KR100989770B1 - Discharge lamp distortion amount monitoring system and discharge lamp - Google Patents

Abstract

Even when the electric power value is changed, the discharging lamp monitoring system which can use the discharge lamp for a period of time according to the original service life, avoid the bursting of the light tube during the lighting of the discharge lamp, and can safely use the discharge lamp; It provides a discharge lamp that is adapted to this system.

The discharge lamp 10, the power supply device 20 which supplies electric power to the discharge lamp 10, and the calculating device 30 which calculates the accumulation distortion amount of the light emitting tube 11 of the discharge lamp 10 are provided, A calculation formula for calculating the amount of accumulated distortion, which is a function of the lighting time, is set for each power value supplied from the power supply device 20 to the discharge lamp 10 by the calculation device 30. The light emitting tube of the discharge lamp 10 according to the lighting time to the electric power value, with the accumulated distortion amount of the light emitting tube 11 at the start of power supply to the electric power supplied to the discharge lamp 10 as an initial value. The total accumulated distortion amount of 11) is specified.

Description

Distortion amount monitoring system and discharge lamp of discharge lamp {DISCHARGE LAMP DISTORTION AMOUNT MONITORING SYSTEM AND DISCHARGE LAMP}

The present invention relates to a distortion amount monitoring system of a discharge lamp that monitors the accumulated distortion amount of a light emitting tube in a discharge lamp such as an ultra-high pressure short arc mercury lamp used for a lithography exposure apparatus or a short arc xenon lamp used for a cinema projector. And a discharge lamp applied to this system.

In a lamp such as an ultra-high pressure mercury lamp, a halogen lamp, a laser tube, or the like, the amount of distortion of the light emitting tube may increase by increasing the internal pressure of the light emitting tube or by thermal expansion of the sealing portion between the electrode and the light emitting tube glass. . For this reason, when the amount of distortion of a light emitting tube exceeds the limit during operation | movement of a lamp, there exists a possibility that a light emitting tube may burst.

For example, a short arc mercury lamp is used for baking exposure to a semiconductor substrate of a circuit pattern in various exposure processes in manufacturing processes, such as a semiconductor element and a liquid crystal display element.

In recent years, large-sized ones have been used as short arc mercury lamps due to the increase in the exposure area and the high throughput of the process. In such lamps, the pressure in the light emitting tube at the time of lighting reaches from 20 atm to 40 atm. . As a result, the stress applied to the light emitting tube increases, the risk of rupturing the light emitting tube increases, and the breaking force in the case of rupturing also increases. If the light tube is ruptured, the influence on the surroundings is great and serious damage to optical equipment, lighting fixtures and the like is caused.

In particular, in various manufacturing processes, when a light tube ruptures during an exposure process, a manufacturing line stops and it has an important influence on production, and it is an important problem.

In order to solve this problem, during the operation of the lamp, by irradiating a laser beam to the light emitting tube of the lamp and detecting the transmitted light, the amount of distortion of the translucent member is measured, and when the amount of distortion reaches a predetermined value or more, A light source device for stopping the supply of light or for operating an alarm is proposed (see Patent Document 1).

By the way, it is not easy to mount a complicated detection function using a laser in the light source device in reality, and there is a problem such as how to set the position of the laser and the position of the distortion in the light emitting tube. It is difficult to apply widely.

For this reason, the following are actually performed as a means of preventing the rupture of the light emitting tube of a lamp.

In the ultra-high pressure short arc discharge lamp, while the inside of the light emitting tube is maintained at a high pressure during its lighting, the glass (mainly quartz glass) constituting the light emitting tube is heated to a high temperature by heat from an arc to become viscous and thus emit light. Distortion (internal stress) accumulates in the tube. The light emitting tube is added with the stress of the sum of the accumulated distortion and the external pressure applied during lighting, and when the stress reaches the limit stress of the glass constituting the light emitting tube, the possibility of rupture of the light emitting tube increases.

Therefore, in order to stop the use of the lamp before the amount of distortion accumulated in the light emitting tube reaches a predetermined value, the lighting guarantee time is set for each discharge lamp. This lighting guarantee time is a time until it reaches the limit amount (limit distortion amount) which becomes a limit based on the amount of distortion accumulate | stored, for example when a discharge lamp is lighted with some lighting power. The limit distortion amount is empirically derived in consideration of the limit stress of the glass constituting the light emitting tube, the pressure applied to the light emitting tube during lighting, and the like.

[Patent Document 1] Japanese Unexamined Patent Publication No. Hei 6-5639

However, defining the service life of the discharge lamp only by the lighting guarantee time of the discharge lamp has the following problems.

The amount of distortion accumulated in the light emitting tube depends on the power value supplied to the discharge lamp. That is, even if the lighting time is the same, the higher the power value supplied to the discharge lamp, the larger the amount of distortion accumulated in the light emitting tube. And when using an actual discharge lamp, it is not a case to change the power value supplied. For example, (1) In order to stabilize tact time, the so-called constant illuminance lighting method which gradually increases the power value supplied so that the illuminance by the said discharge lamp becomes constant from the start of lighting of a discharge lamp. Or (2) In the same production line, when a plurality of resist processing steps are performed using a common discharge lamp, the power to be supplied to the discharge lamp in accordance with the sensitivity of the resist used in each resist processing step. It is a case where the roughness with respect to a resist is adjusted by changing a value.

As described above, when the discharge lamp is not used with a constant power value, that is, when the power value supplied to the discharge lamp is changed and used, the use condition where the power value supplied to the discharge lamp is maximized, that is, the use condition where the accumulation of distortion is greatest is based on. Lighting time is set.

When the discharge lamp is used until the lighting guarantee time is reached, the discharge lamp is replaced and discarded. By the way, since the discharge lamp discarded is still usable from the viewpoint of the accumulation distortion amount of the light emitting tube, there is a problem that economic and environmental waste occurs.

In addition, in order to avoid such waste, it may be used beyond the lighting guarantee time by the user's own judgment. In this case, the risk of rupture of the light emitting tube increases, and if the lamp ruptures, In addition, the expensive optical system needs to be repaired and the production is temporarily suspended, resulting in a significant decrease in production efficiency.

This invention is made | formed based on the above circumstances, The objective is that even when the electric power value supplied to a discharge lamp is changed, the said discharge lamp can be used for the time according to the original service life, and also the The present invention provides a distortion amount monitoring system for a discharge lamp capable of safely using the discharge lamp, and a discharge lamp applied to the system.

The distortion amount monitoring system of the discharge lamp of the present invention, the discharge lamp,

A power feeding device for supplying electric power to this discharge lamp;

A distortion amount monitoring system for a discharge lamp, comprising: a calculation device for calculating an accumulation distortion amount of a light emitting tube of the discharge lamp;

By the computing device, an arithmetic expression for calculating the amount of accumulated distortion as a function of the lighting time is set for each power value supplied from the power feeding device to the discharge lamp,

According to this calculation formula, the accumulation amount of the light emitting tube at the start of power supply to the power value supplied to the discharge lamp is taken as an initial value, and the total accumulation of the light emitting tube of the discharge lamp is changed according to the lighting time to the power value. It is characterized by the amount of distortion being specified.

In the distortion amount monitoring system of the discharge lamp of the present invention, an alarm is generated when the total accumulated distortion amount reaches the threshold distortion amount by comparing the preset threshold distortion amount of the light emitting tube and the total accumulated distortion amount specified by the calculation formula. It is preferred to have an alarm device for generating a.

Moreover, it is preferable to comprise the display apparatus which displays the information containing the total accumulated distortion amount of a discharge lamp, lighting time, and time until reaching a limit distortion amount.

Moreover, in the distortion amount monitoring system of the discharge lamp of this invention, the discharge lamp is provided with the lamp information recording medium on which the information containing the parameter for setting an arithmetic expression, the total accumulated distortion amount, and accumulated lighting time was recorded. It is preferable.

In this lamp information recording medium, it is preferable that the total accumulated distortion amount and the cumulative lighting time of the discharge lamp are recorded by the computing device.

In addition, an IC tag can be used as the lamp information recording medium.

The discharge lamp of this invention is a discharge lamp applied to the distortion amount monitoring system of said discharge lamp,

And a lamp information recording medium on which information including a parameter for setting a calculation formula, a total accumulated distortion amount, and a cumulative lighting time is recorded.

According to the distortion amount monitoring system of the discharge lamp of the present invention, the accumulated distortion amount of the light emitting tube at the start of power supply is set to an initial value by an arithmetic formula set for each power value supplied to the discharge lamp. Since the total accumulated distortion amount of the light emitting tube is specified, even when the discharge lamp is used by changing the power value supplied thereto, the discharge lamp can be used for a time corresponding to the original service life. In addition, when the total accumulated distortion amount of the light emitting tube reaches the limit distortion amount, the operator can recognize it, so that the use of the discharge lamp is stopped, thereby rupturing the light emitting tube during the lighting of the discharge lamp. The discharge lamp can be used safely.

Further, by providing an alarm device, the user can be reliably informed when the total accumulated distortion amount of the light emitting tube reaches the limit distortion amount.

In addition, by providing the display device, the amount of accumulated distortion of the light emitting tube can always be monitored while the discharge lamp is lit.

In addition, by providing the lamp information recording medium in the discharge lamp itself, even when using another discharge lamp having a different specification from the discharge lamp for reasons such as an improved design, the lamp information recording medium of the other discharge lamp is used. When the recorded information, such as a parameter for setting the calculation formula and the total accumulated distortion amount, is read by the calculation device, the setting of the calculation device is automatically changed, and the calculation equation for the other discharge lamp is set in the calculation device. Therefore, every time the discharge lamp is replaced, it becomes unnecessary for the operator to perform a cumbersome task of changing the setting of the computing device against the specifications of the discharge lamp, and the operator forgets to change the setting of the computing device or makes an incorrect setting. Is avoided, whereby it is possible to prevent the accumulation distortion amount from being calculated by an incorrect operation expression. Therefore, the total accumulated distortion amount of the light emitting tube can be specified on the basis of a calculation formula inherent to the discharge lamp to be lit at all times.

In addition, when the discharge lamp is turned off, the information of the total accumulated distortion amount of the light emitting tube at the time of extinguishing is recorded on the lamp information recording medium, and when the discharge lamp is turned on again, the information of the total accumulated distortion amount at the time of the last extinguishing Since the total accumulated distortion amount at the time of turning off the light is used as an initial value, the total accumulated distortion amount of the light emitting tube can be specified reliably based on the latest information at the time of re-lighting of the discharge lamp.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail.

FIG. 1: is explanatory drawing which shows the outline of the structure in an example of the distortion amount monitoring system (henceforth "distortion amount monitoring system") of the discharge lamp of this invention.

The distortion amount monitoring system includes a discharge lamp 10, a power supply device 20 for supplying electric power to the discharge lamp 10, a power control device 21 for controlling the power supply device 20, and a discharge. The computing device 30 for calculating the accumulated distortion amount of the light emitting tube 11 of the lamp 10, and the display device 40 displaying information such as the total accumulated distortion amount of the light emitting tube 11 of the discharge lamp 10. ) And an alarm device 50 that generates an alarm when the total accumulated distortion amount of the light emitting tube 11 of the discharge lamp 10 reaches the limit distortion amount.

The discharge lamp 10 has a light emitting tube 11 made of, for example, quartz glass, mercury is sealed in the light emitting tube 11, and is configured as a short arc type high pressure mercury lamp. As shown in an enlarged view in FIG. 2, the light emitting tube 11 is formed by forming a straight-sealing sealing portion 13 at both ends of the ellipsoidal tubular light emitting portion 12, and in the light emitting tube 11. And the positive electrode 14 and the negative electrode 15 are arranged along the tube axis direction so as to face each other. Further, a detention 16 is disposed in each of the sealing portions 13 of the light emitting tube 11, and a lead wire W is provided in each of the detentions 16.

Moreover, the IC tag C1 is attached to one lead wire W in the discharge lamp 10. The IC tag C1 includes a parameter for setting a calculation expression relating to the amount of distortion of the light emitting tube 11 of the discharge lamp 10, the limit distortion amount and the accumulated distortion amount of the light emitting tube 11, and the discharge lamp 10. ), Lamp information such as the cumulative lighting time and the serial number of the discharge lamp 10 is recorded.

The power feeding device 20 includes an output unit (not shown) that sends information such as an electric power value supplied from the power feeding device 20 to the discharge lamp 10 and a supply time (lighting time) to the computing device 30. It is installed.

Moreover, the light control means S which detects the illuminance by the radiated light from the discharge lamp 10 is connected to the electric power control apparatus 21, and based on the illuminance detected by the light detection means S, The electric power value supplied from the power supply device 20 to the discharge lamp 10 is feedback controlled by the power control device 21.

The arithmetic unit 30 sets an arithmetic expression by the information reading part 31 which reads the information recorded in the IC tag C1 of the discharge lamp 10, and the information from the IC tag C1, The arithmetic unit 32 which specifies the total accumulated distortion amount of the light emitting tube 11 by the arithmetic formula, a storage unit 33 which temporarily stores information from the arithmetic unit 32, and the memory unit 33 are stored in the storage unit 33. The information recording part 34 which records information to IC tag C1, and the control part 35 which controls the power control apparatus 21 and the alarm apparatus 50 are comprised.

The operation of the distortion monitoring system will be described with reference to FIGS. 1 and 3.

First, the discharge lamp 10 is set in a predetermined attachment part (not shown) (step 1), and the lamp information recorded in the IC tag C1 of this discharge lamp 10 is the information of the computing device 30. It is read by the reading part 31 (step 2). This ramp information is sent from the information reading unit 31 to the calculating unit 32 and stored in the storage unit 33. And when electric power is supplied from the power supply device 20 to the discharge lamp 10, and the discharge lamp 10 is lighted (step 3), the information of an electric power value and lighting time is supplied from the power supply device 20, for example. Every time from 1 second to several minutes, it is sent to the calculating part 32 of the calculating device 30 (step 4).

In the calculating part 32 of the calculating device 30, the value of the parameter for setting a calculation formula is determined based on the electric power value supplied to the discharge lamp 10 from the power feeding device 20, An arithmetic expression? = F (t) for calculating the accumulation distortion amount? As a function of the lighting time is set.

In the setting of this calculation formula, the discharge lamp of the same specification as the discharge lamp used is lighted by a constant electric power value, and the temporal change of the accumulated distortion amount of a light emitting tube is measured, and it is derived based on the data of this measured value. An approximation formula is used as a unique basic calculation formula defined for each discharge lamp of the same specification.

This basic calculation formula is based on the relationship between the physical characteristics of the glass (viscoelastic body) constituting the light emitting tube, that is, the viscoelastic body, from the stress applied from the outside and the temporal change of the amount of distortion accumulated therein by the stress. The exponential function represented by Formula (1) or the power function represented by following formula (2) can be used suitably. These basic calculation formulas are suitably selected based on the measured value of the temporal change of the accumulation distortion amount of the light emitting tube 11 in the discharge lamp 10. In addition, the relationship between the external stress in the viscoelastic body and the temporal change of the accumulation distortion amount is described in, for example, "Non-Newtonian hydrodynamics" (issued by Nakamura Kiyoji Co., Ltd.).

[Equation]

In the above formulas (1) and (2), a _n , α _n , b _n and β _n are parameters determined by the specification of the discharge lamp 10 used and the power value to be supplied. The range of power values and intervals of power values at which these parameters are set vary depending on the specifications of the discharge lamp 10. For example, in the discharge lamp 10 having a rated power consumption of 12 kW, for example, 10 to 12 kW (rated) In the range of 80 to 100% of power consumption), parameters are set at intervals of 0.1 to 1 kw.

In addition, although the parameter is set based on the actual value of the temporal change of the accumulated distortion amount of the light emitting tube 11, from the actual measured value of the temporal conversion of the accumulated distortion amount of the light emitting tube 11 by three or more power values, Parameters for each power value are obtained and an approximation equation [a _n = f ₁ (P) for the relationship between the parameter [a _n , α _n or b _n , β _n ] and the power value [P] from the values of these parameters. , _{n n} = f ₂ (P), or b _n = f ₁ (P), β _n = f ₂ (P)], thereby deriving the values of all parameters in the range of power values set from this approximation equation. Can be obtained.

As described above, the value of the parameter is determined based on the power value supplied to the discharge lamp 10, whereby a calculation formula based on the power value is set.

In the calculation formula set in this way, the total accumulated distortion amount of the light emitting tube 11 stored in the storage unit 33, that is, the light emitting tube 11 at the start of power supply to the power value supplied to the discharge lamp 10. ), And the total accumulated distortion amount of the light emitting tube 11 during lighting of the said discharge lamp 10 is specified according to the lighting time to the said electric power value. Information such as the specified total accumulated distortion amount, cumulative lighting time, and an increase curve of the accumulated distortion amount, which will be described later, is temporarily stored in the storage unit 33 of the arithmetic unit 30, and the display unit of the display device 40 ( 41).

When the power value supplied to the discharge lamp 10 is changed, a calculation formula is newly set based on this power value. In this calculation formula, the light emitting tube 11 at the start of power supply to the power value is calculated. Using the accumulated distortion amount as an initial value, the total accumulated distortion amount of the light emitting tube 11 during the lighting of the discharge lamp 10 is specified (step 5).

On the other hand, information such as the total accumulated distortion amount, the cumulative lighting time, the increase curve of the accumulated distortion amount, and the like, which are temporarily stored in the storage unit 33 of the arithmetic unit 30, are stored by the information recording unit 34 at an appropriate timing. The IC tag C1 of the discharge lamp 10 is recorded (step 6). Here, the recording of the information to the IC tag C1 may be executed each time the information stored in the storage unit 33 is updated, or may be executed only when the discharge lamp 10 is turned off.

Hereinafter, for the specification of the total accumulation distortion amount, for example, the initial accumulation distortion amount of the light emitting tube 11 is 0, and the discharge lamp 10 given the above formula (1) as a basic calculation formula for calculating the accumulation distortion amount is given. ) Will be described in more detail with an example in which 400 hours (total 800 hours) of lighting is performed at 400 kW and 11 kW at 10 kW.

When the discharge lamp 10 is turned on by supplying electric power of 10 kW, the parameters a _n and α _{n in} the above formula (1) are based on "a _n = a ₁ " and " α _n = α ₁ ″, and the formula ε = f (t) = a ₁ × [1-exp (−α ₁ t)] is set. And, as shown in Fig. 4, an increase curve A (hereinafter referred to as "curve A") of the accumulated distortion amount due to the power of 10 kW is given by this calculation formula, and the electric discharge lamp 10 has a power of 10 kW. In this time being supplied, the total accumulated distortion amount of the light emitting tube 11 increases along the curve A, as indicated by the thick line (a) in FIG. 4. Here, in FIG. 4, the horizontal axis represents the lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion amount of the light emitting tube, and the relative value when the initial distortion amount is 0 and the limit distortion amount is 100.

Next, after 400 hours have elapsed since the start of the supply of 10 kW of power, the power to be supplied is changed to 11 kW, and the parameters A _n and α in the above formula (1) based on this power value (11 kW). _n is determined by "A _n = A ₂ " and "α _n = α ₂ ", respectively, and arithmetic expression ε = f (t) = a ₂ x [1-exp (-α ₂ t)] is newly set. . And by this calculation formula, the increase curve B (henceforth "curve B") of the accumulation distortion amount by 11 kW of electric power is given, and in the time which 11 kW of electric power is supplied to the discharge lamp 10, In FIG. 4, the accumulation distortion amount (about 30 in the example in the example) of the light emitting tube 11 at the time of changing the power value supplied to the discharge lamp 10, that is, at the start of power supply of 11 kW is set as an initial value. As indicated by the thick line (b), the total accumulated distortion amount of the light tube increases along the curve B. FIG.

In this way, the total accumulated distortion amount of the light emitting tube 11 during the lighting of the discharge lamp 10 is specified by the calculation formula set for each electric power value, and the actual total accumulated distortion amount is as shown in FIG. 5. Similarly, it increases along the thick line (a) in curve A and the thick line (b) 'in curve B'. 5, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion amount of the light emitting tube, and the relative value when the initial distortion amount is 0 and the limit distortion amount is 100. After 400 hours (cumulative lighting time is 800 hours) after the start of the supply of 11 kW of power, the total accumulated distortion amount of the light emitting tube 11 (66 in the illustrated example) is 800 kW. The value is higher than the total accumulated distortion amount when lighted by supplying time, and lower than the total accumulated distortion amount when lighted by supplying power of 11 kW for 800 hours.

In the above, in the control part 35 of the arithmetic unit 30, the total accumulated distortion amount specified by the arithmetic formula and the limit distortion amount of the light emitting tube 11 read out from the IC tag C1 of the discharge lamp 10 are shown. It is always compared (step 7). When the total accumulated distortion amount does not reach the limit distortion amount, the information is sent to the power control device 21, and the supply of power to the discharge lamp 10 is continued (in step 4). On the other hand, when the total accumulated distortion amount reaches the limit distortion amount, the information is sent to the alarm device 50, and an alarm is generated from the alarm unit 51 (step 8).

Then, when the discharge lamp 10 is turned off before the total accumulated distortion amount of the light emitting tube 11 of the discharge lamp 10 reaches the limit distortion amount, the information on the accumulated distortion amount at the time of extinguishing is turned off. When the discharge lamp 10 is turned on again, the total amount of accumulated distortion of the light emitting tube 11 during lighting of the discharge lamp 10 is specified when the discharge lamp 10 is turned on again.

According to such a distortion amount monitoring system, by using the calculation formula set for each electric power value supplied to the discharge lamp 10, the discharge lamp (with the accumulated distortion amount of the light emitting tube 11 at the time of starting electric power supply as an initial value) Since the total accumulated distortion amount of the light emitting tube 11 during the lighting of 10 is specified, even when the discharge lamp 10 is used by changing the power value supplied thereto, the discharge lamp 10 is used as the light emitting tube 11. ) Can be used for a time until the accumulated distortion amount becomes a critical distortion amount, that is, a time corresponding to the original service life of the discharge lamp 10. In addition, when the total accumulated distortion amount of the light emitting tube 11 reaches the limit distortion amount, the user can recognize it. Therefore, by stopping the use of the discharge lamp 10, the light emitting tube 11 is turned on during the lighting of the discharge lamp 10. The rupture of 11) is avoided, and therefore the discharge lamp 10 can be used safely.

Moreover, since the alarm device 50 is provided, when the total accumulated distortion amount of the light emitting tube 11 reaches the limit distortion amount, it can be reliably informed to the user.

In addition, since the display device 40 is provided, the amount of accumulated distortion of the light emitting tube 11 can always be monitored while the discharge lamp 10 is turned on.

In addition, since the IC tag C1 is provided in the discharge lamp 10, even in the case of using another discharge lamp 10 having different specifications from the discharge lamp 10 for reasons such as an improved design, The information, such as a parameter for setting the calculation formula and the total accumulated distortion amount, recorded in the IC tag C1 of the other discharge lamp 10 is read by the calculation device 30, thereby Since the setting is automatically changed and the calculation formula relating to the other discharge lamp 10 is set in the calculation device 30, the operator sets the setting of the calculation device 30 every time the discharge lamp 10 is replaced. In addition, it becomes unnecessary to perform a complicated operation of changing in contrast with the specification of the discharge lamp 10, and it is avoided that the operator forgets to change the setting of the computing device 30 or makes an incorrect setting. Why accumulate by wrong expression Since the curvature can be prevented from being calculated, the total accumulated distortion amount of the light emitting tube 11 can be specified on the basis of a calculation formula inherent to the discharge lamp 10 to be turned on at all times.

In addition, when the discharge lamp 10 is turned off, since the information of the total accumulated distortion amount of the light emitting tube 11 at the time of being turned off is recorded in the IC tag C1, when the discharge lamp 10 is turned on again, Since the information of the total accumulated distortion amount at the time of last extinguishing, recorded in the IC tag C1, is read by the computing device 30, and the total accumulated distortion amount at the time of extinguishing is used as an initial value, the discharge lamp 10 The total accumulated distortion amount of the light emitting tube 11 can be specified on the basis of the latest information at the time of re-lighting.

In the distortion amount monitoring system of the present invention, various modifications can be added without being limited to the above embodiments.

For example, the lamp information recording medium provided in the discharge lamp is not limited to the IC tag, and various electronic information recording media can be used.

In addition, after an appropriate time (for example, 24 hours) has elapsed since the alarm occurrence of the alarm device, it is possible to stop the supply of power to the discharge lamp and to turn off the discharge lamp.

Moreover, it is not limited to a short arc type high pressure mercury lamp as a discharge lamp, It is applicable to various discharge lamps.

[Example]

Experimental Example 1

According to the structure shown in FIG. 2, the discharge lamp 10 of the following specification was produced.

Light emitting tube 11: Quartz glass, 185 mm in total length, Light emitting part 12; A length of 160 mm, a maximum inner diameter of 110 mm, a maximum outer diameter of 120 mm, a volume of 1000 cm ^{3 in the} light emitting portion 12, and a sealing portion 13; Outer diameter 34mm

Positive electrode 14: tungsten, negative electrode 15: tritized tungsten, distance between electrodes: 13 mm

Inclusion (Amount): Mercury (30mg / cm ³ )

Rated power consumption: 12kW, rated voltage: 115V, rated current: 104A

Let the discharge lamp of the said specification be "discharge lamp A."

Then, the discharge lamp A was turned on at power values of 10 kW, 11 kW, and 12 kW, and the accumulated distortion amount of the light emitting tube 11 was measured for each power value every time the lighting time elapsed.

Using the above formula (1) as the basic calculation formula, the value of the parameter [a _n , α _n ] in each power value is determined from the measured value of the accumulated distortion amount, and the calculation formula in each power value is set. It was. The values of the parameters [a _n , α _n ] are shown in Table 1 below. 6, the increase curve of the accumulation distortion amount given from the measured accumulation distortion amount and a calculation formula is shown. In FIG. 6, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion amount of the light emitting tube, and the relative value when the initial distortion amount is 0 and the limit distortion amount is 100.

As apparent from Fig. 6, it is understood that the accumulated distortion amount of the light emitting tube increases along the increase curve of the accumulated distortion amount given from the calculation formula based on the above formula (1).

TABLE 1

Experimental Example 2

According to the structure shown in FIG. 2, the discharge lamp 10 of the following specification was produced.

Light emitting tube 11: Quartz glass, 170 mm in total length, Light emitting part 12; A length of 145 mm, a maximum inner diameter of 92 mm, a maximum outer diameter of 100 mm, a volume of 600 cm ^{3 in the} light emitting portion 12, and a sealing portion 13; Outer diameter 30mm

Positive electrode 14: tungsten, negative electrode 15: tritized tungsten, distance between electrodes: 11 mm

Inclusion (Amount): Mercury (25mg / cm ³ )

Rated power consumption: 10kW, rated voltage: 95V, rated current: 105A

Let the discharge lamp of the said specification be "discharge lamp B."

Then, the discharge lamp B was turned on at power values of 8 kW, 9 kW and 10 kW, and the accumulated distortion amount of the light emitting tube 11 was measured for each power value every time the lighting time elapsed.

Using the above formula (2) as the basic formula, the value of the parameter [b _n , β _n ] in each power value is obtained from the measured value of the accumulated distortion amount, and the formula in each power value is obtained. Was set. The values of the parameters [b _n , β _n ] are shown in Table 2 below. 7, the increase curve of the accumulated distortion amount given from the measured distortion amount and arithmetic formula is shown. In Fig. 7, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion amount of the light emitting tube, and the relative value when the initial distortion amount is 0 and the limit distortion amount is 100.

As is apparent from FIG. 7, it is understood that the amount of accumulated distortion of the light emitting tube increases along the increase curve of the amount of accumulated distortion given from the calculation formula based on Equation (2) above.

TABLE 2

Experimental Example 3

With respect to the discharge lamp A, from the value of the parameter obtained in Experimental Example _{1 [a n, α n]} , the relationship of the parameters [a _n, α _n] and the value Power [P], an approximate expression [a _n = f ₁ (P), α _n = f ₂ (P)], and from this approximation equation, the parameters [b _n , β _n ] of the respective power values at 0.1 kW intervals in the power range of 10 to 12 kW. The value was obtained.

And by the distortion amount monitoring system of the structure shown in FIG. 1, on condition of 290 hours at 10 kW, 160 hours at 12 kW, 130 hours at 11 kW, 290 hours at 10.5 kW, 250 hours at 11.5 kW, and 310 hours at 11 kW, The discharge lamp A was turned on, and the discharge lamp A was turned off after that. 8, the increase curve of the accumulated distortion amount measured by the distortion amount monitoring system is shown. In FIG. 8, the horizontal axis represents the cumulative lighting time of the discharge lamp, and the vertical axis represents the accumulated distortion amount of the light emitting tube, and the relative value when the initial distortion amount is 0 and the limit distortion amount is 100. Moreover, the curve shown by the thick line shows the increase curve of the accumulated distortion amount measured by the distortion monitoring system, and the curve shown by the broken line shows the 10 kW, 10.5 kW, 11 kW, 11.5 kW, and 12 kW given by the calculation formula. The increase curve of the accumulation distortion amount by each electrode value is shown.

As is clear from Fig. 8, when the discharge lamp A is turned on under the above conditions, the time until the accumulated distortion amount of the light emitting tube 11 reaches the limit distortion amount is at the rated power consumption of 12 kW. It is understood that it is about 1.7 times the time (lighting guarantee time).

Moreover, after turning off the discharge lamp A, the accumulated distortion amount of the light emitting tube 11 was measured, and it confirmed that it nearly corresponded with the accumulated distortion amount measured by the distortion amount monitoring system.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the outline of the structure in an example of the distortion amount monitoring system of this invention.

2 is an explanatory view showing a part of the configuration of an example of a discharge lamp by breaking.

3 is a block diagram showing the operation of the distortion amount monitoring system of the present invention.

4 is a diagram showing an increase curve of the amount of accumulated distortion given by an expression.

Fig. 5 is a diagram showing an increase curve of the accumulated distortion amount measured by the distortion amount monitoring system of the present invention.

6 is a diagram showing an increase curve of the accumulated distortion amount given from the measured accumulation distortion amount and the calculation formula in Experimental Example 1. FIG.

FIG. 7 is a diagram showing an increase curve of the accumulated distortion amount given from the measured accumulation distortion amount and the calculation formula in Experimental Example 2. FIG.

FIG. 8 is a diagram showing an increase curve of the accumulated distortion amount measured by the distortion amount monitoring system in Experimental Example 3. FIG.

[Description of the code]

10 discharge lamp 11 light emitting tube

12 light emitting part 13 sealing part

14: anode 15: cathode

16: detention 20: feeding device

21: power control device 30: computing device

31: information reading section 32: calculating section

33: memory 34: information recording

35 control unit 40 display device

41: display unit 50: alarm device

51: alarm unit C1: IC tag

S: light detecting means W: lead wire

Claims (7)

With discharge lamp, A power feeding device for supplying electric power to this discharge lamp; A distortion amount monitoring system for a discharge lamp, comprising: a calculation device for calculating an accumulation distortion amount of a light emitting tube of the discharge lamp; By the computing device, an arithmetic expression for calculating the amount of accumulated distortion as a function of the lighting time is set for each power value supplied from the power feeding device to the discharge lamp, According to this calculation formula, the accumulation amount of the light emitting tube at the start of power supply to the power value supplied to the discharge lamp is taken as an initial value, and the total accumulation of the light emitting tube of the discharge lamp is changed according to the lighting time to the power value. A distortion amount monitoring system for a discharge lamp, characterized in that the distortion amount is specified. The method according to claim 1, And an alarm device for generating an alarm when the total accumulated distortion amount specified by the formula is compared with the predetermined limit distortion amount of the light emitting tube when the total accumulated distortion amount reaches the threshold distortion amount. Distortion amount monitoring system of discharge lamp. The method according to claim 1, And a display device for displaying information including the total accumulated distortion amount of the discharge lamp, the lighting time, and the time until the limit distortion amount is reached. The method according to any one of claims 1 to 3, The discharge lamp is provided with a distortion information monitoring system for a discharge lamp, characterized in that a lamp information recording medium on which information including a parameter for setting an arithmetic expression, a total accumulated distortion amount, and a cumulative lighting time is recorded. The method according to claim 4, And a total accumulated distortion amount and a cumulative lighting time of the discharge lamp are recorded on the lamp information recording medium by the computing device. The method according to claim 4, The lamp information recording medium is an IC tag, and the distortion amount monitoring system of the discharge lamp. A discharge lamp applied to the distortion amount monitoring system of the discharge lamp according to claim 1, And a lamp information recording medium on which information including a parameter for setting an arithmetic expression, a total accumulated distortion amount, and a cumulative lighting time is recorded.

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