TWI643679B - 旋轉噴塗指紋辨識模組之芯片連板之方法 - Google Patents

旋轉噴塗指紋辨識模組之芯片連板之方法 Download PDF

Info

Publication number
TWI643679B
TWI643679B TW106124634A TW106124634A TWI643679B TW I643679 B TWI643679 B TW I643679B TW 106124634 A TW106124634 A TW 106124634A TW 106124634 A TW106124634 A TW 106124634A TW I643679 B TWI643679 B TW I643679B
Authority
TW
Taiwan
Prior art keywords
chip
connecting plate
pedestal
jig
board
Prior art date
Application number
TW106124634A
Other languages
English (en)
Other versions
TW201908018A (zh
Inventor
許志豪
Original Assignee
致伸科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 致伸科技股份有限公司 filed Critical 致伸科技股份有限公司
Priority to TW106124634A priority Critical patent/TWI643679B/zh
Priority to US15/834,898 priority patent/US10315212B2/en
Application granted granted Critical
Publication of TWI643679B publication Critical patent/TWI643679B/zh
Publication of TW201908018A publication Critical patent/TW201908018A/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0242Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0235Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the movement of the objects being a combination of rotation and linear displacement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
    • B05C11/028Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface with a body having a large flat spreading or distributing surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B05B9/0403Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
    • B05B9/0423Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material for supplying liquid or other fluent material to several spraying apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67288Monitoring of warpage, curvature, damage, defects or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

本發明提供一種旋轉噴塗指紋辨識模組之芯片連板之方法,用以將塗料均勻形成於芯片連板的表面。本發明方法使用一旋轉噴塗系統,該系統包括:複數個治具,各具有台座、抵壓件及旋轉軸,抵壓件用以抵壓並固定芯片連板於台座,以避免芯片連板產生翹曲;輸送帶,用以運送治具,其中治具藉由旋轉軸連接於輸送帶並以旋轉軸為軸心進行轉動;至少一噴塗裝置,用以噴塗塗料於芯片連板的表面上;控制模組,用以控制治具的轉速、輸送帶的移動速度及噴塗裝置的噴塗量。

Description

旋轉噴塗指紋辨識模組之芯片連板之方法
本發明係有關於一種噴塗製程的方法,尤指一種旋轉噴塗指紋辨識模組之芯片連板之方法。
隨著科技的進步,生物辨識功能如:虹膜辨識、指紋辨識、臉部辨識或聲音辨識等也開始被應用於電子裝置之中。其中,具指紋辨識功能的指紋辨識模組已被廣泛地應用於電子裝置中,而成為標準的配備之一,使用者可藉由指紋辨識模組進行身分的識別,以進一步解除電子裝置的鎖定或進行軟體介面的操作。
其中,指紋辨識模組包括:指紋感測單元及覆蓋於指紋感測單元之上的保護層。當使用者以手指按壓保護層時,指紋感測單元便可偵測到與保護層表面接觸的手指指紋。
於習知的技術中,保護層的形成通常是利用噴塗裝置將塗料噴塗在包含複數個感測芯片的芯片連板上,再以烘烤加熱或紫外光曝曬的方式將塗料固化。如此,在重複多次塗料噴塗及烘烤加熱或紫外光曝曬的製作程序後,便可在芯片連板的表面形成單一層或多層的保護層。
在保護層形成之後,便可以雷射切割的方式切割芯 片連板,以產出單一一個指紋辨識模組。而為避免芯片連板表面塗料塗佈不均勻的情況發生,於噴塗塗料之前,通常會先將整板的芯片連板切割為一半後,再進行塗料的噴塗、烘烤加熱或紫外光曝曬等製作程序。然而,芯片連板在受到多次的烘烤加熱或紫外光曝曬後,可能因芯片連板內部材質的不同,導致收縮程度的差異,進而讓芯片連板的外型產生翹曲的現象。翹曲現象則容易造成所形成保護層厚度的不均勻或保護層表面的不平整。另一方面,在進行次一塗料噴塗的製作程序時,翹曲的芯片連板亦可能讓塗料無法均勻地分佈於芯片連板的表面。
有鑑於此,如何提供一種噴塗系統,使塗料可均勻地分佈於芯片連板的表面,並可有效提降低芯片連板翹曲情況的發生,為本發明欲解決的技術課題。
本發明之主要目的,在於提供一種旋轉噴塗指紋辨識模組之芯片連板之方法,使噴塗的塗料可均勻地分佈於芯片連板的表面。
為達成本發明之目的,本發明提供一種旋轉噴塗指紋辨識模組之芯片連板之方法,用以將一塗料均勻形成於該芯片連板的表面,該芯片連板包括一芯片區以及一邊框,該方法包括:提供一旋轉噴塗系統,該系統包括:複數個治具,各具有一台座、一抵壓件及一旋轉軸,其中該台座包括一黏膠層;一輸送帶,其中該些治具藉由該旋轉軸連接於該輸送帶並以該旋轉軸為軸心進行轉動;至少一噴塗裝置,用以噴塗該塗料於該芯片連板之該表面上;以及一控制模組,用以控制該些治具的一轉速、該輸送帶的一移動速度及該至少一噴塗裝置的一噴塗量;以及,將該芯片連板放置於該治具之該台座上,並使該芯片連板黏著於該台座之該黏膠層;使用該抵壓件抵壓該芯片連板之該邊框;使用該輸送 帶運送該治具;以及,使用該控制模組控制該噴塗裝置噴塗該塗料於該芯片連板之該表面。
於上述較佳實施方式中,其中台座具有至少一凹口,用以取出芯片連板。
於上述較佳實施方式中,其中抵壓件為抵壓條或抵壓框。
於上述較佳實施方式中,其中台座進一步包括黏膠層,黏膠層用以黏附固定芯片連板,以避免芯片連板產生翹曲。
於上述較佳實施方式中,其中台座的長度為120mm,寬度為90mm。
於上述較佳實施方式中,其中治具間的軸心間距為152mm。
於上述較佳實施方式中,其中轉速為24轉/秒。
於上述較佳實施方式中,其中移動速度為5m/分鐘。
本發明另一較佳作法,係關於一種治具,用以固持芯片連板,治具包括:台座;抵壓件;以及旋轉軸;其中,抵壓件用以抵壓並固定芯片連板於台座,以避免芯片連板產生翹曲,且治具可以旋轉軸為軸心進行轉動。
於上述較佳實施方式中,其中台座具有至少一凹口,用以取出芯片連板。
於上述較佳實施方式中,其中抵壓件為抵壓條或抵壓框。
於上述較佳實施方式中,其中該台座進一步包括一黏膠層,用以黏附固定該芯片連板,以避免芯片連板產生翹曲。
於上述較佳實施方式中,其中台座的長度為120mm,寬度為90mm。
a1‧‧‧寬度
b1‧‧‧長度
x1‧‧‧寬度
y1‧‧‧長度
v1‧‧‧移動速度
v2‧‧‧轉速
H1‧‧‧軸心間距
1、1’‧‧‧治具
10、10’‧‧‧台座
101、101’‧‧‧第一螺孔
102、102’‧‧‧凹口
11、11’‧‧‧抵壓件
111、111’‧‧‧第二螺孔
112’‧‧‧開口
12、12’‧‧‧螺絲
13、13’‧‧‧黏膠層
14、14’‧‧‧旋轉軸
2‧‧‧芯片連板
20‧‧‧芯片區
21‧‧‧邊框
210‧‧‧定位點
3‧‧‧輸送帶
4‧‧‧控制模組
5‧‧‧噴塗裝置
51‧‧‧塗料
6‧‧‧旋轉噴塗系統
圖1A:係為本發明第一實施例之治具的立體分解圖;圖1B:係為本發明第二實施例之治具的立體分解圖;圖2:係為本發明之芯片連板的示意圖;圖3A:係為本發明第一實施例之治具固定芯片連板的上視圖;圖3B:係為本發明第一實施例之治具固定芯片連板的剖面圖;圖4A:係為本發明第二實施例之治具固定芯片連板的上視圖;圖4B:係為本發明第二實施例之治具固定芯片連板的剖面圖;以及圖5:係為本發明所提供之旋轉噴塗系統。
本發明的優點及特徵以及達到其方法將參照例示性實施例及附圖進行更詳細的描述而更容易理解。然而,本發明可以不同形式來實現且不應被理解僅限於此處所陳述的實施例。相反地,對所屬技術領域具有通常知識者而言,所提供的此些實施例將使本揭露更加透徹與全面且完整地傳達本發明的範疇。
首先,請參閱圖1A所示,圖1A係為本發明第一實施例之治具的立體分解圖。於圖1A中,所述的治具1包括:台座10、抵壓件11、複數個螺絲12、黏膠層13及旋轉軸14。其中,台座10的寬度a1為90mm,而長度b1則為120mm,且台座10承載面之對角線的距離不大於150mm。黏膠層13為一種耐高溫的雙面膠,使黏膠層13於高溫的環境下,仍能維持一定的黏性, 且黏膠層13係設置於台座10的承載面之上。台座10承載面相對的兩側邊則設置有複數個第一螺孔101,抵壓件11為一種抵壓條,且抵壓件11上設置有複數個與第一螺孔101相對應的第二螺孔111。螺絲12則可穿過第二螺孔111並鎖定於第一螺孔101之中,使抵壓件11可固定於台座10的承載面上。旋轉軸14則設置於相對於承載面的另一表面上,且旋轉軸14位於治具1之重心的位置,如此台座10便可以旋轉軸14為軸心而可穩定地進行轉動。此外,旋轉軸14可以焊接或以鎖固的方式與台座10相連接。本發明雖僅提出以螺絲將抵壓件鎖固於台座的實施方式,但於實際應用時,亦可以卡合、扣合或黏合的方式將抵壓件固定於台座的承載面之上,並不以本發明所提出的實施方式為限。
請參閱圖1B所示,圖1B係為本發明第二實施例之治具的立體分解圖。於圖1B中,治具1’的台座10’、複數個螺絲12’、黏膠層13’、旋轉軸14’、複數個第一螺孔101’、寬度a1及長度b1與圖1A相同,在此不再作贅述。唯差異處在於,抵壓件11’係為一種抵壓框,抵壓件11’上則具有一開口112’及複數個與第一螺孔101’相對應的第二螺孔111,,螺絲12’則可穿過第二螺孔111’並鎖定於第一螺孔101’之中,使抵壓件11’可固定於台座10’的承載面上。
請參閱圖2所示,圖2係為本發明之芯片連板的示意圖。於圖2中,芯片連板2具有芯片區20及邊框21,其中芯片區20的材質為環氧模壓樹脂(Epoxy Molding Compound,EMC),其內部包含複數個以平面網格陣列封裝(Land Grid Array,LGA)技術封裝的指紋感測芯片(未示於圖中)。邊框21上係設置有複數個定位點210,定位點210用於標示雷射切割的位置,而待芯片連板2的表面形成至少一保護層後,可依據定位點210的位置,以雷射切割的方式切割芯片連板2,以形成至少一個指紋感測模組。
請一併參閱圖3A及圖3B所示,圖3A係為本發明第一實施例之治具固定芯片連板的上視圖;圖3B:係為本發明第一 實施例之治具固定芯片連板的剖面圖。於圖3A中,抵壓件11係為一種抵壓條,且抵壓件11可藉由穿過第二螺孔111的螺絲12鎖固於台座10的承載面上(如圖3B所示),此時抵壓件11抵壓放置於台座10承載面上的芯片連板2,並覆蓋芯片連板2之邊框21的區塊,使芯片連板2可被固定於台座10的承載面之上。請繼續參閱圖3B,於圖3B中,芯片連板2的芯片區20係黏附於黏膠層13。藉由抵壓件11抵壓在芯片連板2之邊框21的區塊,並同時以黏膠層13黏附芯片連板2之芯片區20,如此便可有效避免芯片連板2在受到烘烤加熱或紫外光曝曬後所產生的翹曲現象。另一方面,因抵壓件11覆蓋於芯片連板2之邊框21的區塊,因此在塗料噴塗的過程中,塗料便不會噴塗到定位點210(如圖2所示),如此便可避免因定位點210汙損而影響後續雷射切割的情況產生。
請一併參閱圖4A及圖4B所示,圖4A係為本發明第二實施例之治具固定芯片連板的上視圖;圖4B:係為本發明第二實施例之治具固定芯片連板的剖面圖。於圖4A中,抵壓件11’係為一種抵壓框,且抵壓件11’可藉由穿過第二螺孔111’的螺絲12,鎖固於台座10’的承載面上(如圖4B所示),此時抵壓件11’抵壓放置於承載面上的芯片連板2,並且覆蓋於芯片連板2四個側邊的區塊,使芯片連板2可被固定於台座10’的承載面之上,而芯片連板2的芯片區20則暴露於開口112’的位置,以便後續噴塗程序的進行。請繼續參閱圖4B,於圖4B中,芯片連板2的芯片區20係黏附於黏膠層13’。藉由抵壓件11’抵壓在芯片連板2四個側邊的區塊,並同時以黏膠層13’黏附芯片連板2的芯片區20,如此便可有效避免芯片連板2在受到烘烤加熱或紫外光曝曬後產生的翹曲現象。另一方面,因抵壓件11’所覆蓋四個側邊的區塊包括了邊框21,因此在塗料噴塗的過程中,塗料便不會噴塗到定位點210(如圖2所示),如此便可避免因定位點210汙損而影響後續雷射切割的情況產生。
請參閱圖5,圖5係為本發明所提供之旋轉噴塗系 統。於圖5中,旋轉噴塗系統6包括:複數個治具1、輸送帶3、控制模組4、至少一噴塗裝置5。其中,治具1用以抵壓並固定芯片連板2,以藉此避免芯片連板2於烘烤加熱或紫外光曝曬的過程中,因材質收縮程度的不同所產生的翹曲的現象,當然,治具1之抵壓條(如圖1A所示)亦可替換為治具1’之抵壓框的形式(如圖1B所示)。輸送帶3則用以運送治具1且輸送帶3的移動速度為v1。治具1則可藉由旋轉軸14連接於輸送帶3之上,同時各個治具1可以旋轉軸14為軸心並以轉速v2進行轉動。另一方面,各個治具1之間的軸心間距H1等於或大於152mm,以避免治具1間相互干涉。治具1上方的噴塗裝置5則用於將塗料51噴射於芯片連板2的表面上,其中,可以人工或自動的方式調整噴塗裝置5與水平線之間的角度及噴塗裝置5與芯片連板2之間的距離,一較佳的實施方式中,噴塗裝置5與水平線之間的角度介於20度到90度之間;而噴塗裝置5與芯片連板2之間的距離則介於15cm到30cm之間。控制模組4則用於控制及調整治具1的轉速v2、輸送帶3的移動速度v1及噴塗裝置5其塗料51的噴塗量。一較佳的實施方式中,治具1的轉速v2為24轉/秒,輸送帶3的移動速度v1為5m/分鐘。
請繼續參閱圖5,治具1上的芯片連板2則可藉由治具1轉動時所產生的離心力,使噴塗裝置5所噴射出的塗料51可均勻地散佈於芯片連板2表面,亦可同時藉由離心力的作用將芯片連板2表面上多餘的塗料51甩出。在塗料51噴塗完成,需對芯片連板2進行烘烤加熱或紫外光曝曬的製作程序時,便可藉由抵壓件11或11,(如圖1A及圖1B所示)抵壓並覆蓋於芯片連板2的邊框21區塊,同時以黏膠層13或13,(如圖3B及圖4B所示)黏附芯片連板2的芯片區20,使芯片連板2可維持平整的狀態,如此便可有效避免芯片連板2在受到烘烤加熱或紫外光曝曬後,因芯片連板2材質收縮程度的差異而產生的翹曲現象。
相較於習知技術,本發明提供一種可讓塗料均勻分 佈在芯片連板表面的旋轉噴塗系統,另一方面,藉由治具上的抵壓件及黏膠層抵壓並黏附芯片連板,除可固定芯片連板使其維持平整的狀態外,亦可有效避免芯片連板在受到烘烤加熱或紫外光曝曬後,因芯片連板材質收縮程度的差異而產生的翹曲現象;故,本發明實為一極具產業價值之創作。
本發明得由熟悉本技藝之人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護。

Claims (7)

  1. 一種旋轉噴塗指紋辨識模組之芯片連板之方法,用以將一塗料均勻形成於該芯片連板的表面,該芯片連板包括一芯片區以及一邊框,該方法包括:提供一旋轉噴塗系統,該系統包括:複數個治具,各具有一台座、一抵壓件及一旋轉軸,其中該台座包括一黏膠層;一輸送帶,其中該些治具藉由該旋轉軸連接於該輸送帶並以該旋轉軸為軸心進行轉動;至少一噴塗裝置,用以噴塗該塗料於該芯片連板之該表面上;以及一控制模組,用以控制該些治具的一轉速、該輸送帶的一移動速度及該至少一噴塗裝置的一噴塗量;以及,將該芯片連板放置於該治具之該台座上,並使該芯片連板黏著於該台座之該黏膠層;使用該抵壓件抵壓該芯片連板之該邊框;使用該輸送帶運送該治具;以及,使用該控制模組控制該噴塗裝置噴塗該塗料於該芯片連板之該表面。
  2. 如申請專利範圍第1項所述之旋轉噴塗指紋辨識模組之芯片連板之方法,其中該台座具有至少一凹口,用以取出該芯片連板。
  3. 如申請專利範圍第1項所述之旋轉噴塗指紋辨識模組之芯片連板之方法,其中該抵壓件為一抵壓條或一抵壓框。
  4. 如申請專利範圍第1項所述之旋轉噴塗指紋辨識模組之芯片連板之方法,其中該台座的長度為120mm,寬度為90mm。
  5. 如申請專利範圍第1項所述之旋轉噴塗指紋辨識模組之芯片連板之方法,其中該些治具間的軸心間距為152mm。
  6. 如申請專利範圍第1項所述之旋轉噴塗指紋辨識模組之芯片連板之方法,其中該轉速為24轉/秒。
  7. 如申請專利範圍第1項所述之旋轉噴塗指紋辨識模組之芯片連板之方法,其中該移動速度為5m/分鐘。
TW106124634A 2017-07-21 2017-07-21 旋轉噴塗指紋辨識模組之芯片連板之方法 TWI643679B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW106124634A TWI643679B (zh) 2017-07-21 2017-07-21 旋轉噴塗指紋辨識模組之芯片連板之方法
US15/834,898 US10315212B2 (en) 2017-07-21 2017-12-07 Rotary spraying coating system and its fixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW106124634A TWI643679B (zh) 2017-07-21 2017-07-21 旋轉噴塗指紋辨識模組之芯片連板之方法

Publications (2)

Publication Number Publication Date
TWI643679B true TWI643679B (zh) 2018-12-11
TW201908018A TW201908018A (zh) 2019-03-01

Family

ID=65014609

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106124634A TWI643679B (zh) 2017-07-21 2017-07-21 旋轉噴塗指紋辨識模組之芯片連板之方法

Country Status (2)

Country Link
US (1) US10315212B2 (zh)
TW (1) TWI643679B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111024424B (zh) * 2019-11-28 2024-05-24 中国科学院金属研究所 一种用于多参数试验的热喷涂样品夹具
CN112090626A (zh) * 2020-07-29 2020-12-18 深圳市永盛旺机械设备有限公司 一种pvd无尘全自动喷涂生产线
CN112427211A (zh) * 2020-12-26 2021-03-02 广州奕极机电科技有限公司 一种化妆品瓶加工用喷涂烘干装置
CN113457915B (zh) * 2021-06-28 2022-12-13 常州港华半导体科技有限公司 一种用于封装整流器外壳的上胶装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW488619U (en) * 2000-07-01 2002-05-21 Inventec Corp Bi-directional rotating-type fastening fixture
JP2002286384A (ja) * 2001-03-26 2002-10-03 Showa Denko Kk ヒートパイプおよびその製造方法
TW569830U (en) * 2003-05-12 2004-01-01 Horng Jinq Co Ltd Multi-staged synchronously rotating cleaner for jig
TW200914169A (en) * 2007-09-20 2009-04-01 Fu-Chia Chang Spray-coating and material-placing process for superconductive vapor chamber and device implementing the same
TW201103386A (en) * 2009-07-01 2011-01-16 Giga Byte Tech Co Ltd Adjustable jig for a motherboard
TWI477658B (zh) * 2011-06-30 2015-03-21 Almex Pe Inc Surface treatment devices and workpiece to maintain a rule

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3807280C1 (zh) * 1988-03-05 1989-05-24 Sussman, Jennewein Bekleidungstechnik Gmbh, 6082 Moerfelden-Walldorf, De
US6136374A (en) * 1999-10-14 2000-10-24 Reuscher; Craig J. Method and apparatus for coating vented brake rotors
US20160303487A1 (en) * 2015-04-15 2016-10-20 Play From Scratch, Llc D/B/A Yoxo Interlocking links and toys formed therefrom

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW488619U (en) * 2000-07-01 2002-05-21 Inventec Corp Bi-directional rotating-type fastening fixture
JP2002286384A (ja) * 2001-03-26 2002-10-03 Showa Denko Kk ヒートパイプおよびその製造方法
TW569830U (en) * 2003-05-12 2004-01-01 Horng Jinq Co Ltd Multi-staged synchronously rotating cleaner for jig
TW200914169A (en) * 2007-09-20 2009-04-01 Fu-Chia Chang Spray-coating and material-placing process for superconductive vapor chamber and device implementing the same
TW201103386A (en) * 2009-07-01 2011-01-16 Giga Byte Tech Co Ltd Adjustable jig for a motherboard
TWI477658B (zh) * 2011-06-30 2015-03-21 Almex Pe Inc Surface treatment devices and workpiece to maintain a rule

Also Published As

Publication number Publication date
US20190022685A1 (en) 2019-01-24
US10315212B2 (en) 2019-06-11
TW201908018A (zh) 2019-03-01

Similar Documents

Publication Publication Date Title
TWI643679B (zh) 旋轉噴塗指紋辨識模組之芯片連板之方法
JP6475519B2 (ja) 保護部材の形成方法
JP5881464B2 (ja) ウェーハのレーザー加工方法
KR102210294B1 (ko) 칩 정렬 방법
US10249515B2 (en) Electronic device package
KR20170136994A (ko) 누설광 검출 방법
WO2011077962A1 (ja) 電子部品の製造方法
US11065805B2 (en) Warpage reduction device and warpage reduction method
TW201308414A (zh) 被加工物之研削方法
JP7285719B2 (ja) 樹脂貼り機
JP2007129228A (ja) パワー半導体モジュールの位置決め装置及びパワー半導体モジュールの表面処理方法
CN109277227A (zh) 旋转喷涂系统及其治具
KR102028027B1 (ko) 반도체 칩의 전자파 차폐막 형성 장치 및 방법
TWI674200B (zh) 指紋感測單元壓印系統及其方法
JP2009043997A (ja) 塗布方法
KR102186816B1 (ko) 기판 가열 장치 및 이를 구비한 기판 처리 시스템
KR101173124B1 (ko) 기판 본딩 장치 및 기판 본딩 장치와 기판 연마 장치를 포함하는 기판 가공 장치
JP2015115526A (ja) チャックテーブルの成形方法
KR20120070415A (ko) 목재 판재의 도장 방법
JP7306859B2 (ja) 透明板の加工方法
JP7062330B2 (ja) ダイボンド用樹脂層形成装置
JP2019133997A (ja) ダイボンド用樹脂の敷設方法
KR20200027759A (ko) 진공 흡착패널 제조방법
KR101755684B1 (ko) 코팅 장치
JP5868702B2 (ja) 積層装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees