KR101831931B1 - 외인성 수직 자화 구조를 구비하는 자기 메모리 장치 - Google Patents

외인성 수직 자화 구조를 구비하는 자기 메모리 장치 Download PDF

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KR101831931B1
KR101831931B1 KR1020110079627A KR20110079627A KR101831931B1 KR 101831931 B1 KR101831931 B1 KR 101831931B1 KR 1020110079627 A KR1020110079627 A KR 1020110079627A KR 20110079627 A KR20110079627 A KR 20110079627A KR 101831931 B1 KR101831931 B1 KR 101831931B1
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South Korea
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magnetic
perpendicular magnetization
film
extrinsic
magnetization
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KR20130017283A (ko
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박정헌
이장은
오세충
김영현
박상환
임우창
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삼성전자주식회사
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Priority to KR1020110079627A priority Critical patent/KR101831931B1/ko
Priority to US13/398,640 priority patent/US8772846B2/en
Priority to DE102012105595.5A priority patent/DE102012105595B4/de
Priority to TW101124101A priority patent/TWI550604B/zh
Priority to JP2012171804A priority patent/JP6100482B2/ja
Priority to CN201210285196.4A priority patent/CN102956813B/zh
Publication of KR20130017283A publication Critical patent/KR20130017283A/ko
Priority to US14/306,792 priority patent/US8987798B2/en
Priority to US14/618,534 priority patent/US9356228B2/en
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Publication of KR101831931B1 publication Critical patent/KR101831931B1/ko
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F13/00Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units
    • G06F13/14Handling requests for interconnection or transfer
    • G06F13/16Handling requests for interconnection or transfer for access to memory bus
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1659Cell access
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • H10N50/85Materials of the active region

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Hall/Mr Elements (AREA)
KR1020110079627A 2011-08-10 2011-08-10 외인성 수직 자화 구조를 구비하는 자기 메모리 장치 Active KR101831931B1 (ko)

Priority Applications (8)

Application Number Priority Date Filing Date Title
KR1020110079627A KR101831931B1 (ko) 2011-08-10 2011-08-10 외인성 수직 자화 구조를 구비하는 자기 메모리 장치
US13/398,640 US8772846B2 (en) 2011-08-10 2012-02-16 Magnetic tunneling junction devices, memories, memory systems, and electronic devices
DE102012105595.5A DE102012105595B4 (de) 2011-08-10 2012-06-27 Magnetische Tunnelkontaktvorrichtungen, Speicher, Speichersysteme und elektronische Vorrichtungen
TW101124101A TWI550604B (zh) 2011-08-10 2012-07-04 磁隧接面裝置、記憶體、記憶體系統及電子裝置
JP2012171804A JP6100482B2 (ja) 2011-08-10 2012-08-02 磁気トンネリング接合装置、メモリ、メモリシステム及び電子装置
CN201210285196.4A CN102956813B (zh) 2011-08-10 2012-08-10 磁隧道结器件、存储器、存储系统及电子设备
US14/306,792 US8987798B2 (en) 2011-08-10 2014-06-17 Magnetic tunneling junction devices, memories, memory systems, and electronic devices
US14/618,534 US9356228B2 (en) 2011-08-10 2015-02-10 Magnetic tunneling junction devices, memories, memory systems, and electronic devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110079627A KR101831931B1 (ko) 2011-08-10 2011-08-10 외인성 수직 자화 구조를 구비하는 자기 메모리 장치

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KR20130017283A KR20130017283A (ko) 2013-02-20
KR101831931B1 true KR101831931B1 (ko) 2018-02-26

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US (3) US8772846B2 (https=)
JP (1) JP6100482B2 (https=)
KR (1) KR101831931B1 (https=)
CN (1) CN102956813B (https=)
DE (1) DE102012105595B4 (https=)
TW (1) TWI550604B (https=)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9299923B2 (en) * 2010-08-24 2016-03-29 Samsung Electronics Co., Ltd. Magnetic devices having perpendicular magnetic tunnel junction
KR101831931B1 (ko) * 2011-08-10 2018-02-26 삼성전자주식회사 외인성 수직 자화 구조를 구비하는 자기 메모리 장치
KR20130034260A (ko) * 2011-09-28 2013-04-05 에스케이하이닉스 주식회사 반도체 장치의 제조방법
US9007818B2 (en) 2012-03-22 2015-04-14 Micron Technology, Inc. Memory cells, semiconductor device structures, systems including such cells, and methods of fabrication
US8923038B2 (en) 2012-06-19 2014-12-30 Micron Technology, Inc. Memory cells, semiconductor device structures, memory systems, and methods of fabrication
US9054030B2 (en) 2012-06-19 2015-06-09 Micron Technology, Inc. Memory cells, semiconductor device structures, memory systems, and methods of fabrication
US9379315B2 (en) 2013-03-12 2016-06-28 Micron Technology, Inc. Memory cells, methods of fabrication, semiconductor device structures, and memory systems
JP6122353B2 (ja) * 2013-06-25 2017-04-26 ルネサスエレクトロニクス株式会社 半導体パッケージ
US9368714B2 (en) 2013-07-01 2016-06-14 Micron Technology, Inc. Memory cells, methods of operation and fabrication, semiconductor device structures, and memory systems
US9466787B2 (en) 2013-07-23 2016-10-11 Micron Technology, Inc. Memory cells, methods of fabrication, semiconductor device structures, memory systems, and electronic systems
JP6225835B2 (ja) * 2013-08-28 2017-11-08 株式会社デンソー 磁気抵抗素子およびそれを用いた磁気センサ
US9461242B2 (en) 2013-09-13 2016-10-04 Micron Technology, Inc. Magnetic memory cells, methods of fabrication, semiconductor devices, memory systems, and electronic systems
US9608197B2 (en) 2013-09-18 2017-03-28 Micron Technology, Inc. Memory cells, methods of fabrication, and semiconductor devices
JP2015061043A (ja) 2013-09-20 2015-03-30 株式会社東芝 抵抗変化メモリ
US10454024B2 (en) 2014-02-28 2019-10-22 Micron Technology, Inc. Memory cells, methods of fabrication, and memory devices
US9281466B2 (en) 2014-04-09 2016-03-08 Micron Technology, Inc. Memory cells, semiconductor structures, semiconductor devices, and methods of fabrication
US9269888B2 (en) 2014-04-18 2016-02-23 Micron Technology, Inc. Memory cells, methods of fabrication, and semiconductor devices
KR20160019253A (ko) * 2014-08-11 2016-02-19 에스케이하이닉스 주식회사 전자 장치
US9349945B2 (en) 2014-10-16 2016-05-24 Micron Technology, Inc. Memory cells, semiconductor devices, and methods of fabrication
KR102268187B1 (ko) 2014-11-10 2021-06-24 삼성전자주식회사 자기 기억 소자 및 그 제조 방법
US9768377B2 (en) 2014-12-02 2017-09-19 Micron Technology, Inc. Magnetic cell structures, and methods of fabrication
KR102376480B1 (ko) * 2014-12-17 2022-03-21 삼성전자주식회사 자기 메모리 장치 및 그의 형성방법
US10439131B2 (en) 2015-01-15 2019-10-08 Micron Technology, Inc. Methods of forming semiconductor devices including tunnel barrier materials
US9960346B2 (en) * 2015-05-07 2018-05-01 Micron Technology, Inc. Magnetic tunnel junctions
US10784045B2 (en) * 2015-09-15 2020-09-22 International Business Machines Corporation Laminated magnetic materials for on-chip magnetic inductors/transformers
US10430618B2 (en) * 2015-10-09 2019-10-01 George Mason University Vanishable logic to enhance circuit security
JP6713650B2 (ja) 2016-05-10 2020-06-24 国立研究開発法人物質・材料研究機構 垂直磁化膜と垂直磁化膜構造並びに磁気抵抗素子および垂直磁気記録媒体
US9680089B1 (en) 2016-05-13 2017-06-13 Micron Technology, Inc. Magnetic tunnel junctions
CN114497268B (zh) * 2020-10-26 2025-10-21 Tdk株式会社 光检测元件及接收装置
DE112022003362T5 (de) * 2021-07-01 2024-05-02 Sony Semiconductor Solutions Corporation Magnetisches speicherelement und halbleitervorrichtung

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090097169A1 (en) 2004-03-30 2009-04-16 Rie Sato Magnetic sensor, magnetic field sensing method, semagnetic recording head, and magnetic memory device
US20100080050A1 (en) 2008-09-26 2010-04-01 Kabushiki Kaisha Toshiba Magnetoresistive effect device and magnetic memory
JP2011061204A (ja) 2009-09-11 2011-03-24 Samsung Electronics Co Ltd 磁気メモリ素子
JP2011119755A (ja) 2011-02-03 2011-06-16 Toshiba Corp 磁気抵抗効果素子およびそれを用いた磁気ランダムアクセスメモリ
WO2011111473A1 (ja) 2010-03-10 2011-09-15 株式会社日立製作所 磁気抵抗効果素子及び磁気メモリ

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6980469B2 (en) * 2003-08-19 2005-12-27 New York University High speed low power magnetic devices based on current induced spin-momentum transfer
US7973349B2 (en) * 2005-09-20 2011-07-05 Grandis Inc. Magnetic device having multilayered free ferromagnetic layer
US7777261B2 (en) * 2005-09-20 2010-08-17 Grandis Inc. Magnetic device having stabilized free ferromagnetic layer
US20080246104A1 (en) * 2007-02-12 2008-10-09 Yadav Technology High Capacity Low Cost Multi-State Magnetic Memory
US7732881B2 (en) 2006-11-01 2010-06-08 Avalanche Technology, Inc. Current-confined effect of magnetic nano-current-channel (NCC) for magnetic random access memory (MRAM)
US8063459B2 (en) * 2007-02-12 2011-11-22 Avalanche Technologies, Inc. Non-volatile magnetic memory element with graded layer
JP2008010590A (ja) 2006-06-28 2008-01-17 Toshiba Corp 磁気抵抗素子及び磁気メモリ
JP2008041716A (ja) * 2006-08-01 2008-02-21 Ulvac Japan Ltd 磁気抵抗素子、磁気抵抗素子の製造方法及び磁気抵抗素子の製造装置
FR2904724B1 (fr) 2006-08-03 2011-03-04 Commissariat Energie Atomique Dispositif magnetique en couches minces a forte polarisation en spin perpendiculaire au plan des couches, jonction tunnel magnetique et vanne de spin mettant en oeuvre un tel dispositif
US7869266B2 (en) 2007-10-31 2011-01-11 Avalanche Technology, Inc. Low current switching magnetic tunnel junction design for magnetic memory using domain wall motion
JP2009081215A (ja) * 2007-09-25 2009-04-16 Toshiba Corp 磁気抵抗効果素子およびそれを用いた磁気ランダムアクセスメモリ
EP2065886A1 (en) * 2007-11-27 2009-06-03 Hitachi Ltd. Magnetoresistive device
KR100905737B1 (ko) 2007-12-07 2009-07-01 상지대학교산학협력단 수직자기이방성을 갖는 스핀밸브 자기저항소자
DE102008048562A1 (de) 2008-09-23 2010-04-29 Knorr-Bremse Systeme für Schienenfahrzeuge GmbH Ventilanordnung zur Brems- sowie Zusatzgeräteansteuerung einer pneumatischen Bremsanlage eines Fahrzeuges
US8102703B2 (en) 2009-07-14 2012-01-24 Crocus Technology Magnetic element with a fast spin transfer torque writing procedure
US8331141B2 (en) * 2009-08-05 2012-12-11 Alexander Mikhailovich Shukh Multibit cell of magnetic random access memory with perpendicular magnetization
KR101046939B1 (ko) 2009-09-02 2011-07-19 (주)거진아이템 지하철 공기 정화장치
KR101766899B1 (ko) * 2010-04-21 2017-08-10 삼성전자주식회사 자기 메모리 소자
US8300356B2 (en) * 2010-05-11 2012-10-30 Headway Technologies, Inc. CoFe/Ni Multilayer film with perpendicular anistropy for microwave assisted magnetic recording
US8374048B2 (en) 2010-08-11 2013-02-12 Grandis, Inc. Method and system for providing magnetic tunneling junction elements having a biaxial anisotropy
JP2012043967A (ja) * 2010-08-19 2012-03-01 Sony Corp 磁気メモリ素子
US8514525B2 (en) * 2010-09-13 2013-08-20 HGST Netherlands B.V. Current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) sensor with reference layer integrated in magnetic shield
JP5740878B2 (ja) * 2010-09-14 2015-07-01 ソニー株式会社 記憶素子、メモリ装置
KR101463948B1 (ko) * 2010-11-08 2014-11-27 삼성전자주식회사 자기 기억 소자
JP2012146727A (ja) * 2011-01-07 2012-08-02 Sony Corp 記憶素子及び記憶装置
US8947914B2 (en) * 2011-03-18 2015-02-03 Samsung Electronics Co., Ltd. Magnetic tunneling junction devices, memories, electronic systems, and memory systems, and methods of fabricating the same
US8754491B2 (en) * 2011-05-03 2014-06-17 International Business Machines Corporation Spin torque MRAM using bidirectional magnonic writing
US8508006B2 (en) * 2011-05-10 2013-08-13 Magic Technologies, Inc. Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications
KR20110074500A (ko) 2011-06-07 2011-06-30 손광수 나노선 배열 방법
FR2977999B1 (fr) 2011-07-12 2013-08-23 Thales Sa Oscillateur spintronique et utilisation de celui-ci dans des dispositifs radiofrequence
KR101831931B1 (ko) * 2011-08-10 2018-02-26 삼성전자주식회사 외인성 수직 자화 구조를 구비하는 자기 메모리 장치
US8885395B2 (en) * 2012-02-22 2014-11-11 Avalanche Technology, Inc. Magnetoresistive logic cell and method of use

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090097169A1 (en) 2004-03-30 2009-04-16 Rie Sato Magnetic sensor, magnetic field sensing method, semagnetic recording head, and magnetic memory device
US20100080050A1 (en) 2008-09-26 2010-04-01 Kabushiki Kaisha Toshiba Magnetoresistive effect device and magnetic memory
JP2011061204A (ja) 2009-09-11 2011-03-24 Samsung Electronics Co Ltd 磁気メモリ素子
WO2011111473A1 (ja) 2010-03-10 2011-09-15 株式会社日立製作所 磁気抵抗効果素子及び磁気メモリ
JP2011119755A (ja) 2011-02-03 2011-06-16 Toshiba Corp 磁気抵抗効果素子およびそれを用いた磁気ランダムアクセスメモリ

Also Published As

Publication number Publication date
US8987798B2 (en) 2015-03-24
US20140297968A1 (en) 2014-10-02
KR20130017283A (ko) 2013-02-20
US9356228B2 (en) 2016-05-31
DE102012105595A1 (de) 2013-02-14
JP2013038421A (ja) 2013-02-21
TW201308324A (zh) 2013-02-16
CN102956813B (zh) 2017-09-05
US8772846B2 (en) 2014-07-08
US20150155477A1 (en) 2015-06-04
DE102012105595B4 (de) 2021-10-07
JP6100482B2 (ja) 2017-03-22
CN102956813A (zh) 2013-03-06
US20130042081A1 (en) 2013-02-14
TWI550604B (zh) 2016-09-21

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