CN105992997B - 图案描画装置用的gui装置、图案描画系统、作业单更新方法及记录介质 - Google Patents
图案描画装置用的gui装置、图案描画系统、作业单更新方法及记录介质 Download PDFInfo
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- CN105992997B CN105992997B CN201580008338.4A CN201580008338A CN105992997B CN 105992997 B CN105992997 B CN 105992997B CN 201580008338 A CN201580008338 A CN 201580008338A CN 105992997 B CN105992997 B CN 105992997B
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F9/00—Arrangements for program control, e.g. control units
- G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
- G06F9/44—Arrangements for executing specific programs
- G06F9/451—Execution arrangements for user interfaces
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Software Systems (AREA)
- Human Computer Interaction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- User Interface Of Digital Computer (AREA)
- Processing Or Creating Images (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014027284A JP6389040B2 (ja) | 2014-02-17 | 2014-02-17 | パターン描画装置用のｇｕｉ装置、パターン描画システム、ジョブチケット更新方法およびプログラム |
| JP2014-027284 | 2014-02-17 | ||
| PCT/JP2015/051355 WO2015122243A1 (ja) | 2014-02-17 | 2015-01-20 | パターン描画装置用のｇｕｉ装置、パターン描画システム、ジョブチケット更新方法およびプログラム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105992997A CN105992997A (zh) | 2016-10-05 |
| CN105992997B true CN105992997B (zh) | 2019-06-07 |
Family
ID=53799991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580008338.4A Active CN105992997B (zh) | 2014-02-17 | 2015-01-20 | 图案描画装置用的gui装置、图案描画系统、作业单更新方法及记录介质 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6389040B2 (ja) |
| KR (1) | KR101800990B1 (ja) |
| CN (1) | CN105992997B (ja) |
| TW (1) | TWI553425B (ja) |
| WO (1) | WO2015122243A1 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112231039B (zh) * | 2020-10-23 | 2023-09-19 | 岭东核电有限公司 | 工单信息统计方法、装置、计算机设备和存储介质 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002049653A (ja) * | 2000-08-07 | 2002-02-15 | Fujitsu Ltd | パターンデータ修正方法及び装置 |
| JP2008197451A (ja) * | 2007-02-14 | 2008-08-28 | Fujifilm Corp | 抽出方法および抽出装置ならびにプログラム |
| CN102681355A (zh) * | 2011-03-18 | 2012-09-19 | 大日本网屏制造株式会社 | 描画数据修正装置及描画装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060123381A1 (en) * | 2004-12-07 | 2006-06-08 | Dainippon Screen Mfg. Co., Ltd. | Data generating system, patterning data generating apparatus, method of generating patterning data and storage medium carrying patterning data |
| JP2006162956A (ja) * | 2004-12-07 | 2006-06-22 | Dainippon Screen Mfg Co Ltd | パターン形成用データ生成装置、パターン形成用データ生成システムおよびパターン形成用データの生成方法 |
| US20080205767A1 (en) * | 2007-02-14 | 2008-08-28 | Fujifilm Corporation | Extraction method, extraction apparatus, program, drawing data creation method, and drawing data creation apparatus |
| JP2008242356A (ja) * | 2007-03-29 | 2008-10-09 | Fujifilm Corp | 描画データ作成方法および描画データ作成装置 |
| KR20090063414A (ko) * | 2007-12-14 | 2009-06-18 | 김순필 | 컴퓨터를 이용한 테스트를 위한 프로그램 |
| KR20100077301A (ko) * | 2008-12-29 | 2010-07-08 | 박영미 | 특정 프로그램만 실행 위한 프로그램 |
| KR20120130124A (ko) * | 2011-05-20 | 2012-11-29 | 가부시키가이샤 히다치 하이테크놀로지즈 | 노광장치, 노광방법, 및 표시용 패널기판의 제조방법, 및 노광장치의 검사방법 |
| JP5852374B2 (ja) * | 2011-09-07 | 2016-02-03 | 株式会社Ｓｃｒｅｅｎホールディングス | 描画装置および描画方法 |
| TW201314376A (zh) * | 2011-09-30 | 2013-04-01 | Dainippon Screen Mfg | 直接描繪裝置用之圖像顯示裝置及記錄媒體 |
| JP5801674B2 (ja) | 2011-09-30 | 2015-10-28 | 株式会社Ｓｃｒｅｅｎホールディングス | 直接描画装置用の画像表示装置、およびプログラム |
| JP5946620B2 (ja) * | 2011-09-30 | 2016-07-06 | 株式会社Ｓｃｒｅｅｎホールディングス | 直接描画装置用の画像表示装置、およびプログラム |
-
2014
- 2014-02-17 JP JP2014027284A patent/JP6389040B2/ja active Active
-
2015
- 2015-01-20 CN CN201580008338.4A patent/CN105992997B/zh active Active
- 2015-01-20 KR KR1020167016862A patent/KR101800990B1/ko active IP Right Grant
- 2015-01-20 WO PCT/JP2015/051355 patent/WO2015122243A1/ja active Application Filing
- 2015-02-16 TW TW104105415A patent/TWI553425B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002049653A (ja) * | 2000-08-07 | 2002-02-15 | Fujitsu Ltd | パターンデータ修正方法及び装置 |
| JP2008197451A (ja) * | 2007-02-14 | 2008-08-28 | Fujifilm Corp | 抽出方法および抽出装置ならびにプログラム |
| CN102681355A (zh) * | 2011-03-18 | 2012-09-19 | 大日本网屏制造株式会社 | 描画数据修正装置及描画装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101800990B1 (ko) | 2017-11-23 |
| JP6389040B2 (ja) | 2018-09-12 |
| WO2015122243A1 (ja) | 2015-08-20 |
| TWI553425B (zh) | 2016-10-11 |
| JP2015153213A (ja) | 2015-08-24 |
| KR20160089483A (ko) | 2016-07-27 |
| TW201543173A (zh) | 2015-11-16 |
| CN105992997A (zh) | 2016-10-05 |
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