DE102017205528B4 - Vorrichtung und Verfahren für ein Rastersondenmikroskop - Google Patents

Vorrichtung und Verfahren für ein Rastersondenmikroskop Download PDF

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Publication number
DE102017205528B4
DE102017205528B4 DE102017205528.6A DE102017205528A DE102017205528B4 DE 102017205528 B4 DE102017205528 B4 DE 102017205528B4 DE 102017205528 A DE102017205528 A DE 102017205528A DE 102017205528 B4 DE102017205528 B4 DE 102017205528B4
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Germany
Prior art keywords
cantilever
measuring
reflective surface
reflective
tip
Prior art date
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DE102017205528.6A
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German (de)
English (en)
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DE102017205528A1 (de
Inventor
Ulrich Matejka
Christof Baur
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Carl Zeiss SMT GmbH
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Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to DE102017205528.6A priority Critical patent/DE102017205528B4/de
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to JP2019553808A priority patent/JP7029469B2/ja
Priority to EP25215202.0A priority patent/EP4671773A3/en
Priority to EP18708990.9A priority patent/EP3602080B1/en
Priority to PCT/EP2018/055282 priority patent/WO2018177685A1/en
Priority to TW107109097A priority patent/TWI675206B/zh
Publication of DE102017205528A1 publication Critical patent/DE102017205528A1/de
Priority to US16/586,239 priority patent/US11237185B2/en
Application granted granted Critical
Publication of DE102017205528B4 publication Critical patent/DE102017205528B4/de
Priority to US17/583,727 priority patent/US11796563B2/en
Priority to JP2022023970A priority patent/JP7333434B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • G01Q40/02—Calibration standards and methods of fabrication thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE102017205528.6A 2017-03-31 2017-03-31 Vorrichtung und Verfahren für ein Rastersondenmikroskop Active DE102017205528B4 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
DE102017205528.6A DE102017205528B4 (de) 2017-03-31 2017-03-31 Vorrichtung und Verfahren für ein Rastersondenmikroskop
EP25215202.0A EP4671773A3 (en) 2017-03-31 2018-03-05 Apparatus and method for a scanning probe microscope
EP18708990.9A EP3602080B1 (en) 2017-03-31 2018-03-05 Apparatus and method for a scanning probe microscope
PCT/EP2018/055282 WO2018177685A1 (en) 2017-03-31 2018-03-05 Apparatus and method for a scanning probe microscope
JP2019553808A JP7029469B2 (ja) 2017-03-31 2018-03-05 走査型プローブ顕微鏡のための装置および方法
TW107109097A TWI675206B (zh) 2017-03-31 2018-03-16 用於掃描探針顯微鏡的裝置與方法
US16/586,239 US11237185B2 (en) 2017-03-31 2019-09-27 Apparatus and method for a scanning probe microscope
US17/583,727 US11796563B2 (en) 2017-03-31 2022-01-25 Apparatus and method for a scanning probe microscope
JP2022023970A JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102017205528.6A DE102017205528B4 (de) 2017-03-31 2017-03-31 Vorrichtung und Verfahren für ein Rastersondenmikroskop

Publications (2)

Publication Number Publication Date
DE102017205528A1 DE102017205528A1 (de) 2018-10-04
DE102017205528B4 true DE102017205528B4 (de) 2021-06-10

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DE102017205528.6A Active DE102017205528B4 (de) 2017-03-31 2017-03-31 Vorrichtung und Verfahren für ein Rastersondenmikroskop

Country Status (6)

Country Link
US (2) US11237185B2 (https=)
EP (2) EP3602080B1 (https=)
JP (2) JP7029469B2 (https=)
DE (1) DE102017205528B4 (https=)
TW (1) TWI675206B (https=)
WO (1) WO2018177685A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017205528B4 (de) 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop
CN111238373A (zh) * 2020-03-13 2020-06-05 深圳明锐仪器有限公司 一种双探针的纳米测量仪器
US11460419B2 (en) 2020-03-30 2022-10-04 Fei Company Electron diffraction holography
US11456149B2 (en) * 2020-03-30 2022-09-27 Fei Company Methods and systems for acquiring 3D diffraction data
CN112964909B (zh) * 2020-09-16 2023-12-01 中国科学院沈阳自动化研究所 一种原子力显微镜多探针同时独立运动测量方法与装置
TWI785906B (zh) 2021-11-26 2022-12-01 國立成功大學 具奈米解析度之檢定力學與磁性特徵的方法

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WO2015011148A1 (de) * 2013-07-22 2015-01-29 Visiotex GmbH Elastischer schuh
EP2913681A1 (en) * 2014-02-28 2015-09-02 Infinitesima Limited Probe system with multiple actuation locations

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JP4162292B2 (ja) 1998-07-07 2008-10-08 セイコーインスツル株式会社 情報記録媒体および情報再生装置
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US20090212215A1 (en) * 2008-02-27 2009-08-27 Hitachi High-Technologies Corporation Scanning electron microscope and method of measuring pattern dimension using the same
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Also Published As

Publication number Publication date
US20220146548A1 (en) 2022-05-12
JP7029469B2 (ja) 2022-03-03
EP3602080A1 (en) 2020-02-05
TWI675206B (zh) 2019-10-21
TW201842338A (zh) 2018-12-01
US11237185B2 (en) 2022-02-01
DE102017205528A1 (de) 2018-10-04
EP3602080B1 (en) 2025-11-19
JP2020512563A (ja) 2020-04-23
JP2022070996A (ja) 2022-05-13
EP4671773A2 (en) 2025-12-31
WO2018177685A1 (en) 2018-10-04
JP7333434B2 (ja) 2023-08-24
US11796563B2 (en) 2023-10-24
EP3602080C0 (en) 2025-11-19
EP4671773A3 (en) 2026-03-11
US20200025796A1 (en) 2020-01-23

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