TWI599231B - 超音波轉換器元件晶片、探針、電子機器及超音波診斷裝置 - Google Patents

超音波轉換器元件晶片、探針、電子機器及超音波診斷裝置 Download PDF

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Publication number
TWI599231B
TWI599231B TW102110755A TW102110755A TWI599231B TW I599231 B TWI599231 B TW I599231B TW 102110755 A TW102110755 A TW 102110755A TW 102110755 A TW102110755 A TW 102110755A TW I599231 B TWI599231 B TW I599231B
Authority
TW
Taiwan
Prior art keywords
substrate
opening
ultrasonic transducer
transducer element
wafer
Prior art date
Application number
TW102110755A
Other languages
English (en)
Chinese (zh)
Other versions
TW201340728A (zh
Inventor
中村友亮
鶴野次郎
清瀨攝內
Original Assignee
精工愛普生股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 精工愛普生股份有限公司 filed Critical 精工愛普生股份有限公司
Publication of TW201340728A publication Critical patent/TW201340728A/zh
Application granted granted Critical
Publication of TWI599231B publication Critical patent/TWI599231B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
    • G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52079—Constructional features
    • G01S7/5208—Constructional features with integration of processing functions inside probe or scanhead
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/56—Display arrangements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Signal Processing (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Molecular Biology (AREA)
  • Biophysics (AREA)
  • Veterinary Medicine (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Gynecology & Obstetrics (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Manufacturing & Machinery (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
TW102110755A 2012-03-30 2013-03-26 超音波轉換器元件晶片、探針、電子機器及超音波診斷裝置 TWI599231B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012078673A JP5900107B2 (ja) 2012-03-30 2012-03-30 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置

Publications (2)

Publication Number Publication Date
TW201340728A TW201340728A (zh) 2013-10-01
TWI599231B true TWI599231B (zh) 2017-09-11

Family

ID=49234864

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102110755A TWI599231B (zh) 2012-03-30 2013-03-26 超音波轉換器元件晶片、探針、電子機器及超音波診斷裝置

Country Status (7)

Country Link
US (1) US9089872B2 (https=)
EP (1) EP2833649B1 (https=)
JP (1) JP5900107B2 (https=)
KR (1) KR101595690B1 (https=)
CN (1) CN104205876B (https=)
TW (1) TWI599231B (https=)
WO (1) WO2013145763A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI675647B (zh) * 2018-03-08 2019-11-01 余學致 超音波導引方法

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JP5990930B2 (ja) 2012-02-24 2016-09-14 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6102075B2 (ja) * 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP5900107B2 (ja) * 2012-03-30 2016-04-06 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6135088B2 (ja) * 2012-10-12 2017-05-31 セイコーエプソン株式会社 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
JP6175780B2 (ja) 2013-01-28 2017-08-09 セイコーエプソン株式会社 超音波デバイス、超音波プローブ、電子機器および超音波画像装置
JP6442821B2 (ja) 2013-09-30 2018-12-26 セイコーエプソン株式会社 超音波デバイス及び電子機器
JP6252280B2 (ja) * 2014-03-20 2017-12-27 セイコーエプソン株式会社 超音波デバイスユニットおよびプローブ並びに電子機器および超音波画像装置
JP6402983B2 (ja) 2014-08-29 2018-10-10 セイコーエプソン株式会社 超音波デバイス、超音波デバイスの製造方法、超音波プローブ、超音波測定装置、電子機器
JP6536792B2 (ja) 2015-03-25 2019-07-03 セイコーエプソン株式会社 超音波センサー及びその製造方法
JP6625441B2 (ja) * 2015-06-26 2019-12-25 キヤノンメディカルシステムズ株式会社 超音波プローブ
JP6597026B2 (ja) * 2015-07-30 2019-10-30 セイコーエプソン株式会社 超音波デバイス及び超音波モジュール
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
JP6753293B2 (ja) * 2016-12-09 2020-09-09 セイコーエプソン株式会社 超音波デバイス及び超音波装置
JP7205191B2 (ja) * 2018-11-22 2023-01-17 セイコーエプソン株式会社 超音波センサー、及び電子機器

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JP5990930B2 (ja) * 2012-02-24 2016-09-14 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP5900107B2 (ja) * 2012-03-30 2016-04-06 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6019671B2 (ja) * 2012-03-30 2016-11-02 セイコーエプソン株式会社 超音波プローブ並びに電子機器および超音波診断装置
JP6102075B2 (ja) * 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6135088B2 (ja) * 2012-10-12 2017-05-31 セイコーエプソン株式会社 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI675647B (zh) * 2018-03-08 2019-11-01 余學致 超音波導引方法

Also Published As

Publication number Publication date
JP2013211604A (ja) 2013-10-10
KR101595690B1 (ko) 2016-02-18
KR20140139093A (ko) 2014-12-04
JP5900107B2 (ja) 2016-04-06
EP2833649B1 (en) 2018-02-14
CN104205876B (zh) 2018-06-12
CN104205876A (zh) 2014-12-10
WO2013145763A1 (ja) 2013-10-03
EP2833649A1 (en) 2015-02-04
US20130258802A1 (en) 2013-10-03
US9089872B2 (en) 2015-07-28
TW201340728A (zh) 2013-10-01
EP2833649A4 (en) 2015-11-18

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