TWI458392B - Discharge monitoring system and discharge lamp for discharge lamp - Google Patents

Description

Distortion variable monitoring system and discharge lamp for discharge lamp

The present invention relates to an ultrahigh-pressure short-arc mercury lamp used for monitoring an exposure device for lithography, or a distortion of a discharge lamp in which an abnormality of a discharge lamp of a discharge lamp used for a short arc lamp of a movie projector is accumulated. Monitoring systems and discharge lamps that are suitable for use in such systems.

In a lamp of an ultra-high pressure mercury lamp, a halogen lamp, a laser tube, or the like, when the actuator is actuated, the internal pressure of the arc tube rises, or the sealing portion of the electrode and the glass of the arc tube is inflated, and the light-emitting tube is enlarged. The case of a distorted variable. Therefore, when the distortion of the arc tube exceeds the distortion variable in the action of the lamp, there is a flaw in the rupture of the arc tube.

For example, a short-arc type mercury lamp is used in various exposure processes of a manufacturing process of a semiconductor element or a liquid crystal display element, and is used for printing a circuit pattern to a semiconductor substrate or the like.

In addition, in recent years, large-sized people use short-arc mercury lamps by increasing the size of the exposure area or increasing the productivity of the project. In such lamps, the pressure inside the arc tube at the time of lighting reaches 20 to 40. Air pressure. As a result, the stress applied to the arc tube becomes large, and the risk of rupture of the arc tube becomes high, and the destructive force at the time of rupture also increases. In the event that the arc tube is broken, the influence on the surroundings is large, and it becomes a major damage to the optical machine or the lamp.

In particular, in various manufacturing processes, when the arc tube is broken in the exposure process, the manufacturing line is stopped, which has a significant impact on production, and thus is an important problem.

In order to solve such a problem, it is proposed that when the lamp is operated, the light-emitting tube of the lamp is irradiated with the laser beam to detect the transmitted light, thereby measuring the distortion of the translucent member, and when the distortion variable is equal to or greater than a predetermined value. Then, the power supply is stopped or the light source device of the alarm device is activated (see Patent Document 1).

However, it is not easy to integrate a complicated detection function using a laser in a light source device, and it is widely applicable to how to set a position where a distortion of a light-emitting tube is measured and a position of a laser. There are difficulties.

For this reason, as a means for preventing the arc of the lamp from being broken, the following cases are actually performed.

The ultra-high pressure short arc discharge lamp is such that the inside of the arc tube is maintained at a high pressure in its lighting, and the glass (mainly quartz glass) constituting the arc tube is heated to a high temperature by the heat from the arc. Thereby, distortion (internal stress) is accumulated in the arc tube. Further, in the arc tube, the total stress applied to the accumulated distortion and the external pressure applied to the lighting is applied, and when the stress reaches the boundary stress of the glass constituting the arc tube, the possibility that the arc tube is broken is increased.

In this manner, the use of the lamp is stopped before the distortion stored in the arc tube becomes a predetermined value, and thus the lighting guarantee time is set in the discharge lamp. This lighting guarantee time is, for example, the time until the distortion (boundary distortion) that becomes the limit is reached based on the distortion stored when the lighting lamp is turned on. Further, the limit distortion is empirically guided in consideration of the boundary stress of the glass constituting the arc tube or the pressure applied to the arc tube in the lighting.

Patent Document 1: Japanese Patent Publication No. 6-5639

However, the service life of the discharge lamp is specified only by the lighting time of the discharge lamp, which has the following problems.

The distortion that is accumulated in the arc tube is different in the amount of power supplied to the discharge lamp. That is, even if the lighting time is the same and the electric power value supplied to the discharge lamp is higher, the distortion stored in the arc tube becomes larger. Moreover, when an actual discharge lamp is used, there are many cases where the supplied electric power value is changed. As a specific example, (1) in order to stabilize the intermittent time, a so-called illuminance lighting in which the illuminance due to the discharge lamp is gradually increased and the supplied electric power value is gradually increased from the start of the lighting discharge lamp In the case of the mode, or (2) on the same line, when a common discharge lamp is used for the complex photoresist process, the sensitivity of the photoresist used in each photoresist processing project is compared with the change in supply to the discharge. The power value of the lamp to adjust the illuminance to the photoresist.

In this way, when the discharge lamp is not used at a constant power value, that is, when the discharge lamp is changed by using the discharge lamp, the power value supplied to the discharge lamp is maximized, that is, the distortion is maximized. The lighting guarantee time is set using the condition as a reference.

Therefore, when the discharge lamp is used until the lighting guarantee time is reached, the discharge lamp is replaced or discarded. However, the discarded discharge lamp is in the view that the discarded discharge lamp is a distortion amount of the arc tube. Because it is still usable, there is a problem of economical and environmental costs.

In addition, in order to avoid such inconvenience, the user's own judgment is used, and the lighting is guaranteed to be used. In this case, the risk of rupture of the arc tube is increased, and in the event of a lamp rupture, it is not only required to be repaired. The expensive optical system, and the production will temporarily stop, thus greatly reducing the production efficiency.

The present invention has been made in accordance with the above circumstances, and an object of the invention is to provide a discharge lamp that can be used in response to an original service life even when the electric power value supplied to the discharge lamp is changed, and can be avoided. In the case where the arc tube is broken in the lighting of the discharge lamp, the distortion monitoring system of the discharge lamp of the discharge lamp and the discharge lamp applied to the system can be safely used.

An abnormality monitoring system for a discharge lamp according to the present invention includes: a discharge lamp; and a power feeding device that supplies electric power to the discharge lamp; and a calculation device that calculates an accumulated distortion of the arc tube of the discharge lamp, and the discharge lamp is configured The distortion monitoring system is characterized in that the calculation means stores the calculation formula of the accumulated distortion variable by the function of calculating the lighting time from the power value of the discharge lamp supplied from the power feeding device. In this calculation formula, the accumulated distortion of the arc tube when the power supply of the discharge lamp is supplied is used as an initial value, and the total accumulation of the arc tube of the discharge lamp is specified in response to the lighting time of the electric power value. Distortion variable.

In the distortion monitoring system of the discharge lamp of the present invention, there is provided a boundary distortion amount of the luminous tube set in advance and a total accumulated distortion variable specified by a calculation formula, and the total accumulated distortion variable occurs when the boundary distortion variable is reached. The alarm device for the alarm is preferred.

Further, it is preferable to provide a display device that displays information including the total accumulated distortion of the discharge lamp, the lighting time, and the time until the limit distortion is reached.

Further, in the distortion monitoring system of the discharge lamp of the present invention, it is preferable that the discharge lamp is provided with a lamp information recording medium on which information including parameters for setting the calculation formula, total accumulated distortion, and accumulated lighting time is recorded.

In such a lamp information recording medium, the total accumulated distortion amount and the accumulated lighting time of the discharge lamp are written by the calculation device.

Further, an IC tag can be used as the lamp information recording medium.

The discharge lamp of the present invention is a discharge lamp applied to the distortion monitoring system of the discharge lamp described above, and is characterized in that it includes information for storing parameters for setting the calculation formula, and accumulating distortion variables and cumulative lighting time. Light information recording media.

According to the distortion monitoring system of the discharge lamp of the present invention, the accumulated distortion amount of the arc tube at the time of starting the power supply is set as an initial value by the calculation formula set by the electric power value supplied to the discharge lamp, and the specific value is specified. Since the total amount of the arc tube of the discharge lamp accumulates a distortion amount, even when the discharge lamp is used by changing the electric power value supplied thereto, the discharge lamp can be used in response to the original service life. Moreover, when the total accumulated distortion of the arc tube reaches the limit distortion variable, the operator can recognize the distortion variable, and thus, by using the value of the suspension discharge lamp, it is possible to avoid the situation in which the arc tube is broken in the lighting of the discharge lamp. Therefore, the discharge lamp can be used safely.

Further, by providing the alarm device, the user can be surely informed when the total accumulated distortion of the arc tube reaches the limit distortion.

Further, by providing the display device, the accumulated distortion of the arc tube can be constantly monitored in the lighting of the discharge lamp.

Further, by providing the lamp information recording medium in the discharge lamp itself, it is possible to read and record the other discharge lamp by using the calculation device, for the reason of improving the design or the like, even if another discharge lamp having a different discharge lamp size is used. The information of the discharge information of the discharge lamp, the parameter used in the setting calculation formula, or the total accumulated distortion, and the like, whereby the setting of the calculation device is automatically changed, and the other discharge lamp is set in the calculation device. Because of the calculation formula, the operator can change the setting of the calculation device and the discharge lamp in accordance with the specifications of the discharge lamp, and the worker can avoid the operator's forgetting the setting change of the calculation device or perform the operation. In the case of erroneous setting, it is possible to prevent the accumulated distortion from being calculated by the erroneous calculation formula, and therefore the total accumulated distortion of the luminous tube can be specified in accordance with the inherent calculation formula of the discharge lamp to be lit. .

Further, when the discharge lamp is turned off, information on the total accumulated distortion of the arc tube when the light is turned off is written in the lamp information recording medium, and when the discharge lamp is turned on again, the last time the light is turned off is read by the calculation device. The information on the total accumulated distortion variable causes the total accumulated distortion at the time of the light-off to be used as the initial value, so that the total accumulated distortion of the luminous tube can be surely determined based on the latest information when the discharge lamp is re-lighted.

Hereinafter, embodiments of the present invention will be described in detail.

1 is an explanatory view showing a schematic configuration of an example of a distortion monitoring system (hereinafter referred to as "distortion monitoring system") of a discharge lamp of the present invention.

The distortion monitoring system is composed of a discharge lamp 10, a power feeding device 20 that supplies electric power to the discharge lamp 10, a power control device 21 that controls the power feeding device 20, and an electric arc tube 11 that calculates the discharge lamp 10. The display device 40 that stores the distortion variable 30 and the display device 40 that displays information such as the total distortion of the arc tube 11 of the discharge lamp 10, and the total accumulated distortion of the arc tube 11 of the discharge lamp 10 when the distortion amount reaches the limit distortion occurs. The report device 50 is configured.

The discharge lamp 10 is an arc tube 11 made of, for example, quartz glass, and mercury is sealed inside the arc tube 11, and is configured as a short-arc type high-pressure mercury lamp. Also shown in Fig. 2, the arc tube 11 has a straight tubular sealing portion 13 formed at both ends of the elliptical bulb-shaped light-emitting portion 12, and in the arc tube 11, the anode 14 and the cathode 15 are along the tube axis. The directions are arranged in a state of being opposed to each other. Further, the base 16 is disposed in each of the sealing portions 13 of the arc tube 11, and the lead wire W is provided in each of the bases 16.

Further, an IC tag C1 is attached to one of the lead wires W of the discharge lamp 10. In the IC tag C1, parameters for calculating the distortion of the arc tube 11 of the discharge lamp 10, the boundary distortion of the arc tube 11 and the accumulated distortion, the cumulative lighting time of the discharge lamp 10, and the discharge are recorded. Lamp information such as the serial number of the lamp 10.

The power feeding device 20 is provided with information such as a power value and a supply time (lighting time) supplied from the power feeding device 20 to the discharge lamp 10, and is transmitted to an output unit (not shown) of the calculation device 30.

Further, the power control device 21 is connected to the light detecting means S for detecting the illuminance caused by the emitted light from the discharge lamp 10, and the feedback is performed by the power control device 21 in accordance with the illuminance detected by the light detecting means S. The power value supplied from the power feeding device 20 to the discharge lamp 10 is controlled.

The calculation device 30 is configured to read the information recorded by the IC tag C1 of the discharge lamp 10, and set the calculation formula by the information from the IC tag C1, and use the calculation formula to specify the luminous tube. The calculation unit 32 for accumulating the distortion variable 11 and the memory unit 33 for temporarily storing the information from the calculation unit 32, and the information writing unit 34 for writing the information stored in the memory unit 33 on the IC tag C1, and The power control device 21 and the control unit 35 of the alarm device 50 are controlled.

The operation of such a distortion monitoring system will be described with reference to Figs. 1 and 3.

First, the discharge lamp 10 is set in a predetermined mounting portion (not shown) (step 1), and the lamp information recorded on the IC tag C1 of the discharge lamp 10 is recorded by the information reading unit 31 of the calculation device 30. Read (step 2). The lamp information is transmitted from the information reading unit 31 to the calculation unit 32, and is also stored in the storage unit 33. Further, electric power is supplied from the power feeding device 20 to the discharge lamp 10, whereby if the discharge lamp 10 is turned on (step 3), the power feeding device 20 has information on the electric power value or the lighting time, for example, every time. The second to several minutes are transmitted to the calculation unit 32 of the calculation device 30 (step 4).

The calculation unit 32 of the calculation device 30 determines a parameter value for setting the calculation formula based on the power value supplied to the discharge lamp 10 from the power feeding device 20, thereby setting a function for calculating the lighting time. The formula for accumulating the distortion ε is ε=f(t).

In determining the calculation formula, for the discharge lamp of the same specification as the discharge lamp to be used, the temporal change of the accumulated distortion of the luminous tube is actually measured by lighting with a constant electric power value, based on the data of the actual measurement value. The approximate approximation of the guide uses the inherent basic equation defined as the discharge lamp of the same specification.

As the basic calculation formula, the physical properties of the glass (viscoelastic body) constituting the arc tube, and the temporality of the external stress applied to the stress and the distortion stored in the viscoelastic body by the external force. As the relationship of the change, an exponential function represented by the following formula (1) or a function represented by the following formula (2) can be suitably used. These basic calculation formulas are appropriately selected depending on the measured value of the temporal change in the accumulated distortion of the arc tube 11 of the discharge lamp 10. In addition, the relationship between the external stress of the viscoelastic body and the temporal change of the accumulated distortion is described, for example, in "Non-Newtonian Fluid Mechanics" (Nakamura Hiroyuki, issued by Rhone Corporation).

[Number 1]

Equation (1): f(t) = a _n × [1-exp(-α _n t)]

Equation (2): f(t)=b _n t ^βn

In the above formulas (1) and (2), a _n , α _n , b _n and β _n are parameters of the discharge lamp 10 to be used and parameters determined by the supplied electric power value. The range of the power value and the interval of the power value set by these parameters are different by the specification of the discharge lamp 10, but for example, in the discharge lamp 10 having a rated power consumption of 12 kW, for example, 10 to 12 kW (rated consumption) The range of 80 to 100% of electricity is set at intervals of 0.1 to 1 kw.

Further, the parameter is set based on the actually measured value of the temporal change in the accumulated distortion of the arc tube 11, but the measured value of the temporal change in the accumulated distortion of the arc tube 11 by using three or more electric power values is obtained. The parameters of the power value, and from these parameter values, for the relationship between the parameters [a _n , α _n or b _n , β _n ) and the power value [P], using the guided approximation [a _n = f ₁ (P ), α _n = f ₂ (P), or b _n = f ₁ (P), β _n = f ₂ (P)], and from the approximation formula, all parameters of the set power value range can be obtained. value.

As described above, the parameter value is determined based on the power value supplied to the discharge lamp 10, and the calculation formula using the power value is set.

In the calculation formula set as described above, the total accumulated distortion amount of the arc tube 11 that is stored in the memory unit 33 is specified, that is, the accumulation of the light-emitting tube 11 that is supplied to the start power supply of the electric power value of the discharge lamp 10 The distortion variable is used as an initial value, and the total accumulated distortion of the arc tube 11 in the lighting of the discharge lamp 10 is specified in response to the lighting time of the electric power value. Information such as the specific total accumulated distortion amount, the accumulated lighting time, and the following increase curve of the accumulated distortion amount are temporarily stored in the memory unit 33 of the calculation device 30, and displayed on the display device 40. Part 41.

When the electric power value supplied to the discharge lamp 10 is changed, the calculation formula is reset based on the electric power value, and in the calculation formula, the accumulated distortion of the luminous tube 11 when the electric power is started to be supplied As an initial value, the accumulated distortion of the arc tube 11 in the lighting of the discharge lamp 10 is specified (step 5).

On the other hand, information such as the total accumulated distortion amount temporarily accumulated in the memory unit 33 of the arithmetic unit 30, the accumulated lighting time, and the increase curve of the accumulated distortion amount are, at an appropriate timing, the information writing unit 34 is used. It is written to the IC tag C1 of the discharge lamp 10 (step 6). Here, the information writing to the IC tag C1 is performed every time the information memorized in the memory unit 33 is updated, or only when the discharge lamp 10 is turned off.

In the following, for the specificity of the total accumulated distortion variable, for example, the initial accumulated distortion amount of the arc tube 11 is 0, and the discharge lamp 10 of the above formula (1) is given as a basic calculation formula for calculating the accumulated distortion amount, and is 10 kW. The case where the electric power is turned on for 400 hours and the electric power is turned on by 11 kW for 400 hours (total 800 hours) is taken as an example, and is more specifically described.

When 10 kW of electric power is supplied to turn on the discharge lamp 10, the parameters a _n and α _{n of the} above formula (1) are determined to be "a _n = a ₁ " and " α _n respectively according to the electric power value (10 kW). =α ₁ ”, and is set to the equation ε=f(t)=a ₁ ×[1-exp(-α ₁ t). Then, as shown in Fig. 4, the increase curve A of the accumulated distortion amount by the electric power of 10 kW (hereinafter referred to as "curve A" is given. The time when the electric power of 10 kW is supplied to the discharge lamp 10 is at the fourth time. In the figure, as shown by the thick line (a), the total accumulated distortion amount of the arc tube 11 is increased along the curve A. Here, in Fig. 4, the horizontal and vertical directions indicate the lighting time of the discharge lamp, and the vertical axis It is a relative value indicating the accumulated distortion of the arc tube, taking the initial distortion variable as 0 and the boundary distortion variable as 100.

Then, after 400 hours have elapsed since the start of supply of 10 kW of electric power, if the supplied electric power is changed to 11 kW, the parameters a _n and α _{n of the} above formula (1) are determined to be "a _n " based on the electric power value (11 kW). = a ₂ " and "α _n = α ₂ ", and the equation ε = f(t) = a ₂ × [1-exp(-α ₂ t) is reset. In this way, the increase curve B (hereinafter referred to as "curve B") of the accumulated distortion by the 11 kW electric power is given, and the change is supplied to the discharge lamp during the time when the electric power of 11 kW is supplied to the discharge lamp 10. In the case of the power value of 10, the accumulated distortion of the arc tube 11 at the time of power supply of 11 kW (about 30 in the illustrated example) is used as the initial value, and in the fourth diagram, as shown by the thick line (a). Along the curve B, the total accumulated distortion of the arc tube is increased.

In this way, the total accumulated distortion of the arc tube 11 in the lighting of the discharge lamp 10 is specified by the calculation formula set by the electric power value. As shown in Fig. 5, the actual total accumulated distortion is along The thick line (a) of the curve A and the thick line (a)' of the curve B' increase. Here, in Fig. 5, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion of the arc tube, and the initial distortion is taken as 0, and the relative distortion is taken as 100. . Thus, after 400 hours of power supply from the start of supply of 400 kW (accumulated lighting time is 800 hours), the total accumulated distortion of the arc tube 11 (illustration 66 is shown) indicates that the lighting is performed for 800 hours than the supply of 10 kW of power. The total accumulated distortion is even higher, and the total accumulated distortion is lower than 800 hours of power supply for 11 hours.

In the above, the control unit 35 of the calculation device 30 constantly compares the total accumulated distortion amount specified by the calculation formula with the boundary distortion of the arc tube 11 read from the IC tag C1 of the discharge lamp 10 (step 7). . Thereafter, when the total accumulated distortion variable has not reached the limit distortion amount, the information is transmitted to the power control device 21, and the power supply to the discharge lamp 10 is continued (to step 4). On the other hand, when the total calculation device reaches the limit distortion amount, the information number is transmitted to the alarm device 50, and an alarm is issued from the alarm portion 51 (step 8).

Further, before the total accumulated distortion of the arc tube 11 of the discharge lamp 10 reaches the limit distortion, when the discharge lamp 10 is to be turned off, the accumulated distortion information at the time of the light-off is written on the IC tag C1, and the discharge lamp is turned on again. At 10 o'clock, the accumulated distortion amount is used as an initial value, and the total distortion of the arc tube 11 in the lighting of the discharge lamp 10 is specified.

According to the above-described distortion monitoring system, the accumulated distortion amount of the arc tube 11 at the time of starting the power supply is used as the initial value by the calculation formula set by the electric power value supplied to the discharge lamp 10, and the discharge lamp 10 is specified. Since the total amount of distortion of the arc tube 11 in the lighting is accumulated, even when the discharge lamp 10 is used by changing the electric power value supplied thereto, the accumulated distortion amount of the discharge lamp 10 to the arc tube 11 can be used as a limit. The time until the distortion is variable, that is, the discharge lamp 10 can also be used to the time required for the original life of the discharge lamp 10. Moreover, when the total accumulated distortion of the arc tube 11 reaches the limit distortion, the user can recognize the boundary distortion. Therefore, by using the discharge lamp 10, the illuminating tube 11 can be avoided in the lighting discharge lamp 10. In this case, therefore, the discharge lamp 10 can be used safely.

Further, since the alarm device 50 is provided, when the total accumulated distortion of the arc tube 11 reaches the limit distortion amount, the user can be surely informed of the situation.

Further, since the display device 40 is provided, the accumulated distortion of the arc tube 11 can be constantly monitored in the lighting of the discharge lamp 10.

Further, since the discharge lamp 10 is provided with the IC tag C1, the discharge lamp 10 can be read and recorded by the calculation device 30 even when the discharge lamp 10 of the discharge lamp 10 is used in the same manner because of the improved design or the like. The information such as the parameters used in the setting calculation formula of the other ten IC tags C1 or the total accumulated distortion is read by the calculation device 30, whereby the setting of the calculation device 30 is automatically changed, and the calculation is performed. Since the device 30 is set with the calculation formula of the other discharge lamp 10, the troublesome work for the operator to change the specifications of the discharge calculation device 30 and the discharge lamp 10 is unnecessary every time the discharge lamp 10 is replaced. Further, it is possible to prevent the worker from forgetting the setting change of the calculation device 30 or setting the error, thereby preventing the distortion from being calculated by the erroneous calculation formula, and thus depending on the discharge lamp to be lit. The intrinsic calculation formula of 10 often makes it possible to specify the total accumulated distortion of the luminous tube 11.

Further, when the discharge lamp 10 is turned off, the information on the total accumulated distortion of the arc tube 11 at the time of turning off the light is written in the IC tag C1. Therefore, when the discharge lamp 10 is turned on again, the reading device 30 reads the image. Recording the information of the total accumulated distortion variable when the lamp is turned off once on the IC tag C1, so that the total accumulated distortion amount at the time of the light-off is utilized as the initial value, and thus the discharge lamp 10 is re-lighted according to the latest information. The total accumulated distortion of the arc tube 11 can be specified.

The distortion monitoring system of the present invention is not limited to the above embodiment, and various modifications can be applied.

For example, the lamp information recording medium provided in the discharge lamp is not limited to the IC tag, and various electronic information recording media can be utilized.

Further, after an appropriate time (for example, 24 hours) has elapsed from the alarm device, the power supply to the discharge lamp is stopped, and the discharge lamp can be controlled to be turned off.

Further, the discharge lamp is not limited to a short-arc type high-pressure mercury lamp, and can be applied to various discharge lamps.

[Examples]

(Experimental Example 1)

According to the configuration shown in Fig. 2, a discharge lamp (10) having the following specifications was produced.

Light-emitting tube (11): made of quartz glass, full length 185mm, light-emitting part (12); length 160mm, maximum inner diameter 110mm, maximum outer diameter 120mm, volume in the light-emitting part (12) 1000cm ³ , sealing part (13); 34mm diameter

Anode (14): Tungsten, cathode (15): Tungsten plated with tungsten, distance between electrodes: 13mm

Enclosure (amount): mercury (30mg/cm ³ )

Rated power consumption: 12kW, rated voltage: 115V, rated current: 104A

The discharge lamp of the above specification is referred to as "discharge lamp A".

Moreover, the lighting discharge lamp A was performed with the electric power value of 10 kW, 11 kW, and 12 kW, and the accumulated distortion of the light-emitting tube (11) was measured for each electric power value every 100 hours of lighting time.

Using the above formula (1) as the basic calculation formula, the values of the parameters [a _n , α _n ] of the respective electric power values are obtained from the actual measured values of the accumulated distortion variables, and the calculation formula of each electric power value is set. The values of the parameters [a _n , α _n ] are shown in Table 1 below. Further, Fig. 6 shows an increase curve of the measured distortion distortion and the accumulated distortion amount given by the calculation formula. In Fig. 6, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion of the arc tube, and represents a relative value when the initial distortion is 0 and the boundary distortion is 100.

As can be seen from Fig. 6, the accumulated distortion of the arc tube is such that the increase curve along the accumulated distortion variable given from the equation of the above formula (1) is increased.

(Experimental Example 2)

According to the configuration shown in Fig. 2, a discharge lamp of the following specifications is produced ( 10).

Light-emitting tube (11): made of quartz glass, full length 170mm, light-emitting part (12); length 145mm, maximum inner diameter 92mm, maximum outer diameter 100mm, volume in the light-emitting part (12) 600cm ³ , sealing part (13); 30mm diameter

Anode (14): Tungsten, cathode (15): Tungsten plated with tungsten, distance between electrodes: 11mm

Enclosure (amount): mercury (25mg/cm ³ )

Rated power consumption: 10kW, rated voltage: 95V, rated current: 105A

The discharge lamp of the above specification is referred to as "discharge lamp B".

Moreover, the lighting discharge lamp B was performed with the electric power value of 8 kW, 9 kW, and 10 kW, and the accumulated distortion amount of the light-emitting tube (11) was measured for each electric power value every 100 hours of lighting time.

Using the above formula (2) as the basic calculation formula, the values of the parameters [b _n , β _n ] of the respective electric power values are obtained from the actual measured values of the accumulated distortion variables, and the calculation formula of each electric power value is set. The values of the parameters [b _n , b _n ] are shown in Table 2 below. Further, Fig. 7 shows an increase curve of the measured distortion distortion and the accumulated distortion amount given by the calculation formula. In Fig. 7, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion of the arc tube, and represents a relative value when the initial distortion is 0 and the boundary distortion is 100.

As can be seen from Fig. 7, the accumulated distortion of the arc tube is such that the increase curve along the accumulated distortion variable given from the equation of the above formula (2) is increased.

(Experimental Example 3)

Regarding the discharge lamp A, the value of the parameter [a _n , α _n ] obtained in Experimental Example 1 is derived for the relationship between the parameter [a _n , α _n ] and the electric power value [P], and an approximate expression [a _n ] is derived. =f ₁ (P), α _n =f ₂ (P)], and by the approximate expression, the parameters [b _n , β _n ] of the respective electric power values are obtained in a power range of 10 to 12 kW on a scale of 0.1 kW. value.

Moreover, the distortion monitoring system of the configuration shown in Fig. 1 was subjected to 11 kW for 310 hours at 10 kW for 290 hours, 12 kW for 160 hours, 11 kW for 130 hours, 10.5 kW for 290 hours, and 11.5 kW for 250 hours for 11 hours. Light up the discharge lamp A, then turn off the discharge lamp A. Fig. 8 shows an increase curve of the accumulated distortion measured by the distortion monitoring system. In Fig. 8, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion of the arc tube, and represents a relative value when the initial distortion is 0 and the boundary distortion is 100. Further, the curve indicated by the thick line is an increase curve of the accumulated distortion measured by the distortion monitoring system, and the other curve indicated by the broken line indicates that 10 kW, 10.5 kW, and 11 kW are used by the calculation formula. An increase curve of accumulated distortion values for each electrode value of 11.5 kW and 12 kW.

As can be seen from Fig. 8, when the lighting discharge lamp A is operated under the above conditions, the accumulated distortion of the arc tube (11) reaches the limit distortion amount, and it can be understood that the lighting is performed at a rated power consumption of 12 kW. The time (lighting guarantee time) is about 1.7 times.

Further, after the discharge lamp A was turned off, the accumulated distortion amount of the arc tube (11) was measured, and it was confirmed that the accumulated distortion amount measured by the distortion monitoring system was approximately the same.

10. . . Discharge lamp

11. . . Luminous tube

12. . . Light department

13. . . Sealing part

14. . . anode

15. . . cathode

16. . . Lamp head

20. . . Feeder

twenty one. . . Power control device

30. . . Arithmetic device

31. . . Information reading department

32. . . Calculation department

33. . . Memory department

34. . . Information writing department

35. . . Control department

40. . . Display device

41. . . Display department

50. . . Alarm device

51. . . Alarm department

C1. . . IC tag

S. . . Light detection means

W. . . Lead-in

Fig. 1 is an explanatory view showing a schematic configuration of an example of a distortion monitoring system according to the present invention.

Fig. 2 is an explanatory view showing a partial configuration of an example of a slit discharge lamp.

Fig. 3 is a block diagram showing the operation of the distortion monitoring system of the present invention.

Fig. 4 is a view showing an increase curve of the accumulated distortion amount given by the calculation formula.

Fig. 5 is a view showing an increase curve of the accumulated distortion measured by the distortion monitoring system of the present invention.

Fig. 6 is a graph showing an increase curve of the stored distortion amount and the accumulated distortion amount given from the calculation formula in Experimental Example 1.

Fig. 7 is a graph showing an increase curve of the stored distortion amount and the accumulated distortion amount given from the calculation formula in Experimental Example 2.

Fig. 8 is a view showing an increase curve of the accumulated distortion measured by the abnormality monitoring system in Experimental Example 3.

10. . . Discharge lamp

11. . . Luminous tube

20. . . Feeder

twenty one. . . Power control device

30. . . Arithmetic device

31. . . Information reading department

32. . . Calculation department

33. . . Memory department

34. . . Information writing department

35. . . Control department

40. . . Display device

41. . . Display department

50. . . Alarm device

51. . . Alarm department

C1. . . IC tag

S. . . Light detection means

W. . . Lead-in

Claims (7)

A distortion monitoring system for a discharge lamp, comprising: a discharge lamp; and a feeding device for supplying electric power to the discharge lamp; and a calculating device for calculating an accumulated distortion of the arc tube of the discharge lamp, wherein the discharge lamp is distorted The quantity monitoring system is characterized in that: the calculation device sets an operation formula from the power value of the discharge lamp supplied to the discharge device every time, and calculates an accumulated distortion function which is a function of the lighting time. In this calculation formula, the electric power value supplied to the discharge lamp is used as an initial value for the accumulated distortion of the arc tube when the electric power supply is started, and the total accumulation distortion of the arc tube of the discharge lamp is obtained by the lighting time at the electric power value. the amount. The distortion monitoring system for a discharge lamp according to claim 1, wherein an alarm device is provided to compare a boundary distortion amount of the luminous tube set in advance with a total accumulated distortion obtained by a calculation formula, An alarm occurs when the total accumulated distortion variable reaches the limit distortion. The distortion monitoring system for a discharge lamp according to the first or second aspect of the invention, wherein the display includes information indicating a total accumulated distortion amount of the discharge lamp, a lighting time, and a time until the limit distortion is reached. Device. An abnormality monitoring system for a discharge lamp as described in claim 1 or 2, wherein The discharge lamp is provided with a lamp information recording medium that records information including parameters for setting the calculation formula, total accumulated distortion variables, and accumulated lighting time. The distortion monitoring system for a discharge lamp according to claim 4, wherein, in the lamp information recording medium, the total accumulated distortion amount and the accumulated lighting time of the discharge lamp are written by the calculation means. The distortion monitoring system of the discharge lamp of claim 4, wherein the lamp information recording medium is an IC tag. A discharge lamp, which is a discharge lamp suitable for use in a distortion monitoring system for a discharge lamp according to claim 1, characterized in that the recording includes parameters for setting a calculation formula, total accumulated distortion, and accumulation. Light information recording medium for lighting time information.