TWI476156B - 製造三氟化鋁之方法 - Google Patents
製造三氟化鋁之方法 Download PDFInfo
- Publication number
- TWI476156B TWI476156B TW099146705A TW99146705A TWI476156B TW I476156 B TWI476156 B TW I476156B TW 099146705 A TW099146705 A TW 099146705A TW 99146705 A TW99146705 A TW 99146705A TW I476156 B TWI476156 B TW I476156B
- Authority
- TW
- Taiwan
- Prior art keywords
- acid
- aluminum
- alkaline earth
- earth metal
- fluoride
- Prior art date
Links
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminium flouride Chemical compound F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 title claims description 62
- 238000000034 method Methods 0.000 title claims description 46
- 238000006243 chemical reaction Methods 0.000 claims description 99
- 239000002253 acid Substances 0.000 claims description 73
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 claims description 56
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 45
- 239000006227 byproduct Substances 0.000 claims description 41
- 150000001340 alkali metals Chemical class 0.000 claims description 39
- 239000007789 gas Substances 0.000 claims description 39
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 38
- 229910052783 alkali metal Inorganic materials 0.000 claims description 37
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 36
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 33
- 150000003839 salts Chemical class 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 25
- 239000007787 solid Substances 0.000 claims description 24
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 22
- 150000004673 fluoride salts Chemical class 0.000 claims description 22
- 229910052782 aluminium Inorganic materials 0.000 claims description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 19
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 18
- -1 aluminum chlorohydrate hydrate Chemical compound 0.000 claims description 18
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 18
- IDYFACFOJYNFAX-UHFFFAOYSA-J tetrafluoroantimony Chemical compound F[Sb](F)(F)F IDYFACFOJYNFAX-UHFFFAOYSA-J 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- 239000002002 slurry Substances 0.000 claims description 13
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 12
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical compound [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 10
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 9
- 239000012429 reaction media Substances 0.000 claims description 8
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 8
- 238000005406 washing Methods 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 229910052703 rhodium Inorganic materials 0.000 claims description 7
- 239000010948 rhodium Substances 0.000 claims description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000004821 distillation Methods 0.000 claims description 5
- 229910001618 alkaline earth metal fluoride Inorganic materials 0.000 claims description 4
- 239000011260 aqueous acid Substances 0.000 claims description 3
- SWURHZJFFJEBEE-UHFFFAOYSA-J tetrafluorocerium Chemical compound F[Ce](F)(F)F SWURHZJFFJEBEE-UHFFFAOYSA-J 0.000 claims description 3
- YZBOOASCZHGWQZ-UHFFFAOYSA-J [F-].[F-].[F-].[F-].[Cs+].[Cs+].[Cs+].[Cs+] Chemical compound [F-].[F-].[F-].[F-].[Cs+].[Cs+].[Cs+].[Cs+] YZBOOASCZHGWQZ-UHFFFAOYSA-J 0.000 claims description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 2
- 239000000460 chlorine Substances 0.000 claims 2
- 229910052801 chlorine Inorganic materials 0.000 claims 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
- 239000003513 alkali Substances 0.000 claims 1
- 229910052787 antimony Inorganic materials 0.000 claims 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 1
- 239000000047 product Substances 0.000 description 40
- 239000011734 sodium Chemical class 0.000 description 22
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 21
- 239000011541 reaction mixture Substances 0.000 description 15
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 11
- 238000005243 fluidization Methods 0.000 description 11
- 229910052707 ruthenium Inorganic materials 0.000 description 11
- CBIYWHCPXHKZME-UHFFFAOYSA-J tetrafluororuthenium Chemical compound [F-].[F-].[F-].[F-].[Ru+4] CBIYWHCPXHKZME-UHFFFAOYSA-J 0.000 description 11
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 239000001307 helium Substances 0.000 description 7
- 229910052734 helium Inorganic materials 0.000 description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 7
- 239000007858 starting material Substances 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 229910016569 AlF 3 Inorganic materials 0.000 description 5
- 229910052684 Cerium Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 5
- 239000011780 sodium chloride Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 229910001610 cryolite Inorganic materials 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000008247 solid mixture Substances 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000029087 digestion Effects 0.000 description 3
- 239000000839 emulsion Substances 0.000 description 3
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000004576 sand Substances 0.000 description 3
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical class FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- QHEDSQMUHIMDOL-UHFFFAOYSA-J hafnium(4+);tetrafluoride Chemical group F[Hf](F)(F)F QHEDSQMUHIMDOL-UHFFFAOYSA-J 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 235000020030 perry Nutrition 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- 238000005201 scrubbing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical compound FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- PPMWWXLUCOODDK-UHFFFAOYSA-N tetrafluorogermane Chemical compound F[Ge](F)(F)F PPMWWXLUCOODDK-UHFFFAOYSA-N 0.000 description 2
- 150000004684 trihydrates Chemical class 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 239000005909 Kieselgur Substances 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- CMCRQEROAJPMQT-UHFFFAOYSA-N [He].F.F.F.F Chemical compound [He].F.F.F.F CMCRQEROAJPMQT-UHFFFAOYSA-N 0.000 description 1
- 238000000184 acid digestion Methods 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 229910001514 alkali metal chloride Inorganic materials 0.000 description 1
- 229910001515 alkali metal fluoride Inorganic materials 0.000 description 1
- 229910001617 alkaline earth metal chloride Inorganic materials 0.000 description 1
- 229910000091 aluminium hydride Inorganic materials 0.000 description 1
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical class Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 1
- 239000008346 aqueous phase Substances 0.000 description 1
- BCZWPKDRLPGFFZ-UHFFFAOYSA-N azanylidynecerium Chemical compound [Ce]#N BCZWPKDRLPGFFZ-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 150000001785 cerium compounds Chemical class 0.000 description 1
- DRVWBEJJZZTIGJ-UHFFFAOYSA-N cerium(3+);oxygen(2-) Chemical group [O-2].[O-2].[O-2].[Ce+3].[Ce+3] DRVWBEJJZZTIGJ-UHFFFAOYSA-N 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000007805 chemical reaction reactant Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012065 filter cake Substances 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000012263 liquid product Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 235000010755 mineral Nutrition 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004682 monohydrates Chemical class 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229940072033 potash Drugs 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000011027 product recovery Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000012066 reaction slurry Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 description 1
- 239000010455 vermiculite Substances 0.000 description 1
- 229910052902 vermiculite Inorganic materials 0.000 description 1
- 235000019354 vermiculite Nutrition 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/48—Halides, with or without other cations besides aluminium
- C01F7/50—Fluorides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10705—Tetrafluoride
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Silicon Compounds (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29114109P | 2009-12-30 | 2009-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201129507A TW201129507A (en) | 2011-09-01 |
| TWI476156B true TWI476156B (zh) | 2015-03-11 |
Family
ID=44187815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW099146705A TWI476156B (zh) | 2009-12-30 | 2010-12-29 | 製造三氟化鋁之方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US8388925B2 (cg-RX-API-DMAC7.html) |
| EP (2) | EP2519470B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP5568142B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR101836537B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN102781836B (cg-RX-API-DMAC7.html) |
| NO (1) | NO20120799A1 (cg-RX-API-DMAC7.html) |
| RU (1) | RU2012132184A (cg-RX-API-DMAC7.html) |
| TW (1) | TWI476156B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2011080656A2 (cg-RX-API-DMAC7.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8388925B2 (en) | 2009-12-30 | 2013-03-05 | Memc Electronic Materials, Inc. | Methods for producing aluminum trifluoride |
| CN107376793B (zh) | 2011-06-28 | 2021-04-13 | 各星有限公司 | 在泡罩塔中制备硅烷的方法 |
| CN102400000A (zh) * | 2011-11-30 | 2012-04-04 | 云南省化工研究院 | 铝还原四氟化硅制备铝-硅合金和氟化铝的方法 |
| CN102718244B (zh) * | 2012-07-13 | 2014-05-07 | 六九硅业有限公司 | 一种冰晶石的制备方法 |
| CN103539180B (zh) * | 2013-10-31 | 2015-03-18 | 洛阳氟钾科技股份公司 | 一种工业氟化铝除钠工艺 |
| WO2016129275A1 (ja) * | 2015-02-10 | 2016-08-18 | 日本電気株式会社 | 情報処理装置、ログ管理システム、ログ管理方法及びプログラム記録媒体 |
| CN108892161B (zh) * | 2018-08-22 | 2020-05-05 | 淮阴师范学院 | 以纳米铝为原料制备纳米氟化铝八面体的方法 |
| CN111960452A (zh) * | 2020-08-27 | 2020-11-20 | 北京理工大学 | 一种氟化铝粉体的制备方法 |
| CN113072088B (zh) * | 2021-03-18 | 2022-11-11 | 闫宏伟 | 应用于核裂变能-钍基熔盐堆无氧六氟铝酸锂的制备方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4382071A (en) * | 1980-07-02 | 1983-05-03 | Central Glass Company, Limited | Process of preparing silicon tetrafluoride by using hydrogen fluoride gas |
| US4474743A (en) * | 1983-07-21 | 1984-10-02 | Ethyl Corporation | Preparation of silane from amine alanes |
| US4632816A (en) * | 1982-12-13 | 1986-12-30 | Ethyl Corporation | Process for production of silane |
| US6217840B1 (en) * | 1995-12-08 | 2001-04-17 | Goldendale Aluminum Company | Production of fumed silica |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3218124A (en) | 1962-09-10 | 1965-11-16 | Tennessee Corp | Process of producing hydrogen fluoride as a dry gas from clear fluosilicic acid-containing solutions |
| DE1220839B (de) | 1964-10-19 | 1966-07-14 | Bayer Ag | Verfahren zur Herstellung von Aluminiumfluorid |
| JPS4925840B1 (cg-RX-API-DMAC7.html) * | 1969-12-13 | 1974-07-03 | ||
| JPS5033992B1 (cg-RX-API-DMAC7.html) | 1970-12-23 | 1975-11-05 | ||
| US3969485A (en) | 1971-10-28 | 1976-07-13 | Flemmert Goesta Lennart | Process for converting silicon-and-fluorine-containing waste gases into silicon dioxide and hydrogen fluoride |
| JPS5841546Y2 (ja) * | 1973-05-08 | 1983-09-20 | ミノルタ株式会社 | ザンリユウトナ−ジヨキヨソウチ |
| US4062930A (en) | 1973-05-31 | 1977-12-13 | Bohdan Zawadzki | Method of production of anhydrous hydrogen fluoride |
| JPS5321399B2 (cg-RX-API-DMAC7.html) | 1975-03-25 | 1978-07-03 | ||
| DE2815881A1 (de) | 1978-04-12 | 1979-10-25 | Lentia Gmbh | Verfahren zur herstellung von aluminiumfluorid |
| CH638163A5 (de) * | 1978-10-09 | 1983-09-15 | Alusuisse | Verfahren zur kalzination von aluminiumfluorid-hydraten. |
| US4213952A (en) | 1978-10-23 | 1980-07-22 | Occidental Research Corporation | Recovery of hydrofluoric acid from fluosilicic acid with high pH hydrolysis |
| US4348849A (en) | 1980-08-11 | 1982-09-14 | Alcan Aluminum Corporation | Starter strip for horizontal siding panels |
| SE437015B (sv) | 1982-01-07 | 1985-02-04 | Boliden Ab | Forfarande for utvinning av anvendbara produkter fran avfallsprodukter herrorande fran framstellning av aluminiumfluorid |
| US4446120A (en) | 1982-01-29 | 1984-05-01 | The United States Of America As Represented By The United States Department Of Energy | Method of preparing silicon from sodium fluosilicate |
| US4748014A (en) | 1982-12-27 | 1988-05-31 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
| US4470959A (en) | 1983-06-20 | 1984-09-11 | Allied Corporation | Continuous production of silicon tetrafluoride gas in a vertical column |
| US4508689A (en) | 1983-07-21 | 1985-04-02 | Aluminum Company Of America | Aluminum-fluorine compound manufacture |
| US4889695A (en) * | 1985-02-20 | 1989-12-26 | Aluminum Company Of America | Reclaiming spent potlining |
| WO1992012268A1 (en) | 1991-01-11 | 1992-07-23 | Comalco Aluminum Limited | Recovery of aluminium and fluoride values from spent pot lining |
| US5558847A (en) | 1991-02-05 | 1996-09-24 | Kaaber; Henning | Process for recovering aluminium and fluorine from fluorine containing waste materials |
| US5242670A (en) * | 1992-07-02 | 1993-09-07 | Gehringer Ronald C | Method for hydrofluoric acid digestion of silica/alumina matrix material for the production of silicon tetrafluoride, aluminum fluoride and other residual metal fluorides and oxides |
| US6193944B1 (en) | 1995-12-08 | 2001-02-27 | Goldendale Aluminum Company | Method of recovering fumed silica from spent potliner |
| US5723097A (en) | 1995-12-08 | 1998-03-03 | Goldendale Aluminum Company | Method of treating spent potliner material from aluminum reduction cells |
| JPH10231114A (ja) | 1997-02-18 | 1998-09-02 | Mitsui Chem Inc | ＳｉＦ４の製造方法 |
| NO325237B1 (no) * | 2001-12-19 | 2008-03-03 | Alstom Technology Ltd | Fremgangsmåte for fjerning av forurensninger fra fluorholdig sekundært alumina finstøv eller andre natrium-aluminium-fluorholdige materialer forbundet med aluminiumproduksjon |
| CA2367544A1 (en) * | 2002-01-08 | 2003-07-08 | Boleslaw Ignasiak | Method for spent potliner processing, separating and recycling the products therefrom |
| JP4925840B2 (ja) | 2007-01-19 | 2012-05-09 | 旭化成ホームプロダクツ株式会社 | ラップフィルム収納箱 |
| US8124039B2 (en) | 2009-01-26 | 2012-02-28 | Vithal Revankar | Process of silicon tetrafluoride gas synthesis |
| CN101544374B (zh) | 2009-03-12 | 2010-12-01 | 六九硅业有限公司 | 一种制备四氟化硅的方法 |
| US8529860B2 (en) | 2009-12-30 | 2013-09-10 | Memc Electronics Materials, Inc. | Methods for producing silicon tetrafluoride |
| US8388925B2 (en) | 2009-12-30 | 2013-03-05 | Memc Electronic Materials, Inc. | Methods for producing aluminum trifluoride |
-
2010
- 2010-12-15 US US12/969,058 patent/US8388925B2/en not_active Expired - Fee Related
- 2010-12-18 EP EP10813031.1A patent/EP2519470B1/en not_active Not-in-force
- 2010-12-18 JP JP2012546530A patent/JP5568142B2/ja not_active Expired - Fee Related
- 2010-12-18 CN CN201080064926.7A patent/CN102781836B/zh not_active Expired - Fee Related
- 2010-12-18 RU RU2012132184/05A patent/RU2012132184A/ru not_active Application Discontinuation
- 2010-12-18 EP EP14167366.5A patent/EP2765117A1/en not_active Withdrawn
- 2010-12-18 WO PCT/IB2010/055926 patent/WO2011080656A2/en not_active Ceased
- 2010-12-18 KR KR1020127020067A patent/KR101836537B1/ko not_active Expired - Fee Related
- 2010-12-29 TW TW099146705A patent/TWI476156B/zh not_active IP Right Cessation
-
2012
- 2012-07-11 NO NO20120799A patent/NO20120799A1/no not_active Application Discontinuation
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2013
- 2013-01-28 US US13/751,294 patent/US9527752B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4382071A (en) * | 1980-07-02 | 1983-05-03 | Central Glass Company, Limited | Process of preparing silicon tetrafluoride by using hydrogen fluoride gas |
| US4632816A (en) * | 1982-12-13 | 1986-12-30 | Ethyl Corporation | Process for production of silane |
| US4474743A (en) * | 1983-07-21 | 1984-10-02 | Ethyl Corporation | Preparation of silane from amine alanes |
| US6217840B1 (en) * | 1995-12-08 | 2001-04-17 | Goldendale Aluminum Company | Production of fumed silica |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201129507A (en) | 2011-09-01 |
| US20130136686A1 (en) | 2013-05-30 |
| JP5568142B2 (ja) | 2014-08-06 |
| WO2011080656A2 (en) | 2011-07-07 |
| US8388925B2 (en) | 2013-03-05 |
| RU2012132184A (ru) | 2014-02-10 |
| CN102781836B (zh) | 2016-01-20 |
| EP2765117A1 (en) | 2014-08-13 |
| US9527752B2 (en) | 2016-12-27 |
| KR101836537B1 (ko) | 2018-03-08 |
| EP2519470A2 (en) | 2012-11-07 |
| KR20120123383A (ko) | 2012-11-08 |
| EP2519470B1 (en) | 2014-06-11 |
| JP2013516376A (ja) | 2013-05-13 |
| US20110158896A1 (en) | 2011-06-30 |
| WO2011080656A3 (en) | 2012-03-01 |
| CN102781836A (zh) | 2012-11-14 |
| NO20120799A1 (no) | 2012-07-11 |
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