CN109991134B - Dust fall detection equipment - Google Patents
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- CN109991134B CN109991134B CN201910252357.1A CN201910252357A CN109991134B CN 109991134 B CN109991134 B CN 109991134B CN 201910252357 A CN201910252357 A CN 201910252357A CN 109991134 B CN109991134 B CN 109991134B
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- 239000000428 dust Substances 0.000 title claims abstract description 215
- 238000001514 detection method Methods 0.000 title claims abstract description 139
- 239000000758 substrate Substances 0.000 claims abstract description 120
- 239000002245 particle Substances 0.000 claims description 20
- 238000004458 analytical method Methods 0.000 claims description 12
- 238000004364 calculation method Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 230000002194 synthesizing effect Effects 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000010705 motor oil Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/04—Investigating sedimentation of particle suspensions
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Abstract
The embodiment of the invention discloses a dust falling detection device, which comprises: the detection module is used for placing and detecting the transparent substrate to be detected; the detection module comprises a shell, a light source, an image acquisition unit and a control unit, wherein the light source, the image acquisition unit and the control unit are arranged in the shell; the light source is used for projecting light rays onto the transparent substrate to be detected, the image acquisition unit is used for scanning the transparent substrate to be detected and acquiring pictures, and the control unit is used for controlling the light source to emit light and controlling the image acquisition unit to acquire images of the transparent substrate to be detected in a light-emitting stage so as to perform dust falling detection on the transparent substrate to be detected. The embodiment of the invention has simple detection process, realizes the clean detection of the environment where the dust falling detection equipment is positioned by adopting a simple image acquisition technology, and also realizes the clean detection of the transparent substrate to be detected.
Description
Technical Field
The embodiment of the invention relates to a detection technology, in particular to falling dust detection equipment for detecting falling dust.
Background
Clean rooms, also known as Clean rooms or Clean rooms. It is the basis of pollution control, and can control the concentration of suspended particles in indoor air to make indoor reach proper level of particle cleanliness. The clean room is used for removing pollutants such as particles, harmful air and bacteria in the air within a certain space range, and is often applied to the manufacturing of semiconductor devices or the medical industry.
Currently, the detection technology of the clean room is to suck an air sample into the sample chamber by an internal vacuum source, the air sample passes through the laser beam, when the particles in the air sample pass through the laser beam, the light beam and the particles react to generate scattering and reflection, and the light sensor receives the scattering and reflection light and calculates to obtain the dust amount in the air sample. Obviously, the detection technique is complex.
Disclosure of Invention
The embodiment of the invention provides falling dust detection equipment, which aims to solve the problem that the existing dust-free room detection technology is complex.
The embodiment of the invention provides a dust falling detection device, which comprises: the detection module is used for placing and detecting the transparent substrate to be detected;
the detection module comprises a shell, and a light source, an image acquisition unit and a control unit which are arranged in the shell, wherein the control unit is electrically connected with the light source and the image acquisition unit respectively;
the control unit is used for controlling the light source to emit light and controlling the image acquisition unit to acquire the image of the transparent substrate to be detected in a light-emitting stage so as to detect dust falling on the transparent substrate to be detected.
Further, the light source is an annular light source, and an axis of the image acquisition unit passes through an inner ring of the annular light source.
Further, the light source comprises at least two light emitting devices which are oppositely arranged, and the axis of the image acquisition unit passes through the space between the at least two light emitting devices.
Further, the light source comprises at least two rows of light emitting devices which are oppositely arranged, and the axis of the image acquisition unit penetrates through the space between the at least two rows of light emitting devices.
Further, the light source and the image acquisition unit are arranged to move synchronously.
Further, the casing of the detection module is a vacuum sealing casing.
Further, the dust fall detection includes at least one of detection of a dust fall amount, a dust fall kind, and a dust fall size.
Further, the dust fall has a diameter of greater than or equal to 300 microns.
Further, the control unit includes a dust fall amount calculation operator unit, and the dust fall amount calculation operator unit is configured to calculate a first dust fall amount N1 on the transparent substrate to be detected at a first time point T1 and a second dust fall amount N2 on the transparent substrate to be detected at a second time point T2, and obtain the dust fall amount on the transparent substrate to be detected in a time period from the first time point T1 to the second time point T2 according to a difference between the second dust fall amount N2 and the first dust fall amount N1.
Further, the control unit comprises a dust fall analysis subunit, and the dust fall analysis subunit is used for calculating the dust fall size and/or analyzing the dust fall type according to the dust fall image acquired by the image acquisition unit.
In the embodiment of the invention, the transparent substrate to be detected is positioned on the detection module, the control unit controls the light source to emit light and controls the image acquisition unit to acquire the image of the transparent substrate to be detected in the light emitting stage so as to detect the dust falling of the transparent substrate. In the embodiment of the invention, the detection process is simple, the dust falling detection equipment is positioned in the environment to be detected, and by means of the characteristic that the transparent substrate absorbs dust falling, the condition of suspended dust falling above a set size in the air can be detected by acquiring the image of the transparent substrate and performing simple image processing, so that dust falling detection analysis and cleanness degree detection of the environment to be detected are realized; the transparent substrate is used for producing the display panel, and the detection equipment can detect the production environment of the display panel, the cleanness degree of the transparent substrate or the adsorption condition. The embodiment of the invention realizes the detection of large dust falling and also realizes the detection and analysis of dust falling information and foreign matter sources.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic view of a dust fall detection apparatus according to an embodiment of the present invention;
FIG. 2 is an image of a transparent substrate taken by the dust fall detection apparatus of FIG. 1;
FIG. 3 is a schematic view of a detection module of the dust fall detection apparatus of FIG. 1;
FIG. 4 is a schematic view of a detection module of the dust fall detection apparatus of FIG. 1;
FIG. 5 is a schematic view of a detection module of the dust fall detection apparatus of FIG. 1;
FIG. 6 is a schematic view of a detection module of the dust fall detection apparatus of FIG. 1;
FIG. 7 is a schematic view of a detection module of the dust fall detection apparatus of FIG. 1;
fig. 8 is a schematic diagram of a dust fall detection method according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described through embodiments with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a schematic view of a dust fall detection device according to an embodiment of the present invention. The dust fall detection apparatus provided by the present embodiment includes: the detection module 10 is used for placing and detecting the transparent substrate 20 to be detected; the detection module 10 comprises a shell 11, a light source 12, an image acquisition unit 13 and a control unit 14, wherein the light source 12, the image acquisition unit 13 and the control unit 14 are arranged in the shell 11, and the control unit 14 is electrically connected with the light source 12 and the image acquisition unit 13 respectively; the light source 12 is used for projecting light rays onto the transparent substrate 20 to be detected, the image acquisition unit 13 is used for scanning the transparent substrate 20 to be detected and acquiring pictures, and the control unit 14 is used for controlling the light source 12 to emit light and controlling the image acquisition unit 13 to acquire the images of the transparent substrate 20 to be detected in a light-emitting stage so as to detect dust falling on the transparent substrate 20 to be detected.
In this embodiment, the optional detection module 10 is in a transparent sealing form, so that suspended particles in the environment where the dust falling detection device is located do not enter the detection module 10, and the detection result of the detection module 10 is not affected. The transparent substrate 20 is exposed in the environment of the dust fall detection device, the front surface of the transparent substrate adsorbs the suspended particles 21, namely, the dust fall, and the back surface of the transparent substrate contacts with the detection module 10, so that the transparent substrate 20 can adsorb the suspended particles, namely, the dust fall, in the environment of the dust fall detection device after being placed in the environment of the dust fall detection device for a period of time, the adsorbed dust fall can reflect the current suspended particle amount, the cleanness degree and other parameters of the environment of the dust fall detection device, the dust fall detection device can also detect for multiple times at intervals of a period of time, and the dust fall condition in the long-term environment can be reflected.
In this embodiment, the light source 12 is configured to project light onto the transparent substrate 20 to be detected, and the image collecting unit 13 is configured to scan the transparent substrate 20 to be detected and collect a picture. The light source 12 is located on the periphery of the image acquisition unit 13 in the light emitting direction of the detection module 10, so that light emitted by the light source 12 can be uniformly distributed around the image acquisition unit 13, the image acquisition unit 13 obtains a relatively uniform image acquisition light source, a gap exists between the light source 12 and the projection of the image acquisition unit 13, the light source 12 does not shield the image acquisition view of the image acquisition unit 13, and the integrity of the image acquired by the image acquisition unit 13 is ensured.
In this embodiment, the control unit 14 controls the light source 12 to emit light, so as to provide an image capturing light source for the image capturing unit 13, which is convenient for the image capturing unit 13 to capture an image under bright light, and ensures the definition of the image. The transparent substrate 20 is located on the light emitting side of the detection module 10 and located in the scanning area of the detection module 10, the housing 11 is a transparent housing 11, and the housing 11 of the optional detection module 10 is a vacuum-sealed housing. During the lighting phase of the light source 12, the light emitted from the light source 12 can sequentially pass through the housing 11 and the transparent substrate 20 located at the position of the light measurement, so as to clearly illuminate the dust falling on the transparent substrate 20, and the control unit 14 controls the image collecting unit 13 to collect the image of the transparent substrate 20 during the lighting phase. When the aerosol is adsorbed on the transparent substrate 20, the adsorbed particles are also displayed on the image of the transparent substrate 20, and the image reflects the dust falling on the transparent substrate 20. The control unit 14 analyzes the image of the transparent substrate 20, and can capture the dust falling amount in the image of the transparent substrate 20, thereby realizing the dust falling detection of the transparent substrate 20. The optional dust fall detection includes at least one of detection of a dust fall amount, a dust fall kind, and a dust fall size. The transparent substrate may be a transparent glass substrate or a transparent plastic substrate.
Specifically, the control unit 14 controls the light source 12 to continuously emit light, and simultaneously controls the light source 12 and the image acquisition unit 13 to synchronously move to each area of the transparent substrate 20 in a stepping manner to acquire multi-frame images; the control unit 14 synthesizes an overall image of the transparent substrate 20 from the plurality of frames of images, and analyzes the overall image to perform dust fall detection. For example, the total amount of particles having a diameter exceeding a predetermined size in the transparent substrate 20 is calculated, or the amount of dust fall increase in two images separated by a predetermined time is calculated, or the types of particles on the transparent substrate 20, i.e., the types of dust fall, are detected by performing comparison based on parameters in a dust fall database, or the sizes of dust fall on the transparent substrate 20 are detected by performing comparison based on parameters in a dust fall database. Fig. 2 is a transparent substrate image obtained by the detection apparatus shown in fig. 1, and it should be noted that, in order to clearly display dust falling in the image, the control unit adjusts the background of the image to be black, where white dot-like or strip-like objects are dust falling, so as to facilitate dust falling detection.
Optionally, the control unit 14 includes a dust fall amount calculating subunit, and the dust fall amount calculating subunit is configured to calculate a first dust fall amount N1 on the transparent substrate 20 to be detected at the first time point T1 and a second dust fall amount N2 on the transparent substrate 20 to be detected at the second time point T2, and obtain the dust fall amount on the transparent substrate 20 to be detected in a time period from the first time point T1 to the second time point T2 according to a difference between the second dust fall amount N2 and the first dust fall amount N1. In this embodiment, the dust fall amount measuring sub-unit may analyze the image acquired at the set time point to obtain the dust fall amount at the set time point, thereby achieving the effect of monitoring the dust fall condition in real time. On the other hand, the dust fall amount calculation operator unit can also calculate the dust fall amount increase in a time period formed by any two time points, and the effect of detecting the dust fall increase and decrease condition is achieved.
Optionally, the control unit 14 includes a dust fall analyzing subunit, and the dust fall analyzing subunit is configured to calculate a dust fall size and/or analyze a dust fall type according to the dust fall image acquired by the image acquisition unit. In this embodiment, the dust fall analysis subunit may analyze the dust fall image to calculate the size, the type, and the like of the dust fall, thereby realizing the detection of the dust fall.
The image sharpness of the image captured by the image capturing unit 13 is limited by the resolution of the image capturing unit 13, so that particles with too small diameter on the transparent substrate 20 may not be captured by the image capturing unit 13, i.e. cannot be displayed in the image, the set size is the particle diameter that can be displayed by the image capturing unit 13, for example, the set size is 100 μm, and the control unit 14 may calculate the relevant parameter of the particles with more than a first size in the image of the transparent substrate 20, where the first size is greater than or equal to 100 μm. Thus, the detection of large dust drops is realized. The dust fall optionally has a diameter of 300 μm or more, and the size is selected as a dust fall size that can be clearly shown in an image captured by the image capturing unit 13.
It should be noted that the optional light source 12 and the image capturing unit 13 are configured to move synchronously. The light source 12 and the image acquisition unit 13 may be installed on a track as a whole to move, for example, step by step from left to right, the image acquisition unit 13 acquires an image of the transparent substrate 20, and takes a plurality of frames of pictures, and the control unit 10 splices the plurality of frames of pictures into an image of the transparent substrate 20 and then performs dust fall detection.
The dust falling detection equipment is positioned in an environment to be detected, such as a dust-free room, the suspended particles of the equipment to be detected fall on the transparent substrate, and the dust falling detection equipment can realize dust falling detection and clean grade detection on the environment to be detected through a simple image processing technology. For example, a first class clean room, which requires less than 20 total particles above a first specified size; a second clean class clean room that requires a total amount of particles exceeding the first specified size of less than 100, and so on; the dust falling detection equipment can detect the total amount of particles with the size more than the first specific size in the transparent substrate so as to judge the dust falling condition and the cleanness grade of the environment to be detected. The first specific dimension may optionally be 300 μm.
The optional transparent substrate 20 is a transparent substrate for producing a display panel, and large dust such as dust of 300 μm or more may affect the product during the process assembly stage, so that it is necessary to perform detection and foreign material source analysis for the large dust and confirm the cleanliness of the production area. The detection equipment can detect the production environment of the display panel, the cleanness degree of the transparent substrate or the adsorption condition through a simple image processing technology. For example, whether dust fall such as large dust and engine oil exists in a production line for manufacturing the transparent substrate, or the dust fall adsorption condition when the transparent substrate is used, and the like, the analysis of dust fall information and a foreign matter source is realized.
It should be noted that the structure of the detection module according to the embodiment of the present invention is only a simple example, and the detection module further includes other devices, which are not described herein again; the specific types or models of each component in the detection module are not described herein again, and any device capable of realizing the functions thereof falls within the protection scope of the present invention, for example, the selectable image acquisition unit is a high-resolution camera, the selectable light source is a white light LED, and the selectable control module is a main control chip; the mode of the detection module for carrying out dust fall detection according to the image of the transparent substrate depends on the image processing technology, and the image processing technology is not described in detail herein; the embodiment of the present invention also does not limit the material of the transparent substrate, and any transparent substrate capable of adsorbing dust falls within the protection scope of the present invention.
In this embodiment, the transparent substrate is located the light-emitting side of detection module, and the control unit controls the light source to give out light and controls the image acquisition unit to gather the image of transparent substrate in order to carry out the dust fall and detect to transparent substrate at the luminescence stage. In the embodiment, the dust falling detection equipment is positioned in the environment to be detected, and by means of the characteristic that the transparent substrate adsorbs dust falling, the condition of suspended dust falling above a set size in the air can be detected through a simple image processing technology, so that dust falling detection analysis and cleanness degree detection of the environment to be detected are realized; the transparent substrate is used for producing the display panel, and the dust falling detection equipment can detect the production environment of the display panel, the cleanness degree of the transparent substrate or the adsorption condition. The embodiment realizes the detection of large dust falling and also realizes the detection and analysis of dust falling information and foreign matter sources.
The optional light source 12 is a ring light source as shown in fig. 3, and the axis of the image capturing unit 13 passes through the inner ring of the ring light source 12. Here, the light emitted from the ring-shaped light source 12 can uniformly surround the image capturing unit 13 and be emitted toward the transparent substrate 20, so that the image captured by the image capturing unit 13 can be uniformly displayed. The light source 12 may be an annular lamp set, that is, the light source 12 has an annular substrate on which an annular light emitting device is disposed.
The optional light source 12 includes at least two light emitting devices 12a disposed oppositely as shown in fig. 4, and the axis of the image pickup unit 13 passes through between the at least two light emitting devices 12 a. The light source 12 emits light, that is, the light emitting devices in the light source 12 emit light simultaneously, so that the light emitted from the light source 12 symmetrically surrounds the image capturing unit 13 and is emitted to the transparent substrate 20, so that the image captured by the image capturing unit 13 can be displayed relatively uniformly. An alternative light source 12 has a supporting substrate on which at least two light emitting devices are symmetrically disposed.
The optional light source 12 includes at least two rows of light emitting devices 12a oppositely disposed as shown in fig. 5, and the axis of the image pickup unit 13 passes through between the at least two rows of light emitting devices 12 a. The light source 12 emits light, that is, the light emitting devices in the light source 12 emit light simultaneously, so that the light emitted from the light source 12 symmetrically surrounds the image capturing unit 13 and is emitted to the transparent substrate 20, so that the image captured by the image capturing unit 13 can be displayed relatively uniformly. The optional light source 12 has at least two symmetrical light bars, a plurality of light emitting devices are disposed on the light bars, and the light emitting devices on the two light bars which are oppositely disposed are also oppositely disposed. The optional image capturing unit 13 in this embodiment includes a plurality of capturing subunits 13a, and the plurality of capturing subunits 13a are arranged in a row and arranged in parallel between two rows of light emitting devices 12 a. The length of the optional row of light-emitting devices 12a and the length of the optional row of collecting subunits 13a exceed the corresponding length of the scanning area of the detection module, so that the complete image of the transparent substrate can be conveniently collected.
In the direction perpendicular to the light exit direction of the detection module, there is a gap or overlap between the light source 12 and the projection 13 of the image acquisition unit. As shown in fig. 1 and fig. 6, there may be a gap between the light source 12 and the projection of the image capturing unit 13 in the light emitting direction X perpendicular to the detecting module 10, that is, the image capturing unit 12 is located on the backlight side or the light emitting side of the light source 12. As shown in fig. 7, there may be an overlap between the projections of the light source 12 and the image capturing unit 13 in the light emitting direction perpendicular to the detection module.
In the embodiment of the present invention, under the condition that the light source 12 does not affect the collection view of the image collection unit 13 and the light source 12 is ensured to provide a uniform image collection backlight, the relative position relationship between the light source 12 and the image collection unit 13 is not specifically defined, and the structures of the light source 12 and the image collection unit 13 are not specifically defined.
With respect to fig. 1-7, the optional light source 12 and the image capturing unit 13 form an integral image sub-module, and the detecting module 10 may include at least one image sub-module. If the detection module 10 includes one image sub-module, the image sub-module moves step by step from left to right and step by step from top to bottom until all regions of the transparent substrate are scanned. If the detection module 10 includes a plurality of image sub-modules, the plurality of image sub-modules as a whole are moved step by step from left to right and/or step by step from top to bottom until the respective regions of the transparent substrate are scanned.
Based on the same inventive concept, the embodiment of the invention also provides a dust fall detection method which can be executed by the dust fall detection equipment. As shown in fig. 8, the dust fall detection method includes the steps of:
s1, providing a dust falling detection device, wherein the dust falling detection device comprises a detection module for placing and detecting a transparent substrate to be detected; the detection module comprises a shell, and a light source, an image acquisition unit and a control unit which are arranged in the shell;
s2, scanning the transparent substrate to be detected, and acquiring a first dust falling quantity N1 of a first time point T1;
and S3, scanning the transparent substrate to be detected, and acquiring a second dust falling quantity N2 of a second time point T2.
In this embodiment, the transparent substrate to be detected is disposed on the detection module of the dust fall detection device, the control unit controls the light source to emit light so that the light source projects light onto the transparent substrate to be detected, and the control unit controls the light source to emit light and controls the image acquisition unit to scan the transparent substrate to be detected at a set time point and acquire pictures in a light emitting stage, so as to achieve dust fall detection of the transparent substrate to be detected.
Specifically, under the control of the control unit, the light source emits light, and the image capturing unit scans the transparent substrate to be detected at the first time point T1 and analyzes the scanned and captured picture, so that the first dust falling amount N1 on the transparent substrate at the first time point T1 can be obtained. Then, the image capturing unit scans the transparent substrate to be detected again at the second time point T2 and analyzes the scanned and captured picture, so that the second dust falling amount N2 on the transparent substrate at the second time point T2 can be obtained. The detection of the dust falling quantity at different time points is realized.
Optionally, the dust fall detection method further includes the steps of: and S4, acquiring the dust falling quantity on the transparent substrate to be detected in the time period from the first time point T1 to the second time point T2 according to the difference value between the second dust falling quantity N2 and the first dust falling quantity N1. And calculating the difference value between N1 and N2 to obtain the amount of dust falling on the transparent substrate to be detected in the time period from the first time point T1 to the second time point T2, thereby realizing the detection of the increase and decrease of the amount of dust falling.
Optionally, the step S1 further includes a step S11 of placing the transparent substrate to be detected on the detection module. Optionally, step S1 further includes a step of starting the dust fall detection device, where the step of starting the dust fall detection device includes: s12, turning on a light source and adjusting the irradiation direction of the light source to the transparent substrate to be detected; and S13, starting the image acquisition unit and the control unit. The light of light source should project on the transparent substrate in order to improve transparent substrate luminance, and the image acquisition unit of being convenient for gathers transparent substrate image, has improved image display effect.
Optionally, step S2 further includes:
s21, acquiring the size of the falling dust;
s22, comparing the size of the falling dust with a preset range;
s23, if the size of the dust fall falls into the preset range, the dust fall is counted into a first dust fall amount N1.
Here, the preset range may be a preset value interval, for example, [100 micrometers, 300 micrometers ], and the first dust falling amount N1 specifically means that the dust falling amount on the transparent substrate is greater than or equal to 100 micrometers and less than 300 micrometers at the first time point T1, so that the detection of the dust falling amount within the set dust falling size range is realized.
Here, the predetermined range may be greater than or equal to a predetermined value, such as [300 micrometers, + ∞), and the first dust falling amount N1 specifically means that the dust falling amount on the transparent substrate at the first time point T1 is greater than or equal to 300 micrometers, so that the detection of the dust falling amount greater than or equal to the set dust falling value is realized.
Optionally, step S3 includes:
s31, acquiring the size of the falling dust;
s32, comparing the size of the falling dust with a preset range;
and S33, if the size of the dust fall falls into the preset range, counting the dust fall into a second dust fall quantity N2.
Here, the preset range may be a preset value interval, for example, [100 micrometers, 300 micrometers ], and the second dust falling amount N2 specifically means that the dust falling amount on the transparent substrate at the second time point T2 is greater than or equal to 100 micrometers and less than 300 micrometers, so that the detection of the dust falling amount within the set dust falling size range is realized.
Here, the predetermined range may be greater than or equal to a predetermined value, such as [300 micrometers, + ∞), and the second dust falling amount N2 specifically means that the dust falling amount on the transparent substrate at the second time point T2 is greater than or equal to 300 micrometers, and the detection of the dust falling amount is achieved, which is greater than or equal to the set dust falling value.
Optionally, the dust fall detection method further includes: and step S5, matching the dust falling image with a preset dust falling image, and analyzing the type of the dust falling on the transparent substrate to be detected. Optionally, step S5 includes the steps of:
s51, matching the dust falling image with a pre-stored dust falling image;
s52, if the dust falling image is successfully matched with the pre-stored dust falling image, acquiring the type of the dust falling; otherwise, the kind of the falling dust is marked, and the image of the falling dust and the marked kind are stored in a storage database which prestores the image of the falling dust.
In this embodiment, after the image collecting unit collects the dust falling image of the transparent substrate, the control unit matches the dust falling image with the preset dust falling image, and can analyze the type of the dust falling on the transparent substrate to be detected. The detection, supplement and update of the dust fall types are realized.
In the embodiment, by means of the characteristic that the transparent substrate absorbs dust falling, the condition of suspended dust falling with a size larger than a set size in the air can be detected through a simple image processing technology, and dust falling detection analysis and cleanness degree detection of an environment to be detected are realized; the transparent substrate is used for producing the display panel, and the dust falling detection equipment can detect the production environment of the display panel, the cleanness degree of the transparent substrate or the adsorption condition. The embodiment realizes the detection of large dust falling and also realizes the detection and analysis of dust falling information.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (6)
1. A dust fall detection apparatus, characterized in that the dust fall detection apparatus is in a dust-free environment, comprising: the detection module is used for placing and detecting a transparent substrate to be detected, the transparent substrate is exposed in the environment where the dust falling detection equipment is located, the front surface of the transparent substrate adsorbs suspended particles, and the back surface of the transparent substrate is in contact with the detection module;
the detection module comprises a shell, and a light source, an image acquisition unit and a control unit which are arranged in the shell, wherein the control unit is electrically connected with the light source and the image acquisition unit respectively, and the shell is a transparent sealing shell;
the control unit is used for controlling the light source to emit light and controlling the image acquisition unit to acquire the image of the transparent substrate to be detected in a light-emitting stage so as to detect dust falling on the transparent substrate to be detected;
in the light outgoing direction of the detection module, the light source is positioned at the periphery of the image acquisition unit, the light source and the image acquisition unit are set to move synchronously, the light source and the image acquisition unit are controlled to move synchronously to each area of the transparent substrate in a stepping mode to acquire multi-frame images, the control unit is used for synthesizing an integral image of the transparent substrate according to the multi-frame images and analyzing the integral image to realize dust falling detection;
the light source comprises two rows of light emitting devices which are oppositely arranged, the axis of the image acquisition unit penetrates through the space between the two rows of light emitting devices, the image acquisition unit comprises a plurality of acquisition subunits, the acquisition subunits are arranged in a row and are arranged in parallel between the two rows of light emitting devices, and the lengths of the light emitting devices and the acquisition subunits exceed the corresponding length of the scanning area of the detection module; the light source and the image acquisition unit are integrally mounted on a track bar to move.
2. A dust fall detection apparatus according to claim 1, wherein the casing of the detection module is a vacuum-tight casing.
3. The dust fall detection apparatus according to claim 1, wherein the dust fall detection includes at least one of detection of a dust fall amount, a dust fall kind, and a dust fall size.
4. A dust fall detection apparatus according to claim 1, wherein the dust fall has a diameter of 300 μm or more.
5. The dust fall detection apparatus according to claim 1, wherein the control unit comprises a dust fall amount calculation sub-unit for calculating a first dust fall amount N1 on the transparent substrate to be detected at a first time point T1 and a second dust fall amount N2 on the transparent substrate to be detected at a second time point T2, and obtaining the dust fall amount on the transparent substrate to be detected in a period from the first time point T1 to the second time point T2 based on a difference between the second dust fall amount N2 and the first dust fall amount N1.
6. The dust falling detection apparatus according to claim 1, wherein the control unit includes a dust falling analysis subunit configured to calculate a dust falling size and/or analyze a dust falling type from the dust falling image acquired by the image acquisition unit.
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