CN101662876B - Strain monitoring system of discharging lamp and the discharging lamp - Google Patents
Strain monitoring system of discharging lamp and the discharging lamp Download PDFInfo
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- CN101662876B CN101662876B CN200910164137.XA CN200910164137A CN101662876B CN 101662876 B CN101662876 B CN 101662876B CN 200910164137 A CN200910164137 A CN 200910164137A CN 101662876 B CN101662876 B CN 101662876B
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- dependent variable
- discharge lamp
- lamp
- luminous tube
- time
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/56—One or more circuit elements structurally associated with the lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/305—Flat vessels or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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- Circuit Arrangement For Electric Light Sources In General (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Abstract
The present invention provides a strain monitoring system of a discharging lamp and the discharging lamp, even the power value is changed, the discharging lamp can also have the same using time as that of the original service life, can avoid the lighting tube from breakage during lighting process of the discharging lamp, thereby safely using the discharging lamp. The strain monitoring system of the discharging lamp comprises: a discharging lamp (10); a power supply device (20)for supplying power thereto; and an calculation device (30) for calculating the strain accumulation of a lighting tube (11) of the discharging lamp, according to each power value supplied to the discharging lamp from the power supply device, the functions of the lighting time, that are expressions of the strain accumulation, are respectively set and calculated by the calculation device, according to the expressions, the strain accumulation of original lighting tube supplied with power under the power value supplied to the discharging lamp is set as an initial value, and the total strain accumulation of the lighting tube of the discharging lamp is determined corresponding to the lighting time under the power value.
Description
Technical field
The present invention relates to a kind of dependent variable surveillance of discharge lamp and be applicable to the discharge lamp of this system, the dependent variable surveillance of above-mentioned discharge lamp is for the dependent variable of accumulating of the luminous tube in the discharge lamps such as the xenon short-act lamp that uses in the extra-high voltage short arc mercury lamp that monitors lithographic printing and use with exposure device, motion-picture projection machine.
Background technology
In the lamps such as extra-high-pressure mercury vapour lamp, Halogen lamp LED, laser tube, in the time of its start, owing to pressing liter in luminous tube, or the sealing thermal expansion of electrode and luminous tube glass, thereby the dependent variable of luminous tube increases.So, if the dependent variable of luminous tube is beyond the mark when lamp moves, the possibility that exists luminous tube to break.
Such as short-arc mercury lamp is used in circuit pattern and cures exposure etc. on semiconductor substrate in the various exposure process of the manufacturing process of semiconductor element and liquid crystal display cells etc.
In addition, due to the maximization of exposure area or the high productive capacity of operation, adopt large-scale short-arc mercury lamp in recent years, in above-mentioned lamp, the luminous tube internal pressure while lighting a lamp reaches 20 atmospheric pressure to 40 atmospheric pressure.Therefore, the stress that puts on luminous tube becomes large, and the danger that luminous tube breaks uprises, and destructive power while breaking also becomes large.Just in case when luminous tube breaks, large on impact around, optical device and light fixture etc. are brought to great damage.
Especially, in various manufacturing process, in the time that luminous tube breaks in exposure process, production line can stop, and brings significant impact to producing, and is therefore important problem.
In order to address the above problem, following light supply apparatus is proposed: in the process of lamp action, luminous tube irradiating laser to this lamp and detect its transmitted light, thereby measure the dependent variable of light-transmitting member, when this dependent variable reaches predetermined value when above, stop supply of electric power or make alert device action (with reference to patent documentation 1).
But in light supply apparatus, assembling is used the complicated measuring ability of laser to be difficult to realize in reality, has in addition the problem such as the position of mensuration dependent variable and the position of laser how to set luminous tube, is therefore difficult to extensively be suitable for.
For above-mentioned reasons, the method for breaking as the luminous tube that prevents lamp, in fact in the following ways.
Superhigh pressure short arc discharge lamp is luminous tube inner sustain high pressure in it lights a lamp process, and make to form heated intensification of glass (being mainly quartz glass) of luminous tube and be with toughness from the heat of electric arc, thereby stress (internal stress) is accumulated in this luminous tube.In addition, the combined stress of the external pressure applying when being applied with the stress of accumulating and lighting a lamp on luminous tube, in the time that this stress reaches the limit stress of the glass that forms luminous tube, can improve the possibility that luminous tube breaks.
Therefore,, in order to stop using this lamp before reaching predetermined value being accumulated in dependent variable on luminous tube, each discharge lamp is set respectively to the guarantee time of lighting a lamp.This time that ensures of lighting a lamp is the time till the dependent variable accumulated while for example lighting a lamp discharge lamp with certain electric power of lighting a lamp reaches critical dependent variable (critical strain).In addition, this critical strain be consider the limit stress of the glass that forms luminous tube and light a lamp in put on the pressure etc. of luminous tube and obtain by experience.
Patent documentation 1: Japanese Patent Publication 6-005639 communique
Summary of the invention
But, only ensure that by lighting a lamp of discharge lamp the time specifies to have following problem the useful life of this discharge lamp.
Be accumulated in dependent variable on luminous tube according to being supplied in the power value of discharge lamp difference.That is to say, even if the time of lighting a lamp is identical, the power value that is supplied in discharge lamp is higher, and the dependent variable that is accumulated in luminous tube also becomes large.In addition,, when actual use discharge lamp, the situation that changes the power value of supplying is quite a few.Exemplify object lesson, have following situation: (1) for the stabilisation of cycle time, adopt from discharge lamp lighting and start to improve gradually supplied power value so that the illumination of this discharge lamp reaches the constant constant illumination of the what is called mode of lighting a lamp; (2), on same production line, while carrying out multiple protective layer treatment process with common discharge lamp, according to the sensitivity of the protective layer using in each protective layer treatment process, change the power value that is supplied in discharge lamp, thereby adjust the illumination to protective layer.
Like this, do not using discharge lamp with constant power value, change the power value supplied and while using discharge lamp, taking the power value that is supplied in discharge lamp as maximum service condition is as benchmark, set taking the maximum service condition of accumulating of stress as benchmark the guarantee time of lighting a lamp.
Thereby, discharge lamp is used while reaching till the guarantee time of lighting a lamp, change, discarded this discharge lamp.But the discharge lamp going out of use in spendable state still, therefore has economy, the irrational problem in environment aspect in the viewpoint of accumulating dependent variable of its luminous tube.
In addition, for fear of above-mentioned unreasonable, according to user's oneself judgement, continuation use after the guarantee time of lighting a lamp can exceeded, the danger that now luminous tube breaks improves, and when lamp contingency is broken, expensive optical system not only needs repairing, and need to temporarily stop producing, therefore there is the problem that significantly reduces production efficiency.
The present invention In view of the foregoing makes, the discharge lamp that its object is to provide a kind of dependent variable surveillance of discharge lamp and is applicable to this system, even if the power value of supplying with to discharge lamp changes, discharge lamp also can use and the corresponding time in original useful life, and can avoid luminous tube to break in the process of lighting a lamp of discharge lamp, thereby can use safely this discharge lamp.
The dependent variable surveillance of a kind of discharge lamp of the present invention, possesses: discharge lamp; To the electric supply installation of this discharge lamp power supply; And calculate the arithmetic unit of accumulating dependent variable of the luminous tube of this discharge lamp, the dependent variable surveillance of above-mentioned discharge lamp is characterised in that, according to each power value of supplying with to above-mentioned discharge lamp from above-mentioned electric supply installation, set respectively the arithmetic expression of calculating the function of time of lighting a lamp and accumulate dependent variable by above-mentioned arithmetic unit, according to this arithmetic expression, electric power under the power value of supplying with to above-mentioned discharge lamp is supplied with to the dependent variable of accumulating of luminous tube while starting and is made as initial value, with the time of lighting a lamp under this power value determine accordingly this discharge lamp luminous tube always accumulate dependent variable.
In the dependent variable surveillance of discharge lamp of the present invention, preferably, possess alarm device, the critical strain of the more predefined luminous tube of this alarm device with determined by arithmetic expression always accumulate dependent variable, when this is always accumulated when dependent variable reaches this critical strain and gives the alarm.
In addition, preferably, possess display unit, this display unit show comprise discharge lamp always accumulate dependent variable, light a lamp the time and reach critical strain till time in interior information.
In addition, in the dependent variable surveillance of discharge lamp of the present invention, preferably, be provided with lamp information recording carrier on discharge lamp, this lamp information recording carrier record comprises parameter for setting arithmetic expression, always accumulate dependent variable and accumulation lights a lamp the time in interior information.
Preferably, write in above-mentioned lamp information recording carrier by arithmetic unit discharge lamp always accumulate dependent variable and accumulation is lit a lamp the time.
In addition, can use IC tag as lamp information recording carrier.
A kind of discharge lamp of the present invention, be applicable to the dependent variable surveillance of above-mentioned discharge lamp, it is characterized in that possessing lamp information recording carrier, this lamp information recording carrier record comprises parameter for setting arithmetic expression, always accumulate dependent variable and accumulation lights a lamp the time in interior information.
According to the dependent variable surveillance of discharge lamp of the present invention, according to the arithmetic expression of setting respectively by the power value that is supplied in discharge lamp, luminous tube accumulates dependent variable as initial value when supply of electric power starts, determine this discharge lamp luminous tube always accumulate dependent variable, while using discharge lamp even if therefore change the power value of supplying, this discharge lamp also can use and the corresponding time in original useful life.And in the time of always the accumulating dependent variable and reach critical strain of luminous tube, user can recognize this point, therefore uses discharge lamp by termination, can avoid luminous tube in discharge lamp lighting process to break, and therefore can use safely this discharge lamp.
In addition, because being provided with alarm device, therefore when always the accumulating dependent variable and reach critical strain of luminous tube, can notify effectively to user.
In addition,, because being provided with display unit, therefore, the lighting a lamp in process of discharge lamp, can monitor all the time the dependent variable of accumulating of luminous tube.
In addition, because being originally provided with lamp information recording carrier with it at discharge lamp, even therefore because improvement design etc. is former thereby use other discharge lamps not identical with the specification of this discharge lamp, due to read by arithmetic unit in the lamp information recording carrier that is recorded in these other discharge lamps for setting the parameter of arithmetic expression, the setting of always accumulating the information such as dependent variable and automatically change arithmetic unit, on this arithmetic unit, set the arithmetic expression relevant to these other discharge lamps, therefore also not needing to carry out operating personnel in the time changing discharge lamp contrasts the specification of discharge lamp and changes the complex operations of the setting of arithmetic unit, and can avoid operating personnel to forget the setting of changing arithmetic unit, or carry out wrong setting, thereby can prevent from calculating and accumulating dependent variable according to wrong arithmetic expression, that therefore can determine luminous tube according to the intrinsic arithmetic expression relevant to the discharge lamp that should light a lamp all the time always accumulates dependent variable.
In addition, when light-off discharge lamp, the information of always accumulating dependent variable of luminous tube when light-off is written in lamp information recording carrier, thereby in the time lighting a lamp again discharge lamp, the information of always accumulating dependent variable while reading last light-off by arithmetic unit, during taking this light-off, always accumulate dependent variable as initial value, that therefore can be in the time lighting a lamp discharge lamp determines luminous tube according to up-to-date information effectively always accumulates dependent variable again.
Brief description of the drawings
Fig. 1 is the key diagram that represents the summary formation of an example of dependent variable surveillance of the present invention.
Fig. 2 blocks a part and the key diagram that represents the formation of an example of discharge lamp.
Fig. 3 is the block diagram that represents the action of dependent variable surveillance of the present invention.
Fig. 4 is the figure that the increase curve of accumulating dependent variable being provided by arithmetic expression is provided.
Fig. 5 is the figure that represents the increase curve of accumulating dependent variable of being measured by dependent variable surveillance of the present invention.
Fig. 6 is the figure that the increase curve of accumulating dependent variable of accumulating dependent variable and being provided by arithmetic expression of measuring in experimental example 1 is provided.
Fig. 7 is the figure that the increase curve of accumulating dependent variable of accumulating dependent variable and being provided by arithmetic expression of measuring in experimental example 2 is provided.
Fig. 8 is the figure that represents the increase curve of accumulating dependent variable of being measured by dependent variable surveillance in experimental example 3.
Embodiment
Below, explained for embodiments of the present invention.
Fig. 1 is the key diagram that the summary of an example of the dependent variable surveillance that represents discharge lamp of the present invention (following, to be called " dependent variable surveillance ") forms.
This dependent variable surveillance comprises: discharge lamp 10, always accumulate by supply of electric power in the luminous tube 11 of the electric supply installation 20 of this discharge lamp 10, the power control unit 21 of controlling this electric supply installation 20, the arithmetic unit of accumulating dependent variable 30 that calculates the luminous tube 11 of discharge lamp 10, the display unit 40 that shows the information such as dependent variable of always accumulating of the luminous tube 11 of discharge lamp 10, discharge lamp 10 alarm device 50 that produces alarm when dependent variable reaches critical strain.
Discharge lamp 10 has the luminous tube 11 being for example made up of quartz glass, encloses and has mercury in the inside of this luminous tube 11, is configured to short-arc type high-pressure mercury-vapor lamp.In Fig. 2, amplify and represent, luminous tube 11 is formed with the sealing 13 of straight tube-like at the two ends of the illuminating part 12 of oval bulb, and in this luminous tube 11, anode 14 and negative electrode 15 are configured to toward each other along tube axial direction.In addition, dispose respectively lamp holder 16 at the sealing 13 of luminous tube 11, be respectively equipped with lead-in wire W at this lamp holder 16.
In addition,, at a side's of discharge lamp 10 lead-in wire W, IC tag C1 is installed.On this IC tag C1, record: for setting the critical strain of parameter, luminous tube 11 of the arithmetic expression relevant to the dependent variable of the luminous tube 11 of discharge lamp 10 and the accumulation of accumulating dependent variable, the discharge lamp 10 lamp information such as the sequence number of time, discharge lamp 10 of lighting a lamp.
On electric supply installation 20, be provided with efferent (omitting diagram), the information such as the power value of supplying with to discharge lamp 10 from this electric supply installation 20 and supply time (lighting a lamp the time) are sent to arithmetic unit 30.
In addition, on power control unit 21, be connected with the optical detecting unit S of detection from the illumination of the radiating light of discharge lamp 10, according to by the detected illumination of optical detecting unit S, the power value of being supplied with to discharge lamp 10 from electric supply installation 20 by power control unit 21 FEEDBACK CONTROL.
Arithmetic unit 30 comprises: the information reading part 31 that reads the information in the IC tag C1 that is recorded in discharge lamp 10; According to setting arithmetic expression from the information of IC tag C1, determine the operational part of always accumulating dependent variable 32 of luminous tube 11 by this arithmetic expression; Temporary transient storage is from the storage part 33 of the information of operational part 32; The information that is stored in storage part 33 is written in to the information write section 34 on IC tag C1; Control the control part 35 of power control unit 21 and alarm device 50.
For the action of above-mentioned dependent variable surveillance, be illustrated with reference to Fig. 1 and Fig. 3.
First, discharge lamp 10 is arranged on predetermined installation portion (omitting diagram) (step 1), reads the lamp information (step 2) in the IC tag C1 that is recorded in this discharge lamp 10 by the information reading part 31 of arithmetic unit 30.This lamp information is transferred into operational part 32 from information reading part 31, and then is stored in storage part 33.In addition, supply with electric power from electric supply installation 20 to discharge lamp 10, if thereby discharge lamp 10 by light a lamp (step 3), for example every through 1 second～several minutes, the operational part 32 from electric supply installation 20 to arithmetic unit 30 sends power value and the information of the time of lighting a lamp (step 4).
In the operational part 32 of arithmetic unit 30, according to the power value of supplying with to discharge lamp 10 from electric supply installation 20, be identified for setting the parameter value of arithmetic expression, thereby setting calculating is lit a lamp, the function of time accumulates arithmetic expression ε=f (t) of dependent variable ε.
In the time setting this arithmetic expression, make and the discharge lamp lighting of the discharge lamp same size being used with the power value of fixing, measure the rheological parameters' change with time of accumulating dependent variable of luminous tube, the intrinsic basic arithmetic expression of the discharge lamp definition of the every kind of same specification of opposing for the approximate expression deriving according to the data of this measured value.
As this basis arithmetic expression, can be according to the physical characteristic of the glass (viscoelastic body) of formation luminous tube, according to the stress applying from outside of viscoelastic body with accumulate in the relation of the rheological parameters' change with time of inner dependent variable because of this stress, suitably use the represented exponential function of following formula (1) or the represented function of following formula (2).Above-mentioned basic arithmetic expression is suitably to select according to the measured value of the rheological parameters' change with time of accumulating dependent variable of the luminous tube 11 of discharge lamp 10.In addition, the external stress of viscoelastic body and the relation of rheological parameters' change with time of accumulating dependent variable, for example, be described in " non-Newtonian fluid mechanic " (middle village's happiness generation work, distribution of コ ロ Na company) etc.
[several 1]
Formula (1): f (t)=a
n× [1-exp (α
nt)]
Formula (2): f (t)=b
nt
β n
In above-mentioned formula (1) and formula (2), a
n, α
n, b
nand β
nthe used specification of discharge lamp 10 and the determined parameter of the power value of supply.The scope of power value and the interval of power value of setting above-mentioned parameter are different according to the specification of discharge lamp 10, the discharge lamp 10 that is for example 12kW for rated power, for example, in the scope of 10～12kW (rated power 80～100%), with the interval setup parameter of 0.1～1kw.
In addition, parameter is to set according to the measured value of the rheological parameters' change with time of accumulating dependent variable of luminous tube 11, obtains the parameter of each power value, from above-mentioned parameter value, to parameter [a according to the measured value of the rheological parameters' change with time of accumulating dependent variable of luminous tube 11 under 3 above power values
n, α
nor b
n, β
n] import approximate expression [a with the relation of power value [P]
n=f
1(P), α
n=f
2or b (P)
n=f
1(P), β
n=f
2(P)], thus obtained the value of all parameters of the power value scope setting by this approximate expression.
As mentioned above, the power value that is supplied in discharge lamp 10 by basis is determined the value of parameter, sets the arithmetic expression of this power value.
In the arithmetic expression of so setting, determine be stored in luminous tube 11 in storage part 33 always accumulate dependent variable, when being supplied under the power value of discharge lamp 10 that supply of electric power starts luminous tube 11 accumulate dependent variable as initial value, while determining that this discharge lamp 10 is lit a lamp accordingly with the time of lighting a lamp under this power value, luminous tube 11 always accumulates dependent variable.Dependent variable that what this was determined always accumulate, the accumulation information such as time and the following increase curve of accumulating dependent variable of lighting a lamp are temporarily stored in the storage part 33 of arithmetic unit 30, and are displayed on the display part 41 of display unit 40.
In addition, if being supplied in the power value of discharge lamp 10 changes, reset arithmetic expression according to this power value, in this arithmetic expression, when under this power value, supply of electric power starts luminous tube 11 accumulate dependent variable as initial value, that determines that this discharge lamp 10 lights a lamp luminous tube 11 in process always accumulates dependent variable (step 5).
On the other hand, be temporarily stored in the storage part 33 of arithmetic unit 30 always to accumulate the information such as increase curve that dependent variable, accumulation light a lamp the time and accumulate dependent variable be the IC tag C1 (step 6) that is write to discharge lamp 10 with suitable opportunity by information write section 34.At this, write about the information of IC tag C1, can in the time that being updated, the information in storage part 33 of being stored in carry out, also can only in the time that turning off the light, carry out by discharge lamp 10.
Below, be described in detail always accumulating the definite of dependent variable as an example of following situation example: for example luminous tube 11 initial accumulated dependent variable as 0, light a lamp 400 hours with the electric power of 10kW taking above-mentioned formula (1) as the discharge lamp 10 for calculating the basic arithmetic expression of accumulating dependent variable, lights a lamp 400 hours (adding up to 800 hours) with the electric power of 11kW.
The discharge lamp 10 if electric power of supply 10kW is lit a lamp, according to this power value (10kW), the parameter a of above-mentioned formula (1)
nand α
nbe determined to be respectively [a
n=a
1] and [α
n=α
1], be set as arithmetic expression ε=f (t)=a
1× [1-exp (α
1t).Then, as shown in Figure 4, obtain the increase curve A of accumulating dependent variable (hereinafter referred to as " curve A ") under the electric power of 10kW, and in the supply of electric power of 10kW during discharge lamp 10, in Fig. 4, as shown in thick line (ア), the dependent variable of always accumulating of luminous tube 11 increases along curve A.At this, in Fig. 4, transverse and longitudinal is to represent lighting a lamp the time of discharge lamp, and the longitudinal axis represents the dependent variable of accumulating of luminous tube, represents that initial strain amount is 0, critical strain is the relative value of 100 o'clock.
Then, certainly supplying after 10kW electric power starts through 400 hours, the electric power of supply is altered to 11kW, now according to this power value (11kW), the parameter A of above-mentioned formula (1)
nand α
0be determined to be respectively " A
n=A
2" and " α
n=α
2", be reset to arithmetic expression ε=f (t)=a
2× [1-exp (α
2t).So, obtain the increase curve B of accumulating dependent variable (hereinafter referred to as " curve B ") under 11kW electric power by this arithmetic expression, in the supply of electric power of 11kW during discharge lamp 10, while change to be supplied in the power value of discharge lamp 10, the luminous tube 11 of the supply of electric power of 11kW while starting accumulates dependent variable (in illustrated example as approximately 30) as initial value, as shown in thick line in Fig. 4 (イ), the dependent variable of always accumulating of luminous tube increases along curve B.
So, by the arithmetic expression of setting respectively by each power value, that determines the luminous tube 11 of discharge lamp 10 in lighting a lamp always accumulates dependent variable, as shown in Figure 5, actual thick line (ア) and the curve B of dependent variable along curve A of always accumulating ' thick line (イ) ' increases.At this, in Fig. 5, transverse axis represents that the accumulation of discharge lamp lights a lamp the time, and the longitudinal axis represents the dependent variable of accumulating of luminous tube, represents initial strain amount to be made as 0, critical strain to be made as to the relative value of 100 o'clock.And, from the electric power that starts to supply 11kW through 400 hours (the accumulation time of lighting a lamp is 800 hours) afterwards, when always the accumulating dependent variable (illustrative example is 66) and represent to light a lamp for 800 hours than the electric power of supply 10kW of luminous tube 11 always accumulate dependent variable high, always accumulate the value that dependent variable is low while within 800 hours, lighting a lamp than the electric power of supply 11kW.
Above, in the control part 35 of arithmetic unit 30, the critical strain (step 7) of the luminous tube 11 of always accumulating dependent variable and reading from the IC tag C1 of discharge lamp 10 of relatively being determined by arithmetic expression all the time.And in the time always accumulating dependent variable and do not reach critical strain, this information is transferred into power control unit 21, proceeds the supply of electric power (to step 4) to discharge lamp 10.On the other hand, in the time that total accumulative total dependent variable reaches critical strain, this information is transferred into alarm device 50, alarm portion 51 give the alarm (step 8).
In addition, the dependent variable of always accumulating at the luminous tube 11 of discharge lamp 10 is turned off the light this discharge lamp 10 before reaching critical strain, the information of accumulating dependent variable when light-off is written in IC tag C1, in the time lighting a lamp again discharge lamp 10, this is accumulated to dependent variable as initial value, and that determines luminous tube 11 when discharge lamp 10 is lit a lamp always accumulates dependent variable.
According to above-mentioned dependent variable surveillance, according to the arithmetic expression of setting respectively by the power value that is supplied in discharge lamp 10, luminous tube 11 accumulates dependent variable as initial value when supply of electric power starts, that determines that discharge lamp 10 lights a lamp luminous tube 11 in process always accumulates dependent variable, while using discharge lamp 10 even if therefore change the power value supplied, also can this luminous tube 11 accumulate dependent variable to reach critical strain till during corresponding with discharge lamp 10 original useful life during in use discharge lamp 10.And, in the time of always the accumulating dependent variable and reach critical strain of luminous tube 11, user can recognize this critical strain, therefore uses discharge lamp 10 by termination, can avoid discharge lamp 10 luminous tube 11 in process of lighting a lamp to break, therefore can use safely discharge lamp 10.
In addition, because being provided with alarm device 50, therefore when always the accumulating dependent variable and reach critical strain of luminous tube 11, can notify effectively to user.
In addition,, because being provided with display unit 40, therefore, the lighting a lamp in process of discharge lamp 10, can monitor all the time the dependent variable of accumulating of luminous tube 11.
In addition, because being provided with IC tag C1 at discharge lamp 10, even therefore because improvement design etc. is former thereby use other discharge lamps 10 not identical with the specification of this discharge lamp 10, due to the setting arithmetic expression parameter used being read by arithmetic unit 30 in the IC tag C1 that is recorded in these other discharge lamps 10, the setting of always accumulating the information such as dependent variable and automatically change arithmetic unit 30, on this arithmetic unit 30, set the arithmetic expression relevant to these other discharge lamps 10, therefore do not need to carry out that in the time changing discharge lamp 10 operating personnel contrasts the specification of discharge lamp 10 and miscellaneous operation of changing the setting of arithmetic unit 30 yet, and can avoid operating personnel to forget the setting of changing arithmetic unit 30, or carry out wrong setting, thereby can prevent from calculating and accumulating dependent variable according to wrong arithmetic expression, that therefore can be all the time determines luminous tube 11 according to the intrinsic arithmetic expression relevant to the discharge lamp 10 that should light a lamp always accumulates dependent variable.
In addition, when light-off discharge lamp 10, the information of always accumulating dependent variable of the luminous tube 11 during because of light-off is written in IC tag C1, therefore in the time lighting a lamp again discharge lamp 10, read last time of being recorded in IC tag C1 information of always accumulating dependent variable while turning off the light by arithmetic unit 30, during taking this light-off, always accumulate dependent variable as initial value, that therefore can be in the time lighting a lamp discharge lamp 10 determines luminous tube 11 according to up-to-date information effectively always accumulates dependent variable again.
Dependent variable surveillance of the present invention is not limited to above-mentioned execution mode, can implement various changes.
The lamp information recording carrier of being for example located at discharge lamp is not limited to IC tag, can utilize various electronic information recording mediums.
In addition, can control as follows: starting for example, through reasonable time (24 hours) afterwards, stop supply of electric power to discharge lamp and this discharge lamp of turning off the light in the time that alarm device gives the alarm.
In addition, discharge lamp is not limited to short-arc type high-pressure mercury-vapor lamp, can be suitable for various discharge lamps.
[embodiment]
(experimental example 1)
Make the discharge lamp (10) of following specification according to the formation of Fig. 2.
Luminous tube (11): quartz glass system, total length 185mm, illuminating part (12): length 160mm, maximum inner diameter 110mm, maximum outside diameter 120mm, the volume 1000cm in illuminating part (12)
3, sealing (13): external diameter 34mm
Anode (14): tungsten system, negative electrode (15): thoriated tungsten (Thoriated Tungsten) system, interelectrode distance: 13mm
Enclosure (amount): mercury (30mg/cm
3)
Rated power: 12kW, rated voltage: 115V, rated current: 104A
Using the discharge lamp of above-mentioned specification as " discharge lamp A ".
In addition,, with 10kW, the power value of 11kW and the 12kW discharge lamp A that lights a lamp, for each power value, whenever the time of lighting a lamp is through measuring the dependent variable of accumulating of luminous tube (11) for 100 hours.
Use above-mentioned formula (1) as basic arithmetic expression, obtain the parameter [a of each power value from the above-mentioned measured value of accumulating dependent variable
n, α
n] value, set the arithmetic expression of each power value.By parameter [a
n, α
n] value representation in following table 1.In addition, the measured increase curve of accumulating dependent variable of accumulating dependent variable and being provided by arithmetic expression is provided Fig. 6.In Fig. 6, transverse axis represents that the accumulation of discharge lamp lights a lamp the time, and the longitudinal axis represents the dependent variable of accumulating of luminous tube, represents initial strain amount to be made as 0, critical strain to be made as to the relative value of 100 o'clock.
As shown in Figure 6, the dependent variable of accumulating of luminous tube increases along the increase curve of accumulating dependent variable that arithmetic expression was provided that is basic arithmetic expression with above-mentioned formula (1).
[table 1]
(experimental example 2)
Make the discharge lamp (10) of following specification according to the formation of Fig. 2.
Luminous tube (11): quartz glass system, total length 170mm, illuminating part (12): length 145mm, maximum inner diameter 92mm, maximum outside diameter 100mm, the volume 600cm in illuminating part (12)
3, sealing (13): external diameter 30mm
Anode (14): tungsten system, negative electrode (15): thoriated tungsten system, interelectrode distance: 11mm
Enclosure (amount): mercury (25mg/cm
3)
Rated power: 10kW, rated voltage: 95V, rated current: 105A
Using the discharge lamp of above-mentioned specification as " discharge lamp B ".
In addition,, with 8kW, the power value of 9kW and the 10kW discharge lamp B that lights a lamp, for each power value, whenever the time of lighting a lamp is through measuring the dependent variable of accumulating of luminous tube (11) for 100 hours.
Use above-mentioned formula (2) as basic arithmetic expression, obtain the parameter [b of each power value from the above-mentioned measured value of accumulating dependent variable
n, β
n] value, set the arithmetic expression of each power value.By parameter [b
n, β
n] value representation in following table 2.In addition, measured dependent variable and the increase curve of accumulating dependent variable being provided by arithmetic expression are provided Fig. 7.In Fig. 7, transverse axis represents that the accumulation of discharge lamp lights a lamp the time, and the longitudinal axis represents the dependent variable of accumulating of luminous tube, represents initial strain amount to be made as 0, critical strain to be made as to the relative value of 100 o'clock.
As shown in Figure 7, the dependent variable of accumulating of luminous tube increases along the increase curve of accumulating dependent variable that arithmetic expression was provided that is basic arithmetic expression with above-mentioned formula (2).
[table 2]
(experimental example 3)
About discharge lamp A, the parameter [a obtaining according to experimental example 1
n, α
n] value, to parameter [a
n, α
n] import approximate expression [a with the relation of power value [P]
n=f
1(P), α
n=f
2(P)], obtained the parameter [b of each power value with the scale of 0.1kW in the electric power scope of 10～12kW by this approximate expression
n, β
n] value.
In addition, according to the dependent variable surveillance of the formation of Fig. 1, at the discharge lamp A that lights a lamp with the condition of 10kW and 290 hours, 12kW and 160 hours, 11kW and 130 hours, 10.5kW and 290 hours, 11.5kW and 250 hours, 11kW and 310 hours, discharge lamp A then turns off the light.Fig. 8 represents the increase curve of accumulating dependent variable that utilizes dependent variable surveillance to measure.In Fig. 8, transverse axis represents that the accumulation of discharge lamp lights a lamp the time, and the longitudinal axis represents the dependent variable of accumulating of luminous tube, represents initial strain amount to be made as 0, critical strain to be made as to the relative value of 100 o'clock.In addition, curve shown in thick line represents the increase curve of accumulating dependent variable of being measured by dependent variable surveillance, the increase curve of accumulating dependent variable under each electrode value of that the curve shown in other dotted lines represents to be provided by arithmetic expression, 10kW, 10.5kW, 11kW, 11.5kW and 12kW.
As shown in Figure 8, in the time lighting a lamp discharge lamp A with above-mentioned condition, to reach time till critical strain be approximately 1.7 times of time (lighting a lamp the guarantee time) while lighting a lamp with rated power 12kW to the dependent variable of accumulating of luminous tube (11).
In addition, after light-off discharge lamp A, measure accumulating dependent variable of luminous tube (11), confirmed with measured by dependent variable surveillance to accumulate dependent variable roughly consistent.
Claims (6)
1. a dependent variable surveillance for discharge lamp, possesses:
Discharge lamp;
To the electric supply installation of this discharge lamp power supply; And
Calculate the arithmetic unit of accumulating dependent variable of the luminous tube of this discharge lamp,
The dependent variable surveillance of above-mentioned discharge lamp is characterised in that,
According to each power value from above-mentioned electric supply installation to above-mentioned discharge lamp that supply with from, set respectively the function that calculates the time of lighting a lamp and accumulate the arithmetic expression of dependent variable by above-mentioned arithmetic unit,
According to this arithmetic expression, the electric power under the power value of supplying with to above-mentioned discharge lamp is supplied with to the dependent variable of accumulating of luminous tube while starting and is made as initial value, with the time of lighting a lamp under this power value determine accordingly this discharge lamp luminous tube always accumulate dependent variable.
2. the dependent variable surveillance of discharge lamp as claimed in claim 1, is characterized in that,
Possess alarm device, the critical strain of the more predefined luminous tube of this alarm device with by the determined dependent variable of always accumulating of arithmetic expression, when this is always accumulated when dependent variable reaches this critical strain and gives the alarm.
3. the dependent variable surveillance of discharge lamp as claimed in claim 1 or 2, is characterized in that,
Possess display unit, this display unit show comprise discharge lamp always accumulate dependent variable, light a lamp the time and reach critical strain till time in interior information.
4. the dependent variable surveillance of discharge lamp as claimed in claim 1, is characterized in that,
On discharge lamp, be provided with lamp information recording carrier, this lamp information recording carrier record comprises parameter for setting arithmetic expression, always accumulate dependent variable and accumulation lights a lamp the time in interior information.
5. the dependent variable surveillance of discharge lamp as claimed in claim 4, is characterized in that,
Write in lamp information recording carrier by arithmetic unit discharge lamp always accumulate dependent variable and accumulation is lit a lamp the time.
6. the dependent variable surveillance of discharge lamp as claimed in claim 4, is characterized in that,
Lamp information recording carrier is IC tag.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008216058 | 2008-08-26 | ||
| JP2008216058A JP4548530B2 (en) | 2008-08-26 | 2008-08-26 | Discharge lamp distortion monitoring system and discharge lamp |
| JP2008-216058 | 2008-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101662876A CN101662876A (en) | 2010-03-03 |
| CN101662876B true CN101662876B (en) | 2014-07-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910164137.XA Expired - Fee Related CN101662876B (en) | 2008-08-26 | 2009-08-06 | Strain monitoring system of discharging lamp and the discharging lamp |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4548530B2 (en) |
| KR (1) | KR100989770B1 (en) |
| CN (1) | CN101662876B (en) |
| TW (1) | TWI458392B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5454168B2 (en) * | 2010-01-27 | 2014-03-26 | ウシオ電機株式会社 | Power supply device for discharge lamp |
| JP2014075316A (en) * | 2012-10-05 | 2014-04-24 | Cerma Precision Inc | Lamp and light source device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1882209A (en) * | 2005-05-13 | 2006-12-20 | 电灯专利信托有限公司 | Electric lamp and lighting system, and method for operating said electric lamp and lighting system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69736023T2 (en) * | 1996-04-10 | 2007-05-10 | Seiko Epson Corp. | Light source unit, light source device and projection display device |
| JP3933724B2 (en) * | 1996-05-30 | 2007-06-20 | ハリソン東芝ライティング株式会社 | High pressure discharge lamp lighting device and image display device |
| JPH11121339A (en) * | 1997-10-20 | 1999-04-30 | Nikon Corp | Method and device for exposure |
| JP2002122940A (en) | 2000-10-12 | 2002-04-26 | Nikon Corp | Projection type display device |
| JP2002287243A (en) * | 2001-03-23 | 2002-10-03 | Seiko Epson Corp | Lamp life display |
| JP2005243381A (en) * | 2004-02-26 | 2005-09-08 | Hitachi Ltd | Discharge lamp lighting device |
| JP2006201645A (en) * | 2005-01-24 | 2006-08-03 | Plus Vision Corp | Cartridge type lamp unit |
-
2008
- 2008-08-26 JP JP2008216058A patent/JP4548530B2/en not_active Expired - Fee Related
-
2009
- 2009-06-02 TW TW098118206A patent/TWI458392B/en not_active IP Right Cessation
- 2009-06-26 KR KR1020090057773A patent/KR100989770B1/en not_active IP Right Cessation
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|---|---|---|---|---|
| CN1882209A (en) * | 2005-05-13 | 2006-12-20 | 电灯专利信托有限公司 | Electric lamp and lighting system, and method for operating said electric lamp and lighting system |
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| Title |
|---|
| JP特开平11-121339A 1999.04.30 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010055754A (en) | 2010-03-11 |
| TWI458392B (en) | 2014-10-21 |
| JP4548530B2 (en) | 2010-09-22 |
| KR20100024887A (en) | 2010-03-08 |
| TW201010508A (en) | 2010-03-01 |
| CN101662876A (en) | 2010-03-03 |
| KR100989770B1 (en) | 2010-10-26 |
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