TWI642930B - 照明單元、缺陷檢查裝置及照明方法 - Google Patents

照明單元、缺陷檢查裝置及照明方法 Download PDF

Info

Publication number
TWI642930B
TWI642930B TW106121226A TW106121226A TWI642930B TW I642930 B TWI642930 B TW I642930B TW 106121226 A TW106121226 A TW 106121226A TW 106121226 A TW106121226 A TW 106121226A TW I642930 B TWI642930 B TW I642930B
Authority
TW
Taiwan
Prior art keywords
illumination
light
lighting
unit
inspection
Prior art date
Application number
TW106121226A
Other languages
English (en)
Chinese (zh)
Other versions
TW201804151A (zh
Inventor
松山晃久
Original Assignee
日商歐姆龍股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商歐姆龍股份有限公司 filed Critical 日商歐姆龍股份有限公司
Publication of TW201804151A publication Critical patent/TW201804151A/zh
Application granted granted Critical
Publication of TWI642930B publication Critical patent/TWI642930B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N2021/8924—Dents; Relief flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
TW106121226A 2016-07-29 2017-06-26 照明單元、缺陷檢查裝置及照明方法 TWI642930B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016149104A JP6759812B2 (ja) 2016-07-29 2016-07-29 欠陥検査装置、および欠陥検査方法
JP2016-149104 2016-07-29

Publications (2)

Publication Number Publication Date
TW201804151A TW201804151A (zh) 2018-02-01
TWI642930B true TWI642930B (zh) 2018-12-01

Family

ID=61081611

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106121226A TWI642930B (zh) 2016-07-29 2017-06-26 照明單元、缺陷檢查裝置及照明方法

Country Status (4)

Country Link
JP (1) JP6759812B2 (ja)
KR (1) KR101969378B1 (ja)
CN (1) CN107664645B (ja)
TW (1) TWI642930B (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6969439B2 (ja) * 2018-02-23 2021-11-24 オムロン株式会社 外観検査装置、及び外観検査装置の照明条件設定方法
JP7010057B2 (ja) * 2018-02-26 2022-01-26 オムロン株式会社 画像処理システムおよび設定方法
JP6958444B2 (ja) 2018-03-13 2021-11-02 オムロン株式会社 コントローラおよび画像処理システム
JP7067148B2 (ja) * 2018-03-13 2022-05-16 オムロン株式会社 照明装置、および画像処理システム
CN109596625A (zh) * 2019-02-01 2019-04-09 东莞中科蓝海智能视觉科技有限公司 料盘中的工件缺陷检测识别方法
CN109859192A (zh) * 2019-02-01 2019-06-07 东莞中科蓝海智能视觉科技有限公司 圆形高反光工件的检测识别方法
CN111044521A (zh) * 2019-12-13 2020-04-21 苏州通富超威半导体有限公司 一种用于芯片检测的组合光源装置及方法
CN116819857A (zh) * 2023-08-22 2023-09-29 苏州默然光电科技有限公司 一种照明单元、视觉检测系统及其方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005091049A (ja) * 2003-09-12 2005-04-07 Ccs Inc 画像処理用光照射装置及び画像処理用光照射方法
JP2005274558A (ja) * 2004-02-27 2005-10-06 Omron Corp 表面状態検査方法およびその方法を用いた表面状態検査装置ならびに基板検査装置
JP2007240431A (ja) * 2006-03-10 2007-09-20 Omron Corp 欠陥検査装置および欠陥検査方法
JP2009174857A (ja) * 2008-01-21 2009-08-06 Omron Corp 照明装置およびこの装置を用いた欠陥検査装置
TWI491871B (zh) * 2013-07-05 2015-07-11 Machvision Inc 用於光學檢測的照明系統及使用其之檢測系統、檢測方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11237210A (ja) * 1998-02-19 1999-08-31 Komatsu Ltd 半導体パッケージの検査装置
CN1844901A (zh) * 2005-04-08 2006-10-11 欧姆龙株式会社 缺陷检查方法以及利用该方法的缺陷检查装置
JP4826750B2 (ja) 2005-04-08 2011-11-30 オムロン株式会社 欠陥検査方法およびその方法を用いた欠陥検査装置
JP4809032B2 (ja) * 2005-10-04 2011-11-02 ヤマハ発動機株式会社 実装基板の検査装置および印刷装置
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
JP4389982B2 (ja) * 2007-08-09 2009-12-24 オムロン株式会社 基板外観検査装置
KR101175595B1 (ko) * 2011-09-26 2012-08-24 주식회사 미르기술 비접촉식 부품검사장치 및 부품검사방법
JP5927930B2 (ja) * 2012-01-19 2016-06-01 株式会社リコー 情報処理装置及びプログラム
JP5673621B2 (ja) * 2012-07-18 2015-02-18 オムロン株式会社 欠陥検査方法及び欠陥検査装置
JP2014035307A (ja) * 2012-08-10 2014-02-24 Hitachi High-Technologies Corp 欠陥検査装置、及び欠陥検査方法
JP2014038045A (ja) * 2012-08-17 2014-02-27 Sony Corp 検査装置、照明、検査方法、プログラム及び基板の製造方法
JP2014122863A (ja) * 2012-12-21 2014-07-03 Murata Mfg Co Ltd 撮像装置及び撮像方法
JP6220521B2 (ja) * 2013-01-18 2017-10-25 株式会社ニューフレアテクノロジー 検査装置
JP5825278B2 (ja) * 2013-02-21 2015-12-02 オムロン株式会社 欠陥検査装置および欠陥検査方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005091049A (ja) * 2003-09-12 2005-04-07 Ccs Inc 画像処理用光照射装置及び画像処理用光照射方法
JP2005274558A (ja) * 2004-02-27 2005-10-06 Omron Corp 表面状態検査方法およびその方法を用いた表面状態検査装置ならびに基板検査装置
JP2007240431A (ja) * 2006-03-10 2007-09-20 Omron Corp 欠陥検査装置および欠陥検査方法
JP2009174857A (ja) * 2008-01-21 2009-08-06 Omron Corp 照明装置およびこの装置を用いた欠陥検査装置
TWI491871B (zh) * 2013-07-05 2015-07-11 Machvision Inc 用於光學檢測的照明系統及使用其之檢測系統、檢測方法

Also Published As

Publication number Publication date
JP2018017638A (ja) 2018-02-01
JP6759812B2 (ja) 2020-09-23
KR101969378B1 (ko) 2019-04-16
CN107664645A (zh) 2018-02-06
KR20180013709A (ko) 2018-02-07
CN107664645B (zh) 2020-08-18
TW201804151A (zh) 2018-02-01

Similar Documents

Publication Publication Date Title
TWI642930B (zh) 照明單元、缺陷檢查裝置及照明方法
TWI626438B (zh) 檢查設備及物品製造方法
KR102178903B1 (ko) 외관 검사 장치, 및 외관 검사 장치의 조명 조건 설정 방법
TWI524064B (zh) 多重瑕疵檢出之光學檢測設備
US6781687B2 (en) Illumination and image acquisition system
TWI426261B (zh) End inspection device
KR102100889B1 (ko) 다이 본딩 장치 및 반도체 장치의 제조 방법
TW201531695A (zh) 自動外觀檢查裝置
JP2007064801A (ja) 照明装置及びこれを備えた外観検査装置
JP5245212B2 (ja) 端部検査装置
TWI545314B (zh) Method and method for checking unevenness of film thickness
TWI747365B (zh) 外觀檢查裝置
JP6428554B2 (ja) 検査システム、検査方法
JP7246938B2 (ja) 検査装置
KR20130035827A (ko) 자동 외관 검사 장치
KR101442666B1 (ko) 복수 행의 조명부재를 포함하는 비전검사장치
JP2004085204A (ja) 座屈検査装置及び方法
JP6016515B2 (ja) プレス部品用検査装置
JP7370023B1 (ja) 検査装置及び検査方法
KR20130035826A (ko) 자동 외관 검사 장치
JP2022135644A (ja) 撮像装置
TW202409554A (zh) 圖像取得裝置、基板檢查裝置、圖像取得方法以及基板檢查方法
JP2005241469A (ja) 製品外観検査方法
JP2024027506A (ja) 画像取得装置、基板検査装置、画像取得方法および基板検査方法
JP2020204470A (ja) 照明装置及びこれを備えた外観検査装置