TWI550604B - 磁隧接面裝置、記憶體、記憶體系統及電子裝置 - Google Patents
磁隧接面裝置、記憶體、記憶體系統及電子裝置 Download PDFInfo
- Publication number
- TWI550604B TWI550604B TW101124101A TW101124101A TWI550604B TW I550604 B TWI550604 B TW I550604B TW 101124101 A TW101124101 A TW 101124101A TW 101124101 A TW101124101 A TW 101124101A TW I550604 B TWI550604 B TW I550604B
- Authority
- TW
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- Prior art keywords
- perpendicular magnetization
- layer
- magnetic
- tunnel junction
- magnetic tunnel
- Prior art date
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F13/00—Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units
- G06F13/14—Handling requests for interconnection or transfer
- G06F13/16—Handling requests for interconnection or transfer for access to memory bus
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1659—Cell access
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Materials of the active region
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110079627A KR101831931B1 (ko) | 2011-08-10 | 2011-08-10 | 외인성 수직 자화 구조를 구비하는 자기 메모리 장치 |
| US13/398,640 US8772846B2 (en) | 2011-08-10 | 2012-02-16 | Magnetic tunneling junction devices, memories, memory systems, and electronic devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201308324A TW201308324A (zh) | 2013-02-16 |
| TWI550604B true TWI550604B (zh) | 2016-09-21 |
Family
ID=47678274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101124101A TWI550604B (zh) | 2011-08-10 | 2012-07-04 | 磁隧接面裝置、記憶體、記憶體系統及電子裝置 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US8772846B2 (https=) |
| JP (1) | JP6100482B2 (https=) |
| KR (1) | KR101831931B1 (https=) |
| CN (1) | CN102956813B (https=) |
| DE (1) | DE102012105595B4 (https=) |
| TW (1) | TWI550604B (https=) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9299923B2 (en) * | 2010-08-24 | 2016-03-29 | Samsung Electronics Co., Ltd. | Magnetic devices having perpendicular magnetic tunnel junction |
| KR101831931B1 (ko) * | 2011-08-10 | 2018-02-26 | 삼성전자주식회사 | 외인성 수직 자화 구조를 구비하는 자기 메모리 장치 |
| KR20130034260A (ko) * | 2011-09-28 | 2013-04-05 | 에스케이하이닉스 주식회사 | 반도체 장치의 제조방법 |
| US9007818B2 (en) | 2012-03-22 | 2015-04-14 | Micron Technology, Inc. | Memory cells, semiconductor device structures, systems including such cells, and methods of fabrication |
| US8923038B2 (en) | 2012-06-19 | 2014-12-30 | Micron Technology, Inc. | Memory cells, semiconductor device structures, memory systems, and methods of fabrication |
| US9054030B2 (en) | 2012-06-19 | 2015-06-09 | Micron Technology, Inc. | Memory cells, semiconductor device structures, memory systems, and methods of fabrication |
| US9379315B2 (en) | 2013-03-12 | 2016-06-28 | Micron Technology, Inc. | Memory cells, methods of fabrication, semiconductor device structures, and memory systems |
| JP6122353B2 (ja) * | 2013-06-25 | 2017-04-26 | ルネサスエレクトロニクス株式会社 | 半導体パッケージ |
| US9368714B2 (en) | 2013-07-01 | 2016-06-14 | Micron Technology, Inc. | Memory cells, methods of operation and fabrication, semiconductor device structures, and memory systems |
| US9466787B2 (en) | 2013-07-23 | 2016-10-11 | Micron Technology, Inc. | Memory cells, methods of fabrication, semiconductor device structures, memory systems, and electronic systems |
| JP6225835B2 (ja) * | 2013-08-28 | 2017-11-08 | 株式会社デンソー | 磁気抵抗素子およびそれを用いた磁気センサ |
| US9461242B2 (en) | 2013-09-13 | 2016-10-04 | Micron Technology, Inc. | Magnetic memory cells, methods of fabrication, semiconductor devices, memory systems, and electronic systems |
| US9608197B2 (en) | 2013-09-18 | 2017-03-28 | Micron Technology, Inc. | Memory cells, methods of fabrication, and semiconductor devices |
| JP2015061043A (ja) | 2013-09-20 | 2015-03-30 | 株式会社東芝 | 抵抗変化メモリ |
| US10454024B2 (en) | 2014-02-28 | 2019-10-22 | Micron Technology, Inc. | Memory cells, methods of fabrication, and memory devices |
| US9281466B2 (en) | 2014-04-09 | 2016-03-08 | Micron Technology, Inc. | Memory cells, semiconductor structures, semiconductor devices, and methods of fabrication |
| US9269888B2 (en) | 2014-04-18 | 2016-02-23 | Micron Technology, Inc. | Memory cells, methods of fabrication, and semiconductor devices |
| KR20160019253A (ko) * | 2014-08-11 | 2016-02-19 | 에스케이하이닉스 주식회사 | 전자 장치 |
| US9349945B2 (en) | 2014-10-16 | 2016-05-24 | Micron Technology, Inc. | Memory cells, semiconductor devices, and methods of fabrication |
| KR102268187B1 (ko) | 2014-11-10 | 2021-06-24 | 삼성전자주식회사 | 자기 기억 소자 및 그 제조 방법 |
| US9768377B2 (en) | 2014-12-02 | 2017-09-19 | Micron Technology, Inc. | Magnetic cell structures, and methods of fabrication |
| KR102376480B1 (ko) * | 2014-12-17 | 2022-03-21 | 삼성전자주식회사 | 자기 메모리 장치 및 그의 형성방법 |
| US10439131B2 (en) | 2015-01-15 | 2019-10-08 | Micron Technology, Inc. | Methods of forming semiconductor devices including tunnel barrier materials |
| US9960346B2 (en) * | 2015-05-07 | 2018-05-01 | Micron Technology, Inc. | Magnetic tunnel junctions |
| US10784045B2 (en) * | 2015-09-15 | 2020-09-22 | International Business Machines Corporation | Laminated magnetic materials for on-chip magnetic inductors/transformers |
| US10430618B2 (en) * | 2015-10-09 | 2019-10-01 | George Mason University | Vanishable logic to enhance circuit security |
| JP6713650B2 (ja) | 2016-05-10 | 2020-06-24 | 国立研究開発法人物質・材料研究機構 | 垂直磁化膜と垂直磁化膜構造並びに磁気抵抗素子および垂直磁気記録媒体 |
| US9680089B1 (en) | 2016-05-13 | 2017-06-13 | Micron Technology, Inc. | Magnetic tunnel junctions |
| CN114497268B (zh) * | 2020-10-26 | 2025-10-21 | Tdk株式会社 | 光检测元件及接收装置 |
| DE112022003362T5 (de) * | 2021-07-01 | 2024-05-02 | Sony Semiconductor Solutions Corporation | Magnetisches speicherelement und halbleitervorrichtung |
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| US20050041462A1 (en) * | 2003-08-19 | 2005-02-24 | Andrew Kent | High speed low power magnetic devices based on current induced spin-momentum transfer |
| JP2008010590A (ja) * | 2006-06-28 | 2008-01-17 | Toshiba Corp | 磁気抵抗素子及び磁気メモリ |
| JP2008041716A (ja) * | 2006-08-01 | 2008-02-21 | Ulvac Japan Ltd | 磁気抵抗素子、磁気抵抗素子の製造方法及び磁気抵抗素子の製造装置 |
| US20090080124A1 (en) * | 2007-09-25 | 2009-03-26 | Kabushiki Kaisha Toshiba | Magnetoresistive element and magnetoresistive random access memory including the same |
| KR100905737B1 (ko) * | 2007-12-07 | 2009-07-01 | 상지대학교산학협력단 | 수직자기이방성을 갖는 스핀밸브 자기저항소자 |
| US7777261B2 (en) * | 2005-09-20 | 2010-08-17 | Grandis Inc. | Magnetic device having stabilized free ferromagnetic layer |
| US20100240152A1 (en) * | 2006-11-01 | 2010-09-23 | Avalanche Technology, Inc. | Current-Confined Effect of Magnetic Nano-Current-Channel (NCC) for Magnetic Random Access Memory (MRAM) |
| US20110013448A1 (en) * | 2009-07-14 | 2011-01-20 | Crocus Technology | Magnetic element with a fast spin transfer torque writing procedure |
| US7939870B2 (en) * | 2007-11-27 | 2011-05-10 | Hitachi, Ltd. | Magnetoresistive device |
| US7973349B2 (en) * | 2005-09-20 | 2011-07-05 | Grandis Inc. | Magnetic device having multilayered free ferromagnetic layer |
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| US7471491B2 (en) | 2004-03-30 | 2008-12-30 | Kabushiki Kaisha Toshiba | Magnetic sensor having a frequency filter coupled to an output of a magnetoresistance element |
| US20080246104A1 (en) * | 2007-02-12 | 2008-10-09 | Yadav Technology | High Capacity Low Cost Multi-State Magnetic Memory |
| US8063459B2 (en) * | 2007-02-12 | 2011-11-22 | Avalanche Technologies, Inc. | Non-volatile magnetic memory element with graded layer |
| FR2904724B1 (fr) | 2006-08-03 | 2011-03-04 | Commissariat Energie Atomique | Dispositif magnetique en couches minces a forte polarisation en spin perpendiculaire au plan des couches, jonction tunnel magnetique et vanne de spin mettant en oeuvre un tel dispositif |
| US7869266B2 (en) | 2007-10-31 | 2011-01-11 | Avalanche Technology, Inc. | Low current switching magnetic tunnel junction design for magnetic memory using domain wall motion |
| DE102008048562A1 (de) | 2008-09-23 | 2010-04-29 | Knorr-Bremse Systeme für Schienenfahrzeuge GmbH | Ventilanordnung zur Brems- sowie Zusatzgeräteansteuerung einer pneumatischen Bremsanlage eines Fahrzeuges |
| US8223533B2 (en) | 2008-09-26 | 2012-07-17 | Kabushiki Kaisha Toshiba | Magnetoresistive effect device and magnetic memory |
| US8331141B2 (en) * | 2009-08-05 | 2012-12-11 | Alexander Mikhailovich Shukh | Multibit cell of magnetic random access memory with perpendicular magnetization |
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| JP5600344B2 (ja) | 2010-03-10 | 2014-10-01 | 株式会社日立製作所 | 磁気抵抗効果素子及び磁気メモリ |
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| JP2012146727A (ja) * | 2011-01-07 | 2012-08-02 | Sony Corp | 記憶素子及び記憶装置 |
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-
2011
- 2011-08-10 KR KR1020110079627A patent/KR101831931B1/ko active Active
-
2012
- 2012-02-16 US US13/398,640 patent/US8772846B2/en active Active
- 2012-06-27 DE DE102012105595.5A patent/DE102012105595B4/de active Active
- 2012-07-04 TW TW101124101A patent/TWI550604B/zh active
- 2012-08-02 JP JP2012171804A patent/JP6100482B2/ja active Active
- 2012-08-10 CN CN201210285196.4A patent/CN102956813B/zh active Active
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2014
- 2014-06-17 US US14/306,792 patent/US8987798B2/en active Active
-
2015
- 2015-02-10 US US14/618,534 patent/US9356228B2/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050041462A1 (en) * | 2003-08-19 | 2005-02-24 | Andrew Kent | High speed low power magnetic devices based on current induced spin-momentum transfer |
| US7777261B2 (en) * | 2005-09-20 | 2010-08-17 | Grandis Inc. | Magnetic device having stabilized free ferromagnetic layer |
| US7973349B2 (en) * | 2005-09-20 | 2011-07-05 | Grandis Inc. | Magnetic device having multilayered free ferromagnetic layer |
| JP2008010590A (ja) * | 2006-06-28 | 2008-01-17 | Toshiba Corp | 磁気抵抗素子及び磁気メモリ |
| JP2008041716A (ja) * | 2006-08-01 | 2008-02-21 | Ulvac Japan Ltd | 磁気抵抗素子、磁気抵抗素子の製造方法及び磁気抵抗素子の製造装置 |
| US20100240152A1 (en) * | 2006-11-01 | 2010-09-23 | Avalanche Technology, Inc. | Current-Confined Effect of Magnetic Nano-Current-Channel (NCC) for Magnetic Random Access Memory (MRAM) |
| US20090080124A1 (en) * | 2007-09-25 | 2009-03-26 | Kabushiki Kaisha Toshiba | Magnetoresistive element and magnetoresistive random access memory including the same |
| US7939870B2 (en) * | 2007-11-27 | 2011-05-10 | Hitachi, Ltd. | Magnetoresistive device |
| KR100905737B1 (ko) * | 2007-12-07 | 2009-07-01 | 상지대학교산학협력단 | 수직자기이방성을 갖는 스핀밸브 자기저항소자 |
| US20110013448A1 (en) * | 2009-07-14 | 2011-01-20 | Crocus Technology | Magnetic element with a fast spin transfer torque writing procedure |
Also Published As
| Publication number | Publication date |
|---|---|
| US8987798B2 (en) | 2015-03-24 |
| US20140297968A1 (en) | 2014-10-02 |
| KR20130017283A (ko) | 2013-02-20 |
| US9356228B2 (en) | 2016-05-31 |
| DE102012105595A1 (de) | 2013-02-14 |
| JP2013038421A (ja) | 2013-02-21 |
| TW201308324A (zh) | 2013-02-16 |
| KR101831931B1 (ko) | 2018-02-26 |
| CN102956813B (zh) | 2017-09-05 |
| US8772846B2 (en) | 2014-07-08 |
| US20150155477A1 (en) | 2015-06-04 |
| DE102012105595B4 (de) | 2021-10-07 |
| JP6100482B2 (ja) | 2017-03-22 |
| CN102956813A (zh) | 2013-03-06 |
| US20130042081A1 (en) | 2013-02-14 |
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