TWI480216B - Sheet conveyance system - Google Patents

Sheet conveyance system Download PDF

Info

Publication number
TWI480216B
TWI480216B TW101142316A TW101142316A TWI480216B TW I480216 B TWI480216 B TW I480216B TW 101142316 A TW101142316 A TW 101142316A TW 101142316 A TW101142316 A TW 101142316A TW I480216 B TWI480216 B TW I480216B
Authority
TW
Taiwan
Prior art keywords
delivery device
sheet
conveying
plate
plate glass
Prior art date
Application number
TW101142316A
Other languages
English (en)
Chinese (zh)
Other versions
TW201318943A (zh
Inventor
久下守正
田中秀幸
高原一典
過田京史
Original Assignee
川崎重工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 川崎重工業股份有限公司 filed Critical 川崎重工業股份有限公司
Publication of TW201318943A publication Critical patent/TW201318943A/zh
Application granted granted Critical
Publication of TWI480216B publication Critical patent/TWI480216B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3222—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
TW101142316A 2011-11-14 2012-11-14 Sheet conveyance system TWI480216B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011248753A JP5931409B2 (ja) 2011-11-14 2011-11-14 板材の搬送システム

Publications (2)

Publication Number Publication Date
TW201318943A TW201318943A (zh) 2013-05-16
TWI480216B true TWI480216B (zh) 2015-04-11

Family

ID=48429252

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101142316A TWI480216B (zh) 2011-11-14 2012-11-14 Sheet conveyance system

Country Status (6)

Country Link
JP (1) JP5931409B2 (https=)
KR (1) KR101564675B1 (https=)
CN (1) CN103906692B (https=)
IN (1) IN2014CN03271A (https=)
TW (1) TWI480216B (https=)
WO (1) WO2013073156A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3049943B1 (fr) * 2016-04-06 2020-08-28 Saint Gobain Dispositif de convoyage et de maintien de feuilles de verre notamment dans une installation de lavage, et procede de mise en oeuvre
FR3079507A1 (fr) * 2018-03-29 2019-10-04 Saint-Gobain Glass France Ensemble de convoyage ameliore

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001151318A (ja) * 1999-09-13 2001-06-05 Press Gijutsu Kenkyusho:Kk 加工用送り装置
JP2004154893A (ja) * 2002-11-06 2004-06-03 Mitsubishi Materials Techno Corp 板硝子の研磨方法および研磨装置
JP2006036471A (ja) * 2004-07-28 2006-02-09 Shinko Electric Co Ltd 基板の受渡し方法、及びその装置
CN101323396A (zh) * 2007-06-11 2008-12-17 奥林巴斯株式会社 基板吸附装置和基板搬送装置以及外观检查装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6435330B1 (en) * 1998-12-18 2002-08-20 Asyai Technologies, Inc. In/out load port transfer mechanism
JP3887549B2 (ja) * 2001-07-16 2007-02-28 東京エレクトロン株式会社 基板搬送装置
JP4244006B2 (ja) 2003-11-14 2009-03-25 株式会社ダイフク 搬送装置
JP4800611B2 (ja) * 2004-12-13 2011-10-26 コーニングジャパン株式会社 板材収納方法および装置
JP4849969B2 (ja) * 2006-06-15 2012-01-11 東京エレクトロン株式会社 基板処理システムおよび基板搬送方法
JP5162640B2 (ja) * 2010-10-06 2013-03-13 川崎重工業株式会社 板ガラスの搬送装置とそれを備えた面取り装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001151318A (ja) * 1999-09-13 2001-06-05 Press Gijutsu Kenkyusho:Kk 加工用送り装置
JP2004154893A (ja) * 2002-11-06 2004-06-03 Mitsubishi Materials Techno Corp 板硝子の研磨方法および研磨装置
JP2006036471A (ja) * 2004-07-28 2006-02-09 Shinko Electric Co Ltd 基板の受渡し方法、及びその装置
CN101323396A (zh) * 2007-06-11 2008-12-17 奥林巴斯株式会社 基板吸附装置和基板搬送装置以及外观检查装置

Also Published As

Publication number Publication date
JP5931409B2 (ja) 2016-06-08
CN103906692A (zh) 2014-07-02
WO2013073156A1 (ja) 2013-05-23
JP2013103797A (ja) 2013-05-30
CN103906692B (zh) 2016-01-06
TW201318943A (zh) 2013-05-16
KR20140085482A (ko) 2014-07-07
IN2014CN03271A (https=) 2015-07-03
KR101564675B1 (ko) 2015-10-30

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees