TWI458392B - Discharge monitoring system and discharge lamp for discharge lamp - Google Patents
Discharge monitoring system and discharge lamp for discharge lamp Download PDFInfo
- Publication number
- TWI458392B TWI458392B TW098118206A TW98118206A TWI458392B TW I458392 B TWI458392 B TW I458392B TW 098118206 A TW098118206 A TW 098118206A TW 98118206 A TW98118206 A TW 98118206A TW I458392 B TWI458392 B TW I458392B
- Authority
- TW
- Taiwan
- Prior art keywords
- discharge lamp
- distortion
- accumulated
- monitoring system
- arc tube
- Prior art date
Links
- 238000012544 monitoring process Methods 0.000 title claims description 32
- 230000005856 abnormality Effects 0.000 claims description 4
- 238000009825 accumulation Methods 0.000 claims description 4
- 230000008859 change Effects 0.000 description 12
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 9
- 229910052753 mercury Inorganic materials 0.000 description 9
- 230000035882 stress Effects 0.000 description 7
- 230000001186 cumulative effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 6
- 239000010937 tungsten Substances 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000002123 temporal effect Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000006355 external stress Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/56—One or more circuit elements structurally associated with the lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/305—Flat vessels or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
Landscapes
- Circuit Arrangement For Electric Light Sources In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008216058A JP4548530B2 (ja) | 2008-08-26 | 2008-08-26 | 放電ランプの歪量監視システムおよび放電ランプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201010508A TW201010508A (en) | 2010-03-01 |
| TWI458392B true TWI458392B (zh) | 2014-10-21 |
Family
ID=41790544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098118206A TWI458392B (zh) | 2008-08-26 | 2009-06-02 | Discharge monitoring system and discharge lamp for discharge lamp |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4548530B2 (ja) |
| KR (1) | KR100989770B1 (ja) |
| CN (1) | CN101662876B (ja) |
| TW (1) | TWI458392B (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5454168B2 (ja) * | 2010-01-27 | 2014-03-26 | ウシオ電機株式会社 | 放電ランプ用給電装置 |
| JP2014075316A (ja) * | 2012-10-05 | 2014-04-24 | Cerma Precision Inc | ランプ及び光源装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11121339A (ja) * | 1997-10-20 | 1999-04-30 | Nikon Corp | 露光装置及び露光方法 |
| US20010005172A1 (en) * | 1996-04-10 | 2001-06-28 | Seiko Epson | Light-source lamp unit, light-source device and projection-type display apparatus |
| JP2002287243A (ja) * | 2001-03-23 | 2002-10-03 | Seiko Epson Corp | ランプ寿命表示 |
| TWI256274B (en) * | 2004-02-26 | 2006-06-01 | Hitachi Ltd | Discharge lamp lighting device |
| JP2006201645A (ja) * | 2005-01-24 | 2006-08-03 | Plus Vision Corp | カートリッジ式ランプユニット |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3933724B2 (ja) * | 1996-05-30 | 2007-06-20 | ハリソン東芝ライティング株式会社 | 高圧放電灯点灯装置および画像表示装置 |
| JP2002122940A (ja) | 2000-10-12 | 2002-04-26 | Nikon Corp | 投射型表示装置 |
| DE102005022375A1 (de) * | 2005-05-13 | 2006-11-16 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Elektrische Lampe und Beleuchtungssystem und Verfahren zum Betreiben einer elektrischen Lampe oder eines Beleuchtungssystems |
-
2008
- 2008-08-26 JP JP2008216058A patent/JP4548530B2/ja not_active Expired - Fee Related
-
2009
- 2009-06-02 TW TW098118206A patent/TWI458392B/zh not_active IP Right Cessation
- 2009-06-26 KR KR1020090057773A patent/KR100989770B1/ko not_active IP Right Cessation
- 2009-08-06 CN CN200910164137.XA patent/CN101662876B/zh not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010005172A1 (en) * | 1996-04-10 | 2001-06-28 | Seiko Epson | Light-source lamp unit, light-source device and projection-type display apparatus |
| JPH11121339A (ja) * | 1997-10-20 | 1999-04-30 | Nikon Corp | 露光装置及び露光方法 |
| JP2002287243A (ja) * | 2001-03-23 | 2002-10-03 | Seiko Epson Corp | ランプ寿命表示 |
| TWI256274B (en) * | 2004-02-26 | 2006-06-01 | Hitachi Ltd | Discharge lamp lighting device |
| JP2006201645A (ja) * | 2005-01-24 | 2006-08-03 | Plus Vision Corp | カートリッジ式ランプユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101662876A (zh) | 2010-03-03 |
| JP2010055754A (ja) | 2010-03-11 |
| CN101662876B (zh) | 2014-07-30 |
| TW201010508A (en) | 2010-03-01 |
| KR100989770B1 (ko) | 2010-10-26 |
| KR20100024887A (ko) | 2010-03-08 |
| JP4548530B2 (ja) | 2010-09-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |