JP2020512563A5 - - Google Patents

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Publication number
JP2020512563A5
JP2020512563A5 JP2019553808A JP2019553808A JP2020512563A5 JP 2020512563 A5 JP2020512563 A5 JP 2020512563A5 JP 2019553808 A JP2019553808 A JP 2019553808A JP 2019553808 A JP2019553808 A JP 2019553808A JP 2020512563 A5 JP2020512563 A5 JP 2020512563A5
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JP
Japan
Prior art keywords
cantilever
measuring
wedge
measuring head
tip
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JP2019553808A
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English (en)
Japanese (ja)
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JP7029469B2 (ja
JP2020512563A (ja
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Priority claimed from DE102017205528.6A external-priority patent/DE102017205528B4/de
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Priority to JP2022023970A priority Critical patent/JP7333434B2/ja
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JP2019553808A 2017-03-31 2018-03-05 走査型プローブ顕微鏡のための装置および方法 Active JP7029469B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022023970A JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017205528.6A DE102017205528B4 (de) 2017-03-31 2017-03-31 Vorrichtung und Verfahren für ein Rastersondenmikroskop
DE102017205528.6 2017-03-31
PCT/EP2018/055282 WO2018177685A1 (en) 2017-03-31 2018-03-05 Apparatus and method for a scanning probe microscope

Related Child Applications (1)

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JP2022023970A Division JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

Publications (3)

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JP2020512563A JP2020512563A (ja) 2020-04-23
JP2020512563A5 true JP2020512563A5 (https=) 2021-05-20
JP7029469B2 JP7029469B2 (ja) 2022-03-03

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ID=61569269

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JP2019553808A Active JP7029469B2 (ja) 2017-03-31 2018-03-05 走査型プローブ顕微鏡のための装置および方法
JP2022023970A Active JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

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JP2022023970A Active JP7333434B2 (ja) 2017-03-31 2022-02-18 走査型プローブ顕微鏡のための装置および方法

Country Status (6)

Country Link
US (2) US11237185B2 (https=)
EP (2) EP3602080B1 (https=)
JP (2) JP7029469B2 (https=)
DE (1) DE102017205528B4 (https=)
TW (1) TWI675206B (https=)
WO (1) WO2018177685A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017205528B4 (de) 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop
CN111238373A (zh) * 2020-03-13 2020-06-05 深圳明锐仪器有限公司 一种双探针的纳米测量仪器
US11460419B2 (en) 2020-03-30 2022-10-04 Fei Company Electron diffraction holography
US11456149B2 (en) * 2020-03-30 2022-09-27 Fei Company Methods and systems for acquiring 3D diffraction data
CN112964909B (zh) * 2020-09-16 2023-12-01 中国科学院沈阳自动化研究所 一种原子力显微镜多探针同时独立运动测量方法与装置
TWI785906B (zh) 2021-11-26 2022-12-01 國立成功大學 具奈米解析度之檢定力學與磁性特徵的方法

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US6298715B1 (en) * 1999-12-22 2001-10-09 Mfi Technologies Corporation Scanning force microscope probe cantilever with reflective structure
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JP2002168754A (ja) 2000-11-30 2002-06-14 Japan Science & Technology Corp 走査型プローブ顕微鏡装置
JP2005308756A (ja) 2001-06-19 2005-11-04 Japan Science & Technology Agency カンチレバーの検出及び制御のための装置
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