TWI469309B - 積體電路封裝系統 - Google Patents

積體電路封裝系統 Download PDF

Info

Publication number
TWI469309B
TWI469309B TW96101208A TW96101208A TWI469309B TW I469309 B TWI469309 B TW I469309B TW 96101208 A TW96101208 A TW 96101208A TW 96101208 A TW96101208 A TW 96101208A TW I469309 B TWI469309 B TW I469309B
Authority
TW
Taiwan
Prior art keywords
integrated circuit
substrate
termination pad
hole
pad
Prior art date
Application number
TW96101208A
Other languages
English (en)
Chinese (zh)
Other versions
TW200739874A (en
Inventor
林充彬
權奕燦
河宗佑
Original Assignee
星科金朋有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 星科金朋有限公司 filed Critical 星科金朋有限公司
Publication of TW200739874A publication Critical patent/TW200739874A/zh
Application granted granted Critical
Publication of TWI469309B publication Critical patent/TWI469309B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
    • H10W74/117Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65Shapes or dispositions of interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/681Shapes or dispositions thereof comprising holes not having chips therein, e.g. for outgassing, underfilling or bond wire passage
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/015Manufacture or treatment of bond wires
    • H10W72/01515Forming coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/075Connecting or disconnecting of bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/722Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/732Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Wire Bonding (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
TW96101208A 2006-03-17 2007-01-12 積體電路封裝系統 TWI469309B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/276,946 US7501697B2 (en) 2006-03-17 2006-03-17 Integrated circuit package system

Publications (2)

Publication Number Publication Date
TW200739874A TW200739874A (en) 2007-10-16
TWI469309B true TWI469309B (zh) 2015-01-11

Family

ID=38516949

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96101208A TWI469309B (zh) 2006-03-17 2007-01-12 積體電路封裝系統

Country Status (4)

Country Link
US (2) US7501697B2 (https=)
JP (1) JP4943898B2 (https=)
KR (1) KR101424777B1 (https=)
TW (1) TWI469309B (https=)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7364945B2 (en) 2005-03-31 2008-04-29 Stats Chippac Ltd. Method of mounting an integrated circuit package in an encapsulant cavity
US8198735B2 (en) 2006-12-31 2012-06-12 Stats Chippac Ltd. Integrated circuit package with molded cavity
US9466545B1 (en) 2007-02-21 2016-10-11 Amkor Technology, Inc. Semiconductor package in package
US7982297B1 (en) * 2007-03-06 2011-07-19 Amkor Technology, Inc. Stackable semiconductor package having partially exposed semiconductor die and method of fabricating the same
US20080315406A1 (en) * 2007-06-25 2008-12-25 Jae Han Chung Integrated circuit package system with cavity substrate
US8258614B2 (en) * 2007-11-12 2012-09-04 Stats Chippac Ltd. Integrated circuit package system with package integration
US20090127715A1 (en) * 2007-11-15 2009-05-21 Shin Hangil Mountable integrated circuit package system with protrusion
US8536692B2 (en) * 2007-12-12 2013-09-17 Stats Chippac Ltd. Mountable integrated circuit package system with mountable integrated circuit die
US8084849B2 (en) * 2007-12-12 2011-12-27 Stats Chippac Ltd. Integrated circuit package system with offset stacking
US7781261B2 (en) * 2007-12-12 2010-08-24 Stats Chippac Ltd. Integrated circuit package system with offset stacking and anti-flash structure
US7985628B2 (en) * 2007-12-12 2011-07-26 Stats Chippac Ltd. Integrated circuit package system with interconnect lock
US7800212B2 (en) * 2007-12-27 2010-09-21 Stats Chippac Ltd. Mountable integrated circuit package system with stacking interposer
US8247893B2 (en) * 2007-12-27 2012-08-21 Stats Chippac Ltd. Mountable integrated circuit package system with intra-stack encapsulation
US8258015B2 (en) * 2008-02-22 2012-09-04 Stats Chippac Ltd. Integrated circuit package system with penetrable film adhesive
US7919871B2 (en) * 2008-03-21 2011-04-05 Stats Chippac Ltd. Integrated circuit package system for stackable devices
US20090243069A1 (en) * 2008-03-26 2009-10-01 Zigmund Ramirez Camacho Integrated circuit package system with redistribution
US9293385B2 (en) * 2008-07-30 2016-03-22 Stats Chippac Ltd. RDL patterning with package on package system
US8304869B2 (en) * 2008-08-01 2012-11-06 Stats Chippac Ltd. Fan-in interposer on lead frame for an integrated circuit package on package system
US7750455B2 (en) * 2008-08-08 2010-07-06 Stats Chippac Ltd. Triple tier package on package system
US8513801B2 (en) * 2008-08-18 2013-08-20 Stats Chippac Ltd. Integrated circuit package system
US8406004B2 (en) 2008-12-09 2013-03-26 Stats Chippac Ltd. Integrated circuit packaging system and method of manufacture thereof
US7923290B2 (en) * 2009-03-27 2011-04-12 Stats Chippac Ltd. Integrated circuit packaging system having dual sided connection and method of manufacture thereof
US8004073B2 (en) * 2009-06-17 2011-08-23 Stats Chippac Ltd. Integrated circuit packaging system with interposer and method of manufacture thereof
TWI411051B (zh) * 2009-12-02 2013-10-01 晨星半導體股份有限公司 封裝層疊方法與結構及其電路板系統
CN102087983A (zh) * 2009-12-07 2011-06-08 晨星软件研发(深圳)有限公司 封装层叠方法与结构及其电路板系统
KR101695352B1 (ko) * 2010-08-12 2017-01-12 삼성전자 주식회사 리드 프레임 및 이를 갖는 반도체 패키지
CN102569247A (zh) * 2012-01-17 2012-07-11 华为终端有限公司 集成模块、集成系统板和电子设备
JP2014150213A (ja) * 2013-02-04 2014-08-21 Fujitsu Semiconductor Ltd 半導体装置及び半導体装置の製造方法
US9312198B2 (en) * 2013-03-15 2016-04-12 Intel Deutschland Gmbh Chip package-in-package and method thereof
KR102729072B1 (ko) 2019-08-28 2024-11-13 삼성전자주식회사 반도체 패키지
KR20240023263A (ko) * 2022-08-11 2024-02-21 삼성전자주식회사 반도체 패키지

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200416787A (en) * 2002-10-08 2004-09-01 Chippac Inc Semiconductor stacked multi-package module having inverted second package

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6111306A (en) * 1993-12-06 2000-08-29 Fujitsu Limited Semiconductor device and method of producing the same and semiconductor device unit and method of producing the same
US5656550A (en) * 1994-08-24 1997-08-12 Fujitsu Limited Method of producing a semicondutor device having a lead portion with outer connecting terminal
TW373308B (en) * 1995-02-24 1999-11-01 Agere Systems Inc Thin packaging of multi-chip modules with enhanced thermal/power management
US6005778A (en) * 1995-06-15 1999-12-21 Honeywell Inc. Chip stacking and capacitor mounting arrangement including spacers
US5663593A (en) * 1995-10-17 1997-09-02 National Semiconductor Corporation Ball grid array package with lead frame
JP3297387B2 (ja) * 1998-11-20 2002-07-02 沖電気工業株式会社 半導体装置の製造方法
JP3722209B2 (ja) * 2000-09-05 2005-11-30 セイコーエプソン株式会社 半導体装置
US6967395B1 (en) * 2001-03-20 2005-11-22 Amkor Technology, Inc. Mounting for a package containing a chip
US6946323B1 (en) * 2001-11-02 2005-09-20 Amkor Technology, Inc. Semiconductor package having one or more die stacked on a prepackaged device and method therefor
US7109574B2 (en) * 2002-07-26 2006-09-19 Stmicroelectronics, Inc. Integrated circuit package with exposed die surfaces and auxiliary attachment
US6965160B2 (en) * 2002-08-15 2005-11-15 Micron Technology, Inc. Semiconductor dice packages employing at least one redistribution layer
US6972481B2 (en) * 2002-09-17 2005-12-06 Chippac, Inc. Semiconductor multi-package module including stacked-die package and having wire bond interconnect between stacked packages
US6861288B2 (en) * 2003-01-23 2005-03-01 St Assembly Test Services, Ltd. Stacked semiconductor packages and method for the fabrication thereof
US6936922B1 (en) * 2003-09-26 2005-08-30 Amkor Technology, Inc. Semiconductor package structure reducing warpage and manufacturing method thereof
JP4580671B2 (ja) * 2004-03-29 2010-11-17 ルネサスエレクトロニクス株式会社 半導体装置
US7205656B2 (en) * 2005-02-22 2007-04-17 Micron Technology, Inc. Stacked device package for peripheral and center device pad layout device
US7372141B2 (en) * 2005-03-31 2008-05-13 Stats Chippac Ltd. Semiconductor stacked package assembly having exposed substrate surfaces on upper and lower sides
US7535086B2 (en) * 2006-08-03 2009-05-19 Stats Chippac Ltd. Integrated circuit package-on-package stacking system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200416787A (en) * 2002-10-08 2004-09-01 Chippac Inc Semiconductor stacked multi-package module having inverted second package

Also Published As

Publication number Publication date
KR20070094449A (ko) 2007-09-20
TW200739874A (en) 2007-10-16
US20090134509A1 (en) 2009-05-28
US7884460B2 (en) 2011-02-08
JP2007251159A (ja) 2007-09-27
US7501697B2 (en) 2009-03-10
JP4943898B2 (ja) 2012-05-30
KR101424777B1 (ko) 2014-07-31
US20070216010A1 (en) 2007-09-20

Similar Documents

Publication Publication Date Title
TWI469309B (zh) 積體電路封裝系統
US6492726B1 (en) Chip scale packaging with multi-layer flip chip arrangement and ball grid array interconnection
US7312519B2 (en) Stacked integrated circuit package-in-package system
US7679178B2 (en) Semiconductor package on which a semiconductor device can be stacked and fabrication method thereof
TWI394236B (zh) 具有黏著性間隔結構之可固定積體電路封裝內封裝系統
US8916958B2 (en) Semiconductor package with multiple chips and substrate in metal cap
US20090102037A1 (en) Semiconductor package, module, system having solder ball coupled to chip pad and manufacturing method thereof
CN110534506A (zh) 半导体器件层叠封装件、半导体器件封装件及其制造方法
TWI416700B (zh) 晶片堆疊封裝結構及其製造方法
US9917073B2 (en) Reconstituted wafer-level package dram with conductive interconnects formed in encapsulant at periphery of the package
TW201304018A (zh) 積層型半導體封裝及其製造方法
US8274144B2 (en) Helical springs electrical connecting a plurality of packages
KR101370016B1 (ko) 베이스 패키지 상에 다이를 갖는 집적 회로 패키지 시스템
US20100123236A1 (en) Semiconductor package having adhesive layer and method of manufacturing the same
US20060102993A1 (en) Method and apparatus for stacking electrical components using via to provide interconnection
KR100673379B1 (ko) 적층 패키지와 그 제조 방법
CN105977233A (zh) 芯片封装结构及其制造方法
US7265441B2 (en) Stackable single package and stacked multi-chip assembly
CN204303804U (zh) 可拆卸、可组装的半导体封装体堆叠结构
KR102029804B1 (ko) 패키지 온 패키지형 반도체 패키지 및 그 제조 방법
CN105742283B (zh) 倒置堆叠封装件
KR100632476B1 (ko) 멀티칩 패키지 및 이에 사용되는 반도체칩
CN104465606B (zh) 可拆卸、可组装的半导体封装体堆叠结构及其制备方法
US20080179721A1 (en) Stacking of transfer carriers with aperture arrays as interconnection joints
JP2003133516A (ja) 積層型半導体装置