CN103048885A - 无掩膜曝光系统及方法 - Google Patents
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US13/648,944 US9001305B2 (en) | 2011-10-11 | 2012-10-10 | Ultra-large size flat panel display maskless photolithography system and method |
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US201161545928P | 2011-10-11 | 2011-10-11 | |
US61/545,928 | 2011-10-11 |
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104423139A (zh) * | 2013-08-19 | 2015-03-18 | 苹果公司 | 自适应光掩模及其使用方法 |
CN104536269A (zh) * | 2014-10-24 | 2015-04-22 | 江苏影速光电技术有限公司 | 倾斜式扫描中利用dmd三角区域进行拼接改善的方法 |
CN105574029A (zh) * | 2014-10-16 | 2016-05-11 | 上海华虹宏力半导体制造有限公司 | 掩膜板设计中划片槽结构设计的检查方法 |
CN105892241A (zh) * | 2014-05-12 | 2016-08-24 | 上海微电子装备有限公司 | 一种光刻机大面积静态调焦调平的装置和方法 |
WO2017039959A1 (en) * | 2015-09-04 | 2017-03-09 | Applied Materials, Inc. | Line edge roughness reduction via step size alteration |
CN106527056A (zh) * | 2016-12-20 | 2017-03-22 | 湖北凯昌光电科技有限公司 | 一种单台面直写式曝光机 |
CN107290932A (zh) * | 2016-03-30 | 2017-10-24 | 上海微电子装备(集团)股份有限公司 | 运动台测量系统、方法以及运动台 |
CN107808400A (zh) * | 2017-10-24 | 2018-03-16 | 上海交通大学 | 一种摄像机标定系统及其标定方法 |
CN108062006A (zh) * | 2016-11-07 | 2018-05-22 | 俞庆平 | 一种自动上下版的直写式丝网制版系统及制版方法 |
CN108073046A (zh) * | 2016-11-07 | 2018-05-25 | 俞庆平 | 一种大行程的直写式丝网制版系统及制版方法 |
CN108681213A (zh) * | 2018-05-14 | 2018-10-19 | 中山新诺科技股份有限公司 | 数字化光刻系统和方法 |
CN112204707A (zh) * | 2018-05-31 | 2021-01-08 | 应用材料公司 | 数字光刻系统的多基板处理 |
CN112236721A (zh) * | 2018-06-19 | 2021-01-15 | Ev 集团 E·索尔纳有限责任公司 | 用于像点曝光的方法和设备 |
TWI752617B (zh) * | 2020-09-04 | 2022-01-11 | 劉大有 | 無光罩曝光機之晶片偏移校正方法 |
CN113959349A (zh) * | 2021-10-25 | 2022-01-21 | 湖南捷力泰科技有限公司 | 一种膜片质量检测装置及其方法 |
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EP0552953A1 (en) * | 1992-01-21 | 1993-07-28 | Hughes Aircraft Company | Apparatus and method for micropatterning surfaces |
JP2001500628A (ja) * | 1996-02-28 | 2001-01-16 | ケニス シー ジョンソン | マイクロリトグラフィ用マイクロレンズスキャナ及び広フィールド共焦顕微鏡 |
CN1424594A (zh) * | 2001-12-11 | 2003-06-18 | 中国科学院光电技术研究所 | 用激光直写装置制造光栅的方法 |
CN1461972A (zh) * | 2002-05-30 | 2003-12-17 | 大日本网目版制造株式会社 | 图形写入装置和图形写入方法 |
CN1797204A (zh) * | 2004-12-27 | 2006-07-05 | Asml荷兰有限公司 | 具有多重对准装置的光刻设备和对准测量方法 |
KR100737875B1 (ko) * | 2004-03-29 | 2007-07-10 | 후지필름 가부시키가이샤 | 노광장치 |
CN101137937A (zh) * | 2005-03-22 | 2008-03-05 | 富士胶片株式会社 | 图形形成材料以及图形形成装置和图形形成方法 |
CN101213494A (zh) * | 2005-04-28 | 2008-07-02 | 富士胶片株式会社 | 描绘装置及描绘方法 |
US20100019172A1 (en) * | 2007-03-26 | 2010-01-28 | Akio Yamada | Multi-column electron beam exposure apparatus and multi-column electron beam exposure method |
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2012
- 2012-09-26 CN CN201210363540.7A patent/CN103048885B/zh active Active
Patent Citations (9)
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EP0552953A1 (en) * | 1992-01-21 | 1993-07-28 | Hughes Aircraft Company | Apparatus and method for micropatterning surfaces |
JP2001500628A (ja) * | 1996-02-28 | 2001-01-16 | ケニス シー ジョンソン | マイクロリトグラフィ用マイクロレンズスキャナ及び広フィールド共焦顕微鏡 |
CN1424594A (zh) * | 2001-12-11 | 2003-06-18 | 中国科学院光电技术研究所 | 用激光直写装置制造光栅的方法 |
CN1461972A (zh) * | 2002-05-30 | 2003-12-17 | 大日本网目版制造株式会社 | 图形写入装置和图形写入方法 |
KR100737875B1 (ko) * | 2004-03-29 | 2007-07-10 | 후지필름 가부시키가이샤 | 노광장치 |
CN1797204A (zh) * | 2004-12-27 | 2006-07-05 | Asml荷兰有限公司 | 具有多重对准装置的光刻设备和对准测量方法 |
CN101137937A (zh) * | 2005-03-22 | 2008-03-05 | 富士胶片株式会社 | 图形形成材料以及图形形成装置和图形形成方法 |
CN101213494A (zh) * | 2005-04-28 | 2008-07-02 | 富士胶片株式会社 | 描绘装置及描绘方法 |
US20100019172A1 (en) * | 2007-03-26 | 2010-01-28 | Akio Yamada | Multi-column electron beam exposure apparatus and multi-column electron beam exposure method |
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104423139A (zh) * | 2013-08-19 | 2015-03-18 | 苹果公司 | 自适应光掩模及其使用方法 |
CN104423139B (zh) * | 2013-08-19 | 2020-12-15 | 苹果公司 | 自适应光掩模及其使用方法 |
CN105892241A (zh) * | 2014-05-12 | 2016-08-24 | 上海微电子装备有限公司 | 一种光刻机大面积静态调焦调平的装置和方法 |
CN105892241B (zh) * | 2014-05-12 | 2019-03-26 | 上海微电子装备(集团)股份有限公司 | 一种光刻机大面积静态调焦调平的装置和方法 |
CN105574029A (zh) * | 2014-10-16 | 2016-05-11 | 上海华虹宏力半导体制造有限公司 | 掩膜板设计中划片槽结构设计的检查方法 |
CN105574029B (zh) * | 2014-10-16 | 2019-03-26 | 上海华虹宏力半导体制造有限公司 | 掩膜板设计中划片槽结构设计的检查方法 |
CN104536269A (zh) * | 2014-10-24 | 2015-04-22 | 江苏影速光电技术有限公司 | 倾斜式扫描中利用dmd三角区域进行拼接改善的方法 |
US10495975B2 (en) | 2015-09-04 | 2019-12-03 | Applied Materials, Inc. | Line edge roughness reduction via step size alteration |
WO2017039959A1 (en) * | 2015-09-04 | 2017-03-09 | Applied Materials, Inc. | Line edge roughness reduction via step size alteration |
US10289003B2 (en) | 2015-09-04 | 2019-05-14 | Applied Materials, Inc. | Line edge roughness reduction via step size alteration |
CN108351599A (zh) * | 2015-09-04 | 2018-07-31 | 应用材料公司 | 经由步长更改的线边缘粗糙度降低 |
CN107290932A (zh) * | 2016-03-30 | 2017-10-24 | 上海微电子装备(集团)股份有限公司 | 运动台测量系统、方法以及运动台 |
CN108073046A (zh) * | 2016-11-07 | 2018-05-25 | 俞庆平 | 一种大行程的直写式丝网制版系统及制版方法 |
CN108062006A (zh) * | 2016-11-07 | 2018-05-22 | 俞庆平 | 一种自动上下版的直写式丝网制版系统及制版方法 |
CN106527056A (zh) * | 2016-12-20 | 2017-03-22 | 湖北凯昌光电科技有限公司 | 一种单台面直写式曝光机 |
CN107808400A (zh) * | 2017-10-24 | 2018-03-16 | 上海交通大学 | 一种摄像机标定系统及其标定方法 |
CN107808400B (zh) * | 2017-10-24 | 2021-11-26 | 上海交通大学 | 一种摄像机标定系统及其标定方法 |
WO2019218676A1 (zh) * | 2018-05-14 | 2019-11-21 | 中山新诺科技股份有限公司 | 数字化光刻系统和方法 |
CN108681213A (zh) * | 2018-05-14 | 2018-10-19 | 中山新诺科技股份有限公司 | 数字化光刻系统和方法 |
CN112204707A (zh) * | 2018-05-31 | 2021-01-08 | 应用材料公司 | 数字光刻系统的多基板处理 |
CN112236721A (zh) * | 2018-06-19 | 2021-01-15 | Ev 集团 E·索尔纳有限责任公司 | 用于像点曝光的方法和设备 |
TWI752617B (zh) * | 2020-09-04 | 2022-01-11 | 劉大有 | 無光罩曝光機之晶片偏移校正方法 |
CN113959349A (zh) * | 2021-10-25 | 2022-01-21 | 湖南捷力泰科技有限公司 | 一种膜片质量检测装置及其方法 |
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