200839453 九、發明說明 【發明所屬之技術領域】 本發明係關於具有放電燈，可長時間射出均勻照度之 光的光源裝置以及使用如此之光源裝置的曝光裝置。 【先前技術】 使用放電燈的光源裝置係如半導體製造製程及印刷基 板製造製程之光阻劑（photoresist)的曝光製程，頻繁地 利用於使用光線來進行物體的加工之工業製程中。在如此 工業製程所使用之光源裝置係尤其被要求「可長時間射出 均勻照度之光線」，但是，使用於光源裝置的放電燈係因 爲使用時間變長之同時會劣化而照度降低，故不易因應其 要求。 在此從先前就進行有爲了回應該要求的硏究，其成果 係公知有專利文獻1的光源裝置。此光源裝置係使用複數 放電燈來構成光源裝置，在光源裝置較新時，藉由使較整 體數量少之數量的放電燈點燈，確保必須之照度，而光源 裝置的使用時間每經過所定時間，則使剩下的放電燈追加 點燈，來禰補放電燈的劣化所致之照度的降低量。 [專利文獻1]日本特開2005— 227465號公報 【發明內容】 [發明所欲解決之課題] 因爲於放電燈係個別存在有「個體差」，故並不是可 -5- 200839453 完全排除電極的消耗非常快速或者在極早期封體容器 ，而引起「失光」之不良放電燈混在的可能性。爲此 先前技術（專利文獻1 )，無視不良放電燈混入之可 而每於所定時間使放電燈追加點燈係易於產生照度的 不足，對於提高照度的均勻性有一定限制。亦即，即 部份的不良放電燈在早期引起「照度降低」及「失光 到經過所定時間爲止係無法進行放電燈的追加點燈， _ 生從光源裝置射出之光的照度不足。相反地，存在有 經過所定使用時間，光源裝置還是射出充分照度之光 況下，使放電燈追加點燈時，則從光源裝置射出之光 度會成爲過剩之問題點。 本發明係有鑒於如此之先前技術的問題點所開發 因此本發明的主要課題係提供可長時間連續射出均勻 之光的光源裝置以及使用如此之光源裝置的曝光裝置 • [用以解決課題之手段] 申請專利範圍第1項所記載之發明係光源裝置J 0 其特徵爲具備：燈單元1 8，係具有複數放電燈3 0、 設置於放電燈3 0，使從各放電燈3 0射出之光朝相同 反射的反射器3 1及個別測定賦予放電燈3 0之電壓， 據電壓而個別判定放電燈3 0之異常，在判定出異常 輸出異常訊號S3的異常判定手段28，及點燈控制裝f ，係具有個別使放電燈3 0通電，或遮斷通電的功能 動時在至少遮斷1個預備之放電燈3 0的通電之狀態 毀損 ，如 能性 過或 使一 j ， 而產 即使 之狀 的照 者。 照度 個別 方向 並依 時， 1 22 ，起 下， -6 -BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light source device having a discharge lamp that emits light of uniform illumination for a long period of time and an exposure apparatus using such a light source device. [Prior Art] A light source device using a discharge lamp, such as a semiconductor manufacturing process and a photoresist exposure process for a printing substrate manufacturing process, is frequently used in an industrial process in which light is used for processing an object. In the light source device used in such an industrial process, it is particularly required to "light that can emit uniform illumination for a long time". However, the discharge lamp used in the light source device is degraded and the illuminance is lowered because the use time is long, so it is difficult to cope with it. Its requirements. Here, the light source device of Patent Document 1 is known from the prior art. The light source device uses a plurality of discharge lamps to constitute a light source device. When the light source device is new, the necessary illumination is ensured by lighting a relatively small number of discharge lamps, and the use time of the light source device is determined by the predetermined time. Then, the remaining discharge lamps are additionally turned on to compensate for the decrease in the illuminance caused by the deterioration of the discharge lamp. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2005-227465 [Draft of the Invention] [Problems to be Solved by the Invention] Since there is an "individual difference" in the discharge lamp system, it is not possible to completely exclude the electrode from -5 to 200839453. It is very fast or very likely to seal the container at an early stage, and the possibility of a "disappearing" poor discharge lamp is mixed. For this reason, in the prior art (Patent Document 1), it is possible to increase the illuminance uniformity by increasing the illuminance for each of the discharge lamps by ignoring the shortage of the illumination lamp regardless of the incorporation of the discharge lamp. In other words, some of the defective discharge lamps cause "illumination reduction" and "light loss until the elapse of a predetermined period of time", and the additional illumination of the discharge lamp cannot be performed, and the illuminance of the light emitted from the light source device is insufficient. When there is a predetermined period of use and the light source device emits sufficient illuminance, when the discharge lamp is additionally lit, the illuminance emitted from the light source device may become excessive. The present invention is based on such prior art. The problem of the present invention is to provide a light source device capable of continuously emitting uniform light for a long period of time and an exposure device using such a light source device. [Means for Solving the Problem] Patent Application No. 1 The invention is directed to a light source device J 0 characterized in that the lamp unit 18 includes a plurality of discharge lamps 30, a reflector 3 provided on the discharge lamp 30, and the light emitted from each of the discharge lamps 30 is reflected toward the same. And the voltage of the discharge lamp 30 is individually measured, and the abnormality of the discharge lamp 30 is individually determined according to the voltage, and the abnormality of the abnormal output abnormal signal S3 is determined. The means 28 and the lighting control unit f have a function of individually energizing the discharge lamp 30 or blocking the energization, and at the same time, at least one of the preliminary discharge lamps 30 is blocked from being energized, and the energy is excessive. Or make a j, and produce even the shape of the illuminator. Illumination in individual directions and time, 1 22, up, -6 -
200839453 使其他放電燈3 0通電，且遮斷依據異常訊號S 3被與 異常之放電燈3 〇的通電之同時，將到目前爲止通電 斷之預備的放電燈3 0予以通電。」 依照本發明，依據賦予放電燈3 〇之電壓，異常 手段2 8係將因爲電極的耗損而無法使用（甚至因爲 容器30c的損而失光）之放電燈30個別判定爲「異 ，點燈控制裝置22係遮斷藉由異常判定手段28被判 異常之放電燈3 0的通電之同時，使預備的放電燈3 0 點燈。 藉此，不會有因一部份的放電燈3 〇成爲照度不 者失光而在照度降低之狀態下，光源裝置1 〇持續作 虞。相反地，在不發生前述之照度不足或失光之正常 狀態下，因爲不進行伴隨經過所定時間之放電燈3 0 動追加點燈，故從光源裝置1 〇射出之光的照度不會 。所以，在本發明之光源裝置1〇’可長時間連續射出 照度之光。 再者，於本說明書中，所謂「照度」係指1cm2 積，1秒鐘之間接受之光能「mW/ cm2」。 申請專利範圍第2項所記載之發明的特徵係於第 所記載的光源裝置中，「異常判定手段28，係在個別 賦予放電燈3 0之電壓的測定電壓大於設定成較收劍 値高之基準電壓時，將放電燈3 0判定爲異常。」 供給至放電燈3 0之電壓値係雖然在開始放電燈 使用之後不久，與使用時間的經過同時電壓値上升， 丨定爲 :被遮 ‘判定 『封體 卜常」 丨定爲 通電 足或 動之 點燈 的自 過剩 f均勻 的面 1項 卜測定 :電壓 30的 但是 -7- 200839453 ，在這之後係伴隨使用時間的經過，收斂成所定電壓値（ 將此電壓値稱爲「收斂電壓値」）。但是，在前述之「異 常」放電燈3 0，可在短時間見到急激之電壓値的上升。 本發明係利用如此之放電燈3 0具有之特性者，在個 別測定賦予放電燈3 0之電壓的測定電壓大於設定成較收 斂電壓値高之基準電壓時，將該當放電燈3 0判定爲異常 。藉此，可確實檢測出不良放電燈30。 申請專利範圍第3項所記載之發明係曝光裝置1 2，「 其特徵爲具備：光源裝置1 0，係申請專利範圍第1項或第 2項所記載之光源裝置1 0，支持台1 4，係支持藉由從光源 裝置10射出之光來曝光之曝光對象物X，及光學系16, 係將從光源裝置1 0射出之光，引導至以支持台1 4支持之 曝光對象物X。」 依據本發明，可從光源裝置10長期間連續射出均勻 照度之光，故可長時間使對曝光對象物X照射來自光源裝 置1〇之光的時間（cycle time)，亦即曝光對象物X的曝 光所需時間成爲一定。所以，使曝光對象物X載置於支持 台14之時機（timing)及搬送至下個處理工程的時機成爲 一定，可使曝光工程前後之工程的等待時間及滯留的發生 機率成爲極小。 [發明的效果] 依據此發明，可提供可長時間連續射出均勻照度之光 的光源裝置。又，可提供曝光對象物的曝光時間在長時間 -8- 200839453 保持一定的曝光裝置。 【實施方式】 以下遵從圖面說明本發明。圖1係揭示組入關於 明之光源裝置10的曝光裝置12之槪要的圖。該曝光 12係用以將形成於印刷電路基板p上，作爲「曝光 物」的光阻層X加以曝光者，以光源裝置1 〇、支持 電路基板P之同時支持光阻層的支持台i 4及將從光 置10射出之光作爲平行光來照射光阻層X的光學系】 大略構成。 光源裝置1 0係用以將曝光所需之光（紫外光或 近紫外光的可視光）以所定照度來射出者，具備有燈 1 8、照度計20及點燈控制裝置22。 再者，於本說明書中，所謂「照度」係指丨cm2 積，1秒鐘之間接受之光能「mW/ cm2」。 燈單元1 8係如圖2所示，具有複數燈裝置2 4、 供給裝置2 6及異常判定手段2 8。進而，燈單元1 8係 使來自複數燈裝置24之光朝相同方向射出，具備保 數燈裝置24的區塊（block)狀的支座（holder) 29。 燈裝置24係個別以放電燈3 0及使從放電燈3 0 之光朝所定方向反射的反射器3 1所構成。 放電燈3 0係如圖3所示，是直流點燈式的短 short arc)高壓燈，具備：球狀的發光部30a、具有 兩端藉由收縮封止（shrink seal )方式形成之封止部 本發 裝置 對象 印刷 源裝 6而 者接 單元 的面 電力 爲了 持複 射出 弧（ 於其 30b -9- 200839453 的封體容器3 0 c、電極棒3 0 d、埋設於封止部3 0 b內的鉬 范3 0 e、溶接於鉬箱3 0 e的引導（1 e a d )棒3 0 f及封入於 發光部3 0 a內的水銀及其他必要封止物。 於封體容器3 0c之各封止部的內部係配設有一端突出 至發光部30a內部的電極棒30d、一端突出至外部的引導 棒3 Of及電性連接電極棒30d之他端與引導棒30f之他端 的鉬箔3 0 e，並且於各電極棒3 0 d的一端係有構成一對電 ϋ 極30g的陽極30h及陰極30i隔開所定間隔（以下稱爲「 電極間距離L」）而連接。 電力供給裝置26係如圖2所示，是爲了供給一定電 力給構成燈裝置24的放電燈3 0，用以供給所需電流的鎭 流器（ballast)，以鎭流器電力部32與鎭流器控制部33 大略構成。又，燈單元1 8係具有與燈裝置24相同數量的 電力供給裝置2 6。 鎭流器電力部3 2係在接收來自點燈控制裝置2 2的通 # 電訊號s 1時，利用因應來自鎭流器控制部3 3的脈衝寬度 #1號’進行開關動作（switching )，將放電燈3 〇的點燈 所需之電力供給給放電燈3 0，或者在接收來自點燈控制裝 置22的通電遮斷訊號S2時，停止對於放電燈3()的電力 供給。 又’鎭流器控制部3 3係考慮供給至放電燈3 〇之電壓 的偏離及經過時間之電壓變化等，以可供給爲了供給一定 電力給放電燈3 0所需之電流之方式，控制鎭流器電力部 32 ° -10 - 200839453 異常判定手段2 8係判定各放電燈3 0的異常之有無的 手段，具有：測定從電力供給裝置2 6供給至放電燈3 0之 電壓値的測定電路34、及將以測定電路34測定之電壓値 與預先設定之基準電壓V 1加以比較，在測定之電壓値大 於基準電壓VI時，輸出異常訊號S3的比較電路36。又 ，燈單元1 8係具有與燈裝置24相同數量的異常判定手段 28 〇 照度計20係如圖1所示，安裝於光源裝置1 〇之光的 射出軸上，亦爲構成光學系1 6的反射鏡54背面中與燈單 元1 8相對的朝向，是設定從光源裝置1 〇射出之光的照度 者。又，以照度計20測定之實照度係作爲照度値S4輸出 至點燈控制裝置22。 點燈控制裝置22係使放電燈3 0個別通電或者遮斷通 電的裝置，如圖4所示，具備：積算光量計3 8、序列器（ programmable logic controller: PLC) 40 及電算處理裝置 42 ° 積算光量計38係具有：依據從照度計20輸出之照度 値S4，判定異常之有無的判定電路44、及積算該當照度 値S4，計算出光量的積算電路46。 再者，於本說明書中，所謂「光量」係指1 cm2的面 積，在所定時間內接收之光能^ mJ/ cm2」。 判定電路44係判定從照度計20送出之照度値S4是 高於或低於預先設定之適正照度値，進而判定照度値S4 與適正照度値的差是否與1個放電燈3 0射出之光的照度 -11 - 200839453 相同程度。從照度計20送出之照度値S4高於適正照度値 且照度値S4是與適正照度値的差與從1個放電燈3 〇射出 之光的照度相同程度時，判定電路44係對於序列器40， 傳送照度異常高訊號S5，相反地，從照度計20送出之照 度値S4低於適正照度値且照度値S4是與適正照度値的差 與從1個放電燈3 0射出之光的照度相同程度時，判定電 路 44 係對於序列器（programmable logic controller :PLC )40，傳送照度異常低訊號S6。 積算電路46係從照度計20接受照度値S4並積算照 度値S4，是計算出光量的電路，在接收來自序列器40的 積算開始訊號S7時，重設積算値之同時，開始照度値S4 的積算。然後，光量成爲預先設定之値時，積算電路46 係結束照度値S4的積算之同時，對於序列器40，輸出積 算結束訊號S 8。 序列器40係具備：控制部40a，係接受從異常判定手 段28的比較電路36輸出之異常訊號S3、從積算光量計 38的判定電路44輸出之照度異常高訊號S5或照度異常 低訊號S6、從積算電路46輸出之積算結束訊號S8、及從 電算處理裝置42輸出之照度異常高訊號S12或照度異常 低訊號S13，並依據該等訊號，輸出通電訊號S1或通電 遮斷訊號S2至各電力供給裝置26 ;記憶部40b，係記憶 作爲從放電燈3 0開始點燈至照度安定爲止的時間而預先 設定之設定待機時間及預先設定光源裝置1 〇的起動時使 哪個燈裝置24點燈哪個燈裝置24消燈之燈裝置使用設定 -12- 200839453 等；及計時器40c，係計算時間。 亦即，從燈單元1 8的異常判定手段2 8具有之比較電 路26賦予異常訊號S3至序列器40時，序列器40係將通 電遮斷訊號S2送至該當異常判定手段28所對應之電力供 給裝置2 6之同時，將通電訊號S1送至到目前爲止消燈之 預備放電燈30所對應之電力供給裝置26。 又，從積算光量計3 8的判定電路44賦予照度異常高 訊號S5給序列器40時，序列器40係從點燈中的放電燈 3 〇中選擇1個放電燈3 0，並對於該當放電燈3 0所對應之 電力供給裝置26’送出通電遮斷訊號S2。另一^方面，賦 予照度異常低訊號S6給序列器40時，序列器40係從消 燈中的放電燈3 0中選擇1個放電燈3 0，並對於被選擇之 放電燈3 0所對應之電力供給裝置2 6，送出通電訊號S 1。 進而，序列器40係因爲以適正的光量將光阻層X加 以曝光’故對於包含於光學系1 6之曝光控制用遮斷器5 0 ，輸出開訊號S 1 0或閉訊號S 1 1。 又，序列器40係對於曝光控制用遮斷器（shutter ) 5〇 ’輸出開訊號S10時，傳送積算開始訊號S7至積算電 路46，同時計時器40c開始時間的計算。然後，序列器 4〇從積算電路46接受積算結束訊號S8時，序列器40係 對於曝光控制用遮斷器5 0輸出閉訊號S 1 1之同時，計時 器40c係結束時間的計算。亦即，計時器40c係計算光阻 層X的曝光時間。然後，序列器40係將從積算開始訊號 S7的傳送至積算結束訊號S8的接收爲止被計算之曝光時 -13- 200839453 間値S9，傳送至電算處理裝置42之同時，重設計時器 4 0c的計算。 電算處理裝置42係以將從序列器4 0接受之曝光時間 値S9與預先設定之適正曝光時間加以比較，判定曝光時 間値S9的問題之有無的判定部42a、及記憶曝光時間値 5 9的記憶部4 2 b所構成。曝光時間値S 9短於適正曝光時 間時，電算處理裝置42係對於序列器40，輸出照度異常 高訊號S 1 2。相反地，曝光時間値S9長於適正曝光時間 時，電算處理裝置42係對於序列器40，輸出照度異常低 訊號S 1 3。 再者，記憶於記憶部42b之曝光時間資料係作爲表示 曝光裝置1 2的運轉履歷而儲存。利用如此儲存曝光時間 資料，萬一，發生曝光不良時，可藉由參考過去的曝光時 間資料，分析曝光裝置1 2的運轉狀況，追及不良發生的 原因。 支持台14係如圖1所示，是支持印刷電路基板P者 ，可適切採用目前爲止公知的構造。 光學系16係將從光源裝置10射出之光作爲平行光引 導至被支持台1 4支持之印刷電路基板？的光阻層1者， 以使從光源裝置1 〇射出之光的照度分佈成爲均勻（亦即 ，在照射平面時，於被照射面中不發生照度不均之光）的 積光器52 (蠅眼鏡：fly — eye lens )、開壁控制從光源裝 置1 〇射出之光（在本實施例係通過積光器5 2之後的光） 之射出光路的曝光控制用遮斷器5 0、使通過曝光控制用遮 -14- 200839453 斷器50之光的光路曲折的反射鏡54、及使在反射鏡54反 射之光作爲平行光，並誘導至支持台1 4的凹面鏡5 6所構 成。又，於反射鏡54的略中心部係設置有貫通孔5 8，在 反射鏡54的背面，可接收通過貫通孔5 8之光的位置，設 置照度計20。所以，照度計20係可接收從光源裝置1 〇射 出，藉由通過積光器52而照度分佈均勻之光的一部份， 並測定其照度。 再者，在此所τκ之光學系16的構造係其一例，不是 限定於本實施例的構造者。例如，作爲在反射鏡54反射 從光源裝置10射出之光後，入光至積光器52之構造亦可 ，亦可因應作爲目的的光學路徑，適切變更其構造。又， 曝光控制用遮斷器50的型式係如圖1所示之百葉（louver )方式之外，亦可使用以所定旋轉控制裝置使以不使光通 過之材質形成，且具有從光源裝置10射出之光通過之孔 的旋轉盤（未圖7K)之方式。 起動點燈控制裝置22時，從序列器40對於所定數量 的電力供給裝置26傳送通電訊號S 1，燈裝置24會點燈 ，從燈裝置2 4射出之光（在本實施例，主要是紫外光） 係朝前方射出。再者，在關於本實施例之曝光裝置12戶斤 需之照度係可以3個燈裝置24射出之光來供給之量。所 以，光源裝置1 〇具備之5個燈裝置24中，原則上3個燈 裝置24同時點燈即可，剩下兩個燈裝置24係作爲預備而 維持消燈狀態。 從光源裝置ίο射出之光係藉由通過積光器 -15- 200839453 照度分佈均勻的光。然後，作爲從放電燈3 0開始點燈 光量安定爲止的時間，經過預先設定於序列器40的記 部4 0b之設定待機時間時，序列器40係輸出積算開始 號S7至積算光量計38的積算電路46之同時，將開訊 S 1 0傳送至曝光控制用遮斷器5 0，開啓曝光控制用遮斷 50。又，同時計時器40c開始時間的計算。 然後，來自積光器52之光係通過接受來自序列器 之開訊號S 1 0而開啓的曝光控制用遮斷器5 0。進而， 過曝光控制用遮斷器50之光係藉由反射鏡54朝凹面鏡 反射。 此時，朝反射鏡54之光的一部份係通過設置於反 鏡54之貫通孔58而照射照度計20。然後，照度計20 依據通過貫通孔5 8之光來測定照度，而將測定之照度 S4輸出至點燈控制裝置22的積算光量計3 8。又，被輸 之照度値S4係利用積算光量計3 8的判定電路44來判 異常之有無之同時，以積算電路46進行積算。 藉由反射鏡54朝凹面鏡56反射鏡之光係於凹面鏡 中成爲平行光，朝支持台1 4反射。朝支持台1 4反射之 係經由形成電路圖案之遮罩（mask )，照射載置於支持 1 4上的印刷電路基板P之光阻層X。 於積算電路46中被積算之光量値成爲預先設定之 時，積算電路46係對於序列器40，傳送積算結束訊號 。接受積算結束訊號S 8的序列器4 0係輸出閉訊號S 1 1 曝光控制用遮斷器5 0，關閉曝光控制用遮斷器5 0並遮 到 憶 訊 號 器 40 通 56 射 係 値 出 定 56 光 台 値 S8 至 斷 -16- 200839453 照射光阻層χ之光之同時’在傳送積算開始訊號s 7到接 收積算結束訊號S8之間’將以計時器40c計算之曝光時 間値S9輸出至電算處理裝置42。接收曝光時間値S9的 電算處理裝置42係判定曝光時間値S9是否在預先設定之 適正曝光時間內’將該當曝光時間値S 9作爲曝光時間資 料而輸出至記憶部4 2 b。 如此一來，結束對於1個光阻層X的曝光時，遮罩Μ 下的印刷電路基板Ρ與未處理物交換，同樣地被曝光。 曝光光阻層X之間，測定被供給至點燈中的放電燈 30之電壓値的異常判定手段28檢測出該當放電燈30的異 常時，異常判定手段2 8係輸出異常訊號S 3至序列器40 。接收該異常訊號S3的序列器40係將通電遮斷訊號S3 送出至供給電力給發生異常之放電燈3 0的電力供給裝置 26之同時，將通電訊號S 1送出至消燈之預備放電燈3 0 所對應之電力供給裝置26。藉此，發生異常之放電燈30 消燈之同時，新的放電燈3 0將會點燈，故整體觀看光源 裝置10，發光之放電燈30的數量不會變化。再者，發生 異常之放電燈30係在適切之時期，藉由作業員進行交換 ，被交換之放電燈3 0係作爲預備的放電燈3 0，到下個其 他放電燈3 0發生異常爲止，維持消燈狀態。 在異常判定手段28，如前述般，依據從電力供給裝置 2 6供給至燈裝置2 4的放電燈3 0之電壓値，判定放電燈 30的異常。亦即，供給至放電燈30之電壓値係如圖5中 Α所示’雖然在開始放電燈3 0的使用之後不久，與使用 -17- 200839453 時間的經過同時電壓値會上升，但是，在這之後係伴隨使 用時間的經過，收斂成所定電壓値（將此電壓値稱爲收斂 電壓値）。發生如此現象係因爲如長時間使用放電燈3 0 的話，電極30g會消耗而電極間距離L變長，而爲了維持 放電狀態所需之電壓値變大。 但是，於數量繁多的放電燈3 0中係存在有電極的消 耗非常快速或者在極早期封體容器30c毀損而失光之不良 放電燈3 0。如此不良放電燈3 0之電壓値與使用時間的關 係係如圖5中B所示，可在短時間見到急激之電壓値的上 升。 在此，作爲基準電壓V 1設定大於收斂電壓値之電壓 値，比較測定之電壓値與基準電壓V1的大小。比較之結 果，測定之電壓値較大時，該放電燈3 0已經失光，或者 快要失光之可能性較高，故可判斷爲「異常」。 在如此關於本實施例之光源裝置1 〇，針對各個放電燈 3 0來個別判斷異常，遮斷被判斷爲異常之放電燈3 0的通 電之同時，使預備的放電燈30通電，故無在沒察覺從光 源裝置1 0射出之光的照度降低之狀態下，使光源裝置1 0 持續做動之虞，相反地，在不發生從光源裝置10射出之 光的照度不足之正常點燈下，因爲不進行伴隨經過所定時 間的自動追加點燈，故光源裝置1 〇射出之光量不會發生 過或不足。 所以，只要是關於本竇施例之光源裝置1 0，即可長時 間連續射出均勻照度之光。 -18- 200839453 正 放 定 從 點 電 〇 10 光 小 從 38 號 40 該 S1 置 正 可 光 電 光 又，檢測出從光源裝置1 〇射出之照度値s 4大於適 照度値，進而照度値S4與適正照度値的差是與從1個 電燈3 0射出之光的照度相同程度的積算光量計3 8之判 電路44，係對於序列器40，輸出照度異常高訊號S5。 判定電路44接收照度異常高訊號S 5的序列器40係從 燈中的放電燈3 0中選擇1個放電燈3 0，並對於該當放 燈3 0所對應之電力供給裝置26，輸出通電遮斷訊號S2 JI 藉此，點燈之放電燈3 0的數量會減少，故從光源裝置 射出之光的照度會降低，原來過剩之照度會收容於適正 量値。相反地，檢測出從光源裝置1 0照射之照度値S 4 於適正照度値，進而照度値S4與適正照度値的差是與 1個放電燈3 0射出之光的照度相同程度的積算光量計 之判定電路44,係對於序列器40，輸出照度異常低訊 S 6。從判定電路44接收照度異常低訊號S 6的序列器 係從消燈中的放電燈3 0中選擇1個放電燈3 0，並對於 φ 當放電燈3 0所對應之電力供給裝置2 6，輸出通電訊號 。藉此，點燈之放電燈30的數量會增加，故從光源裝 1 0照射之光的照度會增加，原來過小之照度會收容於適 光量値。 藉此’藉由電壓値掌握各放電燈30的異常，不僅 經常使預先設定之數量的放電燈3 0點燈，亦可測定從 源裝置10射出之光的照度本身，使最適切之數量的放 燈3 0點燈。 進而詳細說明’照度計20接收之光係因爲藉由積 -19- 200839453 器52而照度分佈均勻化者，故照度計20的設置位置 如「必須對準光源裝置10之光的中心軸」之限制， 是可接收來自光源裝置10之光的位置，不管在哪設 度計20，皆可同樣測定照度。亦即，可易於進行照 2 0的位置調整。 進而，檢測出從序列器40輸出之曝光時間値S9 適正曝光時間（亦即，從光源裝置10射出之光的照 低）的電算處理裝置42，係對於序列器40，輸出照 常低訊號S 1 3。從電算處理裝置42接收照度異常低 S 1 3的序列器40係從消燈中的放電燈3 0中選擇1個 燈3 0，並對於該當放電燈3 0所對應之電力供給裝置 輸出通電訊號S 1。藉此，點燈之放電燈3 0的數量會 ’從光源裝置1 〇射出之光的照度會增加，藉此於積 路46中被積算之光量成爲預先設定之値爲止的時間 短，故曝光時間値S9收容於適正曝光時間內。相反 檢測出曝光時間値S9短於適正曝光時間（亦即，從 裝置10射出之光的照度較高）的電算處理裝置42, 於序列器40，輸出照度異常高訊號S 1 2。從電算處理 42接收照度異常高訊號S 1 2的序列器40係從點燈中 電燈3 0中選擇1個放電燈3 0，並對於該當放電燈3 0 應之電力供給裝置26，輸出通電遮斷訊號S2。藉此 燈之放電燈3 0的數量會減少，從光源裝置1 0射出之 照度會降低，藉此於積算電路46中被積算之光量成 先設定之値爲止的時間會變長，故曝光時間値S9會 無例 只要 置照 度計 長於 度較 度異 訊號 放電 26， 增加 算電 會縮 地， 光源 係對 裝置 的放 所對 ，點 光的 爲預 收容 -20- 200839453 於適正曝光時間內。 藉此’依據曝光時間來判斷從光源裝置i 〇射出之光 的照度之妥當性，可使最適切之數量的燈裝置24點燈。 如以上所述’依據關於本實施例之曝光裝置1 2，可從 光源裝置1 〇長期間連續射出均勻照度之光，故可長時間 使對曝光對象物X照射來自光源裝置1 〇之光的時間（ cycle time)，亦即曝光對象物X的曝光所需時間成爲一 g 定。所以’使曝光對象物X載置於支持台14之時機及搬 送至下個處理工程的時機成爲一定，可使曝光工程前後之 工程的等待時間及滯留的發生機率成爲極小。 再者，圖3所示之放電燈30是兩端（dollble — end) 型直流點燈方式燈，但是以交流點燈方式燈及單端（ single — end)型燈來代替亦可。進而，放電燈30係不限 於於封體容器30c封入水銀的短弧（short arc )型放電燈 ’使用作爲發光物質封入鈉或銃等之金屬鹵化物質的金屬 Φ 鹵化物燈，射出紫外光或者可視光亦可。又，作爲封體容 器3 0c的材質，使用石英玻璃或有透光性的陶瓷亦可。 又，在本實施例，供給給放電燈3 0之測定電壓値大 於設定爲高於收斂電壓値之基準電壓V 1時，判斷該當放 電燈3 0爲「異常」’但是，放電燈3 0爲「異常」的判斷 方法係不限於此，有依據使初始放電燈3 0點燈時的電壓 値（稱爲「當初電壓値」），將從當初電壓値僅增加所定 伏特數之値作爲基準電壓V1的方法及從當初電壓値僅增 加所定比例之値作爲基準電壓V1的方法。又，運算現在 200839453 的測定電壓値與從現在之所定時間前測定之測定電壓値的 差’以該當差大於所定値（亦即，電壓値急激增加）或者該 當差是負（亦即，伴隨使用時間的經過，電壓値一起減少） 判斷該當放電燈3 0爲「異常」亦可。藉由使用該判斷方 法，可檢測出放電燈3 0的電壓値進行如圖5中之C所示 的動態。亦即，於放電燈3 0中係在使用中，有封體容器 3 0c因熱而膨脹者，而發生如此膨脹時，電壓値係僅在短 _ 暫期間減少，之後，放電燈3 0會失光，而電壓値成爲0。 所以，藉由運算現在的測定電壓値與經過所定時間後之測 定電壓値的差，不僅可檢測出電壓値急激上升之型式的「 異常」，亦可檢測出電壓値減少之型式的「異常」。 又，藉由判定從照度計20送來之照度値S4高於或低 於預先設定之適正照度値，控制點燈之放電燈3 0的數量 ，使從光源裝置1 〇射出之光的照度成爲一定，但是，在 從照度計20送來之照度値S4高於適正照度値時係減少供 φ 給給放電燈3 0之電力量，在從照度計20送來之照度値 S4低於適正照度値時係增加供給給放電燈3 0之電力量， 而藉此使從光源裝置10射出之光的照度成爲一定亦可。 進而，組合點燈之放電燈3 0數量的控制與供給給放電燈 3 〇之電力量的控制亦可。 又，於構成光學系1 6之反射鏡54的背面，配置照度 計20，但是，僅在將已曝光的印刷電路基板P交換成印 刷電路基板P之間，於遮罩Μ的正上方配置其他照度計 20，測定照射於遮罩Μ之光的照度，依據該當照度，修正 -22- 200839453 反射鏡54的背面之照度計20測定的照度亦可。如此一來 ，可依據實際的曝光對象物之光阻層X附近之照度’提高 配置於反射鏡54的背面之照度計20的照度測定制度，進 行更正確的曝光時間管理。 又，點燈控制裝置22具有之功能係積算光量計3 8、 序列器40及電算處理裝置42個別分擔，但是，將點燈控 制裝置22所需之所有功能集中於1台裝置亦可，使功能 分攤至多於本實施例的裝置亦可。又，以點燈控制裝置22 負擔異常判定手段2 8的功能之方式構成亦可。 又，依每個燈裝置2 4來調整相對於支座2 9的角度， 使燈裝置2 4的光軸通過積光器5 2之中心，但是，如圖6 所示，使用各燈裝置24所對應之全反射鏡60及具備半反 射鏡（half mirror) 62的導光單元64，使各燈裝置24的 光軸R集束，讓該當集束之光軸R通過積光器52的中心、 亦可。200839453 The other discharge lamp 30 is energized, and the discharge lamp 30 that has been energized off so far is energized while the discharge of the abnormal discharge lamp 3 is interrupted according to the abnormal signal S3. According to the present invention, depending on the voltage applied to the discharge lamp 3, the abnormal means 28 is determined to be "different, lighting" by the discharge lamp 30 which cannot be used due to the wear of the electrode (even because of the loss of the container 30c). The control device 22 blocks the energization of the discharge lamp 30 which is abnormal by the abnormality determining means 28, and turns on the preliminary discharge lamp 30. Thereby, there is no part of the discharge lamp 3 〇 In the state where the illuminance is not lost and the illuminance is lowered, the light source device 1 continues to operate. Conversely, in the normal state in which the aforementioned illuminance is insufficient or the light is not lost, the discharge lamp accompanying the lapse of the predetermined time is not performed. Since the illuminance of the light emitted from the light source device 1 is not increased, the illuminance of the light source device 1 〇 ' can be continuously emitted for a long time. Further, in the present specification, "Illumination" means a 1cm2 product, and the light energy received in one second is "mW/cm2". In the light source device according to the second aspect of the invention, the abnormality determining means 28 is configured such that the voltage of the voltage applied to the discharge lamp 30 is higher than the set value. At the reference voltage, the discharge lamp 30 is judged to be abnormal." The voltage supplied to the discharge lamp 30 is shortly after the start of the use of the discharge lamp, and the voltage 値 rises at the same time as the use time, and is determined to be "covered" It is determined that the "enclosure of the body" is determined as the surface of the lamp that is energized or moved. The measurement of the surface of the excess f is uniform: the voltage of 30 is -7-200839453, after which it converges with the passage of time. The specified voltage 値 (this voltage is referred to as "convergence voltage 値"). However, in the above-mentioned "abnormal" discharge lamp 30, the increase in the voltage 急 of the rush can be seen in a short time. According to the present invention, when the characteristics of the discharge lamp 30 are measured, when the measurement voltage for individually applying the voltage of the discharge lamp 30 is larger than the reference voltage set to be higher than the convergence voltage, the discharge lamp 30 is judged to be abnormal. . Thereby, the defective discharge lamp 30 can be surely detected. The invention disclosed in claim 3 is an exposure apparatus 1 2, which is characterized in that it includes a light source device 10, which is a light source device 10 described in the first or second aspect of the patent application, and a support station 1 4 The exposure target X that is exposed by the light emitted from the light source device 10 and the optical system 16 support the light emitted from the light source device 10 to the exposure target X supported by the support station 14. According to the present invention, since the light of the uniform illuminance can be continuously emitted from the light source device 10 for a long period of time, the exposure object X can be irradiated with the light from the light source device 1 for a long period of time, that is, the exposure object X. The time required for exposure becomes certain. Therefore, the timing at which the exposure target X is placed on the support table 14 and the timing of transport to the next processing project are constant, and the waiting time and the probability of occurrence of the project before and after the exposure engineering can be made extremely small. [Effect of the Invention] According to the invention, it is possible to provide a light source device which can continuously emit light of uniform illuminance for a long period of time. Further, the exposure time of the object to be exposed can be maintained for a long time -8 - 200839453 to maintain a certain exposure device. [Embodiment] The present invention will be described below in accordance with the drawings. Fig. 1 is a view showing a summary of an exposure device 12 incorporated in a light source device 10 of the present invention. The exposure 12 is used to expose the photoresist layer X which is formed on the printed circuit board p as an "exposure", and supports the resistive layer i 4 while supporting the circuit board P with the light source device 1 And an optical system that irradiates the light emitted from the light 10 as a parallel light to illuminate the photoresist layer X. The light source device 10 is configured to emit light (ultraviolet light or visible light of near-ultraviolet light) required for exposure with a predetermined illuminance, and includes a lamp 18, an illuminometer 20, and a lighting control device 22. In addition, in this specification, "illuminance" means the light energy "mW/cm2" received in one second between 丨cm2 product. As shown in FIG. 2, the lamp unit 18 has a plurality of lamp devices 24, a supply device 26, and an abnormality determining means 28. Further, the lamp unit 18 emits light from the plurality of lamp devices 24 in the same direction, and includes a block-shaped holder 29 of the lamp device 24. The lamp unit 24 is composed of a discharge lamp 30 and a reflector 31 that reflects the light from the discharge lamp 30 in a predetermined direction. As shown in FIG. 3, the discharge lamp 30 is a short-light arc high-voltage lamp of a direct current lighting type, and includes a spherical light-emitting portion 30a and a seal formed by shrink seals at both ends. The surface power of the unit to be printed is the surface of the device, and the surface power of the unit is connected to the arc (the sealed container 30c of 30b-9-200839453, the electrode rod 30d, and the sealing part 3 0). The molybdenum van 30 e in b, the lead (1 ead ) rod 3 0 f dissolved in the molybdenum box 30 e, and the mercury and other necessary seals enclosed in the light-emitting portion 30 a. In the sealed container 3 0c The inside of each of the sealing portions is provided with an electrode rod 30d whose one end protrudes into the inside of the light-emitting portion 30a, a guide rod 3of that protrudes to the outside at one end, and a molybdenum that electrically connects the other end of the electrode rod 30d with the other end of the guiding rod 30f. The foil 30 e is connected to the anode 30h and the cathode 30i constituting the pair of electric electrodes 30g at one end of each electrode rod 30 d at a predetermined interval (hereinafter referred to as "interelectrode distance L"). The device 26 is shown in Fig. 2 for supplying a certain amount of electric power to the discharge lamp 30 constituting the lamp unit 24 for use. A ballast for supplying a required current is roughly configured by the choke power unit 32 and the choke control unit 33. Further, the lamp unit 18 has the same number of power supply units 26 as the lamp unit 24. The choke power unit 32 performs switching operation in response to the pulse width #1 ' from the choke control unit 33 when receiving the # electric signal s 1 from the lighting control unit 2 2 . The electric power required for lighting the discharge lamp 3 供给 is supplied to the discharge lamp 30, or when the energization interruption signal S2 from the lighting control device 22 is received, the supply of electric power to the discharge lamp 3 () is stopped. The flow controller control unit 3 3 controls the current of the choke to control the current required to supply a constant amount of electric power to the discharge lamp 30 in consideration of the deviation of the voltage supplied to the discharge lamp 3 及 and the voltage change of the elapsed time. 32 ° -10 - 200839453 The abnormality determining means 2 8 is a means for determining the presence or absence of an abnormality of each of the discharge lamps 30, and includes a measuring circuit 34 for measuring a voltage 供给 supplied from the power supply device 26 to the discharge lamp 30, and The electricity to be measured by the measuring circuit 34値Compared with the preset reference voltage V 1 , when the measured voltage 値 is greater than the reference voltage VI, the comparison circuit 36 of the abnormal signal S3 is output. Further, the lamp unit 18 has the same number of abnormality determining means as the lamp device 24 As shown in Fig. 1, the illuminance meter 20 is mounted on the emission axis of the light of the light source device 1 and also faces the lamp unit 18 on the back surface of the mirror 54 constituting the optical system 16. The illuminator of the light emitted by the light source device 1 . Further, the actual illuminance measured by the illuminance meter 20 is output to the lighting control device 22 as the illuminance 値S4. The lighting control device 22 is a device for individually energizing or blocking the discharge lamp 30. As shown in FIG. 4, the lighting control device 22 includes an integrated light meter 38, a programmable logic controller (PLC) 40, and a computer processing device 42°. The integrated light meter 38 has a determination circuit 44 that determines the presence or absence of an abnormality based on the illuminance 値S4 output from the illuminometer 20, and an integrated circuit 46 that calculates the amount of light by integrating the illuminance 値S4. In the present specification, the term "light quantity" means an area of 1 cm2, and the light energy received in a predetermined time is ^mJ/cm2". The determination circuit 44 determines whether the illuminance 値S4 sent from the illuminometer 20 is higher or lower than a predetermined positive illuminance 値, and further determines whether or not the difference between the illuminance 値S4 and the positive illuminance 値 is equal to the light emitted from the one discharge lamp 30. Illumination -11 - 200839453 The same degree. When the illuminance 値S4 sent from the illuminometer 20 is higher than the appropriate illuminance 値 and the illuminance 値S4 is the same as the illuminance of the light emitted from the one discharge lamp 3 ,, the determination circuit 44 is for the sequencer 40. The illuminance abnormally high signal S5 is transmitted. Conversely, the illuminance 値S4 sent from the illuminometer 20 is lower than the appropriate illuminance 値, and the difference between the illuminance 値S4 and the appropriate illuminance 値 is the same as the illuminance of the light emitted from the one discharge lamp 30. To the extent, the decision circuit 44 transmits a illuminance abnormally low signal S6 to the programmable logic controller (PLC) 40. The integrated circuit 46 receives the illuminance 値S4 from the illuminometer 20 and integrates the illuminance 値S4, and calculates a light amount. When receiving the integrated start signal S7 from the sequencer 40, the integrated circuit 46 resets the integrated , and starts the illuminance 値S4. Total calculation. Then, when the amount of light is set to a predetermined value, the integrated circuit 46 ends the integration of the illuminance 値S4, and outputs the integrated end signal S8 to the sequencer 40. The sequencer 40 includes a control unit 40a that receives an abnormality signal S3 outputted from the comparison circuit 36 of the abnormality determining means 28, an illuminance abnormally high signal S5 or an illuminance abnormally low signal S6 outputted from the determination circuit 44 of the integrated optical quantity meter 38, The integrated end signal S8 output from the integrated circuit 46, and the illuminance abnormally high signal S12 or the illuminating abnormally low signal S13 outputted from the computer processing device 42 are outputted according to the signals, and the power-on signal S1 or the power-on interrupt signal S2 is output to each power. The storage unit 26 stores the setting standby time set in advance as the time from the start of lighting of the discharge lamp 30 to the illuminance stabilization, and which lamp unit 24 is turned on at the start of the setting of the light source device 1 预先. The lamp device 24 is used to eliminate the lamp device setting -12-200839453, and the timer 40c is used to calculate the time. That is, when the comparison circuit 26 provided by the abnormality determining means 28 of the lamp unit 18 gives the abnormal signal S3 to the sequencer 40, the sequencer 40 sends the power-on blocking signal S2 to the power corresponding to the abnormality determining means 28. At the same time as the supply device 26, the energization signal S1 is sent to the power supply device 26 corresponding to the preliminary discharge lamp 30 that has been extinguished so far. Further, when the illuminance abnormality high signal S5 is supplied from the integrated circuit 3 to the sequencer 40, the sequencer 40 selects one of the discharge lamps 3 from the lighting lamp 3 in the lighting, and discharges the discharge lamp 3 The power supply device 26' corresponding to the lamp 30 sends a power-on interrupt signal S2. On the other hand, when the illuminance abnormally low signal S6 is given to the sequencer 40, the sequencer 40 selects one of the discharge lamps 30 from the discharge lamp, and corresponds to the selected discharge lamp 30. The power supply device 2 6 sends out the power-on signal S 1 . Further, since the sequencer 40 applies the exposure layer X to the exposure control unit 50 included in the optical system 16 by the appropriate amount of light, the open signal S 1 0 or the closed signal S 1 1 is output. Further, when the sequencer 40 outputs the ON signal S10 to the exposure control shutter 5', the integrated start signal S7 to the integrated circuit 46 is transmitted, and the timer 40c starts the calculation of the time. Then, when the sequencer 4 receives the integrated end signal S8 from the integrated circuit 46, the sequencer 40 outputs the closed signal S 1 1 to the exposure control interrupter 50, and the timer 40c calculates the end time. That is, the timer 40c calculates the exposure time of the photoresist layer X. Then, the sequencer 40 transmits the calculated exposure period -13 - 200839453 値S9 from the transmission of the integrated start signal S7 to the reception of the integrated end signal S8, and transfers it to the computer processing device 42, and resets the timer 40c. Calculation. The computer processing device 42 compares the exposure time 値S9 received from the sequencer 40 with a predetermined exposure time set in advance, and determines the presence or absence of the problem of the exposure time 値S9, and the memory exposure time 値59. The memory unit is composed of 4 2 b. When the exposure time 値S 9 is shorter than the appropriate exposure time, the computer processing device 42 outputs the illuminance abnormally high signal S 1 2 to the sequencer 40. Conversely, when the exposure time 値S9 is longer than the appropriate exposure time, the arithmetic processing unit 42 outputs the illuminance abnormally low signal S 1 3 to the sequencer 40. Further, the exposure time data stored in the storage unit 42b is stored as an operation history indicating the exposure device 12. By storing the exposure time data in this way, in the event of an exposure failure, the operation state of the exposure device 12 can be analyzed by referring to the past exposure time data, and the cause of the failure can be caught. As shown in FIG. 1, the support table 14 is a structure that supports the printed circuit board P, and a structure known so far can be suitably employed. The optical system 16 guides the light emitted from the light source device 10 as parallel light to the printed circuit board supported by the support table 14. The light-shielding layer 1 is such that the illuminance distribution of the light emitted from the light source device 1 is uniform (that is, light that does not illuminate unevenly in the illuminated surface when the light is irradiated) ( Fly-eye lens: fly-eye lens, open-wall control of the light-emitting device (1) The mirror 54 which is curved by the optical path of the light for the exposure control is used, and the light reflected by the mirror 54 is used as the parallel light, and is guided to the concave mirror 56 of the support table 14. Further, a through hole 5 is provided at a substantially central portion of the mirror 54, and a position of the light passing through the through hole 58 is received on the back surface of the mirror 54, and an illuminometer 20 is provided. Therefore, the illuminance meter 20 can receive a portion of the light that is emitted from the light source device 1 by illuminating through the illuminator 52, and the illuminance is measured. Further, the structure of the optical system 16 of τκ is not limited to the structure of the present embodiment. For example, the structure in which the light emitted from the light source device 10 is reflected by the mirror 54 and the light is incident on the light concentrator 52 may be changed, and the structure may be appropriately changed in accordance with the intended optical path. Further, the type of the exposure control breaker 50 may be formed of a material that does not allow light to pass through a predetermined rotation control device in addition to the louver method shown in FIG. The way the light exits through the hole of the rotating disk (not shown in Figure 7K). When the lighting control device 22 is activated, the power supply signal S1 is transmitted from the sequencer 40 for a predetermined number of power supply devices 26, and the light device 24 is turned on, and the light emitted from the light device 24 (in this embodiment, mainly ultraviolet) Light) is shot toward the front. Further, the illuminance required for the exposure apparatus 12 of the present embodiment is the amount that can be supplied by the light emitted from the three lamp units 24. Therefore, in the five lamp devices 24 provided in the light source device 1, in principle, the three lamp devices 24 can be turned on at the same time, and the remaining two lamp devices 24 are maintained as a standby state. The light emitted from the light source device ίο is uniformly distributed by illuminance through the illuminator -15- 200839453. Then, when the time until the lighting amount is stabilized from the discharge lamp 30, the sequencer 40 outputs the integrated start number S7 to the integrated light amount meter 38 when the set standby time set in the register 40b of the sequencer 40 is set in advance. At the same time as the integration circuit 46, the transmission S 1 0 is transmitted to the exposure control interrupter 50, and the exposure control interrupt 50 is turned on. Also, at the same time, the timer 40c starts the calculation of the time. Then, the light from the light concentrator 52 passes through the exposure control interrupter 50 that is turned on by receiving the open signal S 1 0 from the sequencer. Further, the light of the overexposure control interrupter 50 is reflected by the mirror 54 toward the concave mirror. At this time, a part of the light toward the mirror 54 is irradiated to the illuminometer 20 through the through hole 58 provided in the mirror 54. Then, the illuminometer 20 measures the illuminance based on the light passing through the through hole 58 and outputs the measured illuminance S4 to the integrated light amount meter 38 of the lighting control device 22. Further, the received illuminance 値S4 is determined by the determination circuit 44 of the integrated optical quantity meter 38, and the integrated circuit 46 performs the integration. The light reflected by the mirror 54 toward the concave mirror 56 is made into parallel light in the concave mirror, and is reflected toward the support table 14. The reflection of the support stage 14 is performed by irradiating a photoresist layer X of the printed circuit board P placed on the support 14 via a mask forming a circuit pattern. When the amount of light 値 accumulated in the integrated circuit 46 is set in advance, the integrating circuit 46 transmits the integrated end signal to the sequencer 40. The sequencer 40 that receives the integrated end signal S 8 outputs a closed signal S 1 1 exposure control interrupter 50, turns off the exposure control interrupter 50, and blocks the memory signal 40 through the system. 56 光台値S8至断-16- 200839453 While irradiating the light of the photoresist layer, 'between the transmission integration start signal s 7 and the reception integration end signal S8', the exposure time 値S9 calculated by the timer 40c is output to The computer processing device 42. The computer processing device 42 that receives the exposure time 値S9 determines whether or not the exposure time 値S9 is within the predetermined exposure time set in advance. The exposure time 値S 9 is output as the exposure time data to the memory unit 4 2 b. As a result, when the exposure to one photoresist layer X is completed, the printed circuit board 遮 under the mask is exchanged with the unprocessed material, and is exposed in the same manner. When the abnormality determining means 28 for measuring the voltage 値 supplied to the discharge lamp 30 in the lighting between the exposure resist layers X detects the abnormality of the discharge lamp 30, the abnormality determining means 28 outputs the abnormal signal S 3 to the sequence. 40. The sequencer 40 that receives the abnormality signal S3 sends the energization interrupting signal S3 to the power supply device 26 that supplies the power to the abnormal discharge lamp 30, and sends the power-on signal S1 to the preliminary discharge lamp 3 for eliminating the lamp. 0 corresponds to the power supply device 26. Thereby, the discharge lamp 30 which is abnormal will be extinguished, and the new discharge lamp 30 will be turned on. Therefore, the overall viewing of the light source device 10 does not change the number of the discharge lamps 30 that emit light. Further, the discharge lamp 30 in which the abnormality occurs is exchanged by the operator, and the exchanged discharge lamp 30 is used as the preliminary discharge lamp 30, and the next discharge lamp 30 is abnormal. Maintain the status of the lights. The abnormality determining means 28 determines the abnormality of the discharge lamp 30 based on the voltage 値 of the discharge lamp 30 supplied from the power supply device 26 to the lamp unit 24 as described above. That is, the voltage supplied to the discharge lamp 30 is as shown in FIG. 5'. Although the voltage 値 is increased shortly after the start of the use of the discharge lamp 30, the voltage 値 will rise at the same time as the use of the time -17-200839453, but, This is followed by convergence to a predetermined voltage 伴随 (this voltage is referred to as a convergence voltage 値). This phenomenon occurs because if the discharge lamp 30 is used for a long period of time, the electrode 30g is consumed and the distance L between the electrodes becomes long, and the voltage 所需 required to maintain the discharge state becomes large. However, in a large number of discharge lamps 30, there is a defective discharge lamp 30 in which the consumption of the electrode is very fast or the sealed container 30c is destroyed in the very early stage and is lost. The relationship between the voltage 値 of the poor discharge lamp 30 and the usage time is as shown in B of Fig. 5, and the rise of the violent voltage 値 can be seen in a short time. Here, the voltage 大于 which is larger than the convergence voltage 设定 is set as the reference voltage V 1 , and the magnitude of the measured voltage 値 and the reference voltage V1 is compared. As a result of the comparison, when the measured voltage 値 is large, the discharge lamp 30 has lost light, or the possibility of losing light is high, so it can be judged as "abnormal". In the light source device 1 of the present embodiment, an abnormality is individually determined for each of the discharge lamps 30, and the discharge of the discharge lamp 30, which is determined to be abnormal, is interrupted, and the preliminary discharge lamp 30 is energized, so that there is no When the illuminance of the light emitted from the light source device 10 is lowered, the light source device 10 is continuously operated, and conversely, under normal lighting when the illuminance of the light emitted from the light source device 10 is insufficient. Since the automatic additional lighting is not performed for a predetermined period of time, the amount of light emitted from the light source device 1 is not excessive or insufficient. Therefore, as long as it is the light source device 10 of the present sinus embodiment, the light of uniform illumination can be continuously emitted for a long time. -18- 200839453 is being set from the point of electricity 〇 10 light small from 38 No. 40 This S1 is set to be photoelectrically light, and it is detected that the illuminance 从 s 4 emitted from the light source device 1 is larger than the appropriate illumination 値, and then the illumination 値 S4 and The difference between the positive illuminance and the illuminance is the same as the illuminance of the light emitted from one of the lamps 30, and the circuit 44 of the integrated light meter 38 outputs the illuminance abnormality signal S5 to the sequencer 40. The sequencer 40 that receives the illuminance abnormally high signal S 5 from the determination circuit 44 selects one discharge lamp 30 from the discharge lamps 30 in the lamp, and outputs a power-on cover for the power supply device 26 corresponding to the discharge lamp 30. According to the stop signal S2 JI, the number of the discharge lamps 30 that are turned on is reduced, so that the illuminance of the light emitted from the light source device is lowered, and the original excess illuminance is accommodated in the positive amount 値. On the other hand, the illuminance 値S 4 irradiated from the light source device 10 is detected at the appropriate illuminance 値, and the difference between the illuminance 値S4 and the positive illuminance 値 is the same as the illuminance of the light emitted from the one discharge lamp 30. The determination circuit 44 outputs an illuminance abnormality low S6 to the sequencer 40. The sequencer that receives the illuminance abnormally low signal S 6 from the determination circuit 44 selects one discharge lamp 30 from the discharge lamps 30 in the extinguishing lamp, and for φ the power supply device 2 corresponding to the discharge lamp 30 Output a power-on signal. As a result, the number of the discharge lamps 30 that are lit up increases, so that the illuminance of the light irradiated from the light source is increased, and the illuminance that is too small is accommodated in the amount of illuminance. Therefore, by knowing the abnormality of each of the discharge lamps 30 by the voltage ,, not only the predetermined number of discharge lamps 30 are often turned on, but also the illuminance itself of the light emitted from the source device 10 can be measured, so that the optimum number is Put the lights on and turn on the lights. Further, the light system received by the illuminometer 20 is uniform in illuminance distribution by the -19-200839453 device 52, so that the illuminance meter 20 is disposed at a position such as "the center axis of the light of the light source device 10 must be aligned" The limitation is a position at which light from the light source device 10 can be received, and the illuminance can be measured in the same manner regardless of the setting of the meter 20. That is, the position adjustment of the photo 20 can be easily performed. Further, the computer processing device 42 that detects the exposure time 値S9 output from the sequencer 40 and corrects the exposure time (that is, the illumination light emitted from the light source device 10) is low, and outputs the normal low signal S 1 to the sequencer 40. 3. The sequencer 40 that receives the illuminance abnormally low S 1 3 from the computer processing device 42 selects one lamp 30 from the discharge lamp 30 in the lamp elimination, and outputs a power-on signal to the power supply device corresponding to the discharge lamp 30. S 1. As a result, the number of the discharge lamps 30 that are lit up will increase the illuminance of the light emitted from the light source device 1 , and the time until the amount of light accumulated in the integrated circuit 46 becomes a predetermined threshold is short. Time 値S9 is contained in the appropriate exposure time. On the contrary, it is detected that the exposure processing time 値S9 is shorter than the appropriate exposure time (i.e., the illuminance of the light emitted from the device 10 is high), and the sequencer 40 outputs the illuminance abnormally high signal S 1 2 . The sequencer 40 that receives the illuminance abnormally high signal S 1 2 from the computer processing 42 selects one of the discharge lamps 30 from the lighting in the lighting, and outputs a current to the power supply device 26 of the discharge lamp 30. Break signal S2. As a result, the number of discharge lamps 30 of the lamp is reduced, and the illuminance emitted from the light source device 10 is lowered, whereby the time until the amount of light integrated in the integrated circuit 46 is set to the first time becomes longer, so the exposure time値S9 will have no case as long as the illuminance meter is longer than the degree of difference signal discharge 26, increase the calculation will reduce the ground, the light source is placed on the device, and the spot light is pre-accommodation -20- 200839453 within the appropriate exposure time. Thereby, the illuminance of the light emitted from the light source device i is judged based on the exposure time, and the optimum number of the lamp devices 24 can be turned on. As described above, according to the exposure apparatus 1 2 of the present embodiment, light of uniform illuminance can be continuously emitted from the light source device 1 for a long period of time, so that the exposure object X can be irradiated with light from the light source device 1 for a long time. The cycle time, that is, the time required for exposure of the exposure object X becomes one g. Therefore, the timing at which the exposure target X is placed on the support table 14 and the timing of transport to the next processing project are constant, and the waiting time and the probability of occurrence of the retention before and after the exposure engineering can be made extremely small. Further, the discharge lamp 30 shown in Fig. 3 is a double-dot-end type DC lighting type lamp, but it may be replaced by an AC lighting type lamp and a single-end type lamp. Further, the discharge lamp 30 is not limited to a short arc type discharge lamp in which the mercury is sealed in the sealed container 30c. A metal Φ halide lamp in which a metal halide such as sodium or cesium is sealed as a luminescent material is emitted, and ultraviolet light is emitted or Visible light is also available. Further, as the material of the sealed container 30c, quartz glass or a translucent ceramic may be used. Further, in the present embodiment, when the measurement voltage 供给 supplied to the discharge lamp 30 is larger than the reference voltage V 1 set to be higher than the convergence voltage ,, it is determined that the discharge lamp 30 is "abnormal", but the discharge lamp 30 is The method of judging "abnormality" is not limited to this. There is a basis for making the voltage 値 at the initial discharge lamp 30 (referred to as "the initial voltage 値"), and the voltage 値 from the initial voltage 値 is only increased as the reference voltage. The method of V1 and the method of increasing the predetermined ratio from the initial voltage 値 as the reference voltage V1. Further, the difference between the measured voltage 2008 of 200839453 and the measured voltage 测定 measured from the current time set is calculated as the difference is greater than the predetermined enthalpy (that is, the voltage 値 is sharply increased) or the difference is negative (ie, accompanied by use) After the passage of time, the voltage 値 is reduced together. It is judged that the discharge lamp 30 is "abnormal". By using this judging method, the voltage 放电 of the discharge lamp 30 can be detected to perform the dynamics as shown by C in Fig. 5. That is, when the discharge lamp 30 is in use, the sealed container 30c expands due to heat, and when such expansion occurs, the voltage enthalpy is reduced only during the short period, and thereafter, the discharge lamp 30 will Loss of light, and the voltage 値 becomes zero. Therefore, by calculating the difference between the current measurement voltage 値 and the measured voltage 经过 after a predetermined period of time, it is possible to detect not only the “abnormality” of the voltage 値 値 上升, but also the “abnormality” of the voltage 値 reduction type. . Further, by determining that the illuminance 値S4 sent from the illuminometer 20 is higher or lower than the predetermined positive illuminance 値, the number of the discharge lamps 30 that are turned on is controlled so that the illuminance of the light emitted from the light source device 1 becomes However, when the illuminance 値S4 sent from the illuminometer 20 is higher than the appropriate illuminance 値, the amount of electric power supplied to the discharge lamp 30 is reduced, and the illuminance 値S4 sent from the illuminometer 20 is lower than the appropriate illuminance. In the case of 値, the amount of electric power supplied to the discharge lamp 30 is increased, whereby the illuminance of the light emitted from the light source device 10 is made constant. Further, it is also possible to control the number of discharge lamps 30 in combination with the amount of electric power supplied to the discharge lamp 3 〇. Further, the illuminometer 20 is disposed on the back surface of the mirror 54 constituting the optical system 16. However, only the printed circuit board P that has been exposed is exchanged between the printed circuit board P, and other components are disposed directly above the mask Μ. The illuminance meter 20 measures the illuminance of the light irradiated on the mask ,, and according to the illuminance, the illuminance measured by the illuminometer 20 on the back surface of the mirror 54 of the -22-200839453 may be corrected. In this manner, the illuminance measurement system of the illuminometer 20 disposed on the back surface of the mirror 54 can be improved in accordance with the illuminance in the vicinity of the photoresist layer X of the actual object to be exposed, and more accurate exposure time management can be performed. Further, the function-based calorimeter 38 and the sequencer 40 and the computer processing device 42 are separately shared by the lighting control device 22. However, all the functions required for the lighting control device 22 can be concentrated in one device. The function can be distributed to more than the device of the embodiment. Further, the lighting control device 22 may be configured to bear the function of the abnormality determining means 28. Further, the angle with respect to the holder 29 is adjusted for each of the lamp units 24, so that the optical axis of the lamp unit 24 passes through the center of the illuminator 52, but as shown in Fig. 6, each of the lamp units 24 is used. The corresponding total reflection mirror 60 and the light guiding unit 64 including the half mirror 62 bundle the optical axis R of each of the lamp devices 24 so that the optical axis R of the bundle passes through the center of the light collector 52. can.
進而，將關於發明之光源裝置1 〇使用於曝光裝置i 2 ，但是，可長時間射出均勻之光量的光源裝置1 〇係可適 用於使用光之所有工業製程。 【圖式簡單說明】 [圖1]揭示關於本發明之曝光裝置的圖。 [圖2]揭示光源單元的圖。 [圖3]揭示放電燈的圖。 [圖4]揭示點燈控制裝置的圖。 -23- 200839453 [圖5 ]揭示供給至放電燈之電壓値與該當放電燈之使 用時間的關係的圖。 [圖6]揭示複數燈與積光器與關於位置之其他實施例 的圖。 【主要元件符號說明】Further, the light source device 1 of the invention is used in the exposure device i 2 , but the light source device 1 capable of emitting a uniform amount of light for a long period of time can be applied to all industrial processes using light. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A diagram showing an exposure apparatus according to the present invention. [Fig. 2] A diagram showing a light source unit. Fig. 3 is a view showing a discharge lamp. Fig. 4 is a view showing a lighting control device. -23- 200839453 [Fig. 5] A diagram showing the relationship between the voltage 供给 supplied to the discharge lamp and the use time of the discharge lamp. Fig. 6 is a view showing a plurality of lamps and a concentrator and other embodiments relating to positions. [Main component symbol description]
1 〇 :光源裝置 12 :曝光裝置 1 4 :支持台 16 :光學系 18:燈單元（lamp unit) 20 :照度計 22 :點燈控制裝置 24 :燈裝置 26 :電力供給裝置 28 :異常判定手段 3 〇 :放電燈 3 8 :積算光量計 40:序歹！J 器(programmable logic controller * PLC) 42 :電算處理裝置 50:曝光控制用遮斷器（shutter) 52:積光器（integrator) 54 :反射鏡 5 6 :凹面鏡 -24-1 〇: light source device 12: exposure device 1 4: support table 16: optical system 18: lamp unit 20: illuminance meter 22: lighting control device 24: lamp device 26: power supply device 28: abnormality determining means 3 〇: Discharge lamp 3 8 : Accumulated light meter 40: Preface! J (programmable logic controller * PLC) 42 : computer processing device 50: shutter for exposure control (shutter) 52: integrator 54: mirror 5 6 : concave mirror -24-