JP2014531833A - 組み合わされた厚み振動モードと幅振動モードを有する圧電共振器 - Google Patents

組み合わされた厚み振動モードと幅振動モードを有する圧電共振器 Download PDF

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JP2014531833A
JP2014531833A JP2014532085A JP2014532085A JP2014531833A JP 2014531833 A JP2014531833 A JP 2014531833A JP 2014532085 A JP2014532085 A JP 2014532085A JP 2014532085 A JP2014532085 A JP 2014532085A JP 2014531833 A JP2014531833 A JP 2014531833A
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electrodes
piezoelectric resonator
vibration mode
piezoelectric
width
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Japanese (ja)
Inventor
チェンジエ・ズオ
チ・シュン・ロ
サンフン・ジョ
チャンハン・ユン
ジョンヘ・キム
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クアルコム，インコーポレイテッド
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2014532085A 2011-09-23 2012-09-24 組み合わされた厚み振動モードと幅振動モードを有する圧電共振器 Pending JP2014531833A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/241,356 US8987976B2 (en) 2011-09-23 2011-09-23 Piezoelectric resonator having combined thickness and width vibrational modes
US13/241,356 2011-09-23
PCT/US2012/056962 WO2013044262A1 (en) 2011-09-23 2012-09-24 Piezoelectric resonator having combined thickness and width vibrational modes

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JP2014531833A true JP2014531833A (ja) 2014-11-27

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JP2014532085A Pending JP2014531833A (ja) 2011-09-23 2012-09-24 組み合わされた厚み振動モードと幅振動モードを有する圧電共振器

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Country Link
US (1) US8987976B2 (enExample)
EP (1) EP2759058A1 (enExample)
JP (1) JP2014531833A (enExample)
KR (1) KR20140078702A (enExample)
CN (1) CN103828233A (enExample)
AR (1) AR088013A1 (enExample)
BR (1) BR112014006925A2 (enExample)
IN (1) IN2014CN01544A (enExample)
TW (1) TWI517572B (enExample)
WO (1) WO2013044262A1 (enExample)

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* Cited by examiner, † Cited by third party
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JPWO2016114237A1 (ja) * 2015-01-16 2017-05-25 株式会社村田製作所 共振子

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US20130120082A1 (en) * 2011-11-10 2013-05-16 Qualcomm Incorporated Two-port resonators electrically coupled in parallel
US9917571B2 (en) * 2014-06-13 2018-03-13 Georgia Tech Research Corporation Resonant gyroscopes and methods of making and using the same
US10476476B2 (en) * 2016-12-15 2019-11-12 Murata Manufacturing Co., Ltd. MEMS resonator with suppressed spurious modes
KR102434704B1 (ko) 2017-08-04 2022-08-22 삼성전자주식회사 전방향 음향 센서
WO2019070265A1 (en) 2017-10-05 2019-04-11 Google Llc LOW-DIMENSIONAL RESONATOR IN RETURNED CHIP GEOMETRY
US10356523B2 (en) * 2017-12-13 2019-07-16 Nvf Tech Ltd Distributed mode loudspeaker actuator including patterned electrodes
US10477321B2 (en) * 2018-03-05 2019-11-12 Google Llc Driving distributed mode loudspeaker actuator that includes patterned electrodes
US11381212B2 (en) * 2018-03-21 2022-07-05 Qorvo Us, Inc. Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same
WO2020133316A1 (zh) * 2018-12-29 2020-07-02 天津大学 一种拆分结构谐振器
KR102472120B1 (ko) * 2019-05-03 2022-11-28 메이 선 테크놀로지 씨오 엘티디 의사-압전 d33 진동 장치 및 이를 통합하는 디스플레이
US11545612B2 (en) 2019-05-03 2023-01-03 May Sun Technology Co., Ltd. Pseudo-piezoelectric D33 device and electronic device using the same
CN118371418B (zh) * 2024-04-24 2025-05-06 上海心弘生命科学有限公司 一种二维复合振动的超声换能器及其设计方法

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JPS5590116A (en) * 1978-12-27 1980-07-08 Noto Denshi Kogyo Kk Piezoelectric device
JPS56141700A (en) * 1980-04-04 1981-11-05 Nec Corp Piezo-oscillator
JPS58188917A (ja) * 1982-04-28 1983-11-04 Tdk Corp 圧電フイルタ及びその製造方法
JPS60260849A (ja) * 1984-05-22 1985-12-24 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン 超音波変換装置
JPH05129873A (ja) * 1991-11-08 1993-05-25 Seiko Electronic Components Ltd 幅縦水晶振動子
JPH06338641A (ja) * 1993-05-28 1994-12-06 Nec Corp 圧電磁器トランス及びその駆動方法
JP2001007676A (ja) * 1999-06-24 2001-01-12 Toyo Commun Equip Co Ltd 短冊形ａｔカット水晶振動子
JP2001119267A (ja) * 1999-10-21 2001-04-27 Toyo Commun Equip Co Ltd 平衡型二重モード圧電フィルタ
JP2003060480A (ja) * 2001-08-21 2003-02-28 Toyo Commun Equip Co Ltd 超薄板ａｔカット水晶共振素子
JP2006270770A (ja) * 2005-03-25 2006-10-05 Sanyo Electric Co Ltd 薄膜バルク波素子および高周波デバイス
WO2006103852A1 (ja) * 2005-03-28 2006-10-05 Murata Manufacturing Co., Ltd. 厚み縦圧電共振子
JP2007181087A (ja) * 2005-12-28 2007-07-12 Toshiba Corp 薄膜圧電共振器およびフィルタ回路
JP2008179525A (ja) * 2006-12-25 2008-08-07 Kyocera Corp 圧電磁器および圧電素子
JP2008543157A (ja) * 2005-05-27 2008-11-27 エヌエックスピー ビー ヴィ バルク音波共振器装置

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DE1591330B2 (de) * 1966-09-30 1972-05-25 Nippon Electric Co. Ltd., Tokio Piezoelektrischer biegeschwinger
GB2044527B (en) * 1978-12-27 1983-05-25 Murata Manufacturing Co Piezoelectric unit and device
US5118982A (en) 1989-05-31 1992-06-02 Nec Corporation Thickness mode vibration piezoelectric transformer
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JP3266031B2 (ja) 1996-04-18 2002-03-18 株式会社村田製作所 圧電共振子およびそれを用いた電子部品
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JPH11201758A (ja) * 1998-01-13 1999-07-30 Nikon Corp 圧電振動子及びこれを用いた圧電振動角速度計
US6118206A (en) * 1998-12-16 2000-09-12 Toda; Kohji Piezoelectric signal converter
JP3987744B2 (ja) * 2002-03-25 2007-10-10 敏夫 小川 ドメイン制御圧電単結晶素子
KR100628812B1 (ko) * 2003-05-21 2006-09-26 제이에프이 미네랄 가부시키가이샤 압전단결정 소자와 그 제조방법
WO2005035840A1 (ja) * 2003-10-14 2005-04-21 Jfe Mineral Company, Ltd. 圧電単結晶、圧電単結晶素子およびその製造方法
US7176770B2 (en) 2004-08-24 2007-02-13 Georgia Tech Research Corp. Capacitive vertical silicon bulk acoustic resonator
DE102005061344A1 (de) 2005-12-21 2007-06-28 Epcos Ag Mit akustischen Volumenwellen arbeitender Resonator
JP4305542B2 (ja) 2006-08-09 2009-07-29 エプソントヨコム株式会社 Ａｔカット水晶振動片及びその製造方法

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353393A (en) * 1976-10-25 1978-05-15 Matsushita Electric Ind Co Ltd Ultrasonic probe
JPS5590116A (en) * 1978-12-27 1980-07-08 Noto Denshi Kogyo Kk Piezoelectric device
JPS56141700A (en) * 1980-04-04 1981-11-05 Nec Corp Piezo-oscillator
JPS58188917A (ja) * 1982-04-28 1983-11-04 Tdk Corp 圧電フイルタ及びその製造方法
JPS60260849A (ja) * 1984-05-22 1985-12-24 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン 超音波変換装置
JPH05129873A (ja) * 1991-11-08 1993-05-25 Seiko Electronic Components Ltd 幅縦水晶振動子
JPH06338641A (ja) * 1993-05-28 1994-12-06 Nec Corp 圧電磁器トランス及びその駆動方法
JP2001007676A (ja) * 1999-06-24 2001-01-12 Toyo Commun Equip Co Ltd 短冊形ａｔカット水晶振動子
JP2001119267A (ja) * 1999-10-21 2001-04-27 Toyo Commun Equip Co Ltd 平衡型二重モード圧電フィルタ
JP2003060480A (ja) * 2001-08-21 2003-02-28 Toyo Commun Equip Co Ltd 超薄板ａｔカット水晶共振素子
JP2006270770A (ja) * 2005-03-25 2006-10-05 Sanyo Electric Co Ltd 薄膜バルク波素子および高周波デバイス
WO2006103852A1 (ja) * 2005-03-28 2006-10-05 Murata Manufacturing Co., Ltd. 厚み縦圧電共振子
JP2008543157A (ja) * 2005-05-27 2008-11-27 エヌエックスピー ビー ヴィ バルク音波共振器装置
JP2007181087A (ja) * 2005-12-28 2007-07-12 Toshiba Corp 薄膜圧電共振器およびフィルタ回路
JP2008179525A (ja) * 2006-12-25 2008-08-07 Kyocera Corp 圧電磁器および圧電素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016114237A1 (ja) * 2015-01-16 2017-05-25 株式会社村田製作所 共振子

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KR20140078702A (ko) 2014-06-25
AR088013A1 (es) 2014-04-30
US20130076209A1 (en) 2013-03-28
BR112014006925A2 (pt) 2017-04-04
TW201325082A (zh) 2013-06-16
TWI517572B (zh) 2016-01-11
CN103828233A (zh) 2014-05-28
IN2014CN01544A (enExample) 2015-05-08
US8987976B2 (en) 2015-03-24
EP2759058A1 (en) 2014-07-30
WO2013044262A1 (en) 2013-03-28

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