JP6424901B2 - 共振子 - Google Patents
共振子 Download PDFInfo
- Publication number
- JP6424901B2 JP6424901B2 JP2016569345A JP2016569345A JP6424901B2 JP 6424901 B2 JP6424901 B2 JP 6424901B2 JP 2016569345 A JP2016569345 A JP 2016569345A JP 2016569345 A JP2016569345 A JP 2016569345A JP 6424901 B2 JP6424901 B2 JP 6424901B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- electrode film
- longitudinal direction
- center line
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000006073 displacement reaction Methods 0.000 claims description 19
- 239000010408 film Substances 0.000 description 56
- 238000005452 bending Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 238000004088 simulation Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 238000012795 verification Methods 0.000 description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- -1 scandium aluminum Chemical compound 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
- H03H9/2452—Free-free beam resonators
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
振動部は、所定の方向に並んで配置された少なくとも4つの振動領域であって、各振動領域が、隣接する他の振動領域に対して逆位相で振動する、少なくとも4つの振動領域と、振動領域の各々に形成された電極膜と、を有しており、
電極膜の所定の方向における中心線が、当該電極膜が形成された振動領域の所定の方向における中心線からずれる。
振動部は、所定の方向に並んで配置された少なくとも4つの振動領域であって、各振動領域が、隣接する他の振動領域に対して逆位相で振動する、少なくとも4つの振動領域を有しており、
支持部の所定の方向における中心線が、当該支持部が接続された振動領域の所定の方向における中心線からずれる。
13a 振動子(圧電振動子)
14 支持枠
15 振動部
15a〜15d 振動領域
16a 支持部
16b 支持部
25 電極膜(上側電極膜)
L1 中心線
L2 中心線
Claims (6)
- 支持枠と、
長手方向及び短手方向を有する矩形の振動部であって、前記長手方向に沿って互いに平行
に延びる第1辺及び第2辺を有し、前記長手方向において幅拡がりモードで輪郭振動する
矩形の振動部と、
前記振動部の前記第1辺及び前記第2辺と前記支持枠とをそれぞれ接続する2対の支持
部と、を備え、
前記振動部は、
前記長手方向に並んで配置されるとともに前記長手方向においてそれぞれ同一の幅を有
する少なくとも4つの振動領域であって、各振動領域が、隣接する他の振動領域に対して
逆位相で振動する、少なくとも4つの振動領域と、
前記振動領域の各々に形成された電極膜と、を有しており、
前記電極膜の前記長手方向における中心線が、当該電極膜が形成された前記振動領域の
前記長手方向における中心線からずれる、共振子。 - 前記電極膜の前記長手方向における中心線が、当該電極膜が形成された前記振動領域に
おける変位最小点を通る、請求項1に記載の共振子。 - 前記支持部の前記長手方向における中心線が、当該支持部が接続された前記振動領域の
前記長手方向における中心線からずれる、請求項1又は2に記載の共振子。 - 前記支持部の前記長手方向における中心線が、当該支持部が接続された前記振動領域の
前記電極膜の前記長手方向における中心線に一致する、請求項3に記載の共振子。 - 前記電極膜の前記長手方向における幅は、当該電極膜が形成された前記振動領域の前記
長手方向における幅に対して0.6以上0.9以下の比率を有する大きさに設定される、
請求項1〜4のいずれか1項に記載の共振子。 - 前記比率は0.7以上0.8以下である、請求項5に記載の共振子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015007029 | 2015-01-16 | ||
JP2015007029 | 2015-01-16 | ||
PCT/JP2016/050545 WO2016114237A1 (ja) | 2015-01-16 | 2016-01-08 | 共振子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016114237A1 JPWO2016114237A1 (ja) | 2017-05-25 |
JP6424901B2 true JP6424901B2 (ja) | 2018-11-21 |
Family
ID=56405784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016569345A Active JP6424901B2 (ja) | 2015-01-16 | 2016-01-08 | 共振子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10707831B2 (ja) |
JP (1) | JP6424901B2 (ja) |
CN (1) | CN106797208B (ja) |
WO (1) | WO2016114237A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10476476B2 (en) * | 2016-12-15 | 2019-11-12 | Murata Manufacturing Co., Ltd. | MEMS resonator with suppressed spurious modes |
FI128436B (en) * | 2018-02-08 | 2020-05-15 | Tikitin Oy | MEMS resonator |
WO2020153287A1 (ja) * | 2019-01-24 | 2020-07-30 | 株式会社村田製作所 | 共振子及び共振装置 |
CN113631499B (zh) * | 2019-04-18 | 2024-08-09 | 株式会社村田制作所 | 谐振装置以及谐振装置制造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5492089A (en) * | 1977-12-29 | 1979-07-20 | Seiko Instr & Electronics Ltd | Electrostrictive oscillator |
JP3139273B2 (ja) * | 1993-04-14 | 2001-02-26 | 株式会社村田製作所 | 幅拡がりモードを利用した共振子、圧電共振部品及び圧電フィルタ |
US5541469A (en) | 1993-04-14 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Resonator utilizing width expansion mode |
CN1050247C (zh) * | 1993-04-14 | 2000-03-08 | 株式会社村田制作所 | 采用宽度扩展振动方式的振动器、谐振器和谐振元件 |
US5430342A (en) * | 1993-04-27 | 1995-07-04 | Watson Industries, Inc. | Single bar type vibrating element angular rate sensor system |
US5365138A (en) * | 1993-12-02 | 1994-11-15 | Northern Telecom Limited | Double mode surface wave resonators |
DE69832843T2 (de) * | 1997-05-28 | 2006-07-27 | Murata Mfg. Co., Ltd., Nagaokakyo | Vibrationskreisel |
JP3613117B2 (ja) * | 2000-02-23 | 2005-01-26 | 株式会社村田製作所 | 振動子及びそれを用いた振動ジャイロ及びそれを用いた電子装置 |
JP4531953B2 (ja) * | 2000-08-31 | 2010-08-25 | 京セラキンセキ株式会社 | 小型矩形圧電振動子 |
JP4665242B2 (ja) * | 2005-01-24 | 2011-04-06 | リバーエレテック株式会社 | 輪郭振動圧電デバイス |
US7639105B2 (en) | 2007-01-19 | 2009-12-29 | Georgia Tech Research Corporation | Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators |
JP2008228195A (ja) * | 2007-03-15 | 2008-09-25 | Epson Toyocom Corp | 輪郭滑り振動片、輪郭滑り振動デバイスおよび輪郭滑り振動片の製造方法 |
US8987976B2 (en) * | 2011-09-23 | 2015-03-24 | Qualcomm Incorporated | Piezoelectric resonator having combined thickness and width vibrational modes |
JP5949445B2 (ja) * | 2012-10-26 | 2016-07-06 | 株式会社大真空 | 圧電フィルタ |
US10938375B2 (en) * | 2015-03-31 | 2021-03-02 | Murata Manufacturing Co, Ltd. | Resonator |
-
2016
- 2016-01-08 WO PCT/JP2016/050545 patent/WO2016114237A1/ja active Application Filing
- 2016-01-08 CN CN201680003178.9A patent/CN106797208B/zh active Active
- 2016-01-08 JP JP2016569345A patent/JP6424901B2/ja active Active
-
2017
- 2017-04-10 US US15/483,161 patent/US10707831B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN106797208B (zh) | 2020-03-20 |
WO2016114237A1 (ja) | 2016-07-21 |
CN106797208A (zh) | 2017-05-31 |
US20170222621A1 (en) | 2017-08-03 |
JPWO2016114237A1 (ja) | 2017-05-25 |
US10707831B2 (en) | 2020-07-07 |
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