TWI675206B - 用於掃描探針顯微鏡的裝置與方法 - Google Patents

用於掃描探針顯微鏡的裝置與方法 Download PDF

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Publication number
TWI675206B
TWI675206B TW107109097A TW107109097A TWI675206B TW I675206 B TWI675206 B TW I675206B TW 107109097 A TW107109097 A TW 107109097A TW 107109097 A TW107109097 A TW 107109097A TW I675206 B TWI675206 B TW I675206B
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TW
Taiwan
Prior art keywords
cantilever
measurement
probe
tip
area
Prior art date
Application number
TW107109097A
Other languages
English (en)
Chinese (zh)
Other versions
TW201842338A (zh
Inventor
尤瑞奇 馬泰卡
Ulrich Matejka
克里斯多福 包爾
Christof Baur
Original Assignee
德商卡爾蔡司Ｓｍｔ有限公司
Carl Zeiss Smt Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 德商卡爾蔡司Ｓｍｔ有限公司, Carl Zeiss Smt Gmbh filed Critical 德商卡爾蔡司Ｓｍｔ有限公司
Publication of TW201842338A publication Critical patent/TW201842338A/zh
Application granted granted Critical
Publication of TWI675206B publication Critical patent/TWI675206B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • G01Q40/02—Calibration standards and methods of fabrication thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW107109097A 2017-03-31 2018-03-16 用於掃描探針顯微鏡的裝置與方法 TWI675206B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017205528.6A DE102017205528B4 (de) 2017-03-31 2017-03-31 Vorrichtung und Verfahren für ein Rastersondenmikroskop
DE102017205528.6 2017-03-31

Publications (2)

Publication Number Publication Date
TW201842338A TW201842338A (zh) 2018-12-01
TWI675206B true TWI675206B (zh) 2019-10-21

Family

ID=61569269

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107109097A TWI675206B (zh) 2017-03-31 2018-03-16 用於掃描探針顯微鏡的裝置與方法

Country Status (6)

Country Link
US (2) US11237185B2 (https=)
EP (2) EP3602080B1 (https=)
JP (2) JP7029469B2 (https=)
DE (1) DE102017205528B4 (https=)
TW (1) TWI675206B (https=)
WO (1) WO2018177685A1 (https=)

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DE102017205528B4 (de) 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop
CN111238373A (zh) * 2020-03-13 2020-06-05 深圳明锐仪器有限公司 一种双探针的纳米测量仪器
US11460419B2 (en) 2020-03-30 2022-10-04 Fei Company Electron diffraction holography
US11456149B2 (en) * 2020-03-30 2022-09-27 Fei Company Methods and systems for acquiring 3D diffraction data
CN112964909B (zh) * 2020-09-16 2023-12-01 中国科学院沈阳自动化研究所 一种原子力显微镜多探针同时独立运动测量方法与装置
TWI785906B (zh) 2021-11-26 2022-12-01 國立成功大學 具奈米解析度之檢定力學與磁性特徵的方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06294638A (ja) * 1993-04-06 1994-10-21 Olympus Optical Co Ltd 表面形状測定装置
WO2000019166A1 (en) * 1998-09-26 2000-04-06 Xidex Corporation Multidimensional sensing system for atomic force miscroscopy
WO2001046643A1 (en) * 1999-12-22 2001-06-28 Mfi Technologies Corporation Scanning force microscope probe cantilever with reflective structure
EP2943681A1 (de) * 2014-02-03 2015-11-18 Stoba Holding GmbH & Co. KG Kraftstoffeinspritzdosiereinrichtung, kraftstoffeinspritzdüse, werkzeug zum herstellen einer kraftstoffeinspritzdosiereinrichtung und verfahren zum herstellen einer kraftstoffeinspritzdosiereinrichtung

Also Published As

Publication number Publication date
US20220146548A1 (en) 2022-05-12
JP7029469B2 (ja) 2022-03-03
EP3602080A1 (en) 2020-02-05
DE102017205528B4 (de) 2021-06-10
TW201842338A (zh) 2018-12-01
US11237185B2 (en) 2022-02-01
DE102017205528A1 (de) 2018-10-04
EP3602080B1 (en) 2025-11-19
JP2020512563A (ja) 2020-04-23
JP2022070996A (ja) 2022-05-13
EP4671773A2 (en) 2025-12-31
WO2018177685A1 (en) 2018-10-04
JP7333434B2 (ja) 2023-08-24
US11796563B2 (en) 2023-10-24
EP3602080C0 (en) 2025-11-19
EP4671773A3 (en) 2026-03-11
US20200025796A1 (en) 2020-01-23

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