tolerance by more than 2 mm were evaluated as "○" is "△", and a sample that cannot be substantially measured (the shape is not maintained) is evaluated as "×".
如第4圖所示,確認了SiC粒子的平均粒子徑為15μm以下、0.05μm以上25μm以下的氣孔的數量為100個以上的試料(試料1~6)可獲得良好的強度(300MPa以上)。此外,確認了SiC粒子的最大粒子徑為30μm以下的的試料(試料1~5)可獲得特別良好的強度(350MPa以上)。另外,確認了SiC粒子的最大粒子徑為15μm以下的試料(試料1~3)可獲得極良好的強度(400MPa以上)。另外,顯示出良好強度的試料(試料1~6)均具有0.05μm以上的最小粒子徑、1%以下的視孔隙度。另外,確認了試料1~6比起試料7~9成形性及保形性均較良好。As shown in Figure 4, it was confirmed that samples (
如上所述,確認了試料1~3可獲得極高強度的耐火材。比較試料1~3及試料4~6,試料1~3具有視孔隙度為0.5%以下的特徵。藉由此結果,確認了通過將耐火材的視孔隙度降低至0.5%以下,可以進一步提高耐火材的強度。As mentioned above, it was confirmed that
在上述實施例中,示出了利用耐火材的輥、載具、樑的示例,但是本說明書中揭示的耐火材也可作為上述實施例以外的部件(製品)而利用,若是在高溫環境下使用的部件。此外,在上述實施例中,示出了圓柱狀的樑的示例,但樑也可是角柱狀。In the above-mentioned embodiments, examples using rollers, carriers, and beams made of refractory materials are shown. However, the refractory materials disclosed in this specification can also be used as components (products) other than those in the above-mentioned embodiments. If used in a high-temperature environment parts used. In addition, in the above-mentioned embodiment, the example of the cylindrical beam was shown, but the beam may also be in the shape of a corner prism.
以上,對本發明的具體示例進行了詳細說明,但這些僅為例示,並不限定專利請求的範圍。專利請求的範圍中記載的技術包括以上例示的具體示例的各種變形和變更。另外,本說明書或所附圖式中說明的技術要素單獨地或以各種組合的形式發揮出技術上的有用性,並不限於申請時請求項記載的組合。另外,本說明書或所附圖式所例示的技術可以同時達成多種目的,達成其中一種目的本身具有技術上的有用性。Specific examples of the present invention have been described in detail above, but these are only examples and do not limit the scope of the patent claims. The technology described in the scope of the patent claims includes various modifications and changes of the specific examples illustrated above. In addition, the technical elements described in this specification or the attached drawings are technically useful individually or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology illustrated in this specification or the accompanying drawings can achieve multiple purposes simultaneously, and achieving one of the purposes itself has technical usefulness.
10:輥 12:貫通孔 14:燒成用載具 16:加熱爐用樑10:Roller 12:Through hole 14: Vehicle for firing 16:Heating furnace beams
[第1圖]示出了耐火材的一示例(輥)。 [Figure 1] shows an example of a refractory material (roller).
[第2圖]示出了耐火材的一示例(燒成用載具)。 [Figure 2] shows an example of a refractory material (carrier for firing).
[第3圖]示出了耐火材的一示例(加熱爐用樑),(A)示出了加熱爐用樑的外觀,(B)示出了加熱爐用樑的剖面。 [Fig. 3] shows an example of the refractory material (beam for heating furnace), (A) shows the appearance of the beam for heating furnace, and (B) shows the cross section of the beam for heating furnace.
[第4圖]示出了實施例的結果。 [Fig. 4] shows the results of the Example.
10:輥10:Roller
12:貫通孔12:Through hole
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020150060 | 2020-09-07 | ||
JP2020-150060 | 2020-09-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202210414A TW202210414A (en) | 2022-03-16 |
TWI821649B true TWI821649B (en) | 2023-11-11 |
Family
ID=80490949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110112699A TWI821649B (en) | 2020-09-07 | 2021-04-08 | Refractory materials |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7167367B2 (en) |
KR (1) | KR20220033050A (en) |
CN (1) | CN115956064A (en) |
TW (1) | TWI821649B (en) |
WO (1) | WO2022049818A1 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10310474A (en) * | 1997-05-08 | 1998-11-24 | Tokai Konetsu Kogyo Co Ltd | Silicon carbide-silicon composite ceramic material |
JP2000130951A (en) * | 1998-10-28 | 2000-05-12 | Ngk Insulators Ltd | Substrate firing furnace for plasma display panel and furnace member therefor |
JP2003090685A (en) * | 2001-07-13 | 2003-03-28 | Ngk Insulators Ltd | Heat treatment furnace for functional film material formed on substrate |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4154787A (en) * | 1977-07-25 | 1979-05-15 | Coors Porcelain Company | Method for manufacturing silicon carbide bodies |
US4795673A (en) * | 1978-01-09 | 1989-01-03 | Stemcor Corporation | Composite material of discontinuous silicon carbide particles and continuous silicon matrix and method of producing same |
CA1158259A (en) * | 1980-07-17 | 1983-12-06 | Francis J. Frechette | Composite material of silicon carbide and silicon and methods of producing |
JPS605550B2 (en) * | 1980-11-21 | 1985-02-12 | 京セラ株式会社 | Manufacturing method of silicon carbide sintered body |
JPS60138913A (en) * | 1983-12-26 | 1985-07-23 | Toshiba Ceramics Co Ltd | Manufacture of semiconductor diffusion furnace tube |
JPH0597520A (en) * | 1991-10-04 | 1993-04-20 | Sumitomo Metal Ind Ltd | Production of silicon carbide-based material |
DE4243864C2 (en) * | 1991-12-24 | 1996-04-18 | Schunk Ingenieurkeramik Gmbh | Process for the production of moldings from silicon carbide |
DE4392693T1 (en) * | 1992-06-08 | 1994-09-08 | Ngk Insulators Ltd | Inserts resistant to temperature changes, creep and oxidation resistant |
JPH06263538A (en) * | 1993-03-05 | 1994-09-20 | Shin Etsu Chem Co Ltd | Production of silicon carbide member |
JPH0867581A (en) * | 1994-08-30 | 1996-03-12 | Sumitomo Metal Ind Ltd | Jig or tool for semiconductor and method for producing the same |
JP3270798B2 (en) * | 1994-12-27 | 2002-04-02 | 京セラ株式会社 | Method for producing silicon carbide sintered body |
JPH1171178A (en) * | 1997-08-25 | 1999-03-16 | Bridgestone Corp | Heat-resistant member |
JPH11171671A (en) * | 1997-12-10 | 1999-06-29 | Tokai Konetsu Kogyo Co Ltd | Production of plate silicon carbide-silicon composite ceramic |
JP3688138B2 (en) * | 1998-09-29 | 2005-08-24 | 東芝セラミックス株式会社 | Silicon impregnated silicon carbide material for semiconductor heat treatment and wafer boat using the same |
JP4183108B2 (en) * | 1999-12-20 | 2008-11-19 | 日本碍子株式会社 | In-furnace transport roller with ring and method for manufacturing the same |
JP3830733B2 (en) * | 2000-06-05 | 2006-10-11 | 株式会社東芝 | Particle-dispersed silicon material and manufacturing method thereof |
WO2002028801A2 (en) * | 2000-09-29 | 2002-04-11 | The B.F.Goodrich Company | Boron carbide based ceramic matrix composites |
JP4376479B2 (en) * | 2001-09-03 | 2009-12-02 | 昭和電工株式会社 | Method for producing Si-SiC composite material |
JP2006003376A (en) * | 2004-06-15 | 2006-01-05 | Taiheiyo Cement Corp | Optical reflection mirror |
DE102005060304B4 (en) * | 2005-12-16 | 2008-12-18 | Schunk Ingenieurkeramik Gmbh | Process for the production of molded articles from non-silicate technical ceramics |
JP4847237B2 (en) * | 2006-07-11 | 2011-12-28 | イビデン株式会社 | Composite ceramic powder and manufacturing method thereof |
JP4327190B2 (en) * | 2006-10-11 | 2009-09-09 | 日本碍子株式会社 | Si-SiC sintered body and manufacturing method thereof |
JP4612608B2 (en) * | 2006-10-31 | 2011-01-12 | 株式会社東芝 | Method for producing silicon / silicon carbide composite material |
JP2008156169A (en) * | 2006-12-25 | 2008-07-10 | Bridgestone Corp | Silicon carbide granule, method for producing silicon carbide sintered compact using it and silicon carbide sintered compact |
CN101323524B (en) * | 2008-04-15 | 2011-04-06 | 西安交通大学 | Preparation of oriented hole silicon carbide porous ceramic |
US8865607B2 (en) * | 2010-11-22 | 2014-10-21 | Saint-Gobain Ceramics & Plastics, Inc. | Infiltrated silicon carbide bodies and methods of making |
EP2879836B1 (en) * | 2012-08-02 | 2019-11-13 | 3M Innovative Properties Company | Abrasive element with precisely shaped features, abrasive article fabricated therefrom and method of making thereof |
JP6182082B2 (en) * | 2013-03-15 | 2017-08-16 | 日本碍子株式会社 | Dense composite material, manufacturing method thereof, and member for semiconductor manufacturing equipment |
CN104387073B (en) * | 2014-10-09 | 2016-03-09 | 奉化市中立密封件有限公司 | The method of ultra-fine high tenacity thyrite is manufactured based on reaction sintering |
CN105669205B (en) * | 2014-11-17 | 2018-04-13 | 中国科学院上海硅酸盐研究所 | The method that fine and close solid-phase sintered silicon carbide is prepared using grain composition powder as raw material |
JP6489891B2 (en) * | 2015-03-24 | 2019-03-27 | 昭和電工株式会社 | Method for producing SiC raw material used in sublimation recrystallization method |
-
2021
- 2021-04-02 KR KR1020227002200A patent/KR20220033050A/en not_active Application Discontinuation
- 2021-04-02 CN CN202180004708.2A patent/CN115956064A/en active Pending
- 2021-04-02 WO PCT/JP2021/014378 patent/WO2022049818A1/en active Application Filing
- 2021-04-02 JP JP2021568109A patent/JP7167367B2/en active Active
- 2021-04-08 TW TW110112699A patent/TWI821649B/en active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10310474A (en) * | 1997-05-08 | 1998-11-24 | Tokai Konetsu Kogyo Co Ltd | Silicon carbide-silicon composite ceramic material |
JP2000130951A (en) * | 1998-10-28 | 2000-05-12 | Ngk Insulators Ltd | Substrate firing furnace for plasma display panel and furnace member therefor |
JP2003090685A (en) * | 2001-07-13 | 2003-03-28 | Ngk Insulators Ltd | Heat treatment furnace for functional film material formed on substrate |
Also Published As
Publication number | Publication date |
---|---|
JPWO2022049818A1 (en) | 2022-03-10 |
WO2022049818A1 (en) | 2022-03-10 |
TW202210414A (en) | 2022-03-16 |
KR20220033050A (en) | 2022-03-15 |
JP7167367B2 (en) | 2022-11-08 |
CN115956064A (en) | 2023-04-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Schulte-Fischedick et al. | Oxidation behaviour of C/C–SiC coated with SiC–B4C–SiC–cordierite oxidation protection system | |
US6355206B1 (en) | Sic-C/C composite material, uses thereof, and method for producing the same | |
WO2016093360A1 (en) | Silicon carbide fiber reinforced silicon carbide composite material | |
US9938198B2 (en) | Method for integral joining infiltrated ceramic matrix composites | |
KR100458023B1 (en) | Fibrous composite material and process for producing the same | |
US10519069B2 (en) | Roller for a roller furnace having at least one coating on the surface | |
Lee et al. | Multilayered oxide interphase concept for ceramic‐matrix composites | |
TWI821649B (en) | Refractory materials | |
Badini et al. | High temperature oxidation of multilayered SiC processed by tape casting and sintering | |
JP2009292709A (en) | Silicon carbide porous body | |
TWI751709B (en) | Refractory | |
JP2003252694A (en) | SiC-FIBER-COMPOSITED SiC COMPOSITE MATERIAL | |
CA2145706C (en) | Composites for wear | |
JP6685549B2 (en) | Porous body and method for producing the same | |
WO2022014613A1 (en) | Exhaust pipe | |
EP1136463A2 (en) | Oxidation resistant carbonaceous material and method for producing the same | |
JP3943282B2 (en) | Ceramic tube and induction heating furnace using the same | |
Licciulli et al. | Influence of zirconia interfacial coating on alumina fiber‐reinforced alumina matrix composites | |
JP2000052461A (en) | Kiln tool excellent in processability | |
Lee et al. | Microstructure and bending properties of SiC/SiC composites fabricated by reaction sintering process | |
JP2000088111A (en) | Mechanical seal member | |
WO2022014617A1 (en) | Exhaust pipe | |
WO2022014612A1 (en) | Exhaust pipe | |
WO2022014616A1 (en) | Exhaust pipe | |
JP4175745B2 (en) | Hot working support |