CN101889199A - Glass substrate inspecting apparatus and glass substrate inspecting method - Google Patents
Glass substrate inspecting apparatus and glass substrate inspecting method Download PDFInfo
- Publication number
- CN101889199A CN101889199A CN2008801192355A CN200880119235A CN101889199A CN 101889199 A CN101889199 A CN 101889199A CN 2008801192355 A CN2008801192355 A CN 2008801192355A CN 200880119235 A CN200880119235 A CN 200880119235A CN 101889199 A CN101889199 A CN 101889199A
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- Prior art keywords
- glass substrate
- described glass
- detection mechanism
- defects detection
- handle sturcture
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
Abstract
Defect inspection accuracy is improved by correcting warping of a glass substrate without generating excessive stress concentration on a side of the glass substrate, while meeting a demand of inspecting defects with a simple apparatus constitution while the glass substrate is being shifted. A glass substrate inspecting apparatus (1) inspects existence of defects included in a glass substrate (G) by scanning the glass substrate (G) by using a defect detecting means (3) by relatively moving the glass substrate (G) in the vertical posture to the defect detecting means (3) in the width direction of the glass substrate (G). The glass substrate inspecting apparatus is provided with an upper holding means (4) which holds the upper side of the glass substrate (G), and a lower holding means (5) which holds the lower side of the glass substrate (G). The glass substrate (G) is held only by the upper holding means (4) and the lower holding means (5), and the upper holding means (4) and the lower holding means (5) are separated one from the other. The glass substrate (G) is shifted in the width direction toward the defect detecting means (3), in a state where tension is applied to the glass substrate (G) in the vertical direction.
Description
Technical field
The present invention relates to check the glass substrate inspecting apparatus and the glass substrate inspecting method that whether contain defectiveness in the glass substrate.
Background technology
As everyone knows, will be in melting furnace fusion melten glass be configured as banded glass tape, after this glass tape is fully cooled off, cut into given size, make thus with the various glass plates headed by the glass substrate of flat-panel monitor (FPD) of such as LCD, plasma display, electroluminescent display, field-emitter display.At this, in the shaping of glass tape, except that float glass process, utilize glass tube down-drawings such as overflow downdraw (fusion method) or slot draw method etc. usually.
Then, will transmit to the inspection operation through the glass substrate (little glass substrate comprises the mother glass substrate that has carried out chamfering) that this kind process is made usually, check whether there are defectives such as microlesion or foreign matter.
As checking the device that uses in the operation at this kind, shown in disclosing in for example following patent documentation 1, horizontal mounting glass substrate on transfer roller, by transfer roller glass substrate is moved with horizontal attitude, simultaneously, by the camera of light source and ccd sensor etc., the defective of glass substrate is detected.
Yet, under the situation of this kind structure, serve as when checking object with the glass substrate of in recent years large-scale and thin plate, between transfer roller, can produce glass substrate downwards because deadweight and crooked bigger situation.When the inspection of glass substrate, utilize camera usually, if glass substrate so produces bending, the focal position that then can produce camera is departed from and can't correctly be detected the problem of defective.Especially, under the situation of the glass substrate that FPD uses,,, for example need detect damage very little about tens μ m etc., so the decline of the crooked caused accuracy of detection of glass substrate just becomes bigger problem as defective in order to ensure high-quality.
Therefore, in following patent documentation 2, disclose as lower device: whole four limits of controlling the glass substrate of vertical attitude by clamp system, and, glass substrate with the state that stretches glass substrate is fixed on allocation by each clamp system so that reaching the mode of left and right directions extension along the vertical direction, with respect to this fixing glass substrate, lighting device and camera one are moved, check whether glass substrate exists defective.
Patent documentation 1: TOHKEMY 2006-266933 communique
Patent documentation 2: TOHKEMY 2005-172782 communique
Yet the end of glass substrate i.e. four limits is easy impaired positions, and the number on the limit that the inhibition of therefore trying one's best is controlled is very important.Yet, in above-mentioned patent documentation 2 disclosed methods, control whole four limits of glass substrate by clamp system.And, glass substrate is being controlled under the state on whole four limits, above-below direction not only, and also left and right directions also is stretched, therefore on the position of controlling by clamp system, be easy to generate excessive stress and concentrate, thereby glass substrate may be that starting point causes breakage with the end.
In addition, shown in record in the above-mentioned patent documentation 1, in the inspection of glass substrate, many existence are moved glass substrate and are carried out the requirement of defect inspection simultaneously.Yet in above-mentioned patent documentation 2 disclosed methods, glass substrate is fixed on allocation, only makes lighting device and mobile camera moving, therefore can't satisfy described requirement.And, when supposing in order to meet the demands under the state on whole four limits of controlling glass substrate, the glass substrate broad ways to be moved, because clamp system also is positioned on the moving direction, therefore be used to realize the device complexity that glass substrate moves and maximize, impracticable.
Summary of the invention
The present invention In view of the foregoing, its technical problem is, satisfies the requirement that glass substrate is moved and carry out defect inspection with simple apparatus structure, simultaneously, do not make to produce excessive stress on the limit of glass substrate and concentrate, correct the bending of glass substrate, improve the accuracy of detection of defective.
What propose in order to solve above-mentioned problem the present invention relates to a kind of glass substrate inspecting apparatus, relatively move with respect to defects detection mechanism by the glass substrate that makes vertical attitude, and described defects detection mechanism is scanned to described glass substrate, check whether described glass substrate contains defectiveness, described glass substrate inspecting apparatus is characterised in that, possess the top handle sturcture of the top of controlling described glass substrate and the bottom handle sturcture of controlling the bottom of described glass substrate, only keep described glass substrate by controlling of being carried out of described top handle sturcture and described bottom handle sturcture, and described top handle sturcture and described bottom handle sturcture are deviated from, described glass substrate is applied tension force along the vertical direction, under this state, described glass substrate is moved towards described defects detection mechanism broad ways.
According to this kind structure, in four limits of glass substrate, only control bottom and upper segment by top handle sturcture and bottom handle sturcture.Therefore, even top handle sturcture and bottom handle sturcture are deviated from and along the vertical direction glass substrate is applied tension force, also can on the dual-side of the Width of glass substrate, not produce excessive stress and concentrate.Moreover, owing to the moving direction at glass substrate is not have handle sturcture on the Width, therefore can realize moving of glass substrate with simple apparatus structure.
In above-mentioned structure, preferably constitute, in described glass substrate and the described defects detection mechanism, described glass substrate is moved.
So, the defects detection mechanism that possesses the camera that has weight etc. is moved, therefore compare with the situation that defects detection mechanism is moved, the frequency of maintenance reduces.Therefore, can use defects detection mechanism with stable status for a long time, highly beneficial at economic aspect.
What propose in order to solve above-mentioned problem the present invention relates to a kind of glass substrate inspecting method, relatively move along the Width of described glass substrate with respect to defects detection mechanism by the glass substrate that makes vertical attitude, and described defects detection mechanism is scanned to described glass substrate, check whether described glass substrate contains defectiveness, described glass substrate inspecting method is characterised in that, apply along the vertical direction under the state of tension force at the bottom and upper segment of only controlling described glass substrate, described glass substrate is moved towards described defects detection mechanism broad ways.
According to this kind method, can similarly have the described action effect of this page or leaf first paragraph.
In above-mentioned method, preferred, described defects detection mechanism is fixed on allocation, described glass substrate is moved.
So, can similarly have the described action effect of this page or leaf the 3rd paragraph.
The invention effect
So,, can satisfy the requirement that glass substrate is moved and carry out defect inspection reliably, simultaneously, not make to produce excessive stress on the limit of glass substrate and concentrate, correct the bending of glass substrate, improve the accuracy of detection of defective according to the present invention.
Description of drawings
Fig. 1 is the stereographic map that the glass substrate inspecting apparatus of one embodiment of the present invention is shown.
Symbol description:
1 glass substrate inspecting apparatus
2 travel mechanisms
3 defects detection mechanisms
4 top handle sturctures
The 4a handle part
The 4b base portion
5 bottom handle sturctures
The 5a handle part
The 5b cylinder
The 5c base portion
6 upper ralls
7 lower guide
8 light sources
9 line sensors
The 9a camera
Embodiment
Below, with reference to accompanying drawing, one embodiment of the present invention is described.
Fig. 1 is the integrally-built side view that the glass substrate inspecting apparatus of present embodiment is shown.As shown in the drawing, this glass substrate inspecting apparatus 1 possesses: the travel mechanism 2 that glass substrate G is moved with the state of vertical attitude (in the legend roughly vertical attitude); Be configured on the mobile route of the glass substrate G that moves by this travel mechanism 2, detect the defects detection mechanism 3 of the defective of glass substrate G.In addition, as glass substrate G, thickness is 0.05～1.8mm Yi Bian for example enumerate, be of a size of the glass substrate that the above LCD of 1m is used.
Above-mentioned travel mechanism 2 possesses: the top handle sturcture 4 of controlling the top of glass substrate G; Control the bottom handle sturcture 5 of the bottom of glass substrate G; With the upper rall 6 of top handle sturcture 4 along Width (the arrow A direction among the figure) guiding of glass substrate G; With the lower guide 7 of bottom handle sturcture 5 along Width (the arrow A direction among the figure) guiding of glass substrate G.
Respectively, upper rall 6 is configured in the top position of the top of glass substrate G, and lower guide 7 is configured in the lower position of the bottom of glass substrate G, and two guide rails, 6,7 Widths along glass substrate G extend in parallel.
Above-mentioned defects detection mechanism 3 has the line sensor 9 that penetrates the light source 8 of long linear light along the vertical direction and be arranged with a plurality of camera 9a along the vertical direction, opposition side at glass substrate G is accepted from the light of light source 8 towards glass substrate G irradiation by line sensor 9, based on the variation of the light quantity of this acceptance, detecting has zero defect.
In addition, in the present embodiment, defects detection mechanism 3 is fixed on the allocation on the mobile route of glass substrate G, by top handle sturcture 4 and bottom handle sturcture 5 glass substrate G is moved towards defects detection mechanism 3 broad ways, thus, the camera 9a of defects detection mechanism 3 is scanned to glass substrate G integral body.
Next, the action of the glass substrate inspecting apparatus 1 that constitutes as mentioned above is described.
At first, the handle part 4a by top handle sturcture 4 controls the top of the glass substrate G that sends successively from the upstream side of glass substrate inspecting apparatus 1, suspention supporting glass substrate G.Next, bottom handle sturcture 5 is risen towards the bottom of glass substrate G, utilize the handle part 5a of bottom handle sturcture 5 to control the bottom of glass substrate G by cylinder 5b.Then,, by cylinder 5b bottom handle sturcture 5 is descended once more, the bottom of glass substrate G is stretched downwards by the handle part 5a that is installed on the cylinder 5b from this state.That is, the handle part 5a of bottom handle sturcture 5 deviates from downwards with respect to the handle part 4a of top handle sturcture 4, therefore glass substrate G is applied tension force along the vertical direction.Therefore, under the effect of this tension force that applies along the vertical direction, can correct the bending of glass substrate G.And at this moment, the dual-side of the Width of glass substrate G is not supported from the outside and becomes free state, therefore is difficult to produce owing to the tension force that applies along the vertical direction producing the situation that stress is concentrated at dual-side.
And, so, control glass substrate G on following and apply stage of tension force along the vertical direction, synchronously and simultaneously along guide rail 6,7 side shifting downstream, glass substrate G is by between the light source 8 and line sensor 9 of defects detection mechanism 3 for the base portion 4b of top handle sturcture 4 and the base portion 5c of bottom handle sturcture 5.
At this moment, light source 8 and the glass substrate G between the line sensor 9 by defects detection mechanism 3 become the state that is applied tension force by top handle sturcture 4 and bottom handle sturcture 5 along the vertical direction, thereby the bending of glass substrate G is corrected.Therefore, can reduce reliably because the focal position of the camera 9a of the bending of glass substrate G and line sensor 9 is departed from and the accuracy of detection of defective reduces this situation.In addition, owing to the moving direction at glass substrate G is not have handle sturcture on the Width, therefore can glass substrate G be moved with simple apparatus structure.
In addition, by the light source 8 of defects detection mechanism 3 and the stage between the line sensor 9, the top of glass substrate G is controlled by the handle sturcture of not shown other in the integral body of glass substrate G.Under this state, it is following that top handle sturcture 4 and bottom handle sturcture 5 leave going up of glass substrate G respectively, along guide rail 6,7 side shifting and reset to original position upstream.On the other hand, when not detecting defective, the glass substrate G that checks being through with transmits to follow-up manufacturing procedure, when detecting defective, it is adopted new glass substrate G as defective products in the discarded or never defective normal part.
Glass substrate inspecting apparatus 1 according to above present embodiment, even glass substrate G is moved and is carrying out simultaneously under the requirement of defect inspection, also can carry out correspondence with simple apparatus structure, and, not producing excessive stress on the limit of glass substrate G concentrates, can correct the bending of glass substrate G reliably, improve the accuracy of detection of defective.
In addition, the present invention is not limited to above-mentioned embodiment, and can implement in every way.For example, in the above-described embodiment, illustrated by cylinder 5b stretching and to glass substrate G to apply the situation of tension force, but also can utilize the weight of the handle part 5a of bottom handle sturcture 5 that glass substrate G is applied tension force.And, in this case, preferred, when the preponderance of the handle part 5a of bottom handle sturcture 5, by cylinder 5b handle part 5a is lifted upward, when the weight of handle part 5a kicks the beam, by cylinder 5b handle part 5a is stretched downwards, come the tension force of corrective action on glass substrate G thus.
Claims (4)
1. glass substrate inspecting apparatus, relatively move along the Width of described glass substrate with respect to defects detection mechanism by the glass substrate that makes vertical attitude, and described defects detection mechanism is scanned to described glass substrate, check whether described glass substrate contains defectiveness, described glass substrate inspecting apparatus is characterised in that
Possess the top handle sturcture of the top of controlling described glass substrate and the bottom handle sturcture of controlling the bottom of described glass substrate,
Only keep described glass substrate by controlling of being carried out of described top handle sturcture and described bottom handle sturcture, and described top handle sturcture and described bottom handle sturcture are deviated from, described glass substrate is applied tension force along the vertical direction, under this state, described glass substrate is moved towards described defects detection mechanism broad ways.
2. glass substrate inspecting apparatus according to claim 1 is characterized in that,
In described glass substrate and the described defects detection mechanism, described glass substrate is moved.
3. glass substrate inspecting method, relatively move along the Width of described glass substrate with respect to defects detection mechanism by the glass substrate that makes vertical attitude, and described defects detection mechanism is scanned to described glass substrate, check whether described glass substrate contains defectiveness, described glass substrate inspecting method is characterised in that
Apply along the vertical direction under the state of tension force at the bottom and upper segment of only controlling described glass substrate, described glass substrate is moved towards described defects detection mechanism broad ways.
4. glass substrate inspecting method according to claim 3 is characterized in that,
In described glass substrate and the described defects detection mechanism, described glass substrate is moved.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-084794 | 2008-03-27 | ||
| JP2008084794A JP5403389B2 (en) | 2008-03-27 | 2008-03-27 | Glass substrate inspection apparatus and glass substrate inspection method |
| PCT/JP2008/071454 WO2009118952A1 (en) | 2008-03-27 | 2008-11-26 | Glass substrate inspecting apparatus and glass substrate inspecting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101889199A true CN101889199A (en) | 2010-11-17 |
| CN101889199B CN101889199B (en) | 2014-04-16 |
Family
ID=41113174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880119235.5A Active CN101889199B (en) | 2008-03-27 | 2008-11-26 | Glass substrate inspecting apparatus and glass substrate inspecting method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5403389B2 (en) |
| KR (1) | KR101471899B1 (en) |
| CN (1) | CN101889199B (en) |
| TW (1) | TWI447381B (en) |
| WO (1) | WO2009118952A1 (en) |
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| CN103697830A (en) * | 2014-01-07 | 2014-04-02 | 苏州精创光学仪器有限公司 | Integral system for measuring warpage and surface stress of protection glass of touch screen |
| CN103777383A (en) * | 2013-12-31 | 2014-05-07 | 深圳市华星光电技术有限公司 | Liquid crystal substrate directional inspection system |
| CN103988291A (en) * | 2012-03-08 | 2014-08-13 | 日本电气硝子株式会社 | Glass substrate conveyance device and conveyance method |
| CN104310032A (en) * | 2014-11-03 | 2015-01-28 | 苏州精创光学仪器有限公司 | Conveying device of glass measuring system |
| CN105339289A (en) * | 2013-08-08 | 2016-02-17 | 日本电气硝子株式会社 | Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method |
| CN106698022A (en) * | 2017-01-18 | 2017-05-24 | 武汉华星光电技术有限公司 | Substrate conveying device and method |
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| CN108519692A (en) * | 2018-04-11 | 2018-09-11 | 蚌埠高华电子股份有限公司 | A kind of LCD glass substrate detection devices penetrated based on X-ray |
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- 2008-11-26 WO PCT/JP2008/071454 patent/WO2009118952A1/en active Application Filing
- 2008-11-26 KR KR1020107011729A patent/KR101471899B1/en active IP Right Grant
- 2008-12-29 TW TW097151220A patent/TWI447381B/en not_active IP Right Cessation
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| CN103988291A (en) * | 2012-03-08 | 2014-08-13 | 日本电气硝子株式会社 | Glass substrate conveyance device and conveyance method |
| CN105339289A (en) * | 2013-08-08 | 2016-02-17 | 日本电气硝子株式会社 | Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method |
| US10101281B2 (en) | 2013-08-08 | 2018-10-16 | Nippon Electric Glass Co., Ltd. | Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveyance method |
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| CN103777383B (en) * | 2013-12-31 | 2016-06-08 | 深圳市华星光电技术有限公司 | Crystal liquid substrate orientation check system |
| WO2015100802A1 (en) * | 2013-12-31 | 2015-07-09 | 深圳市华星光电技术有限公司 | Alignment inspection system for liquid crystal substrate |
| CN103777383A (en) * | 2013-12-31 | 2014-05-07 | 深圳市华星光电技术有限公司 | Liquid crystal substrate directional inspection system |
| CN103697830A (en) * | 2014-01-07 | 2014-04-02 | 苏州精创光学仪器有限公司 | Integral system for measuring warpage and surface stress of protection glass of touch screen |
| CN104310032A (en) * | 2014-11-03 | 2015-01-28 | 苏州精创光学仪器有限公司 | Conveying device of glass measuring system |
| CN106698022A (en) * | 2017-01-18 | 2017-05-24 | 武汉华星光电技术有限公司 | Substrate conveying device and method |
| CN107064157A (en) * | 2017-04-28 | 2017-08-18 | 平湖星天阳服饰科技有限公司 | A kind of novel seamless apparel quality detects workbench |
| CN108508025A (en) * | 2018-04-04 | 2018-09-07 | 马鞍山启元自动化技术有限责任公司 | A kind of glass sample detection device and its detection method |
| CN108519692A (en) * | 2018-04-11 | 2018-09-11 | 蚌埠高华电子股份有限公司 | A kind of LCD glass substrate detection devices penetrated based on X-ray |
| CN109991134A (en) * | 2019-03-29 | 2019-07-09 | 苏州精濑光电有限公司 | A kind of dust fall detection device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110000542A (en) | 2011-01-03 |
| TW200940978A (en) | 2009-10-01 |
| TWI447381B (en) | 2014-08-01 |
| JP5403389B2 (en) | 2014-01-29 |
| JP2009236771A (en) | 2009-10-15 |
| KR101471899B1 (en) | 2014-12-11 |
| CN101889199B (en) | 2014-04-16 |
| WO2009118952A1 (en) | 2009-10-01 |
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