JP7029469B2 - 走査型プローブ顕微鏡のための装置および方法 - Google Patents

走査型プローブ顕微鏡のための装置および方法 Download PDF

Info

Publication number
JP7029469B2
JP7029469B2 JP2019553808A JP2019553808A JP7029469B2 JP 7029469 B2 JP7029469 B2 JP 7029469B2 JP 2019553808 A JP2019553808 A JP 2019553808A JP 2019553808 A JP2019553808 A JP 2019553808A JP 7029469 B2 JP7029469 B2 JP 7029469B2
Authority
JP
Japan
Prior art keywords
cantilever
measurement
light beam
tip
reflection area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019553808A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020512563A5 (https=
JP2020512563A (ja
Inventor
ウルリヒ マテイカ
クリストフ バウアー
Original Assignee
カール・ツァイス・エスエムティー・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by カール・ツァイス・エスエムティー・ゲーエムベーハー filed Critical カール・ツァイス・エスエムティー・ゲーエムベーハー
Publication of JP2020512563A publication Critical patent/JP2020512563A/ja
Publication of JP2020512563A5 publication Critical patent/JP2020512563A5/ja
Priority to JP2022023970A priority Critical patent/JP7333434B2/ja
Application granted granted Critical
Publication of JP7029469B2 publication Critical patent/JP7029469B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • G01Q40/02—Calibration standards and methods of fabrication thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2019553808A 2017-03-31 2018-03-05 走査型プローブ顕微鏡のための装置および方法 Active JP7029469B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022023970A JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017205528.6A DE102017205528B4 (de) 2017-03-31 2017-03-31 Vorrichtung und Verfahren für ein Rastersondenmikroskop
DE102017205528.6 2017-03-31
PCT/EP2018/055282 WO2018177685A1 (en) 2017-03-31 2018-03-05 Apparatus and method for a scanning probe microscope

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022023970A Division JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

Publications (3)

Publication Number Publication Date
JP2020512563A JP2020512563A (ja) 2020-04-23
JP2020512563A5 JP2020512563A5 (https=) 2021-05-20
JP7029469B2 true JP7029469B2 (ja) 2022-03-03

Family

ID=61569269

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2019553808A Active JP7029469B2 (ja) 2017-03-31 2018-03-05 走査型プローブ顕微鏡のための装置および方法
JP2022023970A Active JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2022023970A Active JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

Country Status (6)

Country Link
US (2) US11237185B2 (https=)
EP (2) EP3602080B1 (https=)
JP (2) JP7029469B2 (https=)
DE (1) DE102017205528B4 (https=)
TW (1) TWI675206B (https=)
WO (1) WO2018177685A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017205528B4 (de) 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop
CN111238373A (zh) * 2020-03-13 2020-06-05 深圳明锐仪器有限公司 一种双探针的纳米测量仪器
US11460419B2 (en) 2020-03-30 2022-10-04 Fei Company Electron diffraction holography
US11456149B2 (en) * 2020-03-30 2022-09-27 Fei Company Methods and systems for acquiring 3D diffraction data
CN112964909B (zh) * 2020-09-16 2023-12-01 中国科学院沈阳自动化研究所 一种原子力显微镜多探针同时独立运动测量方法与装置
TWI785906B (zh) 2021-11-26 2022-12-01 國立成功大學 具奈米解析度之檢定力學與磁性特徵的方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000030306A (ja) 1998-07-07 2000-01-28 Seiko Instruments Inc 情報記録媒体および情報再生装置
JP2002168754A (ja) 2000-11-30 2002-06-14 Japan Science & Technology Corp 走査型プローブ顕微鏡装置
JP2008134254A (ja) 2001-06-19 2008-06-12 Japan Science & Technology Agency 走査型プローブ顕微鏡及びカンチレバーアレイの励振方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58100703A (ja) * 1981-12-11 1983-06-15 Yokogawa Hokushin Electric Corp 光学式スケ−ル読取装置
JPH06289036A (ja) * 1993-03-30 1994-10-18 Nikon Corp カンチレバー及び走査型フォース顕微鏡
JPH06294638A (ja) * 1993-04-06 1994-10-21 Olympus Optical Co Ltd 表面形状測定装置
US6520005B2 (en) * 1994-12-22 2003-02-18 Kla-Tencor Corporation System for sensing a sample
US5948972A (en) 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
JPH09218211A (ja) * 1996-02-13 1997-08-19 Horiba Ltd カンチレバー走査プローブ顕微鏡
JPH11118858A (ja) * 1997-10-15 1999-04-30 Nikon Corp 電位計測装置および回路検査装置
WO2000019166A1 (en) * 1998-09-26 2000-04-06 Xidex Corporation Multidimensional sensing system for atomic force miscroscopy
US20020104963A1 (en) 1998-09-26 2002-08-08 Vladimir Mancevski Multidimensional sensing system for atomic force microscopy
JP3261451B2 (ja) * 1999-03-10 2002-03-04 独立行政法人産業技術総合研究所 摩擦力検出用カンチレバー
US6298715B1 (en) * 1999-12-22 2001-10-09 Mfi Technologies Corporation Scanning force microscope probe cantilever with reflective structure
US6642517B1 (en) 2000-01-25 2003-11-04 Veeco Instruments, Inc. Method and apparatus for atomic force microscopy
US7230719B2 (en) * 2003-12-02 2007-06-12 National University Of Singapore High sensitivity scanning probe system
EP1555676A3 (en) * 2004-01-14 2006-09-13 FEI Company Method of operating a probe microscope
US7395698B2 (en) * 2005-10-25 2008-07-08 Georgia Institute Of Technology Three-dimensional nanoscale metrology using FIRAT probe
US7557933B2 (en) * 2006-02-14 2009-07-07 Japan Science And Technology Agency Measuring probe, sample surface measuring apparatus and sample surface measuring method
US7406860B2 (en) * 2006-04-28 2008-08-05 Seagate Technology Llc Atomic force microscopy scanning and image processing
KR20080110234A (ko) * 2007-06-15 2008-12-18 한국표준과학연구원 원자 탐침 현미경의 헤드 모듈부
JP5492383B2 (ja) * 2008-02-27 2014-05-14 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡及びこれを用いたパターン寸法計測方法
SG192224A1 (en) 2011-01-31 2013-09-30 Infinitesima Ltd Adaptive mode scanning probe microscope
GB201201640D0 (en) * 2012-01-31 2012-03-14 Infinitesima Ltd Photothermal probe actuation
GB201218350D0 (en) * 2012-10-12 2012-11-28 Infinitesima Ltd Multiple probe actuation
GB201215546D0 (en) 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
US8895923B2 (en) * 2012-11-20 2014-11-25 Dcg Systems, Inc. System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing
GB201313064D0 (en) 2013-07-22 2013-09-04 Infinitesima Ltd Probe Microscope
DE102013107803A1 (de) 2013-07-22 2015-01-22 Visiotex GmbH Elastischer Schuh
DE102014101308B4 (de) * 2014-02-03 2022-01-27 Stoba Holding Gmbh & Co. Kg Kraftstoffeinspritzdosiereinrichtung, Kraftstoffeinspritzdüse, Werkzeug zum Herstellen einer Kraftstoffeinspritzdosiereinrichtung und Verfahren zum Herstellen einer Kraftstoffdosiereinrichtung
EP2913681A1 (en) * 2014-02-28 2015-09-02 Infinitesima Limited Probe system with multiple actuation locations
DE102017205528B4 (de) 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000030306A (ja) 1998-07-07 2000-01-28 Seiko Instruments Inc 情報記録媒体および情報再生装置
JP2002168754A (ja) 2000-11-30 2002-06-14 Japan Science & Technology Corp 走査型プローブ顕微鏡装置
JP2008134254A (ja) 2001-06-19 2008-06-12 Japan Science & Technology Agency 走査型プローブ顕微鏡及びカンチレバーアレイの励振方法

Also Published As

Publication number Publication date
US20220146548A1 (en) 2022-05-12
EP3602080A1 (en) 2020-02-05
DE102017205528B4 (de) 2021-06-10
TWI675206B (zh) 2019-10-21
TW201842338A (zh) 2018-12-01
US11237185B2 (en) 2022-02-01
DE102017205528A1 (de) 2018-10-04
EP3602080B1 (en) 2025-11-19
JP2020512563A (ja) 2020-04-23
JP2022070996A (ja) 2022-05-13
EP4671773A2 (en) 2025-12-31
WO2018177685A1 (en) 2018-10-04
JP7333434B2 (ja) 2023-08-24
US11796563B2 (en) 2023-10-24
EP3602080C0 (en) 2025-11-19
EP4671773A3 (en) 2026-03-11
US20200025796A1 (en) 2020-01-23

Similar Documents

Publication Publication Date Title
JP7029469B2 (ja) 走査型プローブ顕微鏡のための装置および方法
US7474410B2 (en) Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography
US20030233870A1 (en) Multidimensional sensing system for atomic force microscopy
US20020104963A1 (en) Multidimensional sensing system for atomic force microscopy
CN102209609B (zh) 晶圆级纳米计量系统、用于感测加工元件位置的方法
US9134340B2 (en) Method of investigating a sample surface
JP2009128139A (ja) 走査プローブ顕微鏡及び走査プローブ顕微鏡用探針ユニット
CN110869772B (zh) 控制探针尖端倾斜角度的扫描探针系统
JP4498081B2 (ja) 散乱型近接場顕微鏡およびその測定方法
WO2000019166A1 (en) Multidimensional sensing system for atomic force miscroscopy
KR102630924B1 (ko) 열적으로 안정한, 스캐닝 프로브 현미경을 위한 드리프트 내성 프로브 및 제조 방법
WO2025157660A1 (en) Scanning probe microscope
WO2023021867A1 (ja) 走査プローブ顕微鏡とそれに使用される試料
Sierakowski et al. Optimization method of photolithography process by means of atomic force microscopy
JPH08101217A (ja) 走査型プローブ顕微鏡
TW202611514A (zh) 用於單一雷射原子力顯微鏡之懸臂
JPH06221845A (ja) 原子間力顕微鏡等のカンチレバーの変形検出装置
JP2003247930A (ja) 測定孔付きカンチレバー及びこれを用いたビーム測定方法
JPH04285810A (ja) 表面評価装置および表面加工装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191021

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190930

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190930

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20201005

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20201222

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20210302

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210402

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20210402

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210701

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20210928

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20211130

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20211227

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220119

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220218

R150 Certificate of patent or registration of utility model

Ref document number: 7029469

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250