TWI555864B - 提供硫屬元素之方法及裝置 - Google Patents
提供硫屬元素之方法及裝置 Download PDFInfo
- Publication number
- TWI555864B TWI555864B TW097134932A TW97134932A TWI555864B TW I555864 B TWI555864 B TW I555864B TW 097134932 A TW097134932 A TW 097134932A TW 97134932 A TW97134932 A TW 97134932A TW I555864 B TWI555864 B TW I555864B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- vapor deposition
- vapor
- deposition head
- temperature
- Prior art date
Links
- 229910052798 chalcogen Inorganic materials 0.000 title claims description 49
- 150000001787 chalcogens Chemical class 0.000 title claims description 49
- 238000000034 method Methods 0.000 title claims description 41
- 239000000758 substrate Substances 0.000 claims description 53
- 238000007740 vapor deposition Methods 0.000 claims description 34
- 238000012546 transfer Methods 0.000 claims description 32
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 30
- 229910052711 selenium Inorganic materials 0.000 claims description 30
- 239000011669 selenium Substances 0.000 claims description 30
- 238000012545 processing Methods 0.000 claims description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 21
- 239000012159 carrier gas Substances 0.000 claims description 21
- 239000000203 mixture Substances 0.000 claims description 21
- 229910052760 oxygen Inorganic materials 0.000 claims description 21
- 239000001301 oxygen Substances 0.000 claims description 21
- 238000000576 coating method Methods 0.000 claims description 20
- 239000011248 coating agent Substances 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 15
- 239000011261 inert gas Substances 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052717 sulfur Inorganic materials 0.000 claims description 7
- 239000011593 sulfur Substances 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 9
- 239000011159 matrix material Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 230000007704 transition Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 150000004770 chalcogenides Chemical class 0.000 description 2
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052951 chalcopyrite Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241001442654 Percnon planissimum Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- JPJALAQPGMAKDF-UHFFFAOYSA-N selenium dioxide Chemical compound O=[Se]=O JPJALAQPGMAKDF-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Photovoltaic Devices (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Glass Compositions (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007043051 | 2007-09-11 | ||
| DE102007047098 | 2007-10-01 | ||
| DE102007047099 | 2007-10-01 | ||
| DE102007048204 | 2007-10-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200914634A TW200914634A (en) | 2009-04-01 |
| TWI555864B true TWI555864B (zh) | 2016-11-01 |
Family
ID=40380095
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097134932A TWI555864B (zh) | 2007-09-11 | 2008-09-11 | 提供硫屬元素之方法及裝置 |
| TW097134931A TWI424073B (zh) | 2007-09-11 | 2008-09-11 | 熱轉換金屬前驅物層至半導體層及／或太陽能模組之方法及裝置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097134931A TWI424073B (zh) | 2007-09-11 | 2008-09-11 | 熱轉換金屬前驅物層至半導體層及／或太陽能模組之方法及裝置 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US20100203668A1 (enExample) |
| EP (2) | EP2205772A2 (enExample) |
| JP (2) | JP2010539679A (enExample) |
| KR (2) | KR20100052429A (enExample) |
| AU (2) | AU2008297124A1 (enExample) |
| TW (2) | TWI555864B (enExample) |
| WO (2) | WO2009034131A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI689455B (zh) * | 2019-07-30 | 2020-04-01 | 群翊工業股份有限公司 | 可防板偏之連續通板的氮氣箱 |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009009022A1 (de) | 2009-02-16 | 2010-08-26 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur Beschichtung von flachen Substraten mit Chalkogenen |
| DE102009012200A1 (de) | 2009-03-11 | 2010-09-16 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur thermischen Umsetzung metallischer Precursorschichten in halbleitende Schichten mit Chalkogenquelle |
| DE102009011695A1 (de) | 2009-03-09 | 2010-09-16 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur thermischen Umsetzung metallischer Precursorschichten in halbleitende Schichten |
| DE102009011496A1 (de) | 2009-03-06 | 2010-09-16 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur thermischen Umsetzung metallischer Precursorschichten in halbleitende Schichten mit Chalkogenrückgewinnung |
| KR101245371B1 (ko) * | 2009-06-19 | 2013-03-19 | 한국전자통신연구원 | 태양전지 및 그 제조방법 |
| EP2278625A1 (en) | 2009-07-24 | 2011-01-26 | centrotherm photovoltaics AG | Method and apparatus for deposition of a layer of an Indium Chalcogenide onto a substrate |
| EP2474044A4 (en) * | 2009-09-02 | 2014-01-15 | Brent Bollman | METHOD AND DEVICES FOR PROCESSING A PRECURSORY LAYER IN A GROUP WITH THE AID OF THEIR ENVIRONMENT |
| IT1395908B1 (it) | 2009-09-17 | 2012-11-02 | Advanced Res On Pv Tech S R L | Processo per la produzione di celle solari a film sottili cu(in,ga)se2/cds |
| FR2951022B1 (fr) * | 2009-10-07 | 2012-07-27 | Nexcis | Fabrication de couches minces a proprietes photovoltaiques, a base d'un alliage de type i-iii-vi2, par electro-depots successifs et post-traitement thermique. |
| DE102009053532B4 (de) | 2009-11-18 | 2017-01-05 | Centrotherm Photovoltaics Ag | Verfahren und Vorrichtung zur Herstellung einer Verbindungshalbleiterschicht |
| EP2369033A1 (de) | 2010-03-26 | 2011-09-28 | Saint-Gobain Glass France | Verfahren zum Nachfüllen einer Verdampferkammer |
| EP2369034B1 (de) | 2010-03-26 | 2013-01-30 | Saint-Gobain Glass France | Verfahren zum Nachfüllen einer Selenverdampferkammer |
| EP2371991B1 (de) | 2010-03-26 | 2013-01-30 | Saint-Gobain Glass France | Verfahren zum diskontinuierlichen Nachfüllen einer Selenverdampferkammer |
| DE102010018595A1 (de) | 2010-04-27 | 2011-10-27 | Centrothem Photovoltaics Ag | Verfahren zur Herstellung einer Verbindungshalbleiterschicht |
| JP2012015323A (ja) * | 2010-06-30 | 2012-01-19 | Fujifilm Corp | Ｃｉｓ系膜の製造方法 |
| JP2012015314A (ja) * | 2010-06-30 | 2012-01-19 | Fujifilm Corp | Ｃｉｓ系膜の製造方法 |
| JP2012015328A (ja) * | 2010-06-30 | 2012-01-19 | Fujifilm Corp | Ｃｉｓ系膜の製造方法 |
| DE102010034653A1 (de) | 2010-08-17 | 2012-02-23 | Centrotherm Photovoltaics Ag | Verfahren zur Kondensation von Chalkogendampf sowie Vorrichtung zur Durchführung des Verfahrens |
| DE102010035569A1 (de) | 2010-08-26 | 2012-03-01 | Centrotherm Photovoltaics Ag | Durchlaufofen |
| US20130216967A1 (en) * | 2010-08-27 | 2013-08-22 | Saint-Gobain Glass France | Device and method for heat-treating a plurality of multi-layer bodies |
| TW201230379A (en) * | 2010-09-15 | 2012-07-16 | Precursor Energetics Inc | Deposition processes and devices for photovoltaics |
| KR101371077B1 (ko) * | 2011-03-30 | 2014-03-07 | 씨디에스(주) | 박막형성장치 |
| TW201250017A (en) * | 2011-06-08 | 2012-12-16 | Ind Tech Res Inst | Method and apparatus for depositing selenium thin-film and plasma head thereof |
| JP5709730B2 (ja) * | 2011-11-15 | 2015-04-30 | 京セラ株式会社 | 薄膜製造方法 |
| WO2013125818A1 (ko) * | 2012-02-24 | 2013-08-29 | 영남대학교 산학협력단 | 태양 전지 제조 장치 및 태양 전지 제조 방법 |
| US20130309848A1 (en) * | 2012-05-16 | 2013-11-21 | Alliance For Sustainable Energy, Llc | High throughput semiconductor deposition system |
| WO2014095503A1 (de) | 2012-12-20 | 2014-06-26 | Saint-Gobain Glass France | Verfahren zur herstellung eines verbindungshalbleiters sowie dünnschichtsolarzelle |
| US10317139B2 (en) * | 2013-10-09 | 2019-06-11 | United Technologies Corporation | Method and apparatus for processing process-environment-sensitive material |
| DE102013113108B4 (de) * | 2013-11-27 | 2024-08-29 | Hanwha Q Cells Gmbh | Solarzellenherstellungsverfahren |
| CN105363397A (zh) * | 2014-08-19 | 2016-03-02 | 姚小兵 | 一种蒸汽系统 |
| TWI550717B (zh) | 2014-08-25 | 2016-09-21 | 新能光電科技股份有限公司 | 熱處理方法及其所製得之產物 |
| TWI617684B (zh) * | 2016-10-07 | 2018-03-11 | 國家中山科學研究院 | Integrated fast selenium vulcanization process equipment |
| US10190234B1 (en) | 2017-10-30 | 2019-01-29 | Wisconsin Alumni Research Foundation | Continuous system for fabricating multilayer heterostructures via hydride vapor phase epitaxy |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2426377A (en) * | 1943-12-07 | 1947-08-26 | Ruben Samuel | Selenium rectifier and method of making |
| WO2008085604A2 (en) * | 2006-11-10 | 2008-07-17 | Solopower, Inc. | Reel-to-reel reaction of precursor film to form solar cell absorber |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320950B2 (enExample) * | 1972-07-12 | 1978-06-29 | ||
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- 2008-09-11 KR KR1020097021149A patent/KR20100052429A/ko not_active Withdrawn
- 2008-09-11 US US12/528,913 patent/US20100203668A1/en not_active Abandoned
- 2008-09-11 US US12/529,872 patent/US20100151129A1/en not_active Abandoned
- 2008-09-11 EP EP08804026A patent/EP2205772A2/en not_active Withdrawn
- 2008-09-11 AU AU2008297124A patent/AU2008297124A1/en not_active Abandoned
- 2008-09-11 KR KR1020097021552A patent/KR20100051586A/ko not_active Withdrawn
- 2008-09-11 JP JP2010523359A patent/JP2010539679A/ja not_active Withdrawn
- 2008-09-11 WO PCT/EP2008/062061 patent/WO2009034131A2/en not_active Ceased
- 2008-09-11 WO PCT/EP2008/007466 patent/WO2009033674A2/en not_active Ceased
- 2008-09-11 TW TW097134932A patent/TWI555864B/zh not_active IP Right Cessation
- 2008-09-11 EP EP08830338.3A patent/EP2205773B1/en not_active Not-in-force
- 2008-09-11 JP JP2010523539A patent/JP2010539323A/ja not_active Withdrawn
- 2008-09-11 AU AU2008297944A patent/AU2008297944A1/en not_active Abandoned
- 2008-09-11 TW TW097134931A patent/TWI424073B/zh not_active IP Right Cessation
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2015
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI689455B (zh) * | 2019-07-30 | 2020-04-01 | 群翊工業股份有限公司 | 可防板偏之連續通板的氮氣箱 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200914634A (en) | 2009-04-01 |
| EP2205773A2 (en) | 2010-07-14 |
| KR20100051586A (ko) | 2010-05-17 |
| EP2205773B1 (en) | 2014-11-12 |
| US20100203668A1 (en) | 2010-08-12 |
| JP2010539679A (ja) | 2010-12-16 |
| WO2009034131A3 (en) | 2009-05-22 |
| TW200914633A (en) | 2009-04-01 |
| TWI424073B (zh) | 2014-01-21 |
| JP2010539323A (ja) | 2010-12-16 |
| WO2009034131A2 (en) | 2009-03-19 |
| US20150368789A1 (en) | 2015-12-24 |
| KR20100052429A (ko) | 2010-05-19 |
| AU2008297124A1 (en) | 2009-03-19 |
| US20100151129A1 (en) | 2010-06-17 |
| EP2205772A2 (en) | 2010-07-14 |
| AU2008297944A1 (en) | 2009-03-19 |
| WO2009033674A2 (en) | 2009-03-19 |
| WO2009033674A3 (en) | 2009-05-22 |
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