TWI553425B - 圖案描繪裝置用之圖形使用者介面裝置、圖案描繪系統、工作通知單更新方法及記錄媒體 - Google Patents

圖案描繪裝置用之圖形使用者介面裝置、圖案描繪系統、工作通知單更新方法及記錄媒體 Download PDF

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Publication number
TWI553425B
TWI553425B TW104105415A TW104105415A TWI553425B TW I553425 B TWI553425 B TW I553425B TW 104105415 A TW104105415 A TW 104105415A TW 104105415 A TW104105415 A TW 104105415A TW I553425 B TWI553425 B TW I553425B
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TW
Taiwan
Prior art keywords
information
design data
work
screen
unit
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TW104105415A
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English (en)
Chinese (zh)
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TW201543173A (zh
Inventor
古川至
中井一博
北村清志
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斯克林集團公司
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Publication of TW201543173A publication Critical patent/TW201543173A/zh
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44—Arrangements for executing specific programs
    • G06F9/451—Execution arrangements for user interfaces

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Software Systems (AREA)
  • Human Computer Interaction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • User Interface Of Digital Computer (AREA)
  • Processing Or Creating Images (AREA)
TW104105415A 2014-02-17 2015-02-16 圖案描繪裝置用之圖形使用者介面裝置、圖案描繪系統、工作通知單更新方法及記錄媒體 TWI553425B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014027284A JP6389040B2 (ja) 2014-02-17 2014-02-17 パターン描画装置用のｇｕｉ装置、パターン描画システム、ジョブチケット更新方法およびプログラム

Publications (2)

Publication Number Publication Date
TW201543173A TW201543173A (zh) 2015-11-16
TWI553425B true TWI553425B (zh) 2016-10-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW104105415A TWI553425B (zh) 2014-02-17 2015-02-16 圖案描繪裝置用之圖形使用者介面裝置、圖案描繪系統、工作通知單更新方法及記錄媒體

Country Status (5)

Country Link
JP (1) JP6389040B2 (ja)
KR (1) KR101800990B1 (ja)
CN (1) CN105992997B (ja)
TW (1) TWI553425B (ja)
WO (1) WO2015122243A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112231039B (zh) * 2020-10-23 2023-09-19 岭东核电有限公司 工单信息统计方法、装置、计算机设备和存储介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080205767A1 (en) * 2007-02-14 2008-08-28 Fujifilm Corporation Extraction method, extraction apparatus, program, drawing data creation method, and drawing data creation apparatus
TW201314376A (zh) * 2011-09-30 2013-04-01 Dainippon Screen Mfg 直接描繪裝置用之圖像顯示裝置及記錄媒體
TW201329642A (zh) * 2011-09-07 2013-07-16 Dainippon Screen Mfg 描繪裝置及描繪方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4265722B2 (ja) * 2000-08-07 2009-05-20 富士通マイクロエレクトロニクス株式会社 パターンデータ修正方法及び装置
US20060123381A1 (en) * 2004-12-07 2006-06-08 Dainippon Screen Mfg. Co., Ltd. Data generating system, patterning data generating apparatus, method of generating patterning data and storage medium carrying patterning data
JP2006162956A (ja) * 2004-12-07 2006-06-22 Dainippon Screen Mfg Co Ltd パターン形成用データ生成装置、パターン形成用データ生成システムおよびパターン形成用データの生成方法
JP2008197451A (ja) * 2007-02-14 2008-08-28 Fujifilm Corp 抽出方法および抽出装置ならびにプログラム
JP2008242356A (ja) * 2007-03-29 2008-10-09 Fujifilm Corp 描画データ作成方法および描画データ作成装置
KR20090063414A (ko) * 2007-12-14 2009-06-18 김순필 컴퓨터를 이용한 테스트를 위한 프로그램
KR20100077301A (ko) * 2008-12-29 2010-07-08 박영미 특정 프로그램만 실행 위한 프로그램
JP5731864B2 (ja) * 2011-03-18 2015-06-10 株式会社Ｓｃｒｅｅｎホールディングス 描画データの補正装置および描画装置
KR20120130124A (ko) * 2011-05-20 2012-11-29 가부시키가이샤 히다치 하이테크놀로지즈 노광장치, 노광방법, 및 표시용 패널기판의 제조방법, 및 노광장치의 검사방법
JP5801674B2 (ja) 2011-09-30 2015-10-28 株式会社Ｓｃｒｅｅｎホールディングス 直接描画装置用の画像表示装置、およびプログラム
JP5946620B2 (ja) * 2011-09-30 2016-07-06 株式会社Ｓｃｒｅｅｎホールディングス 直接描画装置用の画像表示装置、およびプログラム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080205767A1 (en) * 2007-02-14 2008-08-28 Fujifilm Corporation Extraction method, extraction apparatus, program, drawing data creation method, and drawing data creation apparatus
TW201329642A (zh) * 2011-09-07 2013-07-16 Dainippon Screen Mfg 描繪裝置及描繪方法
TW201314376A (zh) * 2011-09-30 2013-04-01 Dainippon Screen Mfg 直接描繪裝置用之圖像顯示裝置及記錄媒體

Also Published As

Publication number Publication date
KR101800990B1 (ko) 2017-11-23
JP6389040B2 (ja) 2018-09-12
CN105992997B (zh) 2019-06-07
WO2015122243A1 (ja) 2015-08-20
JP2015153213A (ja) 2015-08-24
KR20160089483A (ko) 2016-07-27
TW201543173A (zh) 2015-11-16
CN105992997A (zh) 2016-10-05

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