TWI655420B - 目視檢查裝置 - Google Patents

目視檢查裝置 Download PDF

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Publication number
TWI655420B
TWI655420B TW104113899A TW104113899A TWI655420B TW I655420 B TWI655420 B TW I655420B TW 104113899 A TW104113899 A TW 104113899A TW 104113899 A TW104113899 A TW 104113899A TW I655420 B TWI655420 B TW I655420B
Authority
TW
Taiwan
Prior art keywords
inspected
transport unit
transported
unit
inspection
Prior art date
Application number
TW104113899A
Other languages
English (en)
Chinese (zh)
Other versions
TW201623943A (zh
Inventor
大澤曜彰
橫內正
川合渉史
阿部浩幸
鈴木大悟
Original Assignee
日商日東電工股份有限公司
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Publication date
Application filed by 日商日東電工股份有限公司 filed Critical 日商日東電工股份有限公司
Publication of TW201623943A publication Critical patent/TW201623943A/zh
Application granted granted Critical
Publication of TWI655420B publication Critical patent/TWI655420B/zh

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)
TW104113899A 2014-12-25 2015-04-30 目視檢查裝置 TWI655420B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201420835941.2U CN204422430U (zh) 2014-12-25 2014-12-25 目视检查装置
??201420835941.2 2014-12-25

Publications (2)

Publication Number Publication Date
TW201623943A TW201623943A (zh) 2016-07-01
TWI655420B true TWI655420B (zh) 2019-04-01

Family

ID=53472787

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104113899A TWI655420B (zh) 2014-12-25 2015-04-30 目視檢查裝置

Country Status (4)

Country Link
JP (1) JP6406084B2 (ko)
KR (1) KR102303687B1 (ko)
CN (1) CN204422430U (ko)
TW (1) TWI655420B (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3119098U (ja) * 2005-11-22 2006-02-16 株式会社島津製作所 Tftアレイ検査装置
CN101320145A (zh) * 2008-07-21 2008-12-10 友达光电股份有限公司 面板抽验装置及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01202644A (ja) * 1988-02-09 1989-08-15 Natl House Ind Co Ltd ワークの検査装置
JP2659384B2 (ja) * 1988-02-16 1997-09-30 オリンパス光学工業株式会社 ウエハ検査装置
JP3053132B2 (ja) 1991-09-30 2000-06-19 芝浦メカトロニクス株式会社 物品の選別搬送装置
KR101201322B1 (ko) * 2005-12-29 2012-11-14 엘지디스플레이 주식회사 평판표시장치용 육안 검사장비 및 검사 방법
JP5005945B2 (ja) * 2006-04-03 2012-08-22 オリンパス株式会社 基板検査装置
JP5001681B2 (ja) * 2007-03-12 2012-08-15 株式会社日本マイクロニクス インライン自動検査装置及びインライン自動検査システム
JP2009031141A (ja) 2007-07-27 2009-02-12 Sharp Corp 自動検査装置、検査システム、処理方法、検査プログラムおよびコンピュータ読み取り可能な記録媒体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3119098U (ja) * 2005-11-22 2006-02-16 株式会社島津製作所 Tftアレイ検査装置
CN101320145A (zh) * 2008-07-21 2008-12-10 友达光电股份有限公司 面板抽验装置及方法

Also Published As

Publication number Publication date
CN204422430U (zh) 2015-06-24
KR102303687B1 (ko) 2021-09-17
KR20160078864A (ko) 2016-07-05
JP6406084B2 (ja) 2018-10-17
JP2016121982A (ja) 2016-07-07
TW201623943A (zh) 2016-07-01

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