TWI594294B - 用於具有嵌入式掃描電子顯微鏡結構重疊目標的重疊之裝置相關量測 - Google Patents

用於具有嵌入式掃描電子顯微鏡結構重疊目標的重疊之裝置相關量測 Download PDF

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Publication number
TWI594294B
TWI594294B TW102132263A TW102132263A TWI594294B TW I594294 B TWI594294 B TW I594294B TW 102132263 A TW102132263 A TW 102132263A TW 102132263 A TW102132263 A TW 102132263A TW I594294 B TWI594294 B TW I594294B
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TW
Taiwan
Prior art keywords
periodic structure
layer
target
periodic
overlay
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TW102132263A
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English (en)
Chinese (zh)
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TW201419377A (zh
Inventor
紐瑞爾 艾米爾
崔東燮
托爾 伊茲卡維奇
丹尼爾 堪德爾
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克萊譚克公司
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Publication of TW201419377A publication Critical patent/TW201419377A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70681—Metrology strategies
    • G03F7/70683—Mark designs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
TW102132263A 2012-09-06 2013-09-06 用於具有嵌入式掃描電子顯微鏡結構重疊目標的重疊之裝置相關量測 TWI594294B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261697503P 2012-09-06 2012-09-06
US13/776,550 US9093458B2 (en) 2012-09-06 2013-02-25 Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets

Publications (2)

Publication Number Publication Date
TW201419377A TW201419377A (zh) 2014-05-16
TWI594294B true TWI594294B (zh) 2017-08-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW102132263A TWI594294B (zh) 2012-09-06 2013-09-06 用於具有嵌入式掃描電子顯微鏡結構重疊目標的重疊之裝置相關量測

Country Status (5)

Country Link
US (1) US9093458B2 (enExample)
JP (1) JP6320387B2 (enExample)
KR (1) KR102160840B1 (enExample)
TW (1) TWI594294B (enExample)
WO (1) WO2014039689A1 (enExample)

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Also Published As

Publication number Publication date
JP6320387B2 (ja) 2018-05-09
US9093458B2 (en) 2015-07-28
WO2014039689A1 (en) 2014-03-13
KR20150053770A (ko) 2015-05-18
JP2015532733A (ja) 2015-11-12
TW201419377A (zh) 2014-05-16
KR102160840B1 (ko) 2020-09-29
US20140065736A1 (en) 2014-03-06

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