JP2004037248A - Inspection device and inspection method for through hole - Google Patents
Inspection device and inspection method for through hole Download PDFInfo
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- JP2004037248A JP2004037248A JP2002194609A JP2002194609A JP2004037248A JP 2004037248 A JP2004037248 A JP 2004037248A JP 2002194609 A JP2002194609 A JP 2002194609A JP 2002194609 A JP2002194609 A JP 2002194609A JP 2004037248 A JP2004037248 A JP 2004037248A
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- honeycomb
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- shaped object
- transmitted light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
Abstract
Description
【0001】
【発明の属する技術分野】
本発明は一方向に整列した多数の貫通孔を有する物体の、該貫通孔の目詰まりの有無を検査する画像検査装置に関する。
【0002】
【従来の技術】
一方向に整列した多数の貫通孔を有する物体として良く知られたものに脱臭フィルターとして用いられるハニカムがある。また、これの類似構造を持つものとして、多数のパイプの集合体や波状の板を巻いたもの等がある。
【0003】
上記ハニカム形状のものは、その貫通孔が重要な意味持つものであり、該貫通孔が閉塞されている場合は使用することができなくなる。そのため、該貫通孔が閉塞されているかどうかの検査が必要となる。
【0004】
この目的を達成させる従来の画像検査装置は、例えば図3に示すように、ハロゲンランプのような光源1からの光をレンズ2により、平行光線とし、検査対象のハニカム形状物4を、該ハニカム形状物の貫通孔の中心線が平行光線と平行となり、平行光線が該貫通孔を通過するように設置する。そして、ハニカム形状物の透過画像をスクリーン5に映し出し、レンズ6を装備したカメラ7により撮影する。あるいは、例えば図4に示すように、ハニカム形状物の透過光を、直接テレセントリックレンズ8を装備したカメラ7により撮影する。こうして得た画像を解析して貫通孔の閉塞の有無を検査していた。
【0005】
この際の画像解析方法は、図5に示すように、予め目詰まりの無い検査対象物を基準画像Aとして保存しておき、この画像と上記手法で得た検査画像Bとを比較し、基準画像より設定濃度以下(たとえば256階調の画像濃度で128)の暗い画素が設定画素数(たとえば100画素)を超えたときに、この検査対象物の貫通孔に閉塞部分があると判断するものである。
【0006】
ところで、こうした従来の画像解析方法は、予め撮影しておいた基準画像と比較するため、実際の検査のときに、照明強度や撮影位置等がわずかに異なっただけで、良否判定の判断を誤る可能性がある。また、図4の方法では、検査対象物が大きくなると非常に高価な大口径テレセントリックレンズが必要となる。
【0007】
【発明が解決しようとする課題】
本発明は、上記欠点のないハニカム形状物貫通孔の検査装置及び検査方法の提供を目的とする。
【0008】
【課題を解決するための手段】
上記課題を解決する本第一の発明は、ハニカム形状物の貫通孔の閉塞の有無を検査するための装置であり、その主要部が透過光用拡散照明と、拡散板と、カメラと少なくとも二つの反射光用照明とから構成され、拡散板が、該拡散板と該透過光用拡散照明との間にハニカム形状物が、該ハニカム形状物の貫通孔中心線と透過光用拡散照明面とが垂直になるように設けられうる間隔で、透過光用拡散照明面と平行、かつ光路内に出し入れ可能に設けられ、カメラが、該カメラのレンズの中心線が透過光用拡散照明面に垂直になるように設けられ、カメラを中心として等間隔で少なくとも二つの反射光用照明がハニカム形状物を照らし出すように設けられた検査装置である。
【0009】
そして、本第二の発明はハニカム形状物の貫通孔を検査する方法であり、主として以下の工程を含むことを特徴とする貫通孔の検査方法である。
1)ハニカム形状物の開口部の反射映像をカメラに取り込み、該反射映像を得る工程。
2)反射映像を画像処理して検査対象範囲を決定する工程。
3) 透過光用拡散照明板より発せられた透過光によるハニカム形状物の透過映像を拡散板に映し出し、該拡散板に映し出された透過映像をカメラに取り込む工程。
4)透過映像を画像処理して検査対象範囲に閉塞部があるかどうかを判定する工程。
【0010】
そして、本第三の発明は本第一の測定装置を用いてハニカム形状物の貫通孔を検査する方法であり、主として以下の工程を含むものである。
1) 拡散板を透過光の光路外に出した状態で反射光照明によりハニカム形状物に投光し、該ハニカム形状物の反射光をカメラに取り込み、反射映像を得る工程。
2)反射映像を画像処理して検査対象範囲を決定する工程。
3) 拡散板を透過光の光路内に入れ、透過光用拡散照明板より発せられた透過光の映像を拡散板に映し出し、映し出された透過映像をカメラに取り込む工程。
4)透過映像を画像処理して検査対象範囲に閉塞部があるかどうかを判定する工程。
【0011】
【発明の実施の形態】
本第一の発明は、例えば図1に示すように、その主要部が透過光用拡散照明11と、拡散板12と、カメラ13と少なくとも二つの反射光用照明14とから構成され、拡散板12が、該拡散板12と該透過光用拡散照明11との間にハニカム形状物15が、該ハニカム形状物15の貫通孔中心線と透過光用拡散照明面16とが垂直になるように設けられうる間隔で、透過光用拡散照明面16と平行、かつ光路内に出し入れ可能に設けられ、カメラ13が、該カメラ13のレンズの中心線17が透過光用拡散照明面16に垂直になるように設けられ、カメラ13を中心として等間隔で二つの反射光用照明14,15がハニカム形状物15を照らし出すように設けられた検査装置である。
【0012】
本発明の原理は、上記第一の発明よりわかるように、ハニカム形状物の開口部の反射映像をカメラに取り込み、該反射映像を得、得た反射映像を画像処理して検査対象範囲を決定し、ハニカム形状物とカメラとの位置関係を変えることなくハニカム形状物の透過映像を拡散板に映し出し、該拡散板に映し出された透過映像をカメラに取り込み、透過映像を画像処理して検査対象範囲に閉塞部があるかどうかを判定することを主要要素とするものであり、請求項二に記載された発明である。
【0013】
請求項3に記載された本第三の発明は、本第一の発明の検査装置を用いて行う検査方法である。本第三の発明において、ハニカム形状物の表面に反射照明を照射しながら、該ハニカム形状物表面を撮影するときは、拡散板を系外に除去し、透過光用拡散照明を消してハニカム形状表面の反射映像を撮影する。ここで、拡散板を系外に除去するのは反射照明を用いて撮影するときに、照明の照射(行き)と開口部輪郭からの反射光(戻り)が拡散板によって拡散してしまい、開口部輪郭の鮮明な映像を撮影することができないためである。
【0014】
そして、反射照明を照射しながらカメラで撮影した反射映像の開口部表面の輪郭(穴以外の部分)を画像処理により抽出して検査除外範囲を設定する。次に、ハニカム形状物の貫通孔映像は、拡散板を系内に挿入し、透過光用拡散照明を点灯し、拡散板に投影される映像をカメラで撮影することにより得る。そして、この映像を画像処理して貫通孔部分に閉塞部があるかどうかを判断する。なお、本発明の方法において反射映像と透過映像を得る順番については任意であり、どちらを先行させても支障はない。
【0015】
具体的な画像解析例を図2に示す。検査対象物には6個の穴が開いている。反射画像(A)には検査除外範囲しきい値(たとえば画像濃度が256階調のとき180)を設定し、検査除外範囲しきい値以上の画像濃度部分を検査場外範囲とする。さらに、透過画像(B)にも目詰まり判断しきい値(たとえば画像濃度が256階調のとき170)を設定し、検査除外範囲以外の範囲で、かつ、目詰まり判断しきい値以下の画素が含まれる穴は目詰まりをしていると判断する。
【0016】
本発明では透過映像を得るのに拡散光を用いているため、1つの穴の一部に異物が付着していても、その異物が直接撮影されるのでなく、異物のサイズに応じてその穴の平均透過率が低下して、暗い映像になる。
【0017】
【実施例】
次に実施例を用いて本発明をさらに説明する。
(実施例1)
直径75mm、長さ150mmで、検査対象物として0.8mm角の貫通孔が平行に1mm間隔で約4500個空いているハニカムを用いた。CCDカメラには1024×1024画素のものを用い、画素分解能が0.1mm/画素になるようにレンズを使用した。従って、およそ8×8=64画素が一つの貫通孔の面積に対応する。
【0018】
本例では図1に示した構成を有する本発明の目詰まり検査装置を用いた。まず、拡散板を系外に取り除き、透過光用拡散照明板を消光し、反射照明によりハニカムの開口部表面(貫通孔が見える面)を反射光照明により照らしだし、同開口部表面の反射映像を撮影した。得られた映像は図8に示したものと同様にハニカムの輪郭は明るく、穴は暗くなった。
【0019】
この映像を256階調のデータとして記録し、検査除去範囲のしきい値を180に設定して、このしきい値以上の部分(すなわち、穴以外)を検査範囲から除いた。
【0020】
次に、拡散板を所定の位置にもどし、反射光照明を消し、透過光用拡散照明板を点灯し、透過光の映像を拡散板に映しだし、透過映像を撮影した。このとき、透過光用拡散照明板とハニカム、拡散板とハニカムとの間隔はいずれも2mmとした。
【0021】
次に、得られた映像を画像処理した。目詰まり判断しきい値を170とし、検査範囲で目詰まり判断しきい値以下の画素が含まれる貫通孔を目詰まりしているとした。ここで検出した画素を1画素膨張収縮処理した後、ラベリング処理を行い、目詰まりをしている貫通孔の個数を求めた。
【0022】
比較のために、上記と同じハニカムを用いて従来の方法で目詰まり検査を行った。基準画像の暗い部分(穴以外の部分)以外の検査画像で目詰まり判断しきい値以下の画素が含まれる穴は目詰まりをしていると判断した。同様に、ここで検出した画素を1画素膨張収縮処理した後、ラベリング処理を行い、目詰まりをしている穴の個数を求めた。
【0023】
本発明の装置と従来の装置による3回の目詰まり検査結果を表1に示した。
表1に示すように、本発明の方法は従来の方法に比べて、検査結果の目詰まり穴の個数が少ない。これは、従来の方法では、透過光である平行光束と穴の中心線が平行になるように非常に正確な位置合わせが必要であり、この位置合わせが正確でないと目詰まりしていない穴も暗くなってしまい、目詰まりしていると判断されたものと思われる。
【0024】
【発明の効果】
本発明は、拡散板と透過光用拡散照明と反射光用照明とを用いてハニカム形状物とカメラとの位置関係を一定に保ちつつハニカム形状物の反射映像と、透過映像とを求め、画像処理によりハニカム形状物の貫通孔の目詰まりを検査する。従って、ハニカム形状物等とカメラとの位置関係は反射映像を得るときと透過映像を得る時とで不変であるため、照明強度や撮影位置等がわずかに異なることによる良否判定の判断ミスはない。また、拡散板を用いるためにハニカム形状物等が大型になっても高価な大口径テレセントリックレンズを必要としない。
【図面の簡単な説明】
【図1】本発明の検査装置の概要図である。
【図2】本発明の画像解析例を示した図である。
【図3】従来の検査装置の概要図である。
【図4】テレセントリックレンズを用いる従来の検査装置の概要図である。
【図5】従来の画像解析例を示した図である。
【符号の説明】
1――――光源
2――――レンズ
3――――平行光線
4――――ハニカム形状物
5――――スクリーン
6――――レンズ
7――――カメラ
8――――テレセントリックレンズ
11―――透過光用拡散照明
12―――拡散板
13―――カメラ
14―――反射光用照明
15―――ハニカム形状物
16―――透過光用拡散照明面
17―――レンズの中心線[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an image inspection apparatus for inspecting an object having a large number of through holes aligned in one direction to determine whether or not the through holes are clogged.
[0002]
[Prior art]
A well-known object having a large number of through holes aligned in one direction is a honeycomb used as a deodorizing filter. Further, as a structure having a similar structure to this, there is an assembly of a large number of pipes or a structure in which a corrugated plate is wound.
[0003]
The above-mentioned honeycomb shape has an important meaning in the through hole, and cannot be used when the through hole is closed. Therefore, it is necessary to inspect whether the through hole is closed.
[0004]
As shown in FIG. 3, for example, a conventional image inspection apparatus that achieves this object converts a light from a
[0005]
As shown in FIG. 5, the image analysis method at this time stores an inspection object without clogging in advance as a reference image A, compares this image with an inspection image B obtained by the above method, and When the number of pixels that are darker than the set density (e.g., 128 image density of 256 gradations is 128) exceeds the set number of pixels (e.g., 100 pixels), it is determined that there is a blockage in the through hole of the inspection object It is.
[0006]
By the way, in such a conventional image analysis method, the actual image is compared with a reference image that has been photographed in advance. there is a possibility. Further, in the method of FIG. 4, when the inspection object becomes large, a very expensive large-diameter telecentric lens is required.
[0007]
[Problems to be solved by the invention]
An object of the present invention is to provide an inspection apparatus and an inspection method for a through-hole of a honeycomb-shaped object that do not have the above-described disadvantage.
[0008]
[Means for Solving the Problems]
The first invention for solving the above-mentioned problems is an apparatus for inspecting whether or not a through-hole of a honeycomb-shaped object is blocked, the main part of which is at least two parts: a diffused illumination for transmitted light, a diffuser, a camera and a camera. A diffused plate, a diffuser plate, a honeycomb-shaped object between the diffuser plate and the transmitted-light diffused illumination, a through-hole center line of the honeycomb-shaped object, and a transmitted-light diffused illumination surface. Are provided at intervals that can be provided so as to be perpendicular, parallel to the diffused illumination surface for transmitted light, and removably into and out of the optical path, and the camera has a camera whose center line is perpendicular to the diffused illumination surface for transmitted light. And at least two reflected light illuminations are provided at regular intervals around the camera so as to illuminate the honeycomb-shaped object.
[0009]
The second invention is a method for inspecting a through-hole of a honeycomb-shaped article, and is a method for inspecting a through-hole mainly including the following steps.
1) A step of capturing a reflection image of the opening of the honeycomb-shaped object into a camera to obtain the reflection image.
2) A step of performing image processing on the reflection image to determine an inspection target range.
3) projecting a transmitted image of the honeycomb-shaped object by the transmitted light emitted from the transmitted light diffused illumination plate on the diffuser plate, and capturing the transmitted image projected on the diffuser plate into the camera;
4) A step of performing image processing on the transmission image to determine whether or not there is an obstruction in the inspection target range.
[0010]
The third invention is a method for inspecting a through-hole of a honeycomb-shaped object using the first measuring device, and mainly includes the following steps.
1) A step of projecting the diffused plate out of the optical path of the transmitted light and projecting it on the honeycomb-shaped object by reflected light illumination, taking in the reflected light of the honeycomb-shaped object into a camera, and obtaining a reflected image.
2) A step of performing image processing on the reflection image to determine an inspection target range.
3) A step of inserting the diffusion plate into the optical path of the transmitted light, projecting the image of the transmitted light emitted from the diffused illumination plate for the transmitted light on the diffusion plate, and capturing the projected transmitted image into the camera.
4) A step of performing image processing on the transmission image to determine whether or not there is an obstruction in the inspection target range.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
In the first invention, for example, as shown in FIG. 1, the main part is composed of a diffused light 11 for transmitted light, a diffuser 12, a camera 13, and at least two reflected light lights 14; 12 is such that the honeycomb-shaped object 15 is located between the diffuser plate 12 and the transmitted-light diffused illumination 11 so that the center line of the through-hole of the honeycomb-shaped object 15 is perpendicular to the transmitted-light diffused illumination surface 16. At an interval that can be provided, the camera 13 is provided so as to be parallel to the diffused illumination surface 16 for transmitted light and removably into and out of the optical path. This is an inspection apparatus in which two reflected light illuminations 14 and 15 are provided so as to illuminate the honeycomb-shaped object 15 at equal intervals around the camera 13.
[0012]
According to the principle of the present invention, as can be understood from the first invention, a reflection image of an opening of a honeycomb-shaped object is taken into a camera, the reflection image is obtained, and the obtained reflection image is subjected to image processing to determine an inspection target range. Then, without changing the positional relationship between the honeycomb-shaped object and the camera, the transmission image of the honeycomb-shaped object is projected on the diffusion plate, the transmission image projected on the diffusion plate is taken into the camera, and the transmission image is image-processed and inspected. The main element is to determine whether or not there is a closed portion in the range, and the invention is described in
[0013]
The third invention described in
[0014]
Then, the contour (portion other than the hole) of the surface of the opening of the reflected image captured by the camera while irradiating the reflected illumination is extracted by image processing to set an inspection exclusion range. Next, a through-hole image of the honeycomb-shaped object is obtained by inserting a diffusion plate into the system, turning on diffused light for transmitted light, and photographing an image projected on the diffusion plate with a camera. Then, image processing is performed on this video to determine whether or not there is a closed portion in the through-hole portion. In the method of the present invention, the order of obtaining the reflection image and the transmission image is arbitrary, and it does not matter which one is first.
[0015]
FIG. 2 shows a specific image analysis example. The inspection object has six holes. An inspection exclusion range threshold value (for example, 180 when the image density is 256 gradations) is set for the reflection image (A), and an image density portion that is equal to or greater than the inspection exclusion range threshold value is set as the inspection outside range. Further, a clogging determination threshold value (for example, 170 when the image density is 256 gradations) is set for the transmission image (B), and pixels which are outside the inspection exclusion range and are equal to or less than the clogging determination threshold value are set. It is determined that the hole including is clogged.
[0016]
In the present invention, since diffused light is used to obtain a transmission image, even if a foreign substance adheres to a part of one hole, the foreign substance is not directly photographed, but the hole is determined according to the size of the foreign substance. Average transmittance decreases, resulting in a dark image.
[0017]
【Example】
Next, the present invention will be further described using examples.
(Example 1)
A honeycomb having a diameter of 75 mm, a length of 150 mm, and about 4500 vacant 0.8 mm square through holes in parallel at 1 mm intervals was used as an inspection object. A 1024 × 1024 pixel CCD camera was used, and a lens was used so that the pixel resolution was 0.1 mm / pixel. Therefore, approximately 8 × 8 = 64 pixels correspond to the area of one through hole.
[0018]
In this example, the clogging inspection device of the present invention having the configuration shown in FIG. 1 was used. First, the diffusion plate is removed from the system, the diffused illumination plate for transmitted light is extinguished, and the surface of the opening of the honeycomb (the surface where the through holes are visible) is illuminated by reflected light illumination by reflected illumination. Was taken. In the obtained image, the outline of the honeycomb was bright and the holes were dark as in the case of FIG.
[0019]
This image was recorded as data of 256 gradations, the threshold value of the inspection removal range was set to 180, and the portion above this threshold value (that is, other than holes) was excluded from the inspection range.
[0020]
Next, the diffuser was returned to a predetermined position, the reflected light illumination was turned off, the diffused illumination plate for transmitted light was turned on, the transmitted light image was projected on the diffuser, and a transmitted image was photographed. At this time, the distance between the diffused illumination plate for transmitted light and the honeycomb and the distance between the diffusion plate and the honeycomb were all 2 mm.
[0021]
Next, the obtained video was subjected to image processing. The clogging determination threshold value is set to 170, and it is assumed that the through-holes including pixels below the clogging determination threshold value in the inspection range are clogged. After subjecting the detected pixels to one-pixel expansion / contraction processing, labeling processing was performed to determine the number of clogged through holes.
[0022]
For comparison, clogging inspection was performed by the conventional method using the same honeycomb as described above. Holes including pixels below the clogging determination threshold in the inspection image other than the dark portion (the portion other than the holes) of the reference image were determined to be clogged. Similarly, after the detected pixels are subjected to one-pixel expansion / contraction processing, labeling processing is performed to determine the number of clogged holes.
[0023]
Table 1 shows the results of three clogging inspections performed by the apparatus of the present invention and the conventional apparatus.
As shown in Table 1, the method of the present invention has a smaller number of clogged holes as a result of inspection than the conventional method. This is because, in the conventional method, it is necessary to perform very accurate alignment so that the parallel light flux, which is the transmitted light, and the center line of the hole are parallel. It seems to have been dark and clogged.
[0024]
【The invention's effect】
The present invention obtains a reflection image of a honeycomb-shaped object and a transmission image while maintaining a constant positional relationship between the honeycomb-shaped object and a camera using a diffusion plate, diffused illumination for transmitted light, and illumination for reflected light, and obtains an image. The clogging of the through-hole of the honeycomb-shaped object is inspected by the processing. Therefore, since the positional relationship between the honeycomb-shaped object or the like and the camera is invariable between when a reflected image is obtained and when a transmitted image is obtained, there is no erroneous judgment of quality judgment due to slight differences in illumination intensity, shooting position, and the like. . Further, even if the honeycomb-shaped object becomes large due to the use of the diffusion plate, an expensive large-diameter telecentric lens is not required.
[Brief description of the drawings]
FIG. 1 is a schematic diagram of an inspection device of the present invention.
FIG. 2 is a diagram showing an image analysis example of the present invention.
FIG. 3 is a schematic diagram of a conventional inspection device.
FIG. 4 is a schematic diagram of a conventional inspection device using a telecentric lens.
FIG. 5 is a diagram showing a conventional image analysis example.
[Explanation of symbols]
1 ---
Claims (3)
1)ハニカム形状物の開口部の反射映像をカメラに取り込み、該反射映像を得る工程。
2)反射映像を画像処理して検査対象範囲を決定する工程。
3) 透過光用拡散照明板より発せられた透過光によるハニカム形状物の透過映像を拡散板に映し出し、該拡散板に映し出された透過映像をカメラに取り込む工程。
4)透過映像を画像処理して検査対象範囲に閉塞部があるかどうかを判定する工程。A method for inspecting a through-hole of a honeycomb-shaped article, which mainly includes the following steps.
1) A step of capturing a reflection image of the opening of the honeycomb-shaped object into a camera to obtain the reflection image.
2) A step of performing image processing on the reflection image to determine an inspection target range.
3) projecting a transmitted image of the honeycomb-shaped object by the transmitted light emitted from the transmitted light diffused illumination plate on the diffuser plate, and capturing the transmitted image projected on the diffuser plate into the camera;
4) A step of performing image processing on the transmission image to determine whether or not there is an obstruction in the inspection target range.
1) 拡散板を透過光の光路外に出した状態で反射光照明によりハニカム形状物に投光し、該ハニカム形状物の反射光をカメラに取り込み、反射映像を得る工程。
2)反射映像を画像処理して検査対象範囲を決定する工程。
3)拡散板を透過光の光路内に入れ、透過光用拡散照明板より発せられた透過光の映像を拡散板に映し出し、映し出された透過映像をカメラに取り込む工程。
4)透過映像を画像処理して検査対象範囲に閉塞部があるかどうかを判定する工程。A method for inspecting a through-hole of a honeycomb-shaped object using the inspection apparatus according to claim 1, wherein the method mainly includes the following steps.
1) A step of projecting the diffused plate out of the optical path of the transmitted light and projecting it on the honeycomb-shaped object by reflected light illumination, taking in the reflected light of the honeycomb-shaped object into a camera, and obtaining a reflected image.
2) A step of performing image processing on the reflection image to determine an inspection target range.
3) A step of inserting the diffusion plate into the optical path of the transmitted light, projecting the image of the transmitted light emitted from the diffused illumination plate for transmitted light on the diffusion plate, and capturing the projected transmitted image into the camera.
4) A step of performing image processing on the transmission image to determine whether or not there is an obstruction in the inspection target range.
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