TWI505041B - 照明光學系統，曝光設備，及裝置製造方法 - Google Patents
照明光學系統，曝光設備，及裝置製造方法 Download PDFInfo
- Publication number
- TWI505041B TWI505041B TW102110042A TW102110042A TWI505041B TW I505041 B TWI505041 B TW I505041B TW 102110042 A TW102110042 A TW 102110042A TW 102110042 A TW102110042 A TW 102110042A TW I505041 B TWI505041 B TW I505041B
- Authority
- TW
- Taiwan
- Prior art keywords
- offset
- illuminated
- aperture
- illumination
- optical system
- Prior art date
Links
- 238000005286 illumination Methods 0.000 title claims description 163
- 230000003287 optical effect Effects 0.000 title claims description 61
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000004364 calculation method Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 10
- 210000001747 pupil Anatomy 0.000 claims description 9
- 230000004075 alteration Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 3
- 238000009826 distribution Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000007493 shaping process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000003504 photosensitizing agent Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229940095676 wafer product Drugs 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70133—Measurement of illumination distribution, in pupil plane or field plane
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70066—Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Elements Other Than Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012086851A JP6023451B2 (ja) | 2012-04-05 | 2012-04-05 | 照明光学系、露光装置及びデバイス製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201341974A TW201341974A (zh) | 2013-10-16 |
| TWI505041B true TWI505041B (zh) | 2015-10-21 |
Family
ID=49292054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102110042A TWI505041B (zh) | 2012-04-05 | 2013-03-21 | 照明光學系統，曝光設備，及裝置製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9140991B2 (enExample) |
| JP (1) | JP6023451B2 (enExample) |
| KR (1) | KR101633317B1 (enExample) |
| TW (1) | TWI505041B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105632971B (zh) * | 2014-11-26 | 2019-06-25 | 上海微电子装备（集团）股份有限公司 | 一种硅片处理装置及方法 |
| TWI571710B (zh) * | 2014-12-30 | 2017-02-21 | 力晶科技股份有限公司 | 曝光機台對準光源裝置內的模組作動監控方法及監控系統 |
| JP6661270B2 (ja) * | 2015-01-16 | 2020-03-11 | キヤノン株式会社 | 露光装置、露光システム、および物品の製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08241860A (ja) * | 1996-02-13 | 1996-09-17 | Nikon Corp | フォトリソグラフィ装置及び露光方法 |
| JP2000243681A (ja) * | 1999-02-17 | 2000-09-08 | Nikon Corp | 投影露光装置及び該投影露光装置を用いた露光方法 |
| JP2000252193A (ja) * | 1999-03-01 | 2000-09-14 | Canon Inc | 露光装置、露光方法およびデバイス製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2503451B2 (ja) * | 1985-12-26 | 1996-06-05 | 株式会社ニコン | 投影露光方法及び装置 |
| JPH0471217A (ja) * | 1990-07-11 | 1992-03-05 | Nec Yamagata Ltd | 露光装置 |
| JPH1126379A (ja) * | 1997-05-09 | 1999-01-29 | Canon Inc | 露光装置およびデバイス製造方法 |
| JPH11251219A (ja) * | 1998-03-02 | 1999-09-17 | Nikon Corp | 露光装置、露光方法及びディスプレイ装置の製造方法 |
| WO1999063585A1 (en) * | 1998-06-02 | 1999-12-09 | Nikon Corporation | Scanning aligner, method of manufacture thereof, and method of manufacturing device |
| JP4174660B2 (ja) * | 2000-12-28 | 2008-11-05 | 株式会社ニコン | 露光方法及び装置、プログラム及び情報記録媒体、並びにデバイス製造方法 |
| JP4497949B2 (ja) | 2004-02-12 | 2010-07-07 | キヤノン株式会社 | 露光装置 |
| JP2008304834A (ja) * | 2007-06-11 | 2008-12-18 | Dainippon Screen Mfg Co Ltd | パターン描画装置および歪み補正方法 |
| JP2010186761A (ja) * | 2009-02-10 | 2010-08-26 | Canon Inc | 露光装置、露光方法及びデバイス製造方法 |
-
2012
- 2012-04-05 JP JP2012086851A patent/JP6023451B2/ja active Active
-
2013
- 2013-03-15 US US13/832,706 patent/US9140991B2/en active Active
- 2013-03-21 TW TW102110042A patent/TWI505041B/zh active
- 2013-04-03 KR KR1020130036122A patent/KR101633317B1/ko active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08241860A (ja) * | 1996-02-13 | 1996-09-17 | Nikon Corp | フォトリソグラフィ装置及び露光方法 |
| JP2000243681A (ja) * | 1999-02-17 | 2000-09-08 | Nikon Corp | 投影露光装置及び該投影露光装置を用いた露光方法 |
| JP2000252193A (ja) * | 1999-03-01 | 2000-09-14 | Canon Inc | 露光装置、露光方法およびデバイス製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6023451B2 (ja) | 2016-11-09 |
| KR101633317B1 (ko) | 2016-06-24 |
| TW201341974A (zh) | 2013-10-16 |
| JP2013219117A (ja) | 2013-10-24 |
| US9140991B2 (en) | 2015-09-22 |
| KR20130113378A (ko) | 2013-10-15 |
| US20130265559A1 (en) | 2013-10-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9726981B2 (en) | Exposure apparatus, exposure method, and device manufacturing method | |
| JPWO2008132799A1 (ja) | 計測方法、露光方法及びデバイス製造方法 | |
| JP2019204058A (ja) | 評価方法、露光方法、および物品製造方法 | |
| TWI505041B (zh) | 照明光學系統，曝光設備，及裝置製造方法 | |
| JP6243616B2 (ja) | 露光装置および物品の製造方法 | |
| JP6139870B2 (ja) | 露光方法、露光装置および物品の製造方法 | |
| TW202207276A (zh) | 調整方法、曝光方法、曝光裝置及物品製造方法 | |
| JP5773735B2 (ja) | 露光装置、および、デバイス製造方法 | |
| JP2013219117A5 (enExample) | ||
| CN116482946A (zh) | 曝光方法、曝光装置以及物品的制造方法 | |
| JP5632685B2 (ja) | 露光装置及びデバイス製造方法 | |
| TWI888685B (zh) | 曝光裝置、曝光方法及物品之製造方法 | |
| CN109307987A (zh) | 曝光装置和物品制造方法 | |
| JP6570298B2 (ja) | 照明光学系及び露光装置並びにデバイス製造方法 | |
| KR20200028845A (ko) | 노광 방법, 노광 장치, 및 물품 제조 방법 | |
| TW201812479A (zh) | 照明光學系統、曝光裝置及物品製造方法 | |
| JP2017026743A (ja) | 露光装置および露光方法、ならびに物品の製造方法 | |
| JP2024130254A (ja) | 照明光学系の調整方法、照明光学系、露光装置、および物品製造方法 | |
| JP6501680B2 (ja) | 露光方法、露光装置及び物品の製造方法 | |
| TW201544913A (zh) | 曝光設備、曝光方法、和製造裝置的方法 | |
| JP2016224375A (ja) | 露光装置及び物品の製造方法 | |
| JP2013239639A (ja) | 露光装置及びその調整方法、パターンのずれの計測方法、並びに、デバイス製造方法 | |
| CN107807494A (zh) | 照明光学系统、曝光装置以及物品制造方法 | |
| JP2023136106A (ja) | 計測装置、露光装置、及び物品の製造方法 | |
| CN117170190A (zh) | 曝光装置、物品的制造方法以及曝光方法 |