TWI655420B - Visual inspection apparatus - Google Patents
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Abstract
本發明,係有關於目視檢查裝置。此目視檢查裝置,係被設置在自動檢查裝置之下游側處,並對於檢查對象物進行目視檢查,而具備有抽取搬送單元和目視檢查單元,抽取搬送單元,係具備有正常檢查對象物搬送部和被檢查對象物搬送部。正常檢查對象物搬送部係搬送正常檢查對象物,被檢查對象物搬送部係搬送被檢查對象物。當藉由感測器而檢測出被檢查對象物被搬送而來一事時,抽取搬送單元係藉由控制裝置之控制,而以被檢查對象物會被搬送至前述被檢查對象物搬送部處的方式來上下移動,並且,在被檢查對象物被搬送至被檢查對象物搬送部處之後,抽取搬送單元係藉由控制裝置之控制,而以回到能夠搬送正常檢查對象物之位置處的方式而移動,且將被檢查對象物搬送至目視檢查單元處,在目視檢查單元處,操作者係以目視來對於被搬送而來之被檢查對象物進行目視檢查。藉由該目視檢查裝置,在自動檢查後,係能夠藉由簡單的構造來將被檢查對象物抽出並搬送至目視檢查單元處。係能夠降低成本並使生產效率提昇。 The present invention relates to a visual inspection device. The visual inspection device is provided on the downstream side of the automatic inspection device, and performs visual inspection on the inspection object, and includes an extraction conveyance unit and a visual inspection unit, and the extraction conveyance unit includes a normal inspection object transport unit. And the object to be inspected. In the normal inspection object transport unit, the normal inspection object is transported, and the object to be inspected transports the object to be inspected. When it is detected by the sensor that the object to be inspected is transported, the object to be inspected is transported to the object to be inspected by the control device. After the object to be inspected is transported to the object to be inspected, the extraction and transport unit is controlled by the control device to return to the position where the normal inspection object can be transported. On the other hand, the object to be inspected is transported to the visual inspection unit, and the visual inspection unit visually inspects the object to be inspected that has been transported by visual inspection. According to the visual inspection device, after the automatic inspection, the object to be inspected can be taken out and transported to the visual inspection unit by a simple structure. It can reduce costs and increase production efficiency.
Description
本發明,係有關於目視檢查裝置,特別是有關於在光學顯示裝置之製造系統中所使用的目視檢查裝置。 The present invention relates to a visual inspection device, and more particularly to a visual inspection device used in a manufacturing system of an optical display device.
現今,因應於光學顯示裝置之普及,對於光學顯示裝置之需求係急速提昇。因此,係需要一種能夠以高品質以及高效率來製造光學顯示裝置之光學顯示裝置(顯示面板)的製造系統。 Nowadays, due to the popularity of optical display devices, the demand for optical display devices is rapidly increasing. Therefore, there is a need for a manufacturing system of an optical display device (display panel) capable of manufacturing an optical display device with high quality and high efficiency.
在如同液晶顯示裝置一般之光學顯示裝置的生產線中,一面將被捲取為卷狀之光學薄膜送出一面切斷成個別之薄片並將所切斷的光學薄膜之薄片貼附於玻璃基板上之方式(Roll to Panel(RTP))方式,係為周知,此種製造裝置,係被稱作RTP貼附裝置。 In a production line of an optical display device such as a liquid crystal display device, an optical film taken up in a roll shape is fed and cut into individual sheets, and the cut thin film of the optical film is attached to the glass substrate. The Roll to Panel (RTP) method is well known, and such a manufacturing device is called an RTP attachment device.
在RTP方式之光學顯示裝置製造系統中,於光學薄膜貼附裝置之下游側處,一般係設置有自動檢查裝置,並對於製品之品質進行檢查。 In the RTP-type optical display device manufacturing system, an automatic inspection device is generally provided on the downstream side of the optical film attachment device, and the quality of the product is inspected.
在光學薄膜貼附裝置中,於被貼附有光學薄膜之玻璃基板的自動檢查裝置、例如光學顯示裝置生產線之自動檢查裝置處,係對於被貼附有光學薄膜之光學顯示裝置,而自動性地進行缺陷檢查。經過此缺陷檢查,被判定為正常之光學顯示裝置,係被搬送至下游裝置側處。 In the optical film attaching device, an automatic inspection device for a glass substrate to which an optical film is attached, for example, an automatic inspection device for an optical display device production line, is an automatic display device for an optical display device to which an optical film is attached. Perform defect inspection. After the defect inspection, the optical display device determined to be normal is transported to the downstream device side.
現今,為了使生產性提昇,上述光學顯示裝置之正常以及不良的判定係非常重要。但是,依存於自動檢查裝置之精確度,當精確度為低的情況時,會成為使不良光學顯示裝置被遺漏,而若是精確度過高,則會有將正常之光學顯示裝置誤判為不良光學顯示裝置之虞。 Nowadays, in order to improve productivity, the normal and poor judgment of the above optical display device is very important. However, depending on the accuracy of the automatic inspection device, when the accuracy is low, the defective optical display device is omitted, and if the accuracy is too high, the normal optical display device is misjudged as poor optical. The display device is the same.
因此,係考慮有在對於上述貼附後之光學顯示裝置進行自動缺陷檢查的自動檢查裝置之後,進而設置目視檢查裝置。亦即是,作為目視檢查裝置,係周知有讓使用者藉由目視檢查來對於自動檢查裝置之判定結果精確度進行再確認的技術(例如,參考專利文獻1)。 Therefore, it is considered that a visual inspection device is further provided after the automatic inspection device for performing automatic defect inspection on the attached optical display device. In other words, as a visual inspection device, a technique for allowing the user to reconfirm the accuracy of the determination result of the automatic inspection device by visual inspection is known (for example, refer to Patent Document 1).
又,在先前技術中,於專利文獻2中,係揭示有一種將應進行檢查之物體為了進行檢查而朝向與生產線之進送方向相異的方向進行搬送之構造。若是作具體敘述,則在專利文獻2中,係記載有一種機構,其係為了將應進行檢查之物體2從沿著生產線之搬送方向前進的輸送帶而朝向身為相對於該生產線之搬送方向而成略垂直的方向之寬幅方向作搬送,而使用有滾珠螺桿22。但是,此種機構,由於係會有對於光學顯示裝置造成損傷之虞,因此,係並不適於在光學顯示裝置之搬送裝置中作採用。 Further, in the prior art, Patent Document 2 discloses a structure in which an object to be inspected is conveyed in a direction different from the feeding direction of the production line for inspection. In the case of the specific description, Patent Document 2 describes a mechanism for moving the object 2 to be inspected from the conveyance belt which is advanced in the conveyance direction of the production line toward the conveyance direction with respect to the production line. The ball is screwed in a wide direction in a direction perpendicular to the vertical direction. However, such a mechanism is not suitable for use in a transport apparatus of an optical display device because it causes damage to an optical display device.
[專利文獻1]日本特開2009-031141號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-031141
[專利文獻2]日本特開平6-064742號公報 [Patent Document 2] Japanese Patent Laid-Open No. Hei 6-064742
在先前技術之目視檢查裝置中,為了進行目視檢查,係有必要將應進行檢查之光學顯示裝置(檢查對象物)從生產線中而抽出,為了此事,係會耗費大量的時間和勞力,而有著非常大的改良餘地。 In the visual inspection device of the prior art, in order to perform visual inspection, it is necessary to take out the optical display device (inspection object) to be inspected from the production line, and it takes a lot of time and labor for this. There is a lot of room for improvement.
本發明,係以提供一種在自動檢查之後,能夠將被檢查對象物抽出並搬送至目視檢查單元處,並能夠以簡單之構造來降低成本並使生產效率提昇的目視檢查裝置一事,作為目的。 The present invention has an object of providing a visual inspection device capable of extracting an object to be inspected and transporting it to a visual inspection unit after the automatic inspection, and reducing the cost and improving the production efficiency with a simple structure.
本發明之其中一種形態之目視檢查裝置1,係為被設置在自動檢查裝置之下游側並對於被檢查對象物2進行目視檢查者。此目視檢查裝置,係具備有抽取搬送單元10和目視檢查單元20。該抽取搬送單元10,係成為將搬送在自動檢查裝置處而被判定為正常的正常檢查對象物作搬送之正常檢查對象物搬送部10a、和被檢查對象物搬 送部10b,配置為上下二段之構成。正常檢查對象物搬送部10a,係為搬送正常檢查對象物2a者,被檢查對象物搬送部10b,係為搬送應進行目視檢查之被檢查對象物2b者。當藉由感測器而檢測出被檢查對象物2b被搬送而來一事時,抽取搬送單元10係藉由控制裝置之控制而動作,並以被檢查對象物2b會被搬送至該被檢查對象物搬送部10b處的方式來上下移動,並且,在該被檢查對象物2b被搬送至該被檢查對象物搬送部10b處之後,抽取搬送單元10係藉由控制裝置之控制,而以回到能夠搬送正常檢查對象物2a之位置處的方式而移動,且將被移動至被檢查對象物搬送部10b上之被檢查對象物2b搬送至目視檢查單元20處,在該目視檢查單元20處,操作者係以目視來對於被搬送而來之被檢查對象物2b進行目視檢查。 The visual inspection device 1 according to one aspect of the present invention is provided on the downstream side of the automatic inspection device and visually inspects the object 2 to be inspected. This visual inspection device is provided with an extraction conveyance unit 10 and a visual inspection unit 20. The sifting and transporting unit 10 is a normal inspection object transport unit 10a that transports a normal inspection object that is determined to be normal at the automatic inspection device, and the object to be inspected The delivery unit 10b is configured as two upper and lower sections. In the normal inspection object transport unit 10a, the object to be inspected 2b is transported, and the object to be inspected 10b is the object 2b to be inspected for visual inspection. When it is detected by the sensor that the object to be inspected 2b is transported, the extraction and transport unit 10 is operated by the control device, and the object to be inspected 2b is transported to the object to be inspected. The object transporting unit 10b is moved up and down, and after the object to be inspected 2b is transported to the object to be inspected 10b, the extracting and transporting unit 10 is controlled by the control device. The object to be inspected 2b is moved to the position of the normal inspection object 2a, and the object to be inspected 2b moved to the object to be inspected 10b is transported to the visual inspection unit 20, and the visual inspection unit 20 is placed at the visual inspection unit 20, The operator visually inspects the object 2b to be inspected that has been transported by visual inspection.
若依據該目視檢查裝置,則在自動檢查後,係能夠藉由簡單的構造來將被檢查對象物抽出並搬送至目視檢查單元處。藉由此,係能夠降低成本並使生產效率提昇。 According to the visual inspection device, after the automatic inspection, the object to be inspected can be taken out and transported to the visual inspection unit by a simple structure. By this, it is possible to reduce costs and increase production efficiency.
在由本發明之其他形態所致之目視檢查裝置中,正常檢查對象物搬送部10a,係位置在被檢查對象物搬送部10b之上方,當正常檢查對象物2a正被作搬送時,該正常檢查對象物搬送部10a,係位置在與主搬送部成為共平面之位置處,該被檢查對象物搬送部10b,係位置在該主搬送部之下方,當藉由感測器而檢測出被檢查對 象物2b被搬送而來一事時,該抽取搬送單元10係藉由控制裝置之控制,而朝向被檢查對象物搬送部10b會與主搬送部成為共平面的位置作向上移動,被檢查對象物2b係成為被搬送至被檢查對象物搬送部10b處,並且,在該被檢查對象物2b被搬送至該被檢查對象物搬送部10b處之後,該抽取搬送單元10,係藉由控制裝置之控制而向下移動,該正常檢查對象物搬送部10a係回到成為與主搬送部共平面並能夠搬送正常檢查對象物2a之位置處,該被檢查對象物搬送部10b上之被檢查對象物2b,係成為被搬送至目視檢查單元20處。 In the visual inspection device according to another aspect of the present invention, the normal inspection object transport unit 10a is positioned above the object transport unit 10b, and when the normal inspection object 2a is being transported, the normal inspection is performed. The object transport unit 10a is located at a position coplanar with the main transport unit, and the object transport unit 10b is positioned below the main transport unit and is detected by the sensor. Correct When the object 2b is transported, the pick-and-place transport unit 10 is moved upward toward the position where the object-to-be-transported unit 10b is coplanar with the main transport unit by the control of the control device, and the object to be inspected is moved. 2b is conveyed to the object-to-be-conveyed object conveying part 10b, and after the to-be-inspected object 2b is conveyed to the to-be-inspected object conveying part 10b, this extraction conveyance unit 10 is controlled by the control apparatus. When the control object is moved downward, the normal inspection object transport unit 10a is returned to the position where the normal inspection object 2a is coplanar with the main transport unit, and the object to be inspected on the object transport unit 10b is inspected. 2b is transported to the visual inspection unit 20.
在由本發明之又一其他形態所致之目視檢查裝置中,正常檢查對象物搬送部10a,係位置在被檢查對象物搬送部10b之下方,當搬送正常檢查對象物2a時,該正常檢查對象物搬送部10a係位置在與主搬送部成為共平面之位置處,被檢查對象物搬送部10b係位置在主搬送部之上方,當藉由感測器而檢測出被檢查對象物2b被搬送而來一事時,抽取搬送單元10,係藉由控制裝置之控制,而朝向被檢查對象物搬送部10b會與主搬送部成為共平面的位置作向下移動,被檢查對象物2b係成為被搬送至被檢查對象物搬送部10b處,並且,在該被檢查對象物2b被搬送至該被檢查對象物搬送部10b處之後,該抽取搬送單元10係藉由控制裝置之控制而向上移動,並回到會使該正常檢查對象物搬送部10a成為與主搬送部共平面並能夠搬送正常檢查對象物2a之位置處,且將該被檢查 對象物搬送部10b上之被檢查對象物2b搬送至目視檢查單元20處。 In the visual inspection device according to still another aspect of the present invention, the normal inspection object transport unit 10a is positioned below the object transport unit 10b, and when the normal inspection object 2a is transported, the normal inspection object is The object transport unit 10a is located at a position coplanar with the main transport unit, and the object to be inspected 10b is positioned above the main transport unit, and the object to be inspected 2b is detected by the sensor. In the case of the control unit, the transport unit 10 is moved downward toward the position where the object transport unit 10b is coplanar with the main transport unit, and the object to be inspected 2b is The object to be inspected is transported to the object to be inspected 10b, and after the object to be inspected 2b is transported to the object to be inspected 10b, the pumping and transporting unit 10 is moved upward by the control of the control device. And returning to the position where the normal inspection object conveying unit 10a is coplanar with the main conveyance unit and capable of transporting the normal inspection object 2a, and the inspection is performed. The object 2b to be inspected on the object transport unit 10b is transported to the visual inspection unit 20.
由本發明之又一其他形態所致之目視檢查裝置,係更進而具備有吸附裝置301,當該被檢查對象物搬送部10b上之被檢查對象物2b被搬送至目視檢查單元20處時,係藉由該吸附裝置301而將該被檢查對象物搬送部10b上之被檢查對象物2b搬送至該目視檢查單元20處。 The visual inspection device according to still another aspect of the present invention further includes an adsorption device 301, and when the object 2b to be inspected on the object to be inspected 10b is transported to the visual inspection unit 20, The object to be inspected 2b on the object to be inspected 10b is transported to the visual inspection unit 20 by the adsorption device 301.
若依據本發明之上述構成,則由於係藉由吸附裝置301來搬送被檢查對象物2b,因此,係能夠並不對於該被檢查對象物造成損傷地而搬送至目視檢查單元20處。 According to the above configuration of the present invention, since the object to be inspected 2b is transported by the adsorption device 301, it can be transported to the visual inspection unit 20 without causing damage to the object to be inspected.
若依據本發明之又一其他形態,則目視檢查單元20,係具備有:目視檢查台,係當被檢查對象物2b被作搬送時,會成為水平狀態,並在進行檢查時,能夠從水平狀態而移動至傾斜狀態。 According to still another aspect of the present invention, the visual inspection unit 20 is provided with a visual inspection table that is horizontal when the object to be inspected 2b is transported, and is capable of horizontally being inspected. Move to the tilt state.
若依據本發明之上述構成,則係能夠讓人並不以手來碰觸被檢查對象物地而進行目視檢查,而能夠對於光學顯示裝置被污損並造成損傷的情形作防止。 According to the above configuration of the present invention, it is possible to prevent the optical display device from being stained and damaged by visual inspection without touching the object to be inspected by hand.
1‧‧‧目視檢查裝置 1‧‧‧ visual inspection device
2‧‧‧檢查對象物(光學顯示裝置) 2‧‧‧Inspection object (optical display device)
2a‧‧‧正常檢查對象物(正常光學顯示裝置) 2a‧‧‧Normal inspection object (normal optical display device)
2b‧‧‧被檢查對象物(不良光學顯示裝置) 2b‧‧‧Objects to be inspected (bad optical display device)
3‧‧‧光學薄膜貼附裝置 3‧‧‧Optical film attachment device
4‧‧‧自動檢查裝置 4‧‧‧Automatic inspection device
10‧‧‧抽取搬送單元 10‧‧‧Drawing transport unit
10a‧‧‧正常檢查對象物搬送部(正常光學顯示裝置搬送部) 10a‧‧‧Normal inspection object transport unit (normal optical display device transport unit)
10b‧‧‧被檢查對象物搬送部(不良光學顯示裝置搬送部) 10b‧‧‧Inspected object transport unit (bad optical display unit transport unit)
20‧‧‧目視檢查單元 20‧‧‧ visual inspection unit
21‧‧‧光學顯示裝置保持部 21‧‧‧Optical display device holding unit
22‧‧‧背光單元 22‧‧‧Backlight unit
301‧‧‧吸附裝置 301‧‧‧Adsorption device
50‧‧‧雙方向搬送裝置 50‧‧‧Double direction conveyor
501‧‧‧主搬送方向搬送裝置 501‧‧‧Main transport direction transport device
502‧‧‧垂直方向搬送裝置 502‧‧‧Vertical conveying device
[圖1]係為對於在由先前技術所致之光學顯示裝置之製造系統中的僅設置有自動檢查裝置之構成作概略展示的平面圖。 Fig. 1 is a plan view schematically showing a configuration in which only an automatic inspection device is provided in a manufacturing system of an optical display device by the prior art.
[圖2]係為對於在由本發明所致之光學顯示裝置之製造系統中而除了自動檢查裝置之外更進而設置有目視檢查裝置之構成作概略展示的平面圖。 FIG. 2 is a plan view schematically showing a configuration in which a visual inspection device is further provided in addition to the automatic inspection device in the manufacturing system of the optical display device according to the present invention.
[圖3]係為對於本發明之目視檢查裝置之構成作概略展示之圖,(a)係為上面圖,(b)係為側面圖。 Fig. 3 is a schematic view showing the configuration of a visual inspection device according to the present invention, wherein (a) is a top view and (b) is a side view.
[圖4]係為對於在由本發明之其中一種實施形態所致之目視檢查裝置中的光學顯示裝置之搬送狀況作概略性展示的側面圖,(a)係為正常檢查對象物正被作搬送之狀態,(b)係為被檢查對象物被搬送至被檢查對象物搬送部處之狀態,(c)係為在被檢查對象物被搬送至被檢查對象物搬送部處之後而抽取搬送單元回到原本的位置處之狀態。 FIG. 4 is a side view schematically showing the conveyance state of the optical display device in the visual inspection device according to one embodiment of the present invention, and (a) is a normal inspection object being transported. (b) is a state in which the object to be inspected is transported to the object transporting portion, and (c) is a transporting unit after the object to be inspected is transported to the object transporting portion. Go back to the original position.
[圖5]係為對於利用主搬送方向搬送裝置來搬送光學顯示裝置的狀態作概略性展示之圖。 FIG. 5 is a view schematically showing a state in which the optical display device is transported by the main transport direction transport device.
[圖6]係為對於利用垂直方向搬送裝置來搬送光學顯示裝置的狀態作概略性展示之圖。 FIG. 6 is a view schematically showing a state in which the optical display device is transported by the vertical transport device.
[圖7]係為對於在本發明之目視檢查裝置中的目視檢查單元作展示之側面圖,(a)係為對於接收檢查對象物之接收位置作概略性展示之圖,(b)係為對於目視檢查位置作概略性展示之圖。 Fig. 7 is a side view showing a visual inspection unit in the visual inspection device of the present invention, wherein (a) is a diagram showing a receiving position of an object to be inspected, and (b) is a diagram. A diagram showing a schematic display of the visual inspection position.
[圖8]係為對於本發明之其中一種實施形態的目視檢查裝置之動作作展示之動作流程圖。 Fig. 8 is a flow chart showing the operation of the visual inspection device according to one embodiment of the present invention.
[圖9]係為對於由本發明之另外一種實施形態所致之目視檢查裝置作展示者,(a)係為正常檢查對象物正被 作搬送之狀態,(b)係為被檢查對象物被搬送至被檢查對象物搬送部處之狀態,(c)係為在被檢查對象物被搬送至被檢查對象物搬送部處之後而抽取搬送單元回到原本的位置處之狀態。 [Fig. 9] is a display of a visual inspection device according to another embodiment of the present invention, and (a) is a normal inspection object being (b) is a state in which the object to be inspected is transported to the object to be inspected, and (c) is extracted after the object to be inspected is transported to the object to be inspected. The transport unit returns to its original position.
[圖10]係為對於由圖9中所示之本發明之實施形態所致的目視檢查裝置之動作作展示之動作流程圖。 Fig. 10 is a flow chart showing the operation of the visual inspection device according to the embodiment of the present invention shown in Fig. 9.
以下,根據圖中所示之實施形態,針對本發明之目視檢查裝置作詳細說明。 Hereinafter, the visual inspection device of the present invention will be described in detail based on the embodiments shown in the drawings.
圖1,係為對於在由先前技術所致之光學顯示裝置之製造系統中的僅設置有自動檢查裝置之構成作概略展示者。 Fig. 1 is a schematic display of the configuration in which only an automatic inspection device is provided in a manufacturing system of an optical display device by the prior art.
一般而言,如同圖1中所示一般,光學顯示裝置之製造系統,係在上游側具備有光學薄膜貼附裝置3,並在此光學薄膜貼附裝置3之下游側處,設置有自動檢查裝置4。 In general, as shown in FIG. 1, the manufacturing system of the optical display device is provided with an optical film attaching device 3 on the upstream side, and an automatic check is provided at the downstream side of the optical film attaching device 3 Device 4.
藉由光學薄膜貼附裝置3,來製造被貼附有光學薄膜之玻璃基板、亦即是光學顯示裝置(顯示面板)。藉由自動檢查裝置4,來對於貼附光學薄膜後之光學顯示裝置自動性地進行缺陷檢查。 The optical film attachment device 3 is used to manufacture a glass substrate to which an optical film is attached, that is, an optical display device (display panel). The automatic inspection device 4 automatically performs defect inspection on the optical display device to which the optical film is attached.
在此先前技術之系統中,由於係身為僅根據自動檢查裝置之檢查結果來判定製品之良否者,因此,依存於自動檢查裝置之精確度,當精確度為低的情況時,會 成為使不良光學顯示裝置被遺漏並使不良光學顯示裝置作為正常的合格製品而被搬送至生產線之下游側處,另一方面,若是精確度過高,則會有就算是身為應判定為正常之光學顯示裝置亦將其誤判為不良並導致無謂的浪費之虞。 In the system of the prior art, since the body is judged to be based on the inspection result of the automatic inspection device alone, depending on the accuracy of the automatic inspection device, when the accuracy is low, When the defective optical display device is omitted and the defective optical display device is transported to the downstream side of the production line as a normal qualified product, on the other hand, if the accuracy is too high, it is judged to be normal. The optical display device also misjudges it as bad and causes unnecessary waste.
因此,係希望在對於貼附後之光學顯示裝置進行自動缺陷檢查的自動檢查裝置4之後,於該自動檢查裝置4之下游側處,更進而設置目視檢查裝置1,並藉由目視檢查來對於自動檢查裝置之判定結果精確度再度作確認。 Therefore, it is desirable to provide the visual inspection device 1 at the downstream side of the automatic inspection device 4 after the automatic inspection device 4 for performing automatic defect inspection on the attached optical display device, and to visually inspect it. The accuracy of the determination result of the automatic inspection device is confirmed again.
圖2,係為對於在由本發明所致之光學顯示裝置製造系統中而除了自動檢查裝置之外更進而設置有目視檢查裝置之構成作概略性展示之圖。 Fig. 2 is a view schematically showing a configuration in which a visual inspection device is further provided in addition to the automatic inspection device in the optical display device manufacturing system of the present invention.
若是具體作敘述,則係希望對於並未被自動檢查裝置判定為不良光學顯示裝置的光學顯示裝置,而隨機性地進行藉由目視檢查裝置來進行目視檢查的抽查。又,係希望對於已被自動檢查裝置判定為不良光學顯示裝置的光學顯示裝置,而針對其全體均藉由目視檢查裝置來進行目視檢查。 Specifically, for the optical display device that is not determined to be a defective optical display device by the automatic inspection device, it is desirable to perform a random inspection by the visual inspection device. Further, it is desirable that the optical display device that has been determined to be a defective optical display device by the automatic inspection device is visually inspected by the visual inspection device.
在以下之說明中,係將並未被自動檢查裝置判定為不良光學顯示裝置並被作隨機檢查的光學顯示裝置、以及已被自動檢查裝置判定為不良光學顯示裝置的光學顯示裝置,作為應進行目視檢查之光學顯示裝置,而總稱為不良光學顯示裝置或者是檢查對象物,並以元件符號2b來作標示。 In the following description, an optical display device that has not been determined as a defective optical display device by the automatic inspection device and is randomly checked, and an optical display device that has been determined as a defective optical display device by the automatic inspection device are to be subjected to The optical display device is visually inspected, and is collectively referred to as a defective optical display device or an object to be inspected, and is indicated by the symbol 2b.
以下,參考圖面,針對由本發明之實施形態所致的目視檢查裝置之具體性構造作詳細說明。 Hereinafter, the specific structure of the visual inspection device according to the embodiment of the present invention will be described in detail with reference to the drawings.
圖3a、3b,係為對於本發明之目視檢查裝置之構成作概略展示之上面圖和側面圖。 3a and 3b are a top view and a side view schematically showing the configuration of the visual inspection device of the present invention.
本發明之目視檢查裝置1,係被設置在自動檢查工程中之自動檢查裝置4之下游側處,並對於光學顯示裝置(檢查對象物)2進行目視檢查,而具備有抽取搬送單元10和目視檢查單元20。 The visual inspection device 1 of the present invention is provided on the downstream side of the automatic inspection device 4 in the automatic inspection project, and visually inspects the optical display device (inspection object) 2, and is provided with the extraction conveyance unit 10 and the visual inspection. Check unit 20.
抽取搬送單元10,係如同圖3(b)中所示一般,具備有由正常光學顯示裝置搬送部(正常檢查對象物搬送部)10a和被配置在該正常檢查對象物搬送部10a之下側處的不良光學顯示裝置搬送部(被檢查對象物搬送部)10b所成的上下二段配置。 The extraction transport unit 10 is provided with a normal optical display device transport unit (normal inspection object transport unit) 10a and a lower side of the normal inspection object transport unit 10a as shown in FIG. 3(b). The defective optical display device transport unit (inspected object transport unit) 10b is disposed in the upper and lower stages.
正常光學顯示裝置搬送部(正常檢查對象物搬送部)10a,係為搬送正常光學顯示裝置(正常檢查對象物)2a者,不良光學顯示裝置搬送部(被檢查對象物搬送部)10b,係為搬送不良光學顯示裝置(被檢查對象物)2b者。 The normal optical display device transport unit (normal inspection object transport unit) 10a is a non-transparent optical display device transport unit (inspected object transport unit) 10b, which is a normal optical display device (normal inspection target object) 2a. The person who transports the defective optical display device (object to be inspected) 2b.
在生產線全體處,係設置有對於光學顯示裝置2(包含正常光學顯示裝置2a和不良光學顯示裝置 2b)之搬送狀況作即時監視的感測器。 At the entire production line, there is provided for the optical display device 2 (including the normal optical display device 2a and the poor optical display device) 2b) The sensor for real-time monitoring of the transport status.
當藉由感測器(未圖示)而檢測出被檢查對象物2b被搬送而來一事時,抽取搬送單元10,係藉由控制裝置之控制,而以該被檢查對象物2b會被搬送至被檢查對象物搬送部1b處的方式,來朝向上方移動,並且,在該被檢查對象物2b被搬送至被檢查對象物搬送部10b處之後,該抽取搬送單元10,係藉由控制裝置之控制,而以回到能夠搬送正常檢查對象物2a之位置處的方式而移動,且藉由吸附裝置301來將該被檢查對象物搬送部10b上之被檢查對象物2b搬送至目視檢查單元20處。之後,藉由於後再作詳細說明之目視檢查單元20,來以目視而對於被搬送而來之被檢查對象物2b進行目視檢查。 When it is detected by the sensor (not shown) that the object 2b to be inspected is transported, the transport unit 10 is picked up, and the object to be inspected 2b is transported by the control device. The method of moving to the object to be inspected 1b is moved upward, and after the object 2b to be inspected is transported to the object to be inspected 10b, the extracting and transporting unit 10 is controlled by the control device. By the control, the object 2b is moved to the position where the normal inspection object 2a can be transported, and the object to be inspected 2b on the object to be inspected 10b is transported to the visual inspection unit by the adsorption device 301. 20 places. Thereafter, the visual inspection unit 20, which will be described in detail later, visually inspects the object 2b to be inspected which is transported.
圖4(a)~圖4(c),係為對於在由本發明之其中一種實施形態所致的目視檢查裝置1中之光學顯示裝置的搬送狀況作概略性展示之圖。 4(a) to 4(c) are diagrams schematically showing the conveyance state of the optical display device in the visual inspection device 1 according to one embodiment of the present invention.
在本發明之第1實施形態中,如同圖4(a)~圖4(c)中所示一般,正常檢查對象物搬送部10a,係位置於被檢查對象物搬送部10b之上方。在圖4(a)所示之狀態下,係藉由正常檢查對象物搬送部10a而搬送正常光學顯示裝置2a。當正在搬送正常光學顯示裝置2a時,正常檢查對象物搬送部10a,係位置在與生產線之主搬送部成為略共平面的位置處,不良光學顯示裝置搬送部、亦即是被檢查對象物搬送部10b,係位置在主搬送部之下方。 In the first embodiment of the present invention, as shown in FIGS. 4(a) to 4(c), the normal inspection object transport unit 10a is positioned above the object transport unit 10b. In the state shown in FIG. 4(a), the normal optical display device 2a is transported by the normal inspection object transport unit 10a. When the normal optical display device 2a is being transported, the normal inspection object transport unit 10a is positioned at a position that is substantially coplanar with the main transport unit of the production line, and the defective optical display device transport unit, that is, the object to be inspected is transported. The portion 10b is located below the main conveying portion.
如同圖4b中所示一般,當藉由感測器而檢測出不良光學顯示裝置、亦即是被檢查對象物2b被搬送而來一事時,抽取搬送單元10,係藉由控制裝置之控制,而以會使該被檢查對象物搬送部10b成為與主搬送部略共平面之位置的方式,來朝向上方移動,不良光學顯示裝置、亦即是被檢查對象物2b,係被搬送至不良光學顯示裝置搬送部、亦即是被檢查對象物搬送部10b處。又,如同圖4(c)中所示一般,在不良光學顯示裝置2b被搬送至不良光學顯示裝置搬送部10b處之後,抽取搬送單元10,係藉由控制裝置之控制,而以回到正常光學顯示裝置搬送部10a會成為與主搬送部略共平面並能夠搬送正常光學顯示裝置2a之位置處的方式,而朝向下方移動。 As shown in FIG. 4b, when the defective optical display device, that is, the object to be inspected 2b is detected by the sensor, the transport unit 10 is controlled by the control device. In addition, the object to be inspected 10b is moved upward so as to be slightly coplanar with the main conveyance unit, and the defective optical display device, that is, the object 2b to be inspected, is transported to the defective optics. The display device transport unit, that is, the object transport unit 10b to be inspected. Further, as shown in FIG. 4(c), after the defective optical display device 2b is transported to the defective optical display device transport unit 10b, the transport unit 10 is extracted and returned to normal by the control of the control device. The optical display device transport unit 10a is moved to the lower side so as to be slightly coplanar with the main transport unit and capable of transporting the position of the normal optical display device 2a.
較理想,在正常光學顯示裝置搬送部10a處,係使用普通所周知之具有單層輥構造的搬送裝置。此種單層輥構造之搬送裝置,係能夠沿著從光學顯示裝置之主搬送部的上游起朝向下游的主搬送方向來搬送光學顯示裝置。該單層輥構造搬送裝置,其構造係為簡單,價格係為低廉。 Preferably, in the normal optical display device transport unit 10a, a conventionally known transport device having a single-layer roll structure is used. In the transport apparatus of the single-layer roll structure, the optical display device can be transported in the main transport direction from the upstream of the main transport unit of the optical display device toward the downstream. The single-layer roll structure conveying device has a simple structure and is inexpensive.
較理想,在不良光學顯示裝置搬送部10b處,係使用具有雙層輥構造的搬送裝置。此種雙層輥構造之搬送裝置,係在能夠沿著從光學顯示裝置之主搬送部的上游起朝向下游的主搬送方向來搬送光學顯示裝置的同時,亦能夠沿著當從上方觀察時為與該主搬送方向略垂直之垂直方向來搬送光學顯示裝置。藉由該雙層輥構造搬送 裝置,係能夠實現在略垂直之2個方向上的搬送。前述具有雙層輥構造的搬送裝置,係於後再詳細作說明。 Preferably, a transfer device having a double roll structure is used in the defective optical display device transport unit 10b. In the conveyance device of the double-layered roller structure, the optical display device can be conveyed in the main conveyance direction downstream from the upstream of the main conveyance portion of the optical display device, and can be viewed from above when viewed from above. The optical display device is transported in a vertical direction that is slightly perpendicular to the main transport direction. Transported by the double roll structure The device is capable of transporting in two directions that are slightly perpendicular. The above-described conveying device having a double roll structure will be described in detail later.
故而,應進行目視檢查之不良光學顯示裝置,亦即是被檢查對象物2b,係藉由具備有雙層輥構造搬送裝置之不良光學顯示裝置搬送部10b,而首先沿著主搬送方向來一直被搬送至不良光學顯示裝置搬送部10b處。之後,該不良光學顯示裝置2b,係依然藉由具備有雙層輥構造搬送裝置之不良光學顯示裝置搬送部、亦即是藉由被檢查對象物搬送部10b,而沿著當從上方觀察時為與該主搬送方向略垂直之垂直方向,而從主搬送部分離並被搬送至進行目視檢查之目視檢查單元20處。 Therefore, the defective optical display device which is visually inspected, that is, the object 2b to be inspected, is always provided along the main transport direction by the defective optical display device transporting unit 10b having the double-roller structure transporting device. It is conveyed to the defective optical display device transport unit 10b. In the case of the defective optical display device 2b, the defective optical display device transport unit including the double-layered roller structure transporting device, that is, the object to be inspected 10b, is viewed from above when viewed from above. In the vertical direction which is slightly perpendicular to the main conveyance direction, the main conveyance unit is separated and conveyed to the visual inspection unit 20 for performing visual inspection.
又,在本實施形態中,係可更進而具備有未圖示之機械臂。在此機械臂處,係被設置有吸附裝置301(圖7a),藉由該吸附裝置301,係能夠將被朝向與主搬送方向略垂直之方向作搬送的不良光學顯示裝置2b作吸附並搬送至目視檢查單元20處。 Further, in the present embodiment, a robot arm (not shown) may be further provided. In the robot arm, an adsorption device 301 (FIG. 7a) is provided, and the adsorption device 301 can adsorb and transport the defective optical display device 2b that is transported in a direction slightly perpendicular to the main conveyance direction. Go to the visual inspection unit 20.
只要是能夠將身為不良光學顯示裝置之被檢查對象物2b作吸附並搬送至目視檢查單元20處者,則作為該機械臂以及吸附裝置,係亦可使用先前技術之機械臂以及吸附裝置。 As long as the object 2b to be inspected as a defective optical display device can be adsorbed and transported to the visual inspection unit 20, the robot arm and the adsorption device can be used as the robot arm and the adsorption device.
如同前述一般,較理想,作為不良光學顯示裝置搬送部、亦即是被檢查對象物搬送部10b,係使用具有雙層輥 構造的搬送裝置。亦有將此具有雙層輥構造之搬送裝置稱作雙方向搬送裝置50的情形。圖5,係為對於利用主搬送方向搬送裝置來搬送光學顯示裝置的狀態作概略性展示者。圖6,係為對於利用垂直方向搬送裝置來搬送光學顯示裝置的狀態作概略性展示之圖。 As described above, it is preferable that the defective optical display device transport unit, that is, the object transport unit 10b to be inspected, has a double-layer roller. The transport device constructed. There is also a case where the conveying device having the double-layered roller structure is referred to as a double-direction conveying device 50. FIG. 5 is a schematic display of a state in which the optical display device is transported by the main transport direction transport device. Fig. 6 is a view schematically showing a state in which the optical display device is transported by the vertical transport device.
如同圖5以及圖6中所示一般,雙方向搬送裝置50,係為具有雙層輥構造之搬送裝置。若是作具體性敘述,則雙方向搬送裝置50,係具備有在主搬送方向上搬送光學顯示裝置之主搬送方向搬送裝置501、和在當從上方觀察時為與該主搬送方向略垂直之橫方向來搬送光學顯示裝置之橫方向搬送裝置502。 As shown in FIG. 5 and FIG. 6, the bidirectional conveying device 50 is a conveying device having a double roll structure. In the case of the specific description, the double-direction conveying device 50 includes a main conveying direction conveying device 501 that conveys the optical display device in the main conveying direction, and a horizontal direction that is slightly perpendicular to the main conveying direction when viewed from above. The lateral direction transport device 502 of the optical display device is transported in the direction.
主搬送方向搬送裝置501,係身為由一連串的搬送輥所成之輥搬送裝置,並能夠在主搬送方向上搬送光學顯示裝置。在主搬送方向搬送裝置501處,係在可旋轉之搬送輥軸上被設置有特定數量之搬送輥,並構成搬送輥列。複數之搬送輥列,係沿著主搬送方向而空出有特定間隔地作平行並排配置,並形成沿著主搬送方向而搬送光學顯示裝置之搬送裝置。 The main conveyance direction conveying device 501 is a roller conveying device formed by a series of conveying rollers, and is capable of conveying the optical display device in the main conveying direction. In the main conveyance direction conveyance device 501, a specific number of conveyance rollers are provided on the rotatable conveyance roller shaft, and the conveyance roller row is comprised. The plurality of transport roller rows are arranged side by side in a predetermined interval along the main transport direction, and a transport device that transports the optical display device along the main transport direction is formed.
橫方向搬送裝置502,係身為由一連串的搬送輥所成之輥搬送裝置,並在當從上方觀察時為與該主搬送方向略垂直的橫方向上搬送光學顯示裝置。於該橫方向搬送裝置502處,係在搬送輥軸上被設置有特定數量之搬送輥,並構成搬送輥列。複數之搬送輥列,係沿著與主搬送方向略垂直之橫方向而空出有特定間隔地作平行並排配 置,並能夠沿著當從上方觀察時為與該主搬送方向略垂直的橫方向來搬送光學顯示裝置。 The horizontal conveying device 502 is a roller conveying device formed by a series of conveying rollers, and conveys the optical display device in a lateral direction that is slightly perpendicular to the main conveying direction when viewed from above. In the lateral conveying device 502, a specific number of conveying rollers are provided on the conveying roller shaft to constitute a conveying roller row. The plurality of conveying roller rows are arranged in parallel and arranged at a predetermined interval in a lateral direction slightly perpendicular to the main conveying direction. The optical display device can be transported in a lateral direction that is slightly perpendicular to the main transport direction when viewed from above.
換言之,當從上方作觀察時,主搬送方向搬送裝置501之搬送輥列,係以與橫方向搬送裝置502之搬送輥列相互正交的方式而被作配置。 In other words, when viewed from above, the conveyance roller row of the main conveyance direction conveyance device 501 is disposed so as to be orthogonal to the conveyance roller row of the lateral conveyance device 502.
主搬送方向搬送裝置501之搬送輥列之間的間隔距離,係至少為較橫方向搬送裝置502之搬送輥列的厚度而更大之距離。亦即是,係能夠使橫方向搬送裝置502之搬送輥在主搬送方向搬送裝置501之搬送輥列之間而通過。 The distance between the transport roller rows of the main transport direction transporting device 501 is at least a larger distance than the thickness of the transport roller row of the lateral transport device 502. In other words, the conveyance roller of the lateral conveyance device 502 can pass between the conveyance roller rows of the main conveyance direction conveyance device 501.
又,該橫方向搬送裝置502之搬送輥間的間隔距離,係為至少較主搬送方向搬送裝置501之搬送輥的直徑而更大之距離。亦即是,係能夠在橫方向搬送裝置502之搬送輥列之間而使主搬送方向搬送裝置501之搬送輥通過。 Moreover, the distance between the conveyance rollers of the lateral conveyance device 502 is at least a larger distance than the diameter of the conveyance roller of the main conveyance direction conveyance device 501. In other words, the conveyance roller of the main conveyance direction conveying device 501 can pass between the conveyance roller rows of the conveyance device 502 in the lateral direction.
藉由此,橫方向搬送裝置502,係能夠從主搬送方向搬送裝置501而獨立出來地進行升降。 As a result, the lateral conveying device 502 can be lifted and lowered independently from the main conveying direction conveying device 501.
另外,構成橫方向搬送裝置502之搬送輥的直徑,係設為較構成主搬送方向搬送裝置501之搬送輥的直徑而更大。 In addition, the diameter of the conveying roller constituting the lateral conveying device 502 is larger than the diameter of the conveying roller constituting the main conveying direction conveying device 501.
該雙方向搬送裝置50,係更進而具備有對於主搬送方向搬送裝置501和橫方向搬送裝置502作切換之切換裝置(未圖示)。 The bidirectional conveying device 50 further includes a switching device (not shown) that switches between the main conveying direction conveying device 501 and the horizontal conveying device 502.
如同圖5中所示一般,在沿著從光學顯示裝 置之主搬送部的上游側起朝向下游側的主搬送方向來搬送光學顯示裝置之過程中,主搬送方向搬送裝置501,係位置在橫方向搬送裝置502之上方。亦即是,構成主搬送方向搬送裝置501之搬送輥的表面,係位在較構成橫方向搬送裝置502之搬送輥的表面而更高之位置處。故而,係能夠藉由主搬送方向搬送裝置501來接收在主搬送方向上而從上游所送來之光學顯示裝置,並朝向下游側作搬送。 As shown in Figure 5, along the optical display In the process of transporting the optical display device toward the downstream main transport direction on the upstream side of the main transport unit, the main transport direction transport device 501 is positioned above the lateral transport device 502. In other words, the surface of the conveying roller constituting the main conveying direction conveying device 501 is positioned higher than the surface of the conveying roller constituting the lateral conveying device 502. Therefore, the optical display device sent from the upstream in the main transport direction can be received by the main transport direction transport device 501, and can be transported toward the downstream side.
如同圖6中所示一般,在將身為不良光學顯示裝置之被檢查對象物2b搬送至被檢查對象物搬送部10b處之後,係對於雙方向搬送裝置50之雙層輥構造進行切換。亦即是,係藉由切換裝置來使橫方向搬送裝置502上升,並使構成該橫方向搬送裝置502之搬送輥的表面成為位在較主搬送方向搬送裝置501之搬送輥的表面更高的位置處,藉由此,而成為能夠藉由橫方向搬送裝置502來在與主搬送方向相垂直之方向上搬送光學顯示裝置。 As shown in FIG. 6 , after the object to be inspected 2 b which is a defective optical display device is transported to the object to be inspected 10 b , the double roller structure of the bidirectional conveying device 50 is switched. In other words, the horizontal conveying device 502 is raised by the switching device, and the surface of the conveying roller constituting the lateral conveying device 502 is positioned higher than the surface of the conveying roller of the main conveying direction conveying device 501. At this position, the optical display device can be transported in the direction perpendicular to the main transport direction by the lateral transport device 502.
藉由如此這般所構成之雙方向搬送裝置50,係能夠同時實現沿著主搬送方向之搬送以及沿著與主搬送方向相垂直的方向之搬送。 According to the bidirectional conveying apparatus 50 configured as described above, the conveyance in the main conveyance direction and the conveyance in the direction perpendicular to the main conveyance direction can be simultaneously performed.
圖7(a)、圖7(b),係為對於在本發明之目視檢查裝置中的目視檢查單元之水平狀態以及傾斜狀態作概略性展示之圖。 7(a) and 7(b) are diagrams schematically showing the horizontal state and the inclined state of the visual inspection unit in the visual inspection device of the present invention.
該目視檢查單元20,係作為目視觀察裝置,而具備有:目視檢查台,係當被檢查對象物2b被作搬送時,會成為水平狀態,並在進行檢查時,能夠從水平狀態而移動至傾斜狀態。 The visual inspection unit 20 is provided as a visual inspection device, and is provided with a visual inspection table that is horizontal when the object to be inspected 2b is transported, and can be moved from the horizontal state to the inspection state when the inspection is performed. Tilted state.
該目視檢查單元20,係具備有:用以保持身為被檢查對象物之應進行檢查的不良光學顯示裝置2b之光學顯示裝置保持部21、和使此光學顯示裝置保持部21傾斜為當操作者進行目視檢查時的適當之角度之搖動機構(未圖示)、和當使不良光學顯示裝置2b立起並成為傾斜狀態時從該不良光學顯示裝置2b之背面側來照射光的背光單元22。 The visual inspection unit 20 includes an optical display device holding portion 21 for holding the defective optical display device 2b to be inspected as an object to be inspected, and tilting the optical display device holding portion 21 to operate. A panning unit 22 that irradiates light from the back side of the defective optical display device 2b when the visual display is tilted at an appropriate angle (not shown) and when the defective optical display device 2b is raised and tilted .
藉由上述一般之被設置在機械臂處的吸附裝置301,來將應進行目視檢查之不良光學顯示裝置2b,以圖7(a)中所示之水平狀態來搬送至光學顯示裝置保持部21處。藉由未圖示之控制手段來對於前述之搖動機構作控制,並使被載置有不良光學顯示裝置2b之光學顯示裝置保持部21搖動,而使其傾斜並立起為對於操作者進行目視檢查而言為適當的角度,而設為傾斜狀態。如同圖7(b)中所示一般,在此傾斜狀態下,藉由從光學顯示裝置保持部21之背面側來照射檢查用光,操作者係能夠以目視來對於不良光學顯示裝置2b進行檢查。 The defective optical display device 2b to be visually inspected is transported to the optical display device holding portion 21 in the horizontal state shown in FIG. 7(a) by the above-described general adsorption device 301 provided at the robot arm. At the office. The above-described rocking mechanism is controlled by a control means (not shown), and the optical display device holding portion 21 on which the defective optical display device 2b is placed is shaken, and tilted and raised to visually inspect the operator. In the case of an appropriate angle, it is set to an inclined state. As shown in FIG. 7(b), in this inclined state, the inspection light is irradiated from the back side of the optical display device holding portion 21, and the operator can visually check the defective optical display device 2b. .
檢查結果為被判定為正常光學顯示裝置2a之光學顯示裝置,在檢查後,係經由被設置在機械臂處之吸附裝置,而被回送至不良光學顯示裝置搬送部10b處,該 不良光學顯示裝置搬送部10b係以與主搬送部成為略共平面的方式而朝向上方移動,並將正常光學顯示裝置2a搬送至下游側工程處。 As a result of the inspection, the optical display device determined to be the normal optical display device 2a is returned to the defective optical display device transport unit 10b via the adsorption device provided at the robot arm after the inspection. The defective optical display device transport unit 10b is moved upward so as to be slightly coplanar with the main transport unit, and transports the normal optical display device 2a to the downstream side.
檢查結果係被判定確實為不良的光學顯示裝置2b,係在檢查後被排出並進行重新加工或者是廢棄。 The inspection result is an optical display device 2b that is determined to be defective, and is discharged after the inspection and reworked or discarded.
另外,上述不良光學顯示裝置2b,係在從主搬送部而被搬送至目視檢查單元20處、在目視搬送單元處被作目視檢查、以及將合格光學顯示裝置回送至主搬送部處的各過程中,並不需要以人的手來接觸光學顯示裝置,而能夠防止光學檢查裝置被污損或損傷的情形。 Further, the defective optical display device 2b is transported to the visual inspection unit 20 from the main transport unit, visually inspected at the visual transport unit, and returned to the main transport unit by the qualified optical display unit. In this case, it is not necessary to touch the optical display device with a human hand, and it is possible to prevent the optical inspection device from being stained or damaged.
圖8,係為本發明之其中一種實施形態的目視檢查裝置之動作流程圖。以下,參考圖8,針對在本發明之該實施形態中的目視檢查裝置1之動作作說明。 Fig. 8 is a flow chart showing the operation of the visual inspection device according to one embodiment of the present invention. Hereinafter, an operation of the visual inspection device 1 according to this embodiment of the present invention will be described with reference to Fig. 8 .
首先,在步驟S11中,係於玻璃基板上貼附光學薄膜而形成光學顯示裝置2,並將該光學顯示裝置2搬送至自動檢查裝置1處。之後,在步驟S12中,對於光學顯示裝置2進行自動檢查(自動光學檢查)。接著,在步驟S13中,藉由自動檢查而判定在光學顯示裝置2中是否存在有缺陷。當判定為「YES」的情況時、亦即是當檢測出缺陷的情況時,係移行至步驟S21。當判定為「NO」的情況時、亦即是當並未檢測出缺陷的情況時,係移行至步驟S14。在步驟S14中,係判定是否有必要對於光學顯示裝置2進行隨機檢查。當判定為「YES」的情況時、亦即是當有必要進行隨機檢查的情況時,係移行至步驟 S21。當判定為「NO」的情況時、亦即是當並不需要進行隨機檢查的情況時,係移行至步驟S15,抽取搬送單元10係並不會動作,而將光學顯示裝置搬送至下一工程處。 First, in step S11, an optical film is attached to a glass substrate to form an optical display device 2, and the optical display device 2 is transported to the automatic inspection device 1. Thereafter, in step S12, an automatic inspection (automatic optical inspection) is performed on the optical display device 2. Next, in step S13, it is determined whether or not there is a defect in the optical display device 2 by automatic inspection. When it is judged as "YES", that is, when a defect is detected, the process proceeds to step S21. When it is judged as "NO", that is, when no defect is detected, the process proceeds to step S14. In step S14, it is determined whether it is necessary to perform random inspection on the optical display device 2. When it is judged as "YES", that is, when it is necessary to perform random inspection, the process proceeds to the step. S21. When it is judged as "NO", that is, when random inspection is not required, the process proceeds to step S15, and the extraction and transport unit 10 does not operate, and the optical display device is transported to the next project. At the office.
當在步驟S13中判定為「YES」的情況時、亦即是當檢測出缺陷的情況時,係移行至步驟S21。 When it is judged as "YES" in step S13, that is, when a defect is detected, the process proceeds to step S21.
當在步驟S14中判定為「YES」的情況時、亦即是當有必要進行隨機檢查的情況時,係移行至步驟S21。 When it is judged as "YES" in step S14, that is, when it is necessary to perform random inspection, the process proceeds to step S21.
當在步驟S13或步驟S14之後而移行至步驟S21的情況時,係將被作為目視檢查對象之光學顯示裝置,總稱為「不良光學顯示裝置2b」或「被檢查對象物2b」。 When the process proceeds to step S21 after step S13 or step S14, the optical display device to be visually inspected is collectively referred to as "bad optical display device 2b" or "inspected object 2b".
在從步驟S21所開始的程序中,係藉由目視檢查裝置1來對於不良光學顯示裝置2b進行目視檢查。在步驟S21中,係將不良光學顯示裝置2b,搬送至抽取搬送單元10之上游的該抽取搬送單元10之旁邊的位置(稱作旁邊上游位置)處。在步驟S22中,抽取搬送單元10係動作(亦即是,抽取搬送單元10係上升)。在步驟S23中,係將不良光學顯示裝置2b送入至抽取搬送單元10之下段(不良光學顯示裝置搬送部10b)處。之後,在步驟S24中,抽取搬送單元10係動作,該抽取搬送單元10係下降。在步驟S25中,係將不良光學顯示裝置2b搬送至目視檢查單元20處。在步驟S26中,係以目視來對於不良光學顯示裝置2b進行目視檢查。在步驟S27中, 係判定是否藉由目視檢查而在不良光學顯示裝置2b中檢測出缺陷。 In the program started in step S21, the visual inspection device 1 performs visual inspection on the defective optical display device 2b. In step S21, the defective optical display device 2b is transported to a position (referred to as a side upstream position) of the side of the extraction transport unit 10 upstream of the extraction transport unit 10. In step S22, the extraction transport unit 10 operates (that is, the extraction transport unit 10 is raised). In step S23, the defective optical display device 2b is sent to the lower stage of the extraction/transport unit 10 (the defective optical display device transport unit 10b). Thereafter, in step S24, the extraction transport unit 10 operates, and the extraction transport unit 10 is lowered. In step S25, the defective optical display device 2b is transported to the visual inspection unit 20. In step S26, the visual inspection of the defective optical display device 2b is performed visually. In step S27, It is determined whether or not a defect is detected in the defective optical display device 2b by visual inspection.
當在步驟S27中判定為「YES」的情況時、亦即是當檢測出缺陷的情況時,係移行至步驟S31,於此,係判定在不良光學顯示裝置2b中存在有缺陷。之後,移行至步驟S32,並將不良光學顯示裝置2b搬送至抽取搬送單元10之下段(不良光學顯示裝置搬送部10b)處。在步驟S33中,係判定在位置於抽取搬送單元10之上段的正常光學顯示裝置搬送部10a或者是其之上游處是否存在有其他的光學顯示裝置。 When it is judged as "YES" in step S27, that is, when a defect is detected, the process proceeds to step S31, and it is determined that there is a defect in the defective optical display device 2b. After that, the process proceeds to step S32, and the defective optical display device 2b is transported to the lower stage of the extraction/transport unit 10 (the defective optical display device transport unit 10b). In step S33, it is determined whether or not another optical display device exists at or upstream of the normal optical display device transport portion 10a positioned above the extraction transport unit 10.
當在步驟S33中判定為「YES」的情況時,係回到此步驟,並再度進行判定。 When it is judged as "YES" in step S33, the process returns to this step, and the determination is made again.
當在步驟S33中判定為「NO」的情況時,係移行至步驟S41中,抽取搬送單元10係動作,該抽取搬送單元10係上升,並接著移行至步驟S42。在步驟S42中,係將不良光學顯示裝置2b搬送至不良光學顯示裝置收容部處。 When it is judged as "NO" in step S33, the process proceeds to step S41, the extracting and transporting unit 10 is operated, the extracting and transporting unit 10 is raised, and then the process proceeds to step S42. In step S42, the defective optical display device 2b is transported to the defective optical display device housing portion.
當在步驟S27中被判定為「NO」的情況時、亦即是當並未檢測出缺陷的情況時,係移行至步驟S28。在步驟S28中,係將不良光學顯示裝置2b搬送至位置於抽取搬送單元10之下段的不良光學顯示裝置搬送部10b處,並移行至步驟S29。在步驟S29中,係判定在位置於抽取搬送單元10之上段的正常光學顯示裝置搬送部10a或者是其之上游處是否已存在有光學顯示裝置。 When it is determined as "NO" in step S27, that is, when no defect is detected, the process proceeds to step S28. In step S28, the defective optical display device 2b is transported to the defective optical display device transport unit 10b positioned at the lower stage of the extraction transport unit 10, and the process proceeds to step S29. In step S29, it is determined whether or not the optical display device is already present at or upstream of the normal optical display device transport portion 10a positioned above the ejector transport unit 10.
當在步驟S29中被判定為「YES」的情況時,係回到該步驟,並再度進行判定。 When it is judged as "YES" in step S29, the process returns to this step, and the determination is made again.
當在步驟S29中判定為「NO」的情況時,係移行至步驟S51中,抽取搬送單元10係動作,該抽取搬送單元10係上升,並接著移行至步驟S52。在步驟S52中,係將不良光學顯示裝置2b作為正常光學顯示裝置2a而搬送至下一工程處。另外,當在步驟S27中被判定為「NO」的情況時、亦即是當並未檢測出缺陷的情況時,只要是在此之後,則不論是在何者的時序處,均能夠將身為被檢查對象物之不良光學顯示裝置2b辨識為正常光學顯示裝置2a。之後,移行至步驟S52處。 When it is judged as "NO" in step S29, the process proceeds to step S51, the extraction/transport unit 10 is operated, the extraction/transport unit 10 is raised, and then the process proceeds to step S52. In step S52, the defective optical display device 2b is transported to the next engineering site as the normal optical display device 2a. In addition, when it is judged as "NO" in step S27, that is, when no defect is detected, as long as it is after that, it can be The defective optical display device 2b of the object to be inspected is recognized as the normal optical display device 2a. Thereafter, the process proceeds to step S52.
又,圖9(a)~圖9(c),係為對於在由本發明之其他實施形態所致的目視檢查裝置1中之光學顯示裝置的搬送狀況作概略性展示之圖。 9(a) to 9(c) are diagrams schematically showing the conveyance state of the optical display device in the visual inspection device 1 according to another embodiment of the present invention.
本發明之第2實施形態,除了在抽取搬送單元10之構造上為與第1實施形態相異以外,其他之構造係全部為相同。於此,係將相同部分的說明省略。 In the second embodiment of the present invention, the structure of the extraction/transport unit 10 is the same as that of the first embodiment, and the other structures are all the same. Here, the description of the same portions will be omitted.
若是作具體性敘述,則作為抽取搬送單元10,係可設為具備有如同本發明之第2實施形態一般的構造者。 In the case of the specific description, the extracting and transporting unit 10 can be configured to have a structure similar to that of the second embodiment of the present invention.
在第2實施形態中,如同圖9(a)~圖9(c)中所示一般,正常檢查對象物搬送部10a係被配置 在被檢查對象物搬送部10b之下方。在圖9(a)所示之狀態下,係藉由正常光學顯示裝置搬送部10a而搬送正常光學顯示裝置2a。當正在搬送正常光學顯示裝置2a時,該正常光學顯示裝置搬送部10a,係位置在與生產線之主搬送部成為略共平面的位置處,不良光學顯示裝置搬送部、亦即是被檢查對象物搬送部10b,係位置在主搬送部之上方。 In the second embodiment, as shown in Figs. 9(a) to 9(c), the normal inspection object transport unit 10a is arranged. Below the object transport unit 10b to be inspected. In the state shown in FIG. 9(a), the normal optical display device 2a is transported by the normal optical display device transport unit 10a. When the normal optical display device 2a is being transported, the normal optical display device transport unit 10a is located at a position that is substantially coplanar with the main transport unit of the production line, and the defective optical display device transport unit, that is, the object to be inspected The conveying unit 10b is located above the main conveying unit.
如同圖9(b)中所示一般,當藉由感測器而檢測出前述不良光學顯示裝置2b被搬送而來一事時,抽取搬送單元10,係藉由控制裝置之控制,而以會使被檢查對象物搬送部10b成為與主搬送部略共平面之位置的方式,來朝向下方移動,不良光學顯示裝置2b係被搬送至不良光學顯示裝置搬送部10b處。又,如同圖9(c)中所示一般,在不良光學顯示裝置2b被搬送至不良光學顯示裝置搬送部10b處之後,抽取搬送單元10,係藉由控制裝置之控制,而以回到該正常光學顯示裝置搬送部10a會成為與主搬送部略共平面並能夠搬送正常光學顯示裝置2a之位置處的方式,而朝向上方移動。 As shown in FIG. 9(b), when it is detected by the sensor that the defective optical display device 2b is transported, the transport unit 10 is extracted by the control device. The object to be inspected 10b is moved to the lower side so as to be slightly flush with the main conveyance unit, and the defective optical display device 2b is conveyed to the defective optical display device transport unit 10b. Further, as shown in FIG. 9(c), after the defective optical display device 2b is transported to the defective optical display device transport unit 10b, the transport unit 10 is extracted and returned to the control unit by the control device. The normal optical display device transport unit 10a moves upward while being slightly coplanar with the main transport unit and capable of transporting the normal optical display device 2a.
在此第2實施形態中,較理想,在正常光學顯示裝置搬送部10a和不良光學顯示裝置搬送部10b處,係使用具有通常之單層輥構造的搬送裝置。此種單層輥構造之搬送裝置,係能夠沿著從光學顯示裝置之主搬送部的上游起朝向下游的主搬送方向來搬送光學顯示裝置。該單層輥構造搬送裝置,其構造係為簡單,價格係為低廉。 In the second embodiment, it is preferable to use a transfer device having a normal single-layer roll structure in the normal optical display device transport unit 10a and the defective optical display device transport unit 10b. In the transport apparatus of the single-layer roll structure, the optical display device can be transported in the main transport direction from the upstream of the main transport unit of the optical display device toward the downstream. The single-layer roll structure conveying device has a simple structure and is inexpensive.
又,在本實施形態中,係與第1實施形態相同的,可具備有未圖示之機械臂。在此機械臂處,係被設置有吸附裝置301,藉由該吸附裝置301,係能夠將不良光學顯示裝置搬送部10b上的不良光學顯示裝置2b作吸附並搬送至目視檢查單元20處。 Further, in the present embodiment, as in the first embodiment, a robot arm (not shown) may be provided. At the robot arm, an adsorption device 301 is provided, and the defective optical display device 2b on the defective optical display device transport unit 10b can be adsorbed and transported to the visual inspection unit 20 by the adsorption device 301.
只要是能夠將不良光學顯示裝置2b作吸附並搬送至目視檢查單元20處的構成,則在該機械臂以及吸附裝置處,係可使用先前技術之機械臂以及吸附裝置。 As long as the defective optical display device 2b can be adsorbed and transported to the visual inspection unit 20, the mechanical arm and the adsorption device of the prior art can be used at the robot arm and the adsorption device.
在第2實施形態中,如同上述一般,其他之構造係與第1實施形態相同。針對相同部分,以相同之元件符號作標示,並省略其說明。 In the second embodiment, as in the above, other structures are the same as those in the first embodiment. The same components are denoted by the same reference numerals, and the description thereof will be omitted.
圖10,係為由本發明之第2實施形態所致的目視檢查裝置之動作流程圖。以下,參考圖10,針對本發明之第2實施形態的目視檢查裝置1之動作作說明。 Fig. 10 is a flowchart showing the operation of the visual inspection device according to the second embodiment of the present invention. Hereinafter, an operation of the visual inspection device 1 according to the second embodiment of the present invention will be described with reference to Fig. 10 .
首先,在步驟S11中,係於玻璃基板上貼附光學薄膜而形成光學顯示裝置2,並將該光學顯示裝置2搬送至自動檢查裝置1處。在步驟S12中,對於光學顯示裝置2進行自動檢查(自動光學檢查)。在步驟S13中,藉由自動檢查而判定在光學顯示裝置2中是否存在有缺陷。當判定為「YES」的情況時、亦即是當檢測出缺陷的情況時,係移行至步驟S21。當判定為「NO」的情況時、亦即是當並未檢測出缺陷的情況時,係移行至步驟S14。在步驟S14中,係判定是否有必要對於光學顯示裝置2進行隨機檢查。當判定為「YES」的情況時、亦即是當有必 要進行隨機檢查的情況時,係移行至步驟S21。當判定為「NO」的情況時、亦即是當並不需要進行隨機檢查的情況時,係移行至步驟S15,抽取搬送單元10係並不會動作,而將光學顯示裝置搬送至下一工程處。 First, in step S11, an optical film is attached to a glass substrate to form an optical display device 2, and the optical display device 2 is transported to the automatic inspection device 1. In step S12, an automatic inspection (automatic optical inspection) is performed on the optical display device 2. In step S13, it is determined whether or not there is a defect in the optical display device 2 by automatic inspection. When it is judged as "YES", that is, when a defect is detected, the process proceeds to step S21. When it is judged as "NO", that is, when no defect is detected, the process proceeds to step S14. In step S14, it is determined whether it is necessary to perform random inspection on the optical display device 2. When it is judged as "YES", that is, when there is a certain In the case where a random check is to be performed, the process proceeds to step S21. When it is judged as "NO", that is, when random inspection is not required, the process proceeds to step S15, and the extraction and transport unit 10 does not operate, and the optical display device is transported to the next project. At the office.
當在步驟S13中判定為「YES」的情況時、亦即是當檢測出缺陷的情況時,係移行至步驟S21。 When it is judged as "YES" in step S13, that is, when a defect is detected, the process proceeds to step S21.
當在步驟S14中判定為「YES」的情況時、亦即是當有必要進行隨機檢查的情況時,係移行至步驟S21。 When it is judged as "YES" in step S14, that is, when it is necessary to perform random inspection, the process proceeds to step S21.
在步驟S13或步驟S14之後而移行至步驟S21,並將被進行目視檢查之光學顯示裝置,總稱為「不良光學顯示裝置2b」或「被檢查對象物2b」。 After step S13 or step S14, the process proceeds to step S21, and the optical display device subjected to visual inspection is collectively referred to as "bad optical display device 2b" or "inspected object 2b".
依據從步驟S21所開始的程序,藉由目視檢查裝置1來對於不良光學顯示裝置2b進行目視檢查。在步驟S21中,係將不良光學顯示裝置2b,搬送至抽取搬送單元10之上游的該抽取搬送單元10之旁邊的位置(稱作旁邊上游位置)處。之後,在步驟S22'中,抽取搬送單元10係動作,該抽取搬送單元10係下降。接著,在步驟S23'中,係將不良光學顯示裝置2b搬送至位置於抽取搬送單元10之上段的不良光學顯示裝置搬送部10b處。之後,在步驟S24'中,該抽取搬送單元10係動作,抽取搬送單元10係上升。之後,在步驟S25中,係將不良光學顯示裝置2b搬送至目視檢查單元20處,在步驟S26中,係以目視來對於不良光學顯示裝置2b進行目視檢查。接 著,在步驟S27中,係判定是否藉由目視檢查而在不良光學顯示裝置2b中檢測出缺陷。 According to the procedure from step S21, the visual inspection device 1 performs visual inspection on the defective optical display device 2b. In step S21, the defective optical display device 2b is transported to a position (referred to as a side upstream position) of the side of the extraction transport unit 10 upstream of the extraction transport unit 10. Thereafter, in step S22', the extraction transport unit 10 operates, and the extraction transport unit 10 is lowered. Next, in step S23', the defective optical display device 2b is transported to the defective optical display device transport unit 10b positioned at the upper stage of the extracting and transporting unit 10. Thereafter, in step S24', the extraction transport unit 10 is operated, and the extraction transport unit 10 is raised. Thereafter, in step S25, the defective optical display device 2b is transported to the visual inspection unit 20, and in step S26, the visual inspection is performed visually on the defective optical display device 2b. Connect In step S27, it is determined whether or not a defect is detected in the defective optical display device 2b by visual inspection.
當在步驟S27中判定為「YES」的情況時、亦即是當檢測出缺陷的情況時,係移行至步驟S31,於此,係判定在不良光學顯示裝置2b中存在有缺陷。之後,移行至步驟S32',並將不良光學顯示裝置2b搬送至位置於抽取搬送單元10之上段的不良光學顯示裝置搬送部10b處。在步驟S33'中,係判定在位置於抽取搬送單元10之下段的正常光學顯示裝置搬送部10a或者是其之上游側處是否已存在有其他的光學顯示裝置。 When it is judged as "YES" in step S27, that is, when a defect is detected, the process proceeds to step S31, and it is determined that there is a defect in the defective optical display device 2b. Thereafter, the process proceeds to step S32', and the defective optical display device 2b is transported to the defective optical display device transport unit 10b positioned at the upper stage of the estaking transport unit 10. In step S33', it is determined whether or not another optical display device exists at the normal optical display device transport portion 10a positioned at the lower portion of the escrow transport unit 10 or at the upstream side thereof.
當在步驟S33'中被判定為「YES」的情況時,係回到該步驟,並再度進行判定。 When it is judged as "YES" in step S33', the process returns to this step, and the determination is made again.
當在步驟S33'中判定為「NO」的情況時,動作係移行至步驟S41'中,抽取搬送單元10係動作,該抽取搬送單元10係下降。之後,接著係移行至步驟S42,在步驟S42中,係將不良光學顯示裝置2b搬送至不良光學顯示裝置收容部處。 When it is judged as "NO" in step S33', the operation proceeds to step S41', the extraction/transport unit 10 operates, and the extraction/transport unit 10 is lowered. Thereafter, the process proceeds to step S42, and in step S42, the defective optical display device 2b is transported to the defective optical display device housing portion.
當在步驟S27中被判定為「NO」的情況時、亦即是當並未檢測出缺陷的情況時,係移行至步驟S28'。在步驟S28'中,係將不良光學顯示裝置2b搬送至位置於抽取搬送單元10之上段的不良光學顯示裝置搬送部10b處。之後,移行至步驟S29'處。在步驟S29'中,係判定在位置於抽取搬送單元10之下段的正常光學顯示裝置搬送部10a或者是其之上游側處是否已存在有其他的光學顯示 裝置。 When it is determined as "NO" in step S27, that is, when no defect is detected, the process proceeds to step S28'. In step S28', the defective optical display device 2b is transported to the defective optical display device transport unit 10b positioned at the upper stage of the extracting and transporting unit 10. After that, the process proceeds to step S29'. In step S29', it is determined whether or not another optical display already exists at the normal optical display device transport portion 10a positioned at the lower portion of the escrow transport unit 10 or at the upstream side thereof. Device.
當在步驟S29'中被判定為「YES」的情況時,係回到該步驟,並再度進行判定。 When it is judged as "YES" in step S29', the process returns to this step, and the determination is made again.
當在步驟S29'中判定為「NO」的情況時,動作係移行至步驟S51'處,抽取搬送單元10係動作,抽取搬送單元10係下降。之後,移行至步驟S52處。在步驟S52中,係將不良光學顯示裝置2b作為正常光學顯示裝置2a而搬送至下一工程處。另外,當在步驟S27中被判定為「NO」的情況時、亦即是當並未檢測出缺陷的情況時,只要是在此之後,則不論是在何者的時序處,均能夠將身為檢查對象物之不良光學顯示裝置2b辨識為正常光學顯示裝置2a。之後,移行至步驟S52處。 When it is judged as "NO" in step S29', the operation proceeds to step S51', the extraction/transport unit 10 operates, and the extraction/transport unit 10 is lowered. Thereafter, the process proceeds to step S52. In step S52, the defective optical display device 2b is transported to the next engineering site as the normal optical display device 2a. In addition, when it is judged as "NO" in step S27, that is, when no defect is detected, as long as it is after that, it can be The defective optical display device 2b of the inspection object is recognized as the normal optical display device 2a. Thereafter, the process proceeds to step S52.
本發明之目視檢查裝置,係如同上述一般,但是,係並不被限定於此,在本發明之思想的範圍內,係可適當進行變更。 The visual inspection device of the present invention is generally as described above, but is not limited thereto, and can be appropriately modified within the scope of the inventive concept.
本發明之目視檢查裝置,係可對於製造薄片狀構件之各種類的製造裝置作適用。 The visual inspection device of the present invention can be applied to various types of manufacturing apparatuses for manufacturing sheet-like members.
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3119098U (en) * | 2005-11-22 | 2006-02-16 | 株式会社島津製作所 | TFT array inspection equipment |
CN101320145A (en) * | 2008-07-21 | 2008-12-10 | 友达光电股份有限公司 | Panel sampling inspection device and method |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01202644A (en) * | 1988-02-09 | 1989-08-15 | Natl House Ind Co Ltd | Work inspecting device |
JP2659384B2 (en) * | 1988-02-16 | 1997-09-30 | オリンパス光学工業株式会社 | Wafer inspection equipment |
JP3053132B2 (en) | 1991-09-30 | 2000-06-19 | 芝浦メカトロニクス株式会社 | Sorting and conveying equipment for articles |
KR101201322B1 (en) * | 2005-12-29 | 2012-11-14 | 엘지디스플레이 주식회사 | Apparatus for Testing flat panel display device and method thereof |
JP5005945B2 (en) * | 2006-04-03 | 2012-08-22 | オリンパス株式会社 | Board inspection equipment |
JP5001681B2 (en) * | 2007-03-12 | 2012-08-15 | 株式会社日本マイクロニクス | Inline automatic inspection device and inline automatic inspection system |
JP2009031141A (en) | 2007-07-27 | 2009-02-12 | Sharp Corp | Automatic inspection device, inspection system, processing method, inspection program, and computer-readable recording medium |
-
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JP3119098U (en) * | 2005-11-22 | 2006-02-16 | 株式会社島津製作所 | TFT array inspection equipment |
CN101320145A (en) * | 2008-07-21 | 2008-12-10 | 友达光电股份有限公司 | Panel sampling inspection device and method |
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JP2016121982A (en) | 2016-07-07 |
KR102303687B1 (en) | 2021-09-17 |
TW201623943A (en) | 2016-07-01 |
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JP6406084B2 (en) | 2018-10-17 |
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