TWI517572B - 具有結合厚度及寬度振動模式之壓電共振器 - Google Patents

具有結合厚度及寬度振動模式之壓電共振器 Download PDF

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Publication number
TWI517572B
TWI517572B TW101134972A TW101134972A TWI517572B TW I517572 B TWI517572 B TW I517572B TW 101134972 A TW101134972 A TW 101134972A TW 101134972 A TW101134972 A TW 101134972A TW I517572 B TWI517572 B TW I517572B
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TW
Taiwan
Prior art keywords
electrodes
piezoelectric
piezoelectric resonator
width
vibration
Prior art date
Application number
TW101134972A
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English (en)
Chinese (zh)
Other versions
TW201325082A (zh
Inventor
左誠杰
羅智昇
周山虎
運長漢
金龍海
Original Assignee
高通公司
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Application filed by 高通公司 filed Critical 高通公司
Publication of TW201325082A publication Critical patent/TW201325082A/zh
Application granted granted Critical
Publication of TWI517572B publication Critical patent/TWI517572B/zh

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
TW101134972A 2011-09-23 2012-09-24 具有結合厚度及寬度振動模式之壓電共振器 TWI517572B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/241,356 US8987976B2 (en) 2011-09-23 2011-09-23 Piezoelectric resonator having combined thickness and width vibrational modes

Publications (2)

Publication Number Publication Date
TW201325082A TW201325082A (zh) 2013-06-16
TWI517572B true TWI517572B (zh) 2016-01-11

Family

ID=47046844

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101134972A TWI517572B (zh) 2011-09-23 2012-09-24 具有結合厚度及寬度振動模式之壓電共振器

Country Status (10)

Country Link
US (1) US8987976B2 (enExample)
EP (1) EP2759058A1 (enExample)
JP (1) JP2014531833A (enExample)
KR (1) KR20140078702A (enExample)
CN (1) CN103828233A (enExample)
AR (1) AR088013A1 (enExample)
BR (1) BR112014006925A2 (enExample)
IN (1) IN2014CN01544A (enExample)
TW (1) TWI517572B (enExample)
WO (1) WO2013044262A1 (enExample)

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JP6424901B2 (ja) * 2015-01-16 2018-11-21 株式会社村田製作所 共振子
US10476476B2 (en) * 2016-12-15 2019-11-12 Murata Manufacturing Co., Ltd. MEMS resonator with suppressed spurious modes
KR102434704B1 (ko) 2017-08-04 2022-08-22 삼성전자주식회사 전방향 음향 센서
WO2019070265A1 (en) 2017-10-05 2019-04-11 Google Llc LOW-DIMENSIONAL RESONATOR IN RETURNED CHIP GEOMETRY
US10356523B2 (en) * 2017-12-13 2019-07-16 Nvf Tech Ltd Distributed mode loudspeaker actuator including patterned electrodes
US10477321B2 (en) * 2018-03-05 2019-11-12 Google Llc Driving distributed mode loudspeaker actuator that includes patterned electrodes
US11381212B2 (en) * 2018-03-21 2022-07-05 Qorvo Us, Inc. Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same
WO2020133316A1 (zh) * 2018-12-29 2020-07-02 天津大学 一种拆分结构谐振器
KR102472120B1 (ko) * 2019-05-03 2022-11-28 메이 선 테크놀로지 씨오 엘티디 의사-압전 d33 진동 장치 및 이를 통합하는 디스플레이
US11545612B2 (en) 2019-05-03 2023-01-03 May Sun Technology Co., Ltd. Pseudo-piezoelectric D33 device and electronic device using the same
CN118371418B (zh) * 2024-04-24 2025-05-06 上海心弘生命科学有限公司 一种二维复合振动的超声换能器及其设计方法

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Also Published As

Publication number Publication date
KR20140078702A (ko) 2014-06-25
JP2014531833A (ja) 2014-11-27
AR088013A1 (es) 2014-04-30
US20130076209A1 (en) 2013-03-28
BR112014006925A2 (pt) 2017-04-04
TW201325082A (zh) 2013-06-16
CN103828233A (zh) 2014-05-28
IN2014CN01544A (enExample) 2015-05-08
US8987976B2 (en) 2015-03-24
EP2759058A1 (en) 2014-07-30
WO2013044262A1 (en) 2013-03-28

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