TWI516430B - 板狀體搬送裝置 - Google Patents

板狀體搬送裝置 Download PDF

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Publication number
TWI516430B
TWI516430B TW100139342A TW100139342A TWI516430B TW I516430 B TWI516430 B TW I516430B TW 100139342 A TW100139342 A TW 100139342A TW 100139342 A TW100139342 A TW 100139342A TW I516430 B TWI516430 B TW I516430B
Authority
TW
Taiwan
Prior art keywords
air
plate
guide plate
air supply
banner
Prior art date
Application number
TW100139342A
Other languages
English (en)
Chinese (zh)
Other versions
TW201245021A (en
Inventor
中尾多通夫
飯塚雪夫
辻起久
齋田克彥
池田大介
Original Assignee
大福股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大福股份有限公司 filed Critical 大福股份有限公司
Publication of TW201245021A publication Critical patent/TW201245021A/zh
Application granted granted Critical
Publication of TWI516430B publication Critical patent/TWI516430B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
TW100139342A 2010-12-06 2011-10-28 板狀體搬送裝置 TWI516430B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010271829A JP5440875B2 (ja) 2010-12-06 2010-12-06 板状体搬送装置

Publications (2)

Publication Number Publication Date
TW201245021A TW201245021A (en) 2012-11-16
TWI516430B true TWI516430B (zh) 2016-01-11

Family

ID=46403477

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100139342A TWI516430B (zh) 2010-12-06 2011-10-28 板狀體搬送裝置

Country Status (4)

Country Link
JP (1) JP5440875B2 (ja)
KR (1) KR101536188B1 (ja)
CN (1) CN102556565B (ja)
TW (1) TWI516430B (ja)

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0650455B1 (en) * 1992-07-15 1996-09-18 Minnesota Mining And Manufacturing Company Fluid transport system for transporting articles
JP3339909B2 (ja) * 1993-04-21 2002-10-28 新日本製鐵株式会社 流体浮上装置
JP2000021949A (ja) * 1998-07-03 2000-01-21 Tabai Espec Corp 非接触式ワーク浮上搬送用構造体
JP3643725B2 (ja) * 1999-05-06 2005-04-27 三菱重工業株式会社 枚葉印刷機のシートガイド
JP2001007187A (ja) * 1999-06-25 2001-01-12 Sony Corp 基板搬送装置
JP4313080B2 (ja) * 2003-04-02 2009-08-12 第一施設工業株式会社 非接触浮上ユニット
JP4258713B2 (ja) * 2003-07-08 2009-04-30 株式会社ダイフク 板状体搬送装置
JP4251279B2 (ja) * 2003-04-14 2009-04-08 株式会社ダイフク 板状体搬送装置
KR100592675B1 (ko) * 2003-11-11 2006-06-26 삼성전자주식회사 기판이송장치
JP2005191553A (ja) * 2003-12-01 2005-07-14 Smc Corp ワーク浮上装置
JP2007088398A (ja) * 2004-12-14 2007-04-05 Realize Advanced Technology Ltd 洗浄装置、この洗浄装置を用いた洗浄システム、及び被洗浄基板の洗浄方法
JP2007238193A (ja) * 2006-03-06 2007-09-20 Kanto Auto Works Ltd 物品の搬送装置
JP5119561B2 (ja) * 2007-08-10 2013-01-16 シンフォニアテクノロジー株式会社 エア浮上搬送装置、エア浮上ユニット、エア浮上搬送方法
JP2008130892A (ja) * 2006-11-22 2008-06-05 Shinko Electric Co Ltd エア浮上搬送装置、およびエア搬送方法
JP2010034309A (ja) * 2008-07-29 2010-02-12 Dainippon Screen Mfg Co Ltd 塗布装置および基板処理システム

Also Published As

Publication number Publication date
CN102556565B (zh) 2015-09-02
CN102556565A (zh) 2012-07-11
JP2012121642A (ja) 2012-06-28
KR20120062620A (ko) 2012-06-14
KR101536188B1 (ko) 2015-07-13
TW201245021A (en) 2012-11-16
JP5440875B2 (ja) 2014-03-12

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