JP2009236771A - Glass substrate inspection apparatus and glass substrate inspection method - Google Patents

Glass substrate inspection apparatus and glass substrate inspection method Download PDF

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JP2009236771A
JP2009236771A JP2008084794A JP2008084794A JP2009236771A JP 2009236771 A JP2009236771 A JP 2009236771A JP 2008084794 A JP2008084794 A JP 2008084794A JP 2008084794 A JP2008084794 A JP 2008084794A JP 2009236771 A JP2009236771 A JP 2009236771A
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glass substrate
gripping
defect detection
defect
gripping means
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JP5403389B2 (en
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Yoshiharu Sotoma
喜春 外間
Masayoshi Yamamoto
正善 山本
Tadanori Yasui
忠徳 安井
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Priority to JP2008084794A priority Critical patent/JP5403389B2/en
Priority to KR1020107011729A priority patent/KR101471899B1/en
Priority to CN200880119235.5A priority patent/CN101889199B/en
Priority to PCT/JP2008/071454 priority patent/WO2009118952A1/en
Priority to TW097151220A priority patent/TWI447381B/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

Abstract

<P>PROBLEM TO BE SOLVED: To simplify an apparatus constitution, deal with a request for inspecting a defect as a glass substrate is moved, correct a flexure of the glass substrate, and improve the detection accuracy of the defect without generating excess stress concentration on a side of the glass substrate. <P>SOLUTION: A glass substrate inspection apparatus 1 for scanning a defect sensing means 3 relative to the glass substrate G and inspecting the existence of the defect included in the glass substrate G by moving the vertical glass substrate G relative to the defect sensing means 3 in the width direction of the glass substrate G comprises: an upper part gripping means 4 for gripping the upper side of the glass substrate G; and a lower part gripping means 5 for gripping the lower side of the glass substrate G, and holds the glass substrate G only by gripping with the upper part gripping means 4 and the lower part gripping means 5 and moves the glass substrate G toward the defect sensing means 3 in the width direction in a state that a vertical tension is applied to the glass substrate G by separating the upper and lower gripping means 4, 5. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、ガラス基板に含まれる欠陥の有無を検査するガラス基板検査装置およびガラス基板検査方法に関する。   The present invention relates to a glass substrate inspection apparatus and a glass substrate inspection method for inspecting the presence or absence of defects contained in a glass substrate.

周知のように、液晶ディスプレイ、プラズマディスプレイ、エレクトロルミネッセンスディスプレイ、フィールドエミッションディスプレイなどのフラットパネルディスプレイ（ＦＰＤ）用のガラス基板を初めとする各種ガラス板は、溶融炉で溶融された溶融ガラスを帯状のガラスリボンに成形し、このガラスリボンを十分に冷却した後に所定寸法に切断することにより製作される場合が多い。ここで、ガラスリボンの成形には、フロート法の他、オーバーフローダウンドロー法（フュージョン法）やスロットダウンドロー法などのダウンドロー法などが一般的に利用されている。   As is well known, various glass plates such as glass substrates for flat panel displays (FPD) such as liquid crystal displays, plasma displays, electroluminescence displays, field emission displays, etc. are made of a molten glass melted in a melting furnace. In many cases, it is manufactured by forming into a glass ribbon, and sufficiently cooling the glass ribbon and then cutting it into a predetermined dimension. Here, for the forming of the glass ribbon, in addition to the float method, a down draw method such as an overflow down draw method (fusion method) or a slot down draw method is generally used.

そして、このような過程を経て製作されたガラス基板（小さなガラス基板が多面取りされるマザーガラス基板を含む）は検査工程に送られ、微小傷や異物等の欠陥の有無が検査されるのが通例である。   And the glass substrate manufactured through such a process (including a mother glass substrate on which a small glass substrate is multi-faced) is sent to an inspection process, and it is inspected for the presence of defects such as micro-scratches and foreign matter. It is customary.

この種の検査工程で使用される装置としては、例えば下記の特許文献１に開示されているように、搬送ローラー上に水平にガラス基板を載置して、搬送ローラーによりガラス基板を水平姿勢で移動させながら、光源とＣＣＤセンサー等のカメラにより、ガラス基板の欠陥を検出するように構成されたものが公知となっている。   As an apparatus used in this type of inspection process, for example, as disclosed in Patent Document 1 below, a glass substrate is placed horizontally on a conveyance roller, and the glass substrate is held in a horizontal posture by the conveyance roller. A device that is configured to detect a defect of a glass substrate by a light source and a camera such as a CCD sensor while being moved is known.

しかしながら、このような構成の場合、近年の大型且つ薄板のガラス基板を検査対象としたときに、搬送ローラー間でガラス基板が自重により下方に大きく撓んでしまうという事態が生じ得る。ガラス基板の検査には、カメラが利用されるのが通例とされているため、このようにガラス基板の撓みが生じれば、カメラの焦点位置がずれて欠陥を正確に検出できないという問題が生じ得る。特に、ＦＰＤ用のガラス基板の場合には、高い品質を確保するために、例えば数十μｍ程度の非常に小さい傷等も欠陥として検出することが必要となることから、ガラス基板の撓みによる検出精度の低下はより大きな問題となる。   However, in the case of such a configuration, when a recent large and thin glass substrate is an inspection target, a situation may occur in which the glass substrate is greatly bent downward by its own weight between the transport rollers. Since it is customary to use a camera for inspecting a glass substrate, if the glass substrate bends in this way, there is a problem that the focal point of the camera shifts and defects cannot be detected accurately. obtain. In particular, in the case of a glass substrate for FPD, in order to ensure high quality, it is necessary to detect, for example, very small scratches of about several tens of μm as defects. Loss of accuracy becomes a bigger problem.

そこで、下記の特許文献２には、鉛直姿勢のガラス基板の四辺全てをクランプ手段により把持するとともに、ガラス基板が上下方向及び左右方向に伸ばされるように各クランプ手段によりガラス基板を引っ張った状態で定位置に固定し、この固定されたガラス基板に対して照明装置とカメラを一体的に移動させてガラス基板の欠陥の有無を検査する装置が開示されている。
特開２００６−２６６９３３号公報 特開２００５−１７２７８２号公報 Therefore, in Patent Document 2 below, all the four sides of the glass substrate in a vertical posture are gripped by the clamping means, and the glass substrate is pulled by each clamping means so that the glass substrate is extended in the vertical direction and the horizontal direction. An apparatus is disclosed that is fixed at a fixed position and inspects whether there is a defect in the glass substrate by integrally moving the illumination device and the camera with respect to the fixed glass substrate.
JP 2006-266933 A JP 2005-172882 A

ところで、ガラス基板の端部である四辺は破損を来たし易い部位であるため、把持する辺の数は極力抑えることが肝要である。しかしながら、上記の特許文献２に開示の手法では、ガラス基板の四辺全てがクランプ手段によって把持されている。しかも、ガラス基板は、四辺全てを把持された状態で、上下方向のみならず、左右方向にも引っ張られているので、クランプ手段により把持されている箇所には過度な応力集中が生じやすく、ガラス基板が端部を起点として破損を来たすおそれがある。   By the way, since the four sides, which are the end portions of the glass substrate, are easily damaged, it is important to suppress the number of sides to be gripped as much as possible. However, in the technique disclosed in Patent Document 2 above, all four sides of the glass substrate are held by the clamping means. In addition, the glass substrate is pulled not only in the vertical direction but also in the horizontal direction in a state where all four sides are gripped. There is a possibility that the substrate may be damaged starting from the end portion.

また、上記の特許文献１に記載されているように、ガラス基板の検査においては、ガラス基板を移動させながら、欠陥の検査を行うことが要請される場合も多いのが実情である。しかしながら、上記の特許文献２に開示の手法では、ガラス基板は定位置に固定され、照明装置とカメラのみが移動するようになっているため、かかる要請に応じるものではない。しかも、仮に、かかる要請に応じるためにガラス基板の四辺全てを把持した状態のままガラス基板を幅方向に移動させようとした場合には、移動方向にもクランプ手段が位置するため、ガラス基板の移動を実現するための装置が複雑且つ大型化してしまうため、実用的でない。   In addition, as described in the above-mentioned Patent Document 1, in the inspection of a glass substrate, it is often the case that a defect inspection is required while moving the glass substrate. However, in the method disclosed in Patent Document 2, the glass substrate is fixed at a fixed position, and only the lighting device and the camera are moved. Moreover, if it is attempted to move the glass substrate in the width direction while holding all four sides of the glass substrate in order to meet such a request, the clamping means is also located in the moving direction. Since the apparatus for realizing the movement becomes complicated and large, it is not practical.

本発明は、上記実情に鑑み、ガラス基板を移動させながら欠陥の検査を行う要請にも簡易な装置構成で応じつつ、ガラス基板の辺に過度な応力集中を生じさせることなく、ガラス基板の撓みを矯正して欠陥の検出精度を向上させることを技術的課題とする。   In view of the above circumstances, the present invention responds to a request for inspecting a defect while moving a glass substrate with a simple apparatus configuration, and without causing excessive stress concentration on the side of the glass substrate, The technical problem is to improve the detection accuracy of defects by correcting the defects.

上記課題を解決するために創案された本発明に係る装置は、縦姿勢のガラス基板を欠陥検知手段に対して相対移動させることにより、前記ガラス基板に対して前記欠陥検知手段を走査して前記ガラス基板に含まれる欠陥の有無を検査するガラス基板検査装置において、前記ガラス基板の上辺を把持する上部把持手段と、前記ガラス基板の下辺を把持する下部把持手段とを備え、前記上部把持手段と前記下部把持手段による把持のみで前記ガラス基板を保持するとともに、前記上部把持手段と前記下部把持手段とを離反させて、前記ガラス基板に対して上下方向に張力を付与した状態で、前記ガラス基板が前記欠陥検知手段に向けて幅方向に移動するように構成されていることに特徴づけられる。   The apparatus according to the present invention, which was created to solve the above-mentioned problems, scans the defect detection means relative to the glass substrate by moving the glass substrate in a vertical posture relative to the defect detection means, and In the glass substrate inspection apparatus for inspecting the presence or absence of defects contained in the glass substrate, the glass substrate inspection apparatus includes upper gripping means for gripping the upper side of the glass substrate, and lower gripping means for gripping the lower side of the glass substrate, While holding the glass substrate only by the gripping by the lower gripping means, the upper gripping means and the lower gripping means are separated from each other, and the glass substrate is tensioned in the vertical direction. Is characterized in that it is configured to move in the width direction toward the defect detection means.

このような構成によれば、上部把持手段と下部把持手段によって、ガラス基板の四辺のうち、上辺と下辺のみが把持されることになる。そのため、この状態で上部把持手段と下部把持手段とを離反させてガラス基板に上下方向に張力を付与したとしても、ガラス基板の幅方向の両側辺に過度な応力集中が生じることがない。さらに、ガラス基板の移動方向である幅方向には把持手段が存在しないので、ガラス基板の移動を簡易な装置構成で実現することができる。   According to such a configuration, only the upper side and the lower side of the four sides of the glass substrate are gripped by the upper gripping means and the lower gripping means. Therefore, even if the upper gripping means and the lower gripping means are separated from each other in this state and tension is applied to the glass substrate in the vertical direction, excessive stress concentration does not occur on both sides in the width direction of the glass substrate. Furthermore, since there is no gripping means in the width direction, which is the moving direction of the glass substrate, the movement of the glass substrate can be realized with a simple apparatus configuration.

上記の構成において、前記ガラス基板と前記欠陥検知手段のうち、前記ガラス基板のみが移動するように構成されていることが好ましい。   Said structure WHEREIN: It is preferable that it is comprised so that only the said glass substrate may move among the said glass substrate and the said defect detection means.

このようにすれば、重量のあるカメラなどを具備している欠陥検知手段を移動させる必要がないため、欠陥検知手段を移動させる場合に比べて、メンテナンスの頻度が減少する。したがって、欠陥検知手段を長期間に亘って安定した状態で使用することが可能となり、経済的にも非常に有利となる。   In this way, since it is not necessary to move the defect detection means equipped with a heavy camera or the like, the frequency of maintenance is reduced compared to the case where the defect detection means is moved. Therefore, the defect detection means can be used in a stable state for a long period of time, which is very advantageous economically.

上記課題を解決するために創案された本発明に係る方法は、縦姿勢のガラス基板を欠陥検知手段に対して前記ガラス基板を幅方向に相対移動させることにより、前記ガラス基板に対して前記欠陥検知手段を走査して前記ガラス基板に含まれる欠陥の有無を検査するガラス基板検査方法において、前記ガラス基板の上辺と下辺のみを把持して上下方向に張力を付与した状態で、前記ガラス基板を前記欠陥検知手段に向けて幅方向に移動させることに特徴づけられる。   The method according to the present invention, which was created to solve the above-mentioned problems, is a method in which the glass substrate in a vertical posture is moved relative to the defect detection means in the width direction, thereby causing the defect to the glass substrate. In a glass substrate inspection method that scans a detection means and inspects for the presence or absence of defects contained in the glass substrate, the glass substrate is held in a state in which only the upper and lower sides of the glass substrate are gripped and tension is applied in the vertical direction. It is characterized by moving in the width direction toward the defect detection means.

このような方法によれば、既に段落［００１１］で述べた作用効果を同様に享受することができる。   According to such a method, it is possible to similarly enjoy the effects described in paragraph [0011].

上記の方法において、前記欠陥検知手段を定位置で固定して、前記ガラス基板のみを移動させることが好ましい。   In the above method, it is preferable that the defect detection means is fixed at a fixed position and only the glass substrate is moved.

このようにすれば、既に段落［００１３］で述べた作用効果を同様に享受することができる。   In this way, it is possible to similarly enjoy the effects described in paragraph [0013].

以上のように本発明によれば、ガラス基板を移動させながら欠陥の検査を行う要請にも的確に応じつつ、ガラス基板の辺に過度な応力集中を生じさせることなく、ガラス基板の撓みを矯正して欠陥の検出精度を向上させることができる。   As described above, according to the present invention, the deflection of the glass substrate is corrected without causing excessive stress concentration on the side of the glass substrate while accurately responding to a request for inspecting defects while moving the glass substrate. Thus, the defect detection accuracy can be improved.

以下、本発明の一実施形態を添付図面に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

図１は、本実施形態に係るガラス基板検査装置の全体構成を示す側面図である。同図に示すように、このガラス基板検査装置１は、ガラス基板Ｇを縦姿勢（図例では略鉛直姿勢）のまま移動させる移動手段２と、この移動手段２によって移動されるガラス基板Ｇの移動経路上に配置され、ガラス基板Ｇの欠陥を検知する欠陥検知手段３とを備える。なお、ガラス基板Ｇとしては、例えば、厚みが０．０５〜１．８ｍｍで、一辺の寸法が１ｍ以上の液晶ディスプレイ用のガラス基板が挙げられる。   FIG. 1 is a side view showing the overall configuration of the glass substrate inspection apparatus according to the present embodiment. As shown in the figure, the glass substrate inspection apparatus 1 includes a moving unit 2 that moves the glass substrate G in a vertical posture (substantially vertical posture in the figure), and a glass substrate G that is moved by the moving unit 2. Defect detection means 3 that is disposed on the movement path and detects a defect of the glass substrate G. In addition, as the glass substrate G, the glass substrate for liquid crystal displays whose thickness is 0.05-1.8 mm and whose dimension of one side is 1 m or more is mentioned, for example.

上記の移動手段２は、ガラス基板Ｇの上辺を把持する上部把持手段４と、ガラス基板Ｇの下辺を把持する下部把持手段５と、上部把持手段４をガラス基板Ｇの幅方向（図中の矢印Ａの方向）に案内する上部ガイドレール６と、下部把持手段５をガラス基板Ｇの幅方向（図中の矢印Ａの方向）に案内する下部ガイドレール７とを備える。   The moving means 2 includes an upper holding means 4 for holding the upper side of the glass substrate G, a lower holding means 5 for holding the lower side of the glass substrate G, and the upper holding means 4 in the width direction of the glass substrate G (in the drawing). An upper guide rail 6 that guides in the direction of the arrow A) and a lower guide rail 7 that guides the lower gripping means 5 in the width direction of the glass substrate G (the direction of arrow A in the figure).

上部ガイドレール６は、ガラス基板Ｇの上辺の上方位置に、下部ガイドレール７は、ガラス基板Ｇの下辺の下方位置にそれぞれ配置されており、両ガイドレール６，７は、ガラス基板Ｇの幅方向に平行に延在している。   The upper guide rail 6 is disposed at an upper position on the upper side of the glass substrate G, and the lower guide rail 7 is disposed at a lower position on the lower side of the glass substrate G. Both guide rails 6 and 7 have a width of the glass substrate G. Extends parallel to the direction.

上部把持手段４は、ガラス基板Ｇの上辺の中央部とその両側を把持する３つの把持部４ａと、この３つの把持部４ａが取り付けられたベース部４ｂとを備えており、このベース部４ｂが上部ガイドレール６にスライド自在に取り付けられている。なお、上部把持手段４の把持部４ａの数は、特に限定されるものではなく、ガラス基板Ｇの大きさや厚みに応じて適宜調整してもよいし、ガラス基板Ｇの上辺全体を一つの把持部４ａで把持するようにしてもよい。   The upper grip means 4 includes a center portion of the upper side of the glass substrate G, three grip portions 4a for gripping both sides thereof, and a base portion 4b to which the three grip portions 4a are attached. The base portion 4b Is slidably attached to the upper guide rail 6. Note that the number of the gripping portions 4a of the upper gripping means 4 is not particularly limited, and may be appropriately adjusted according to the size and thickness of the glass substrate G, or the entire upper side of the glass substrate G may be gripped by one. You may make it hold | grip with the part 4a.

下部把持手段５は、ガラス基板Ｇの下辺の中央部とその両側を把持する３つの把持部５ａと、この３つの把持部５ａが取り付けられ且つ上下方向（図中の矢印Ｂ方向）に伸縮自在なエアシリンダ５ｂと、このエアシリンダ５ｂが取り付けられたベース部５ｃとを備えており、このベース部５ｃが、上記の下部ガイドレール７に沿ってスライド自在に取り付けられている。なお、下部把持手段５の把持部５ａの数は、特に限定されるものではなく、ガラス基板Ｇの大きさや厚みに応じて適宜調整してもよいし、ガラス基板Ｇの下辺全体を一つの把持部５ａで把持するようにしてもよい。   The lower gripping means 5 is provided with three gripping portions 5a for gripping the central portion of the lower side of the glass substrate G and both sides thereof, and these three gripping portions 5a are attached and extendable in the vertical direction (the direction of arrow B in the figure). The air cylinder 5b is provided with a base portion 5c to which the air cylinder 5b is attached. The base portion 5c is slidably attached along the lower guide rail 7. Note that the number of the gripping portions 5a of the lower gripping means 5 is not particularly limited, and may be appropriately adjusted according to the size and thickness of the glass substrate G, or the entire lower side of the glass substrate G may be gripped by one. You may make it hold | grip with the part 5a.

上記の欠陥検知手段３は、上下方向に長いライン光を出射する光源８と、複数のカメラ９ａが上下方向に配列されたラインセンサー９とを有し、光源８からガラス基板Ｇに向けて照射された光を、ガラス基板Ｇの反対側でラインセンサー９により受光し、その受光した光量の変化に基づいて欠陥の有無を検出するようになっている。   The defect detection means 3 includes a light source 8 that emits line light that is long in the vertical direction, and a line sensor 9 in which a plurality of cameras 9 a are arranged in the vertical direction, and irradiates the glass substrate G from the light source 8. The received light is received by the line sensor 9 on the opposite side of the glass substrate G, and the presence or absence of a defect is detected based on the change in the received light quantity.

さらに、本実施形態では、欠陥検知手段３は、ガラス基板Ｇの移動経路上の定位置に固定されており、上部把持手段４と下部把持手段５によってガラス基板Ｇを欠陥検知手段３に向けて幅方向に移動させることにより、ガラス基板Ｇ全体に対して欠陥検知手段３のカメラ９ａを走査するようになっている。   Furthermore, in this embodiment, the defect detection means 3 is fixed at a fixed position on the movement path of the glass substrate G, and the glass substrate G is directed toward the defect detection means 3 by the upper grip means 4 and the lower grip means 5. By moving in the width direction, the camera 9a of the defect detection means 3 is scanned over the entire glass substrate G.

次に、以上のように構成されたガラス基板検査装置１の動作について説明する。   Next, the operation of the glass substrate inspection apparatus 1 configured as described above will be described.

まず、ガラス基板検査装置１の上流側から順次搬送されてくるガラス基板Ｇの上辺を、上部把持手段４の把持部４ａによって把持し、ガラス基板Ｇを吊り下げ支持する。次に、下部把持手段５がエアシリンダ５ｂによりガラス基板Ｇの下辺に向かって上昇し、下部把持手段５の把持部５ａでガラス基板Ｇの下辺を把持する。そして、この状態から再びエアシリンダ５ｂにより下部把持手段５が下降し、ガラス基板Ｇの下辺がエアシリンダ５ｂに取り付けられた把持部５ａによって下方に引っ張られる。すなわち、上部把持手段４の把持部４ａに対して、下部把持手段５の把持部５ａが下方に離間することになるので、ガラス基板Ｇには上下方向に張力が付与されることになる。したがって、この上下方向に付与した張力によって、ガラス基板Ｇの撓みを矯正することが可能となる。さらに、この際、ガラス基板Ｇの幅方向の両側辺は、外部から支持されることなくフリーな状態であることから、上下方向に付与した張力により両側辺に応力集中が生じるという事態も生じ難い。   First, the upper side of the glass substrate G sequentially conveyed from the upstream side of the glass substrate inspection apparatus 1 is gripped by the grip portion 4a of the upper grip means 4, and the glass substrate G is suspended and supported. Next, the lower gripping means 5 is raised toward the lower side of the glass substrate G by the air cylinder 5b, and the lower side of the glass substrate G is gripped by the gripping part 5a of the lower gripping means 5. Then, from this state, the lower gripping means 5 is lowered again by the air cylinder 5b, and the lower side of the glass substrate G is pulled downward by the gripping portion 5a attached to the air cylinder 5b. That is, since the grip portion 5a of the lower grip means 5 is separated downward with respect to the grip portion 4a of the upper grip means 4, tension is applied to the glass substrate G in the vertical direction. Therefore, the bending of the glass substrate G can be corrected by the tension applied in the vertical direction. Further, at this time, since both sides in the width direction of the glass substrate G are in a free state without being supported from the outside, it is difficult to cause a situation where stress concentration occurs on both sides due to the tension applied in the vertical direction. .

そして、このようにガラス基板Ｇの上下辺を把持して上下方向に張力を付与した段階で、上部把持手段４のベース部４ｂと、下部把持手段５のベース部５ｃが同期しながら、ガイドレール６，７に沿って下流側へ移動し、欠陥検知手段３の光源８とラインセンサー９との間にガラス基板Ｇが通される。   The base rail 4b of the upper gripping means 4 and the base portion 5c of the lower gripping means 5 are synchronized with each other while the upper and lower sides of the glass substrate G are gripped and tension is applied in the vertical direction. 6 and 7, the glass substrate G is passed between the light source 8 and the line sensor 9 of the defect detection means 3.

このとき、欠陥検知手段３の光源８とラインセンサー９との間に通されたガラス基板Ｇは、上部把持手段４と、下部把持手段５により上下方向に張力が付与された状態となっていることから、ガラス基板Ｇの撓みは矯正されている。したがって、ガラス基板Ｇの撓みによってラインセンサー９のカメラ９ａの焦点位置がずれて欠陥の検出精度が低下するという事態を確実に低減することができる。さらに、ガラス基板Ｇの移動方向である幅方向には把持手段が存在しないので、ガラス基板Ｇを簡易な装置構成で移動させることができる。   At this time, the glass substrate G passed between the light source 8 and the line sensor 9 of the defect detection means 3 is in a state in which tension is applied in the vertical direction by the upper gripping means 4 and the lower gripping means 5. Therefore, the bending of the glass substrate G is corrected. Therefore, it is possible to reliably reduce a situation in which the focus position of the camera 9a of the line sensor 9 is shifted due to the bending of the glass substrate G and the defect detection accuracy is lowered. Furthermore, since there is no gripping means in the width direction that is the moving direction of the glass substrate G, the glass substrate G can be moved with a simple apparatus configuration.

なお、ガラス基板Ｇの全体が欠陥検知手段３の光源８とラインセンサー９との間を通過した段階で、ガラス基板Ｇの上辺は、図示しない別の把持手段によって把持される。この状態で、上部把持手段４と下部把持手段５は、ガラス基板Ｇの上下辺からそれぞれ離れ、ガイドレール６，７に沿って上流側へと移動して元の位置に復帰する。一方、検査が終了したガラス基板Ｇは、欠陥が検出されかった場合には後続の加工工程へ移送され、欠陥が検出された場合には不良品として廃棄されるか、或いは欠陥のない正常な部分から新たなガラス基板Ｇが採取される。   When the entire glass substrate G passes between the light source 8 and the line sensor 9 of the defect detection means 3, the upper side of the glass substrate G is gripped by another gripping means (not shown). In this state, the upper gripping means 4 and the lower gripping means 5 are moved away from the upper and lower sides of the glass substrate G, moved upstream along the guide rails 6 and 7, and returned to their original positions. On the other hand, the glass substrate G that has been inspected is transferred to a subsequent processing step when a defect is not detected, and is discarded as a defective product when a defect is detected, or is normal without defects. A new glass substrate G is taken from the portion.

以上のような本実施形態に係るガラス基板検査装置１によれば、ガラス基板Ｇを移動させながら欠陥の検査を行う要請にも簡単な装置構成で対応することができ、しかも、ガラス基板Ｇの辺に過度な応力集中を生じさせることなく、ガラス基板Ｇの撓みを的確に矯正して欠陥の検出精度を向上させることができる。   According to the glass substrate inspection apparatus 1 according to the present embodiment as described above, it is possible to cope with a request for inspecting a defect while moving the glass substrate G with a simple apparatus configuration. Without causing excessive stress concentration on the sides, it is possible to accurately correct the deflection of the glass substrate G and improve the detection accuracy of defects.

なお、本発明は、上記の実施形態に限定されるものではなく、種々の形態で実施できる。例えば、上記の実施形態では、エアシリンダ５ｂによって引っ張ってガラス基板Ｇの張力を付与する場合を説明したが、下部把持手段５の把持部５ａの重量によりガラス基板Ｇに張力を付与するようにしてもよい。また、この場合、下部把持手段５の把持部５ａの重量が重すぎるときにはエアシリンダ５ｂにより把持部５ａを上方に持ち上げ、把持部５ａの重量が軽すぎるときにはエアシリンダ５ｂにより把持部５ａを下方に引き下げることにより、ガラス基板Ｇに作用する張力を調整することが好ましい。   In addition, this invention is not limited to said embodiment, It can implement with a various form. For example, in the above embodiment, the case where the tension of the glass substrate G is applied by being pulled by the air cylinder 5b has been described. However, the tension is applied to the glass substrate G by the weight of the grip portion 5a of the lower grip means 5. Also good. In this case, when the weight of the grip portion 5a of the lower grip means 5 is too heavy, the grip portion 5a is lifted upward by the air cylinder 5b, and when the weight of the grip portion 5a is too light, the grip portion 5a is lowered by the air cylinder 5b. It is preferable to adjust the tension acting on the glass substrate G by pulling it down.

本発明の一実施形態に係るガラス基板検査装置を示す斜視図である。It is a perspective view showing a glass substrate inspection device concerning one embodiment of the present invention.

符号の説明Explanation of symbols

１ ガラス基板検査装置
２ 移動手段
３ 欠陥検知手段
４ 上部把持手段
４ａ 把持部
４ｂ ベース部
５ 下部把持手段
５ａ 把持部
５ｂ エアシリンダ
５ｃ ベース部
６ 上部ガイドレール
７ 下部ガイドレール
８ 光源
９ ラインセンサー
９ａ カメラ DESCRIPTION OF SYMBOLS 1 Glass substrate inspection apparatus 2 Moving means 3 Defect detection means 4 Upper holding means 4a Holding part 4b Base part 5 Lower holding means 5a Holding part 5b Air cylinder 5c Base part 6 Upper guide rail 7 Lower guide rail 8 Light source 9 Line sensor 9a Camera

Claims (4)

縦姿勢のガラス基板を欠陥検知手段に対して前記ガラス基板の幅方向に相対移動させることにより、前記ガラス基板に対して前記欠陥検知手段を走査して前記ガラス基板に含まれる欠陥の有無を検査するガラス基板検査装置において、
前記ガラス基板の上辺を把持する上部把持手段と、前記ガラス基板の下辺を把持する下部把持手段とを備え、
前記上部把持手段と前記下部把持手段による把持のみで前記ガラス基板を保持するとともに、前記上部把持手段と前記下部把持手段とを離反させて、前記ガラス基板に対して上下方向に張力を付与した状態で、前記ガラス基板が前記欠陥検知手段に向けて幅方向に移動するように構成されていることを特徴とするガラス基板検査装置。 The glass substrate in a vertical posture is moved relative to the defect detection means in the width direction of the glass substrate, thereby scanning the glass substrate for the defect detection means to inspect for defects contained in the glass substrate. In the glass substrate inspection device to
Upper gripping means for gripping the upper side of the glass substrate, and lower gripping means for gripping the lower side of the glass substrate,
A state in which the glass substrate is held only by gripping by the upper gripping means and the lower gripping means, and the upper gripping means and the lower gripping means are separated from each other, and tension is applied to the glass substrate in the vertical direction. The glass substrate inspection apparatus is configured such that the glass substrate moves in the width direction toward the defect detection means. 前記ガラス基板と前記欠陥検知手段のうち、前記ガラス基板のみが移動するように構成されている請求項１に記載のガラス基板検査装置。   The glass substrate inspection apparatus according to claim 1, wherein only the glass substrate is moved among the glass substrate and the defect detection means. 縦姿勢のガラス基板を欠陥検知手段に対して前記ガラス基板の幅方向に相対移動させることにより、前記ガラス基板に対して前記欠陥検知手段を走査して前記ガラス基板に含まれる欠陥の有無を検査するガラス基板検査方法において、
前記ガラス基板の上辺と下辺のみを把持して上下方向に張力を付与した状態で、前記ガラス基板を前記欠陥検知手段に向けて幅方向に移動させることを特徴とするガラス基板検査方法。 The glass substrate in a vertical posture is moved relative to the defect detection means in the width direction of the glass substrate, thereby scanning the glass substrate for the defect detection means to inspect for defects contained in the glass substrate. In the glass substrate inspection method to
A glass substrate inspection method, wherein the glass substrate is moved in the width direction toward the defect detection means in a state where only the upper and lower sides of the glass substrate are gripped and tension is applied in the vertical direction. 前記ガラス基板と前記欠陥検知手段のうち、前記ガラス基板のみが移動する請求項３に記載のガラス基板検査方法。   The glass substrate inspection method according to claim 3, wherein only the glass substrate moves among the glass substrate and the defect detection means.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101169765B1 (en) 2011-10-24 2012-07-30 (주)쎄미시스코 Glass inspecting device
WO2013132882A1 (en) * 2012-03-08 2013-09-12 日本電気硝子株式会社 Glass substrate conveyance device and conveyance method
JP2014211415A (en) * 2013-04-22 2014-11-13 日本電気硝子株式会社 Plate glass conveyance apparatus, plate glass conveyance method, and plate glass inspection apparatus
WO2015019868A1 (en) * 2013-08-08 2015-02-12 日本電気硝子株式会社 Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method
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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05172753A (en) * 1991-12-24 1993-07-09 Nippon Electric Glass Co Ltd Inspecting apparatus for light transmission characteristic of transparent plate
JPH05301710A (en) * 1992-04-24 1993-11-16 Asahi Glass Co Ltd Method for carrying substrate in substrate-treating system and device therefor
JP2000046747A (en) * 1998-07-31 2000-02-18 Sharp Corp Method and apparatus for inspecting appearance of liquid crystal substrate
JP2001141670A (en) * 1999-11-17 2001-05-25 Masayoshi Tsuchiya Light scattering type glass substrate inspecting apparatus
JP2002250701A (en) * 2001-02-26 2002-09-06 Horiba Ltd Flaw inspection device for plane display panel
JP2003302346A (en) * 2002-04-12 2003-10-24 Hitachi Electronics Eng Co Ltd Surface inspection device for sheet work
JP2004251723A (en) * 2003-02-19 2004-09-09 Tsukuba Seiko Co Ltd Conveyance inspection device and conveyance device
JP2005156200A (en) * 2003-11-21 2005-06-16 Nippon Electric Glass Co Ltd Method and device for inspecting plate glass
JP2005172782A (en) * 2003-12-09 2005-06-30 Samsung Corning Precision Glass Co Ltd Method and device for inspecting glass substrate
JP2006522934A (en) * 2003-03-05 2006-10-05 コーニング インコーポレイテッド Inspection of transparent substrates for defects
JP2007084333A (en) * 2005-09-26 2007-04-05 Horiba Ltd Self-sustaining assisting mechanism of plate material and defect inspection device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4063639B2 (en) * 2002-10-25 2008-03-19 株式会社ニデック Surface inspection device
JP4426276B2 (en) * 2003-10-06 2010-03-03 住友重機械工業株式会社 Conveying device, coating system, and inspection system

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05172753A (en) * 1991-12-24 1993-07-09 Nippon Electric Glass Co Ltd Inspecting apparatus for light transmission characteristic of transparent plate
JPH05301710A (en) * 1992-04-24 1993-11-16 Asahi Glass Co Ltd Method for carrying substrate in substrate-treating system and device therefor
JP2000046747A (en) * 1998-07-31 2000-02-18 Sharp Corp Method and apparatus for inspecting appearance of liquid crystal substrate
JP2001141670A (en) * 1999-11-17 2001-05-25 Masayoshi Tsuchiya Light scattering type glass substrate inspecting apparatus
JP2002250701A (en) * 2001-02-26 2002-09-06 Horiba Ltd Flaw inspection device for plane display panel
JP2003302346A (en) * 2002-04-12 2003-10-24 Hitachi Electronics Eng Co Ltd Surface inspection device for sheet work
JP2004251723A (en) * 2003-02-19 2004-09-09 Tsukuba Seiko Co Ltd Conveyance inspection device and conveyance device
JP2006522934A (en) * 2003-03-05 2006-10-05 コーニング インコーポレイテッド Inspection of transparent substrates for defects
JP2005156200A (en) * 2003-11-21 2005-06-16 Nippon Electric Glass Co Ltd Method and device for inspecting plate glass
JP2005172782A (en) * 2003-12-09 2005-06-30 Samsung Corning Precision Glass Co Ltd Method and device for inspecting glass substrate
JP2007084333A (en) * 2005-09-26 2007-04-05 Horiba Ltd Self-sustaining assisting mechanism of plate material and defect inspection device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101169765B1 (en) 2011-10-24 2012-07-30 (주)쎄미시스코 Glass inspecting device
WO2013062150A1 (en) * 2011-10-24 2013-05-02 주식회사 쎄미시스코 Substrate inspecting apparatus
WO2013132882A1 (en) * 2012-03-08 2013-09-12 日本電気硝子株式会社 Glass substrate conveyance device and conveyance method
JP2013187389A (en) * 2012-03-08 2013-09-19 Nippon Electric Glass Co Ltd Conveyance device and conveyance method of glass substrate
JP2014211415A (en) * 2013-04-22 2014-11-13 日本電気硝子株式会社 Plate glass conveyance apparatus, plate glass conveyance method, and plate glass inspection apparatus
WO2015019868A1 (en) * 2013-08-08 2015-02-12 日本電気硝子株式会社 Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method
KR20160040454A (en) 2013-08-08 2016-04-14 니폰 덴키 가라스 가부시키가이샤 Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method
US10101281B2 (en) 2013-08-08 2018-10-16 Nippon Electric Glass Co., Ltd. Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method
KR20160002341A (en) 2014-06-30 2016-01-07 아반스트레이트 가부시키가이샤 Method for manufacturing glass plate and apparatus for manufacturing glass plate
CN106501076A (en) * 2016-10-28 2017-03-15 昆山国显光电有限公司 A kind of detection fixture of flexible screen crooking ability and method
JP2021144004A (en) * 2020-03-13 2021-09-24 トヨタ車体株式会社 Jig for workpiece measurement and method for measuring thickness of workpiece plate using the same
JP7310664B2 (en) 2020-03-13 2023-07-19 トヨタ車体株式会社 Workpiece measurement jig and work plate thickness measurement method using the jig

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