TWI421643B - A light source device and an exposure device using the same - Google Patents

Description

Light source device and exposure device using same

The present invention relates to a light source device having a discharge lamp that emits light of uniform illumination for a long period of time and an exposure apparatus using such a light source device.

A light source device using a discharge lamp, such as a semiconductor manufacturing process and a photoresist exposure process for a printed circuit board manufacturing process, is frequently used in an industrial process in which light is used to process an object. In the light source device used in such an industrial process, it is particularly required to "light that can emit uniform illumination for a long time". However, the discharge lamp used in the light source device is degraded and the illuminance is lowered because the use time is long, so it is difficult to cope with it. Its requirements.

Here, the research has been carried out in order to respond to the request, and the result is a light source device of Patent Document 1. The light source device uses a plurality of discharge lamps to constitute a light source device. When the light source device is new, the necessary illumination is ensured by lighting a relatively small number of discharge lamps, and the use time of the light source device is determined by the predetermined time. Then, the remaining discharge lamps are additionally turned on to compensate for the decrease in the illuminance caused by the deterioration of the discharge lamp.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-227465

Since the residual discharge lamp has an individual difference, even if it is a discharge lamp of the same type and the same type, the degree of reduction in illuminance due to the deterioration of the discharge lamp varies depending on the individual difference of the discharge lamp. For this reason, as in the prior art (Patent Document 1), regardless of the individual difference of the discharge lamp, it is easy to cause the illuminance to be excessive or insufficient every time the discharge lamp is turned on for a predetermined period of time, and there is a limit to improving the uniformity of the illuminance. In other words, there is a light source device that emits sufficient illuminance even when the illuminance is reduced to a small extent even after a predetermined period of use. When the discharge lamp is additionally turned on, excessive illuminance is provided, and conversely, the arrival is determined. When the time is used, there is a light source device that exceeds the desired illuminance, and even if the discharge lamp is additionally turned on as the illuminance, the illuminance is insufficient, and the illuminance is insufficient.

The present invention has been developed in view of the problems of the prior art. Therefore, a main object of the present invention is to provide a light source device which can continuously emit light of uniform illuminance for a long period of time and an exposure apparatus using such a light source device.

The invention is directed to a light source device 10 according to the first aspect of the invention, comprising: a lamp unit 18 having a plurality of discharge lamps 30, and light lamps provided in the respective discharge lamps 30 to emit light from the respective discharge lamps 30. The illuminometer 20 reflects the illuminance of the light emitted from the lamp unit 18, and the lighting control device 22 has a function of individually energizing the discharge lamp 30 or blocking the energization. In the state in which at least one of the preliminary discharge lamps 30 is blocked, the other discharge lamps 30 are energized, and the actual illuminance measured by the illuminometer 20 is compared with a predetermined illuminance which is set in advance to determine whether the actual illuminance is excessive or insufficient. And the discharge lamp 30 is energized or interrupted to eliminate the excessive or insufficient actual illumination."

In the present invention, the additional lighting or the elimination of the discharge lamp 30 is performed in accordance with the illuminance of the light emitted from the light source device 10. That is, the illuminance of the light emitted from the light source device 10 is measured by the illuminance meter 20, and when the lighting control device 22 determines that "illumination is insufficient", the lighting control device 22 energizes the preliminary discharge lamp 30 to emit the light source device 10. The actual illuminance is restored to a positive illuminance. On the other hand, when the actual illuminance is more than the appropriate illuminance, and the lighting control device 22 determines "excess illuminance", the lighting control device 22 blocks the energization of any of the discharge lamps 30 that are energized, so that the actual light source device 10 is emitted. The illuminance is restored to a positive illumination.

As described above, according to the light source device 10 of the present invention, by measuring the actual illuminance itself emitted from the light source device 10, the optimum number of discharge lamps 30 is turned on, so that a uniform amount of light can be continuously emitted for a long period of time.

In the present specification, the term "illuminance" means an area of 1 cm ² and the light energy received in one second is "mW/cm ² ".

The invention is an exposure apparatus 12 according to the second aspect of the invention, which is characterized in that the light source device 10 is provided, and the light source device 10 according to the first aspect of the patent application, the support table 14 is supported by the light source device. The exposure object X exposed by the light emitted by the light and the optical system 16 guide the light emitted from the light source device 10 to the exposure target X supported by the support table 14."

According to the present invention, it is possible to continuously emit light of uniform illuminance from the light source device 10 for a long period of time, so that the exposure time X can be irradiated with the light from the light source device 10 for a long time, that is, the exposure object X The time required for exposure becomes constant. Therefore, the timing at which the exposure target X is placed on the support table 14 and the timing of transport to the next processing project are constant, and the waiting time and the probability of occurrence of the retention before and after the exposure engineering can be made extremely small.

The invention described in the third aspect of the invention is the exposure apparatus 12 of the second aspect, wherein the optical system 16 has a product that uniformizes the illuminance distribution of the light emitted from the lamp unit 18. An integrator 52, the illuminometer 20, receives the illuminance distributed by the illuminator 52 to uniformize the light, and measures the actual illuminance."

According to the present invention, since the light received by the illuminometer 20 is uniform in illuminance distribution by the illuminator 52, the position of the illuminometer 20 is not limited by, for example, "the central axis of the light of the light source device 10 must be aligned". As long as the position of the light from the light source device 10 can be received, the illuminance can be measured in the same manner regardless of where the illuminometer 20 is installed. That is, the position adjustment of the illuminometer 20 can be easily performed.

According to the invention, it is possible to provide a light source device which can emit light of uniform illuminance for a long period of time. Further, it is possible to provide an exposure apparatus in which the exposure time of the object to be exposed is kept constant for a long period of time. Further, according to the invention of claim 3, the position adjustment of the illuminometer 20 can be easily performed.

The invention will be described below in accordance with the drawings. Fig. 1 is a view showing an outline of an exposure device 12 incorporated in a light source device 10 of the present invention. The exposure device 12 is configured to expose a photoresist layer X formed as an "exposure target" on a printed circuit board P, and a support table for supporting the photoresist layer while supporting the printed circuit board P. 14 and the light emitted from the light source device 10 is roughly configured by irradiating the optical system 16 of the photoresist layer X as parallel light.

The light source device 10 is configured to emit light required for exposure (ultraviolet light or visible light close to ultraviolet light) with a predetermined illuminance, and includes a lamp unit 18, an illuminometer 20, and a lighting control device 22.

In the present specification, the term "illuminance" means an area of 1 cm ² and the light energy received in one second is "mW/cm ² ".

As shown in FIG. 2, the lamp unit 18 includes a plurality of lamp devices 24, a power supply device 26, and an abnormality determining means 28. Further, the lamp unit 18 is provided with a block-shaped holder 29 for holding the plurality of lamp devices 24 in order to emit light from the plurality of lamp devices 24 in the same direction.

The lamp unit 24 is composed of a discharge lamp 30 and a reflector 31 that reflects the light emitted from the discharge lamp 30 in a predetermined direction.

As shown in FIG. 3, the discharge lamp 30 is a direct-arc type short arc high-pressure lamp, and includes a spherical light-emitting portion 30a having a shrink seal formed at both ends thereof. The sealed container 30c of the sealing portion 30b, the electrode rod 30d, the molybdenum foil 30e embedded in the sealing portion 30b, the lead rod 30f which is melted in the molybdenum foil 30e, and the mercury enclosed in the light-emitting portion 30a and the like Necessary sealing.

Inside the sealing portion of the sealed container 30c, an electrode rod 30d whose one end protrudes into the light emitting portion 30a, a guiding rod 30f whose one end protrudes to the outside, and a other end of the electrically connecting electrode rod 30d and the guiding rod 30f are disposed. The molybdenum foil 30e at the other end is connected to the anode 30h and the cathode 30i which constitute the pair of electrodes 30g at one end of each electrode rod 30d at a predetermined interval (hereinafter referred to as "interelectrode distance L").

As shown in FIG. 2, the power supply device 26 is a ballast for supplying a constant amount of electric power to the discharge lamp 30 constituting the lamp unit 24 for supplying a required current, and the ballast power unit 32 and the ballast. The device control unit 33 is roughly configured. Further, the lamp unit 18 has the same number of power supply devices 26 as the lamp unit 24.

When receiving the energization signal S1 from the lighting control device 22, the ballast power unit 32 performs switching operation by means of a pulse width signal from the ballast control unit 33, and turns on the discharge lamp 30. The required electric power is supplied to the discharge lamp 30, or when the energization interruption signal S2 from the lighting control device 22 is received, the supply of electric power to the discharge lamp 30 is stopped.

Further, the ballast control unit 33 controls the ballast power in such a manner as to supply a current required to supply a constant amount of electric power to the discharge lamp 30 in consideration of a deviation of a voltage supplied to the discharge lamp 30 and a voltage change over time. Part 32.

The abnormality determining means 28 is a means for determining the presence or absence of an abnormality of each of the discharge lamps 30, and includes a measuring circuit 34 for measuring a voltage value supplied from the power supply device 26 to the discharge lamp 30, and a voltage value measured by the measuring circuit 34 and a predetermined value. The set reference voltage V1 is compared, and when the measured voltage value is greater than the reference voltage V1, the comparison circuit 36 of the abnormal signal S3 is output. Further, the lamp unit 18 has the same number of abnormality determining means 28 as the lamp unit 24.

As shown in FIG. 1, the illuminometer 20 is mounted on the emission axis of the light of the light source device 10, and is also oriented toward the lamp unit 18 on the back surface of the mirror 54 constituting the optical system 16, and is set to be emitted from the light source device 10. Illumination of light. Further, the actual illuminance measured by the illuminance meter 20 is output to the lighting control device 22 as the illuminance value S4.

The lighting control device 22 is a device that individually or energizes the discharge lamp 30. As shown in FIG. 4, the lighting control device 22 includes an integrated light meter 38, a programmable logic controller (PLC) 40, and an arithmetic processing device 42.

The integrated light meter 38 has a determination circuit 44 that determines the presence or absence of an abnormality based on the illuminance value S4 output from the illuminometer 20, and an integrated circuit 46 that calculates the amount of light by integrating the illuminance value S4. In the present specification, the term "light amount" means an area of 1 cm ² and the light energy received in a predetermined period of time is "mJ/cm ² ".

The determination circuit 44 determines whether the illuminance value S4 sent from the illuminometer 20 is higher or lower than a predetermined positive illuminance value, and further determines whether or not the difference between the illuminance value S4 and the positive illuminance value is the illuminance of the light emitted from one discharge lamp 30. The same degree. When the illuminance value S4 sent from the illuminometer 20 is higher than the appropriate illuminance value and the illuminance value S4 is equal to the illuminance of the light emitted from the one discharge lamp 30, the determination circuit 44 is for the sequencer 40. The illuminance abnormality high signal S5 is transmitted. Conversely, the illuminance value S4 sent from the illuminometer 20 is lower than the appropriate illuminance value, and the illuminance value S4 is the same as the illuminance of the light emitted from the one discharge lamp 30. The determination circuit 44 transmits an illuminance abnormally low signal S6 to the sequencer 40.

The integrated circuit 46 receives the illuminance value S4 from the illuminometer 20 and integrates the illuminance value S4, and calculates a light amount. When receiving the integrated start signal S7 from the sequencer 40, the integrated circuit 46 resets the integrated value and starts the illuminance value S4. Total calculation. When the amount of light reaches a predetermined value, the integrating circuit 46 ends the integration of the illuminance value S4, and outputs the integrated end signal S8 to the sequencer 40.

The sequencer 40 includes a control unit 40a that receives an abnormality signal S3 outputted from the comparison circuit 36 of the abnormality determining means 28, an illuminance abnormally high signal S5 or an illuminance abnormally low signal S6 outputted from the determination circuit 44 of the integrated optical quantity meter 38, The integrated end signal S8 output from the integrated circuit 46, and the illuminance abnormally high signal S12 or the illuminating abnormally low signal S13 outputted from the computer processing device 42 are outputted according to the signals, and the power-on signal S1 or the power-on interrupt signal S2 is output to each power. The storage unit 26 stores the setting standby time set in advance as the time from the start of lighting of the discharge lamp 30 to the illuminance stabilization, and which lamp device 24 is turned on at the time of starting the light source device 10 in advance. 24 lamp setting device usage setting, etc.; and timer 40c, is the calculation time.

That is, when the comparison circuit 26 provided by the abnormality determining means 28 of the lamp unit 18 supplies the abnormal signal S3 to the sequencer 40, the sequencer 40 sends the energization interrupting signal S2 to the power supply device corresponding to the abnormality determining means 28. At the same time, the power-on signal S1 is sent to the power supply device 26 corresponding to the preliminary discharge lamp 30 that has been extinguished so far.

When the illuminance abnormality high signal S5 is given to the sequencer 40 from the determination circuit 44 of the integrated light amount meter 38, the sequencer 40 selects one discharge lamp 30 from the discharge lamps 30 in the lighting, and for the discharge lamp 30 The corresponding power supply device 26 sends the power-on blocking signal S2. On the other hand, when the illuminance abnormally low signal S6 is given to the sequencer 40, the sequencer 40 selects one discharge lamp 30 from the discharge lamps 30 in the lamp elimination, and supplies power to the selected discharge lamp 30. 26, send the power signal S1.

Further, since the sequencer 40 exposes the photoresist layer X with a proper amount of light, the exposure control breaker 50 included in the optical system 16 outputs the ON signal S10 or the OFF signal S11.

Further, the sequencer 40 transmits the integrated start signal S7 to the integrated circuit 46 when the open signal S10 is output to the exposure control shutter 50, and the timer 40c starts the calculation of the time. When the sequencer 40 receives the integrated end signal S8 from the integrated circuit 46, the sequencer 40 outputs the closed signal S11 to the exposure control interrupter 50, and the timer 40c calculates the end time. That is, the timer 40c calculates the exposure time of the photoresist layer X. Then, the sequencer 40 transmits the exposure time value S9 calculated from the transmission of the integration start signal S7 to the reception of the integration completion signal S8 to the computer processing device 42, and resets the calculation of the timer 40c.

The computer processing unit 42 compares the exposure time value S9 received from the sequencer 40 with a predetermined exposure time set in advance, and determines the presence or absence of the problem of the exposure time value S9 and the memory unit of the memory exposure time value S9. The composition of 42b. When the exposure time value S9 is shorter than the appropriate exposure time, the computer processing device 42 outputs the illuminance abnormally high signal S12 to the sequencer 40. Conversely, when the exposure time value S9 is longer than the appropriate exposure time, the computer processing device 42 outputs the illuminance abnormally low signal S13 to the sequencer 40.

Further, the exposure time data stored in the storage unit 42b is stored as the operation history of the exposure device 12. By storing the exposure time data in this way, in the event of an exposure failure, the operation state of the exposure device 12 can be analyzed by referring to the past exposure time data, and the cause of the failure can be caught.

As shown in FIG. 1, the support stand 14 is a structure which supports a printed circuit board P, and can employ the structure currently known.

The optical system 16 guides the light emitted from the light source device 10 as parallel light to the photoresist layer X of the printed circuit board P supported by the support table 14 so that the illuminance distribution of the light emitted from the light source device 10 becomes uniform (also In other words, in the present embodiment, the light illuminator 52 (fly-eye lens) that is not illuminating unevenly on the illuminated surface, and the opening control of the light emitted from the light source device 10 (in the present embodiment) The exposure control interrupter 50 that emits the light path through the light after the light collector 52, the mirror 54 that bends the optical path of the light passing through the exposure control interrupter 50, and the light that is reflected by the mirror 54 It is constituted by a concave mirror 56 which is parallel light and is induced to the support table 14. Further, a through hole 58 is provided at a substantially central portion of the mirror 54, and a position of the light passing through the through hole 58 is received on the back surface of the mirror 54, and the illuminometer 20 is provided. Therefore, the illuminance meter 20 can receive a portion of the light that is emitted from the light source device 10 and is evenly distributed by the illuminator 52, and the illuminance is measured.

In addition, the structure of the optical system 16 shown here is an example, and is not limited to the structure of this embodiment. For example, as the mirror 54 reflects the light emitted from the light source device 10, the light may be incident on the light concentrator 52, and the structure may be appropriately changed depending on the intended optical path. Further, the type of the exposure control interrupter 50 may be formed by a material that does not allow light to pass through a predetermined rotation control device, as shown in FIG. The manner in which the emitted light passes through the rotating disk (not shown) of the hole.

When the lighting control device 22 is activated, the power supply signal S1 is transmitted from the sequencer 40 for a predetermined number of power supply devices 26, and the light device 24 lights up and emits light from the light device 24 (in this embodiment, mainly ultraviolet light). The system shoots forward. Further, the illuminance required for the exposure apparatus 12 of the present embodiment can be supplied by the light emitted from the three lamp units 24. Therefore, in the five lamp devices 24 included in the light source device 10, in principle, the three lamp devices 24 may be turned on at the same time, and the remaining two lamp devices 24 are maintained as a standby state to maintain the light-off state.

The light emitted from the light source device 10 is light having a uniform illuminance distribution by passing through the light concentrator 42. Then, the sequencer 40 outputs the integrated calculation start signal S7 to the integrated light amount meter 38 when the set time is set in advance in the memory unit 40b of the sequencer 40 as the time from the start of the discharge of the discharge lamp 30 to the stabilization of the light amount. At the same time as the circuit 46, the open signal S10 is transmitted to the exposure control interrupter 50, and the exposure control interrupter 50 is turned on. Also, at the same time, the timer 40c starts the calculation of the time.

Then, the light from the light concentrator 52 passes through the exposure control interrupter 50 that is turned on by receiving the open signal S10 from the sequencer 40. Further, the light passing through the exposure control interrupter 50 is reflected by the mirror 54 toward the concave mirror 56.

At this time, a portion of the light toward the mirror 54 is irradiated to the illuminometer 20 through the through hole 58 provided in the mirror 54. Then, the illuminance meter 20 measures the illuminance based on the light passing through the through hole 58, and outputs the measured illuminance value S4 to the integrated light amount meter 38 of the lighting control device 22. Further, the output illuminance value S4 is determined by the determination circuit 44 of the integrated light amount meter 38 to determine the presence or absence of an abnormality, and is integrated by the integrated circuit 46.

The light reflected by the mirror 54 toward the concave mirror 56 is incident on the concave mirror 56 as parallel light, and is reflected toward the support table 14. The light reflected toward the support table 14 illuminates the photoresist layer X of the printed circuit board P placed on the support table 14 via a mask forming a circuit pattern.

When the light amount value integrated in the integrated circuit 46 is a predetermined value, the integrating circuit 46 transmits the integrated end signal S8 to the sequencer 40. The sequencer 40 that has received the integration completion signal S8 outputs the closed signal S11 to the exposure control interrupter 50, closes the exposure control interrupter 50, and blocks the light of the irradiation resist layer X, and transmits the integration start signal S7. Between the reception integration end signal S8, the exposure time value S9 calculated by the timer 40c is output to the computer processing device 42. The computer processing device 42 that receives the exposure time value S9 determines whether or not the exposure time value S9 is within the predetermined exposure time set in advance, and outputs the exposure time value S9 as the exposure time data to the storage unit 42b.

As a result, when the exposure to one photoresist layer X is completed, the printed circuit board P under the mask M is exchanged with the unprocessed material, and is exposed in the same manner.

When the abnormality determining means 28 for measuring the voltage value of the discharge lamp 30 supplied to the lighting between the exposure resist layers X detects the abnormality of the discharge lamp 30, the abnormality determining means 28 outputs the abnormal signal S3 to the sequencer 40. . The sequencer 40 that receives the abnormality signal S3 sends the power-on blocking signal S3 to the power supply device 26 that supplies power to the discharge lamp 30 that has abnormality, and sends the power-on signal S1 to the preliminary discharge lamp 30 for eliminating the lamp. Power supply device 26. Thereby, the discharge lamp 30 which is abnormal is extinguished, and the new discharge lamp 30 is turned on. Therefore, the light source device 10 is viewed as a whole, and the number of the discharge lamps 30 that emit light does not change. Further, the discharge lamp 30 in which the abnormality occurs is exchanged by the operator, and the exchanged discharge lamp 30 serves as the preliminary discharge lamp 30, and the lamp is maintained until the next other discharge lamp 30 is abnormal. status.

The abnormality determining means 28 determines the abnormality of the discharge lamp 30 based on the voltage value of the discharge lamp 30 supplied from the power supply device 26 to the lamp device 24 as described above. That is, the voltage value supplied to the discharge lamp 30 is as shown in A of FIG. 5, and although the voltage value rises at the same time as the passage of the use time after the start of use of the discharge lamp 30, it is accompanied by the use of the voltage value. The passage of time converges to a predetermined voltage value (this voltage value is referred to as a convergence voltage value). This phenomenon occurs because when the discharge lamp 30 is used for a long period of time, the electrode 30g is consumed and the distance L between the electrodes becomes long, and the voltage value required to maintain the discharge state becomes large.

However, in a large number of discharge lamps 30, there is a defective discharge lamp 30 in which the consumption of the electrodes is very fast or the sealed container 30c is destroyed in the very early stage and is lost. The relationship between the voltage value of the poor discharge lamp 30 and the use time is as shown by B in Fig. 5, and the rise of the voltage value of the jerk can be seen in a short time.

Here, a voltage value larger than the convergence voltage value is set as the reference voltage V1, and the measured voltage value and the magnitude of the reference voltage V1 are compared. As a result of the comparison, when the measured voltage value is large, the discharge lamp 30 has lost light, or the possibility of losing light is high, so it can be judged as "abnormal".

In the light source device 10 of the present embodiment, the abnormality is individually determined for each of the discharge lamps 30, and the discharge of the discharge lamp 30, which is determined to be abnormal, is interrupted, and the preliminary discharge lamp 30 is energized, so that it is not noticed. In a state in which the illuminance of the light emitted from the light source device 10 is lowered, the light source device 10 is continuously operated, and conversely, under normal lighting in which the illuminance of the light emitted from the light source device 10 is insufficient, since the illuminance is not performed, Since the lighting is automatically added for a predetermined period of time, the amount of light emitted from the light source device 10 does not occur excessively or insufficiently.

Therefore, as long as the light source device 10 of the present embodiment is used, it is possible to continuously emit light of uniform illuminance for a long time.

Further, it is detected that the illuminance value S4 emitted from the light source device 10 is larger than the positive illuminance value, and the difference between the illuminance value S4 and the positive illuminance value is the same as the illuminance of the light emitted from the one discharge lamp 30. The circuit 44 outputs an illuminance abnormally high signal S5 to the sequencer 40. The sequencer 40 that receives the illuminance abnormally high signal S5 from the determination circuit 44 selects one discharge lamp 30 from the discharge lamps 30 in the lighting, and outputs a power-off occlusion signal to the power supply device 26 corresponding to the discharge lamp 30. S2. As a result, the number of the discharge lamps 30 that are turned on is reduced, so that the illuminance of the light emitted from the light source device 10 is lowered, and the original excess illuminance is accommodated in the appropriate amount of light. On the other hand, it is detected that the illuminance value S4 irradiated from the light source device 10 is smaller than the appropriate illuminance value, and the difference between the illuminance value S4 and the positive illuminance value is the same as the illuminance of the light emitted from the one discharge lamp 30. The determination circuit 44 outputs an illuminance abnormally low signal S6 to the sequencer 40. The sequencer 40 that receives the illuminance abnormally low signal S6 from the determination circuit 44 selects one discharge lamp 30 from the discharge lamps 30 in the lamp elimination, and outputs a power-on signal S1 to the power supply device 26 corresponding to the discharge lamp 30. As a result, the number of the discharge lamps 30 that are lit up increases, so that the illuminance of the light irradiated from the light source device 10 increases, and the originally too small illuminance is accommodated in the appropriate amount of light.

Thereby, the abnormality of each of the discharge lamps 30 can be grasped by the voltage value, and not only the predetermined number of discharge lamps 30 can be turned on, but also the illuminance itself of the light emitted from the light source device 10 can be measured, so that the optimum amount can be measured. The discharge lamp 30 lights up.

More specifically, since the light received by the illuminometer 20 is uniform in illuminance distribution by the illuminator 52, the position of the illuminometer 20 is not limited by, for example, "the central axis of the light of the light source device 10 must be aligned". As long as the position of the light from the light source device 10 can be received, the illuminance can be measured in the same manner regardless of where the illuminometer 20 is installed. That is, the position adjustment of the illuminometer 20 can be easily performed.

Further, it is detected that the exposure processing time value S9 output from the sequencer 40 is longer than the appropriate exposure time (that is, the illuminance of the light emitted from the light source device 10 is low), and the output illuminance is abnormally low for the sequencer 40. Signal S13. The sequencer 40 that receives the illuminance abnormally low signal S13 from the computer processing device 42 selects one of the discharge lamps 30 from the discharge lamp 30, and outputs a power-on signal S1 to the power supply device 26 corresponding to the discharge lamp 30. . As a result, the number of the discharge lamps 30 that are lit up increases, and the illuminance of the light emitted from the light source device 10 increases, so that the time until the amount of light integrated in the integrated circuit 46 becomes a predetermined value is shortened. The time value S9 is accommodated in the appropriate exposure time. Conversely, the computer processing device 42 that detects that the exposure time value S9 is shorter than the appropriate exposure time (that is, the illuminance of the light emitted from the light source device 10 is high) is that the illuminance abnormality high signal S12 is output to the sequencer 40. The sequencer 40 that receives the illuminance abnormally high signal S12 from the computer processing device 42 selects one discharge lamp 30 from the discharge lamps 30 in the lighting, and outputs a current interruption for the power supply device 26 corresponding to the discharge lamp 30. Signal S2. As a result, the number of the discharge lamps 30 that are lit up is reduced, and the illuminance of the light emitted from the light source device 10 is lowered, so that the time until the amount of light integrated in the integrated circuit 46 becomes a predetermined value becomes long. The exposure time value S9 will be accommodated within the appropriate exposure time.

Thereby, the illuminance of the light emitted from the light source device 10 is judged based on the exposure time, and the optimum number of the lamp devices 24 can be turned on.

As described above, according to the exposure apparatus 12 of the present embodiment, it is possible to continuously emit light of uniform illuminance from the light source device 10 for a long period of time, so that the time of irradiating the exposure object X with light from the light source device 10 can be performed for a long time (cycle) Time), that is, the time required for exposure of the exposure target X becomes constant. Therefore, the timing at which the exposure target X is placed on the support table 14 and the timing of transport to the next processing project are constant, and the waiting time and the probability of occurrence of the retention before and after the exposure engineering can be made extremely small.

Further, the discharge lamp 30 shown in FIG. 3 is a double-end type DC lighting type lamp, but may be replaced by an AC lighting type lamp and a single-end type lamp. Further, the discharge lamp 30 is not limited to a short arc type discharge lamp in which mercury is sealed in the sealed container 30c, and a metal halide lamp in which a metal halide such as sodium or barium is sealed as a light-emitting substance is used to emit ultraviolet light or visible. Light can also. Further, as the material of the sealed container 30c, quartz glass or a translucent ceramic may be used.

Further, in the present embodiment, when the measured voltage value supplied to the discharge lamp 30 is larger than the reference voltage V1 set to be higher than the convergence voltage value, it is determined that the discharge lamp 30 is "abnormal", but the discharge lamp 30 is "abnormal". The determination method is not limited to this, and there is a method of using the voltage value when the initial discharge lamp 30 is turned on (referred to as "the initial voltage value"), and the method of increasing the value of the predetermined voltage from the initial voltage value as the reference voltage V1. The initial voltage value only increases the value of the predetermined ratio as the reference voltage V1. Further, the difference between the measured voltage value and the measured voltage value measured before the current time is calculated, and the difference is greater than the predetermined value (that is, the voltage value is sharply increased) or the difference is negative (that is, the accompanying time) The passage of the voltage value is reduced. It is judged that the discharge lamp 30 is "abnormal". By using this judging method, the voltage value of the discharge lamp 30 can be detected to perform the dynamics as shown by C in FIG. That is, in the discharge lamp 30, in use, the sealed container 30c expands due to heat, and when such expansion occurs, the voltage value decreases only for a short period of time, after which the discharge lamp 30 loses light and the voltage The value becomes 0. Therefore, by calculating the difference between the current measured voltage value and the measured voltage value after a predetermined period of time, it is possible to detect not only the "abnormality" of the type in which the voltage value is sharply increased, but also the "abnormality" of the type in which the voltage value is reduced. .

Further, by determining that the illuminance value S4 sent from the illuminometer 20 is higher or lower than a predetermined positive illuminance value, the number of the discharge lamps 30 that are turned on is controlled so that the illuminance of the light emitted from the light source device 10 is constant. However, when the illuminance value S4 sent from the illuminometer 20 is higher than the positive illuminance value, the amount of electric power supplied to the discharge lamp 30 is reduced, and when the illuminance value S4 sent from the illuminometer 20 is lower than the appropriate illuminance value, the supply is increased. The amount of electric power applied to the discharge lamp 30 is such that the illuminance of the light emitted from the light source device 10 is constant. Further, the control of the number of the discharge lamps 30 for lighting and the control of the amount of electric power supplied to the discharge lamps 30 may be controlled.

Further, the illuminometer 20 is disposed on the back surface of the mirror 54 constituting the optical system 16. However, only the printed circuit board P that has been exposed is exchanged between the printed circuit boards P, and other illuminances are disposed directly above the mask M. The illuminance of the light irradiated to the mask M is measured, and the illuminance measured by the illuminometer 20 of the back surface of the mirror 54 may be corrected depending on the illuminance. In this manner, the illuminance measurement system of the illuminometer 20 disposed on the back surface of the mirror 54 can be improved in accordance with the illuminance in the vicinity of the photoresist layer X of the object to be exposed, and more accurate exposure time management can be performed.

Further, the function-based calorimeter 38, the sequencer 40, and the computer processing device 42 are separately shared by the lighting control device 22. However, all the functions required for the lighting control device 22 can be concentrated in one device to make the function It can also be distributed to more than the device of this embodiment. Further, the lighting control device 22 may be configured to bear the function of the abnormality determining means 28.

Further, the angle with respect to the holder 29 is adjusted for each of the lamp units 24, so that the optical axis of the lamp unit 24 passes through the center of the illuminator 52. However, as shown in Fig. 6, the corresponding unit of each of the lamp units 24 is used. The mirror 60 and the light guiding unit 64 including the half mirror 62 bundle the optical axis R of each of the lamp devices 24 so that the optical axis R of the bundle passes through the center of the light collector 52.

Further, the light source device 10 of the invention is used in the exposure device 12. However, the light source device 10 capable of emitting a uniform amount of light for a long period of time can be applied to all industrial processes using light.

10. . . Light source device

12. . . Exposure device

14. . . Support desk

16. . . Optical system

18. . . Lamp unit

20. . . Illuminometer

twenty two. . . Lighting control device

twenty four. . . Light device

26. . . Power supply device

28. . . Abnormal determination

38. . . Integrated light meter

40. . . Sequencer (programmable logic controller: PLC)

42. . . Computerized processing device

50. . . Exposure control shutter (shutter)

52. . . Integrator

54. . . Reflector

56. . . concave mirror

58. . . Through hole

Fig. 1 is a view showing a exposure apparatus relating to the present invention.

[Fig. 2] A diagram showing a light source unit.

Fig. 3 is a view showing a discharge lamp.

Fig. 4 is a view showing a lighting control device.

Fig. 5 is a view showing the relationship between the voltage value supplied to the discharge lamp and the use time of the discharge lamp.

[Fig. 6] A diagram showing a plurality of lamps and a concentrator and other embodiments relating to positions.

10. . . Light source device

12. . . Exposure device

14. . . Support desk

16. . . Optical system

18. . . Lamp unit

20. . . Illuminometer

twenty two. . . Lighting control device

twenty four. . . Light device

26. . . Power supply device

28. . . Abnormal determination

38. . . Integrated light meter

40. . . Sequencer

42. . . Computerized processing device

50. . . Exposure control interrupter

52. . . Light concentrator

54. . . Reflector

56. . . concave mirror

58. . . Through hole

M. . . Mask

P. . . Printed circuit board

X. . . Photoresist layer

S1. . . Power signal

S2. . . Power-on occlusion signal

S3. . . Abnormal signal

S4. . . Illuminance value

S10. . . Signal number

S11. . . Closed signal

Claims (3)

A light source device comprising: a lamp unit having a plurality of discharge lamps; and a reflector provided in each of the discharge lamps to reflect light emitted from each of the discharge lamps toward the same direction, and an illuminometer is measured from the foregoing The illuminance of the light emitted from the lamp unit and the lighting control device have a function of individually energizing the discharge lamp or blocking the energization, and at the time of starting, at least one of the preliminary discharge lamps is blocked from being energized. The other discharge lamp is energized, and by comparing the actual illuminance measured by the illuminometer with a predetermined illuminance set in advance, determining whether the actual illuminance is excessive or insufficient, and determining that the integrated value of the amount of light emitted from the discharge lamp reaches a preset value Whether the exposure time value is a proper exposure time, and the amount of light of the discharge lamp is increased or decreased and the power of the discharge lamp supplied to the lighting is performed in such a manner that the actual illuminance is excessive or insufficient and the exposure time value is made appropriate. The amount of control. An exposure apparatus comprising: a light source device, the light source device according to the first aspect of the patent application, and a support station that supports an exposure target object and an optical system that are exposed by light emitted from the light source device. The light emitted from the light source device is guided to the exposure target supported by the support table. The exposure apparatus described in claim 2, wherein The optical system has an illuminator that uniformizes an illuminance distribution of light emitted from the lamp unit, and the illuminance meter receives light that is illuminating and distributed by the illuminator, and measures the actual illuminance. .