TWI811234B - Light source device, exposure device, and method for determining light source device - Google Patents

Abstract

An object of the present invention is to provide a light source device which is an exposure device for exposure of a printed wiring board or the like. The device is provided with a determining circuit which is used for determining in high precision, short time and low cost, whether a discharge lamp as a light source is pure genuine article, and whether it is a new product or a used item.

The solution of the present invention is a light source device 100 which comprises a discharge lamp 110 as a light source, a determining circuit 200, and a reflector container 151 equipped with the discharge lamp 110 and the determination circuit 200. The determining circuit 200 comprises an incandescent lamp 210 for determining whether the discharge lamp 110 is a pure genuine article or not, and a fuse 220 which is connected in series to the incandescent lamp 210, for determining whether the discharge lamp 110 is a new product or not.

Description

Light source device, exposure device, and determination method of light source device

The present invention relates to a light source device, an exposure device using the light source device, and a method for determining the light source device. An exposure device used for exposing a printed wiring board or the like is equipped with a device for detecting discharge as a light source. A circuit used to determine whether a lamp is genuine, new or second-hand.

Conventionally, in order to mount components on electronic equipment, a printed wiring board in which a wiring pattern is formed using a metal such as copper on a resin or glass epoxy resin substrate has been used. The wiring patterns of these printed circuit boards can be formed using a photolithography technology. Photolithography is to apply a photoresist of a photosensitive agent on a substrate with a metal layer composed of wiring formed on the entire surface, and then irradiate it with irradiation light from an exposure device through a mask with the same wiring pattern.

The photoresist includes a negative photoresist in which the solubility of the photoresist is reduced by irradiation with light, and a positive photoresist in which the solubility of the photoresist is increased by irradiation of light. The photoresist portion whose solubility is relatively increased due to irradiation of light is removed by chemical treatment; once the exposed metal layer is removed by etching, only a certain amount of photoresist remains below the portion where the photoresist remains. It is just a metal layer; the photoresist is removed and a wiring pattern is formed on the substrate. When the irradiation light is irradiated on either positive or negative type photoresist, in order to ensure that the irradiation To maintain uniform exposure across the entire surface, it is necessary to irradiate stable light with uniform illumination for a certain period of time.

Therefore, in order to increase the efficiency of the manufacturing process in the production of printed wiring boards, one large printed wiring board with multiple circuits formed on it can be produced. After the board is completed, it can be divided into circuits one by one for use. desired electronic machine.

As the size of printed wiring boards such as this increases, exposure device manufacturers have been hoping to increase the size of the discharge lamp as a light source and ensure high illuminance, or to secure a multi-lamp light source using a plurality of small discharge lamps with low illuminance. required illumination. For example, a light source using one high-pressure discharge lamp with an 8kW lamp is replaced with a light source using four high-pressure discharge lamps with a 2kW lamp. Compared with high-illumination discharge lamps, low-illumination discharge lamps are relatively easy to manufacture or cost-effective, and most of the exposure devices sold have multiple light sources.

However, as the number of such light sources increases and uniform exposure must be ensured, the homogeneity of the plurality of discharge lamps becomes increasingly important. Therefore, in order to manufacture a highly reliable printed wiring board and stabilize the performance of the exposure device, it is necessary to use only genuine discharge lamps made by the same manufacturer, using the same materials, and the same manufacturing method; it is also necessary to use A device and method for determining whether a discharge lamp is genuine.

There are many known methods for determining discharge lamps and light sources not limited to those used in exposure devices or optical devices (see, for example, Patent Documents 1 to 3). For example, in the lamp abnormality detection device described in Patent Document 1, a predetermined voltage is supplied to an incandescent light bulb using a filament such as a halogen lamp, and the current value when the filament is cut in half and the current value when the filament is normal are measured. Compare to detect lamps with anomalies. However, even if the life of the lamp can be detected in this way, it is difficult to determine whether the lamp is genuine.

For example, in Patent Document 2, a light source called an incandescent lamp or a fluorescent lamp is connected in parallel to a circuit in which a resistor and a capacitor are connected, and a predetermined current is supplied to both ends of the light source. It detects whether the light source is an incandescent lamp or a fluorescent lamp based on the constant number (the product of the resistance value and the capacitance value) when the voltage is applied. However, even if a large difference in timing can be detected in this way (the timing of incandescent lamps and fluorescent lamps is very different), it is difficult to determine whether the same incandescent lamp is genuine. Difficult.

Furthermore, for example, in Patent Document 3, a plurality of filaments enclosed in the same incandescent light bulb emit ultraviolet rays, and the discharge start voltage between the filaments is measured to detect defective products. However, even if defective products can be detected in this manner, it is difficult to determine whether the lamp is genuine.

[Prior technical documents] 〔Patent documents〕

[Patent Document 1] Japanese Patent Publication No. 7-52677

[Patent Document 2] Special Publication No. 2010-527504

[Patent document 3] Japanese Patent Application Publication No. 62-43059

In order to determine whether the light source device is a genuine product or a similar light source device manufactured by another manufacturer, it is necessary to identify whether the light source is defective as described in Patent Documents 1 and 3, or whether it is defective as described in Patent Document 2. Comparing different types of light sources requires a higher-precision judgment device. In addition, it is also necessary to simultaneously solve the problem that the inspection time of multiple light sources does not greatly exceed the startup time of the exposure device, and the cost of the entire exposure device does not increase significantly.

Furthermore, from the perspective of ensuring uniform exposure, it is not ideal to mix new and second-hand light source devices even if they are genuine products from the same manufacturer. Therefore, there is a demand for a light source device that can determine whether it is a second-hand product that has been used only once.

The present invention was completed in view of the above-mentioned problems, and its purpose is to provide a light source device, an exposure device using the light source device, and a determination method thereof, which are high-precision, short-time and low-cost, and have: A judgment circuit used to identify whether the discharge lamp used as the light source in the exposure device used to expose printed wiring boards is genuine, and to identify new or second-hand products.

According to one aspect of the present invention, a light source device can be provided, which includes a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are mounted, wherein the determination circuit is The circuit system includes: a fuse for detecting whether the discharge lamp is a genuine incandescent lamp, and a fuse connected in series to the incandescent lamp for determining whether the discharge lamp is a new product.

Furthermore, according to another aspect of the present invention, a light source device can be provided, which includes a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are mounted, The determination circuit includes: an incandescent lamp for detecting whether the discharge lamp is a genuine product; and a fuse connected in parallel to the incandescent lamp for determining whether the discharge lamp is a new product.

Furthermore, according to other aspects of the present invention, a light source device can be provided, which system has: A discharge lamp as a light source, a circuit for determination, and a light source device equipped with a reflector container equipped with the discharge lamp and the circuit for determination, wherein the circuit for determination has a circuit for detecting whether the discharge lamp is genuine. An incandescent lamp, and a diode connected in series to the incandescent lamp for determining whether the discharge lamp is new.

Furthermore, according to another aspect of the present invention, a light source device can be provided, which includes a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are mounted, The determination circuit includes: an incandescent lamp for detecting whether the discharge lamp is a genuine product; and a light source device connected in parallel to the incandescent lamp for determining whether the discharge lamp is a new product.

Furthermore, according to another aspect of the present invention, a light source device can be provided, which includes a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are mounted, The circuit for determination includes: a sealed container having an airtight internal space, a filament arranged in the internal space, and corrosive gas sealed in the internal space.

Preferably, the circuit for determination is housed in the mirror container.

Preferably, the aforementioned fuse is a thermal fuse.

Preferably, the corrosive gas contains oxygen.

Furthermore, according to another aspect of the present invention, it is possible to provide an exposure apparatus, which is provided with: one or more of the above-mentioned light source devices, a frame for installing the aforementioned light source device toward an object to be irradiated, and a frame for supplying electric current. In the constant current power supply of the aforementioned determination circuit, a switch for turning on and off the aforementioned current from the aforementioned constant current power supply, and a control unit for energizing the aforementioned determination circuit for a predetermined time after the aforementioned switch is turned on and off. , a measuring part that measures the voltage across both ends of the circuit for determination at least twice during power-on, and is used for comparing the difference between the voltage across both ends at the time of the first measurement and the voltage at both ends at the time of the second measurement, and for determining The comparison part of whether the discharge lamp is a genuine product and has a predetermined upper limit and lower limit voltage range, receives the signal from the comparison part, and when the difference between the voltages between the two ends is within the predetermined voltage range , the discharge lamp to be inspected is determined to be a genuine product; when the difference between the voltages at both ends is outside the predetermined voltage range, the discharge lamp to be inspected is determined to be non-genuine. After becoming a genuine product, it is used to supply current to the aforementioned judging circuit, a constant current power supply for antique judgment, a switch for turning on and off the aforementioned current from the aforementioned constant current power supply for antique judgment, and a switch for middle age judgment. After turning the switch for antiquity determination ON and OFF, the control unit for antiquity determination is used to energize the circuit for antiquity determination, and the measurement unit for antiquity determination for measuring the voltage across both ends of the circuit for antiquity determination while the circuit is energized, The second-hand judgment part determines whether the discharge lamp is a second-hand product based on whether the measured voltage across both ends is within a voltage range of a predetermined upper limit value and a lower limit value, and a display part displays the judgment result.

A method for determining a light source device, which includes: energizing the aforementioned determination circuit of the above-mentioned light source device for a predetermined time; measuring the voltage at both ends of the aforementioned determination circuit at least twice during the energization; and comparing the voltage at the time of the first measurement. The difference between the voltage at both ends and the voltage at both ends at the time of the second measurement, and the predetermined upper and lower limit voltage range for determining whether the discharge lamp is genuine; the difference between the voltages at both ends is the predetermined If the difference between the voltages at both ends is outside the predetermined voltage range, the discharge lamp to be determined will be determined to be non-genuine. further, after determining whether the discharge lamp is a genuine product, the circuit for determination is energized; the voltage at both ends of the circuit for determination is measured while the circuit is energized; the measured voltage at both ends is within a predetermined upper limit If the discharge lamp is within the voltage range of the predetermined upper limit value and the lower limit value, the discharge lamp will be judged as a new product; if it is outside the voltage range of the predetermined upper limit value and the lower limit value, the discharge lamp will be judged as a new product. The lamp was judged to be second-hand.

According to the present invention, it is possible to provide a light source device, an exposure device using the light source device, and a determination method thereof, which are used in an exposure device for exposing printed wiring boards and the like and have the following features: high precision, short time, and low cost. It is also used to identify whether the discharge lamp used as a light source is a genuine product, a new product or a second-hand product.

10:Exposure machine

12: Totalizer

14: Concave mirror

16: Illumination surface

50: Exposure device

52:frame

54:Lighting circuit

55: switch

56:Constant current power supply

57:Judgment device

58: Alcove

60:Control Department

62: Measurement Department

64:Comparison Department

66:Judgment Department

67: Fuse breaking action part

68: Medieval judgment control unit

70:Measurement Department for Medieval Judgment

71: Comparative part for medieval judgment

72: Medieval Judgment Department

76: Medieval constant current power supply for judgment

78: Medieval judgment switch

80:Reverse Voltage Inca Department

100:Light source device

110:Discharge lamp

112: Luminous tube department

114:Sealing part

116:Internal space

118: foil

120:Electrode

122:Lead rod

124:Mercury

150:Reflector

151:Reflector container

152: Reflective surface

154:Open your mouth

155: Bottom neck

156:Sealing part insertion hole

170:Insulated base

172: Reflector insertion hole

174:Inside space

176:Power cable insertion hole

200:Judgement circuit

210:Incandescent lamp

220:Fuse

230:Diode

240:Internal space

242: Sealed container

244:Filament

246:Corrosive gas

FIG. 1 is a diagram showing an example of the exposure machine 10 to which the present invention is applied.

FIG. 2 is a diagram showing an example of the exposure device 50 to which the present invention is applied.

FIG. 3 is a plan view showing an example of the exposure device 50 to which the present invention is applied.

FIG. 4 is a cross-sectional view showing an example of the light source device 100 to which the present invention is applied.

FIG. 5 is a cross-sectional view showing an example of the discharge lamp 110.

FIG. 6 is a diagram showing an example of the determination device 57 to which the present invention is applied.

FIG. 7 is a cross-sectional view showing an example of the light source device 100 according to Modification 1 to which the present invention is applied.

FIG. 8 is a cross-sectional view showing an example of the light source device 100 according to Modification 2 to which the present invention is applied.

FIG. 9 is a cross-sectional view showing an example of the light source device 100 according to Modification 3 to which the present invention is applied.

FIG. 10 is a cross-sectional view showing an example of the light source device 100 according to Modification 4 to which the present invention is applied.

FIG. 11 is a cross-sectional view showing another embodiment of the arrangement position of the determination circuit 200.

FIG. 12 is a cross-sectional view showing another embodiment of the arrangement position of the determination circuit 200.

(Example 1) (Structure of exposure machine 10)

FIG. 1 shows an exposure machine 10 according to Embodiment 1 to which the present invention is applied. The exposure machine 10 is roughly composed of an exposure device 50 , an integrator 12 , a concave mirror 14 , and an irradiation surface 16 .

The exposure device 50 emits light containing a wavelength suitable for exposure of the object X to be exposed. Details of the exposure device 50 will be described after describing the structure of the exposure machine 10 .

The integrator 12 has an incident surface 18 that receives incident light from the exposure device 50, and an exit surface 20 that improves the uniformity of the received light and emits the light. The entrance surface 18 and the exit surface 20 are respectively formed by a plurality of fly-eye lenses 21.

The concave mirror 14 has a reflective concave surface 22 on its inner side. The concave mirror 14 uses the reflective concave surface 22 to reflect the light emitted from the calculator 12 into parallel light.

The irradiation surface 16 receives parallel light from the concave mirror 14 and is arranged approximately perpendicular to the direction of the parallel light. The exposure target object X is placed on the irradiation surface 16 . For example, a photosensitive agent is coated on the surface of the object X to be exposed. The parallel light from the concave mirror 14 irradiates a desired area of the exposure object X, thereby forming a desired circuit pattern or the like on the surface of the exposure object X.

(Structure of exposure device 50)

FIG. 2 is a diagram showing an exposure device 50 according to Embodiment 1 to which the present invention is applied. Moreover, FIG. 3 is a plan view of the exposure device 50. The exposure device 50 includes a plurality of light source devices 100, a frame 52, a lighting circuit 54, a switch 55, a constant current power supply 56, a determination device 57, a constant current power supply 76 for age determination, and a switch 78 for age determination. Furthermore, the switch 55 and the switch 78 for antiquity determination, and the constant current power supply 56 and the constant current power supply 76 for antiquity determination may be set to have the same physical substance and share the same function, or physically different substances may be prepared.

The light source device 100 emits light containing a wavelength suitable for exposure of the object X to be exposed. The light source device 100 is roughly composed of a discharge lamp 110, a reflector 150, an insulating base 170, and a determination circuit 200, as shown in FIG. 4 . In addition, the mirror 150 and the insulating base 170 may be integrated and described as a mirror container 151.

As shown in FIG. 5 , the discharge lamp 110 has an arc tube portion 112 and a pair of sealing portions 114 extending from the arc tube portion 112 . The arc tube part 112 and the pair of sealing parts 114 are integrally formed of quartz glass. In addition, an internal space 116 sealed by a sealing portion 114 is formed in the arc tube portion 112 .

Each sealing part 114 of the discharge lamp 110 is provided with: an embedded molybdenum foil 118, one end connected to one side end of the foil 118, and the other end is a tungsten foil disposed in the internal space 116. A pair of electrodes 120 and a pair of lead rods 122 having one end connected to the other side end of the foil 118 and the other end extending outward from the sealing portion 114 . In addition, predetermined amounts of mercury 124 and halogen (for example, bromine) are enclosed in the internal space 116 .

When a predetermined high voltage is applied to the pair of lead rods 122 provided in the discharge lamp 110, the glow discharge started between the pair of electrodes 120 provided in the internal space 116 of the arc tube portion 112 is transferred to an arc discharge. The mercury 124 evaporated and excited by this arc emits light (mainly ultraviolet light).

Returning to FIG. 4 , in this embodiment, the sealing portion 114 on one side of the light source device 100 is a sealing portion insertion hole 156 inserted into the reflector 150 . Furthermore, the discharge lamp 110 may be used for AC lighting or DC lighting.

The reflecting mirror 150 has a bowl-shaped reflecting surface 152 on its inner surface. The reflective surface 152 reflects a part of the light emitted from the discharge lamp 110 arranged so that the arc tube part 112 is located inside the reflector 150 . In this embodiment, the reflective surface 152 is regulated by the rotating placement surface. In addition, the light-emitting point in the discharge lamp 110 (roughly a pair of electric lamps in the internal space 116 The center position of the arc formed between the poles 120 is consistent with the focus of the rotating surface. Thereby, the light emitted from the light-emitting point of the discharge lamp 110 and reflected by the reflective surface 152 becomes almost parallel light emitted from the opening 154 of the reflector 150 . Of course, the shape of the reflective surface 152 is not limited to this, and may also be an ellipsoid of revolution, other surfaces of revolution, or shapes other than surfaces of revolution. In addition, it is not necessarily necessary to align the light-emitting point with the focus, and the light-emitting point may be deviated from the focus as necessary.

In addition, a bottom neck portion 155 protrudes from the side opposite to the opening 154 in the reflecting mirror 150 . In addition, a sealing portion insertion hole 156 into which the sealing portion 114 of one side of the discharge lamp 110 is inserted is formed on the reflecting surface 152 of the reflecting mirror 150 . The sealing portion insertion hole 156 is formed above the tip of the bottom neck portion 155 from the bottom of the reflective surface 152 .

As shown in FIG. 1 , by combining the reflector 150 and the discharge lamp 110 , the light emitted by the discharge lamp 110 is centered on the light traveling along the central axis CL of the reflective surface 152 at a predetermined angle. It travels in front of the reflector 150 within the range of (opening angle).

Returning to FIG. 4 , the insulating base 170 is made of an electrical insulator such as ceramic, and is formed with the bottom neck portion 155 of the reflector 150 and the discharge lamp 110 inserted into the sealing portion insertion hole 156 . The mirror insertion hole 172 allows the sealing portion 114 on one side to be inserted. By inserting the bottom portion 155 and the sealing portion 114 into the mirror insertion hole 172, the insulating base 170 covers the sealing portion insertion hole 156 from the outside.

In addition, the insulating base 170 is formed with an inner space 174 that communicates with the above-mentioned mirror insertion hole 172, and is further formed with a power cable that is communicated with the inner space 174 and the outside so that the power cable A can be inserted. The thread is inserted into acupoint 176.

In addition, the insulating base 170 and the discharge lamp 110 (in the case of this embodiment, the determination circuit 200 is also included) are fixed to each other with an inorganic adhesive C having electrical insulation and high thermal conductivity. Specifically, the reflector is inserted into the reflector insertion hole 172 of the insulating base 170. The end of the bottom neck portion 155 of 150, the sealing portion 114 on one side of the discharge lamp 110, and further, the determination circuit 200 and the power cable A are arranged in the inner space 174 of the insulating base 170. Next, the inorganic adhesive C is filled into the inner space 174 .

The determination circuit 200 includes an incandescent lamp 210 and a fuse 220 in this embodiment. The fuse 220 is a device connected in series to the incandescent lamp 210 . In the case of this embodiment, the capacity of the fuse 220 is set as described below so that it is not disconnected when a constant current for determining whether the discharge lamp 110 is a genuine product is flowing, and after the determination of a genuine product, the capacity is set so that a current greater than the constant current flows. When current flows, the fuse disconnection operating unit 67 causes the fuse to break. Furthermore, a fuse 220 such as a thermal cutout generated by lighting the discharge lamp 110 may be used instead, that is, a "thermal fuse" may be used.

Returning to FIG. 3 , the frame 52 is a substantially cuboid-shaped member formed with a plurality of recesses 58 in which a plurality of light source devices 100 can be installed.

Returning to FIG. 2 , the lighting circuit 54 is a circuit for supplying necessary power to the discharge lamp 110 of each light source device 100 installed in the housing 52 . In addition, the constant current power supply 56 and the constant current power supply 76 for medieval determination are power supplies for supplying a DC constant current to the determination circuit 200 of each light source device 100, and the switch 55 and the switch 78 for medieval determination are for supplying the DC constant current to the determination circuit 200. The constant DC current of circuit 200 is ON‧OFF. In addition, the constant current used for determination may also be an alternating current.

The determination device 57 is a device for determining whether each light source device 100 (discharge lamp 110) is a genuine product, and whether each light source device 100 (discharge lamp 110) is a new product or a second-hand product; as shown in FIG. 6, it roughly has a control part 60, measurement part 62, comparison part 64, determination part 66, fuse breaking operation part 67, control part for antiquity determination 68, measurement part for antiquity determination 70, and antiquity determination part 72. Furthermore, the control unit 60 and the control unit 68 for antiquity determination, the measurement unit 62 and the measurement unit 70 for antiquity determination, and the determination unit 66 and the antiquity determination unit 72 may be configured to have the same physical substance and share the same function, or they may be prepared separately. different substances.

The control unit 60 has a function of operating the switch 55 to turn on and off the current supplied from the constant current power supply 56 to the determination circuit 200 .

The measuring unit 62 has a function of measuring the voltage across both ends of the determination circuit 200 . In addition, in the case of this embodiment, the measurement unit 62 is configured to measure the voltage across both ends of the determination circuit 200 during power supply at least twice.

The comparison unit 64 has: a difference between the voltage across both ends of the determination circuit 200 measured by the measurement unit 62 at the time of the first measurement and the voltage at both ends of the determination circuit 200 at the time of the second measurement; and a unit for determining the discharge lamp 110. Whether it is the function of the voltage range of the predetermined upper limit and lower limit of the genuine product. The comparison unit 64 has previously recorded the voltage distribution ranges of a plurality of incandescent lamps for genuine product detection measured under predetermined conditions; the comparison unit 64 transmits the above-mentioned comparison result signal to the determination unit 66 .

The determination unit 66 receives the result signal transmitted from the comparison unit 64, and determines that the discharge lamp 110 to be inspected is a genuine product when the difference between the voltages at both ends is within a predetermined voltage range; conversely, when If the difference between the voltages at both ends is outside the predetermined voltage range, the discharge lamp 110 to be inspected is determined to be non-genuine.

After the determination unit 66 determines whether the discharge lamp 110 is a genuine product, the fuse blowing operation unit 67 flows a current larger than the constant current used for determination of a genuine product to the determination circuit 200 . Therefore, the fuse 220 is broken, the circuit for determination 200 is opened, and the resistance value at both ends of the circuit for determination 200 becomes infinite.

The control unit 68 for antiquity determination has a function of operating the switch 78 for antiquity determination after the fuse breakage operation unit 67 operates, and then turning on and off the current supplied to the determination circuit 200 from the constant current power supply 76 for antiquity determination. .

The measurement unit 70 for medieval determination has a function of measuring the voltage across both ends of the determination circuit 200 during power supply.

The used judgment unit 72 has a function of judging whether the discharge lamp 110 is a new product or a used product based on whether the voltage across both ends measured by the used measuring unit 70 is within a predetermined upper limit and lower limit voltage range. That is, when the voltage across both terminals measured by the measurement unit 70 for obsolescence determination is within the voltage range of a predetermined upper limit value and a predetermined lower limit value, the obsolescence determination unit 72 determines that the discharge lamp 110 is new. On the contrary, when the voltage across both ends measured by the measurement unit 70 for antique determination is outside the voltage range of the predetermined upper limit value and the lower limit value, the antique determination unit 72 determines the discharge lamp 110 as a second-hand product.

(Operation of exposure device 50)

When the power switch (not shown) of the exposure device 50 is input, the lighting circuit 54 supplies power to the discharge lamps 110 of all the light source devices 100 installed on the frame 52 . Typically, it takes several minutes for the discharge lamp 110 to fully rise.

For example, after the power switch of the exposure device 50 is input, the control unit 60 in the determination device 57 immediately turns on the switch 55 connected to the determination circuit 200 in any one of the light source devices 100 installed in the housing 52 , a constant current is supplied to the determination circuit 200 from the constant current power supply 56 . Of course, the time point at which the determination device 57 operates is not limited to this.

Immediately after the switch 55 is turned on for the first time, the measuring unit 62 measures the voltage at both ends of the determination circuit 200 and transmits the result (for the first time) to the comparing unit 64 . Next, after a predetermined time has elapsed since the first measurement (for example, 10 seconds later), the constant current is supplied to the same circuit 200 for determination again, and the measuring unit 62 measures the voltage across both ends of the circuit 200 for determination, and the result (the second measurement) is 2 times) is sent to the comparison unit 64.

The comparison unit 64 that receives the two measurement results of the voltage across both ends sends a result signal to the determination unit 66 to determine whether the difference between the two measurement voltages is within a pre-recorded voltage difference range. when When the difference between the voltages at both ends is within the predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product; conversely, when the difference between the voltages at both ends is outside the predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is genuine. The unit 66 determines that the discharge lamp 110 to be inspected is not a genuine product.

Generally speaking, due to the characteristics of the filament contained in the incandescent lamp 210, the resistance value tends to increase briefly (several seconds) after current is applied. Therefore, when the light source device 100 is a genuine new product, the voltage across the judgment circuit 200 measured for the second time (for example, 8.5V) will be greater than the voltage across the judgment circuit 200 measured for the first time (for example, 2.0V). . On the contrary, in the case of non-genuine products, the second measurement result is the same or almost the same as the first measurement result. Therefore, it can be determined whether the light source device 100 (discharge lamp 110) is a genuine product by the above-mentioned determination method. In addition, it may be determined whether the voltage across both ends is measured only at the time point of the second measurement. In this case, it is advisable to determine whether the product is genuine based on whether the measured value of the voltage at both ends is within a predetermined voltage range.

After completing the authenticity determination in the first light source device 100 , the control unit 60 starts supplying a constant current to the determination circuits 200 in the other light source devices 100 . From then on, the authenticity determination is performed in the same manner as in the first case above until the determination of all the light source devices 100 is completed, or until the inspection of the light source devices 100 in a predetermined range is completed, and the same determination is returned.

After the necessary authenticity determination is completed, the fuse blowing operation unit 67 in the determination device 57 flows a current larger than the constant current for authenticity determination (for example, 30V, 1.4A) to the determination circuit 200 . Therefore, after the fuse 220 is disconnected, the determination circuit 200 is opened and the resistance value at both ends of the determination circuit 200 becomes infinite.

Then, the antique determination control unit 68 in the determination device 57 turns on the antique determination switch 78 connected to the determination circuit 200 in any one of the light source devices 100, and supplies a constant current from the antique determination constant current power supply 76 to the antique determination switch 78. Determination circuit 200. Switch used for judgment in the Middle Ages Immediately after turning ON 78, the measurement unit 70 for antiquity determination measures the voltage at both ends of the determination circuit 200, and transmits the result to the antiquity determination unit 72.

The used determination unit 72 determines whether the discharge lamp 110 is a new product or a used product by measuring whether the voltage is within a voltage range of a predetermined upper limit value and a predetermined lower limit value.

In the case of this embodiment, when the voltage across both ends measured by the measurement unit 70 for age determination is within a voltage range of a predetermined upper limit value and a predetermined lower limit value, the age determination unit 72 determines that the discharge lamp 110 is New. On the contrary, when the voltage across both ends measured by the measurement unit 70 for second-hand determination is outside the voltage range of the predetermined upper limit value and lower limit value, the second-hand judgment unit 72 determines the discharge lamp 110 as a second-hand product. When the light source device 100 is a genuine and once-used item (= second-hand item), as described above, the fuse 220 in the determination circuit 200 has been disconnected by the fuse disconnection operating unit 67. It can be seen that the judgment circuit 200 is in the open (resistance value = infinite) state. Therefore, the maximum voltage of the conventional constant current power supply 76 for determination is applied to the voltage at both ends of the determination circuit 200 . By setting the predetermined upper limit value in advance to be smaller than the "maximum voltage of the constant current power supply 76 for antique determination", it is possible to determine that the second-hand product in which the determination circuit 200 is open is the second-hand determination measurement unit 70 .

So far, the example has been described in which the genuine product determination is performed on all the light source devices 100 installed in the exposure device 50 and then the used product determination is started. However, the genuine product determination may be continued on one light source device 100 . After the determination and the second-hand product determination, the other light source devices 100 are continued to be authenticated and used. Of course, the plurality of light source devices 100 may also be judged as genuine products in sequence, and then, judged as second-hand products in sequence. This matter is also the same in the following modifications. In addition, it is also possible to carry out the second-hand product judgment after about 2000 hours of use after the genuine product judgment.

(Features of exposure device 50)

According to the present embodiment, it is possible to provide a light source device 100 having a determination circuit 200 for identifying whether the discharge lamp 110 as a light source is a genuine product, a new product, or a second-hand product with high accuracy, short time, and low cost. ; And an exposure device 50 using the light source device 100 and a determination method thereof can be provided.

(Modification 1)

In the determination circuit 200 of the light source device 100 in the above-described embodiment, the fuse 220 is connected in series to the incandescent lamp 210; however, the fuse 220 may be connected in parallel to the incandescent lamp 210 as shown in FIG. 7 .

In this case, the authenticity of the light source device 100 is determined as follows. That is, after the control unit 60 operates the switch 55 to supply power to the determination circuit 200 from the constant current power supply 56 , the measurement unit 62 then measures the voltage across both ends of the determination circuit 200 . At this time, if it is a regular product, the current mainly flows through the fuse 220, so the voltage at both ends becomes sufficiently small (for example, about 0.4V).

Then, the fuse breaking operation unit 67 is operated to flow a large current and voltage (for example, 30V, 1.4A) to the determination circuit 200 (mainly the fuse). Therefore, the fuse 220 is disconnected and the determination circuit 200 is essentially only the incandescent lamp 210 . Of course, similarly to the above-described Embodiment 1, the fuse 220 may be disconnected using heat from the discharge lamp 110 during lighting.

Next, the control unit 60 turns the switch 55 ON again, thereby supplying the constant current from the constant current power supply 56 to the determination circuit 200 . Immediately after the switch 55 is turned on for the first time, the measuring unit 62 measures the voltage at both ends of the determination circuit 200 and transmits the result (for the first time) to the comparing unit 64 . Secondly, after a predetermined time has elapsed since the first measurement (for example, 10 seconds later), the same judgment is performed again. The constant circuit 200 supplies a constant current, and the measurement unit 62 measures the voltage across the determination circuit 200 and transmits the result (second time) to the comparison unit 64 .

The comparison unit 64 that receives the two-terminal voltage measurement results sends a result signal to the determination unit 66 to determine whether the difference between the two measured voltages is within a pre-recorded voltage difference range. When the difference between the voltages at both ends is within the predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product. On the contrary, when the difference between the voltages at both ends is outside the predetermined voltage range, The determination unit 66 determines that the discharge lamp 110 to be inspected is not a genuine product. Furthermore, it is also possible to determine whether it is a genuine product by measuring the voltage across both ends only at the time point of the second measurement. In this case, whether the product is genuine is determined based on whether the measured value of the voltage at both ends is within a predetermined voltage range.

Second-hand goods are judged as follows. That is, the antiquity determination control unit 68 turns on the antiquity determination switch 78 to supply a constant current from the antiquity determination constant current power supply 76 to the determination circuit 200 . After the antique determination switch 78 is turned on for the first time, the antique determination measuring unit 70 immediately measures the voltage at both ends of the determination circuit 200 and transmits the result (for the first time) to the antique determination comparison unit 71 . Next, after a predetermined time has elapsed since the first measurement (for example, 10 seconds later), the constant current is supplied to the same determination circuit 200 again, and the measurement unit 70 for determination measures the voltage across both ends of the determination circuit 200 again, and The result (second time) is sent to the comparison unit 71 for medieval determination.

The comparison unit 71 for secondary determination that receives the secondary voltage measurement result transmits a result signal to the secondary determination unit 72 to determine whether the difference between the secondary measured voltages is within a pre-recorded voltage difference range. When the difference between the voltages at both ends is within the predetermined voltage range, the second-hand determination unit 72 determines that the discharge lamp 110 to be inspected is second-hand. On the contrary, when the difference between the voltages at both ends is outside the predetermined voltage range, In this case, the second-hand determination unit 72 determines that the discharge lamp 110 to be inspected is a new product. The reason for this is the same as that explained in the case of genuine product determination in Embodiment 1.

When the light source device 100 is a genuine new product, as mentioned above, since the fuse 220 in the determination circuit 200 is connected in parallel to the incandescent lamp 210, the voltage at both ends of the determination circuit 200 is almost always the same even if it is measured several times. zero. Therefore, the difference between the measured values of the voltages across the first and second times is outside the predetermined voltage range (almost the same = the difference is zero), so it can be determined by the medieval determination measuring unit 70: the determination circuit 200 Because it is essentially only the incandescent lamp 210, it is a second-hand product. Furthermore, the constant current used for determination can be either direct current or alternating current. Alternatively, it may be determined whether the product is new or second-hand by measuring the voltage across both ends only at the time point of the second measurement. In this case, whether the measured value of the voltage at both ends is within a predetermined voltage range (almost zero) is used to determine whether the product is new or used.

(Modification 2)

In the above embodiment, the determination circuit 200 of the light source device 100 is composed of the incandescent lamp 210 and the fuse 220. However, as shown in FIG. 8, a diode 230 may be connected in series to the incandescent lamp 210 instead of the fuse. 220.

In this case, the judgment of the light source device 100 as a genuine product is the same as that of Embodiment 1 (but please note that the current flowing from the constant current power supply 56 to the judgment circuit 200 is the direct current of the diode 230 in the forward direction. points), the procedure for judging genuine products in Embodiment 1 is used and the description is omitted.

Next, in this modification 2, the reverse voltage applying unit 80 is used in place of the fuse breaking operation unit 67 in the first embodiment. The reverse voltage applying unit 80 has a function of applying a reverse voltage (direct current) to the diode 230 (determination circuit 200) to the extent that the diode 230 is damaged. After the authenticity determination of the light source device 100 is completed, the reverse voltage applying part 80 is activated to apply a voltage in the reverse direction to damage the diode 230 . Therefore, the diode 230 is short-circuited internally and loses its function. Therefore, the determination circuit 200 is the same as one composed only of the incandescent lamp 210 .

In this way, when the light source device 100 is a regular product, the determination circuit 200 after the reverse voltage applying unit 80 is activated is the same as the circuit 200 composed only of the incandescent lamp 210. Therefore, the light source device 100 related to the modification 2 is determined to be an antique product. It is basically carried out in the same method as described in the above-mentioned Modification 1. Furthermore, since ancient times, the DC constant current supplied to the determination circuit 200 from the constant current power supply 76 for determination must flow in the reverse direction of the diode 230 under normal conditions.

(Modification 3)

Alternatively, the diode 230 may be connected in parallel to the incandescent lamp 210 as shown in FIG. 9 . In this case, the authenticity judgment of the light source device 100 is the same as in Embodiment 1 (but please note that the current flowing from the self-determined current power supply 56 to the judgment circuit 200 is a direct current in the opposite direction of the diode 230) , so the procedure for determining genuine products in Embodiment 1 is followed and the description is omitted.

After confirming that the light source device 100 is a legitimate product, a large reverse voltage (DC) is applied to the diode 230 through the reverse voltage applying unit 80. The diode 230 causes a short circuit inside and often loses its function. The circuit for determination 200 It becomes a short circuit state.

Then, the antiquity determination control unit 68 in the determination device 57 turns on the antiquity determination switch 78 to supply a constant current from the antiquity determination constant current power supply 76 to the determination circuit 200 (note, however, that the antiquity determination constant current is supplied from the antiquity determination constant current power supply 76 The current flowing from the power supply 76 to the determination circuit 200 is a direct current in the opposite direction of the diode 230). Immediately after the antique determination switch 78 is turned on, the antique determination measuring unit 70 measures the voltage at both ends of the determination circuit 200 and transmits the result to the antique determination unit 72 .

The used determination unit 72 determines whether the discharge lamp 110 is a new product or a used product by measuring whether the voltage is within a voltage range of a predetermined upper limit value and a predetermined lower limit value. In the case of this embodiment, when the voltage across both ends measured by the measurement unit 70 for age determination is within the voltage range of a predetermined upper limit value and a predetermined lower limit value, the age determination unit 72 determines that the discharge lamp 110 is New. On the contrary, When the voltage across both ends measured by the second-hand determination measuring unit 70 is outside the voltage range of the predetermined upper limit value and lower limit value, the second-hand determination unit 72 determines the discharge lamp 110 as a second-hand product.

When the light source device 100 is a genuine product, as described above, the diode 230 in the determination circuit 200 is already short-circuited due to the reverse voltage applying unit 80, so the determination circuit 200 becomes short-circuited (the resistance value is equivalent to small) state. Therefore, in the case of second-hand products, the voltage across both ends of the determination circuit 200 becomes 1V or less. In case the light source device 100 is new, the diode 230 does not lose its function and no current flows in the reverse direction, so the current only flows through the incandescent lamp 210 . That is, since the determination circuit 200 is in the same state as the incandescent lamp 210 only, the voltage across both ends of the determination circuit 200 becomes greater than 1V (for example, 2.0V to 8.5V). Therefore, the age determination of the light source device 100 can be performed.

(Modification 4)

Furthermore, as shown in FIG. 10 , the determination circuit 200 may be configured by a sealed container 242 having an airtight internal space 240 , a filament 244 disposed in the internal space 240 , and a corrosive gas 246 sealed in the internal space 240 . The corrosive gas 246 is preferably air containing oxygen from the viewpoint of availability, etc. However, an excess amount of halogen (for example, fluorine, chlorine, iodine, bromine) may be enclosed.

A corrosive gas that would corrode (burn) the filament is not sealed in advance in the sealing container of a general incandescent lamp. Instead of sealing an appropriate amount of halogen to prevent the filament from burning out, what is described in Modification 4 is The used determination circuit 200 has a structure similar to that of a general incandescent lamp; however, it is different in that the corrosive gas 246 is sealed in the internal space 240 of the sealed container 242 .

Therefore, when the filament 244 is energized, the filament 244 exhibits the same resistance value as a general incandescent lamp for a predetermined time. When the predetermined time elapses, the filament 244 Will be burned out due to corrosive gas 246. When the filament 244 burns out, the determination circuit 200 of Modification 4 becomes open (resistance value = infinite).

Therefore, the method of determining the authenticity of the light source device 100 until the filament 244 burns out is the same as that in Embodiment 1. Therefore, the procedure for determining the authenticity of the light source device 100 in Embodiment 1 will be followed and the description will be omitted.

Secondly, in this modification 4, there is no need to intentionally cause the above-mentioned fuse disconnection operation part 67 or the reverse voltage application part 80 to disconnect and damage the diode 230. During the genuine product determination, after the control unit 60 turns on the switch 55 and the constant current power supply 56 continues to supply the constant current to the determination circuit 200 and a predetermined time passes, as described above, the filament 244 burns out and the determination circuit 200 It becomes open (resistance value = infinite) state.

In this way, after the filament 244 is burned out, although the light source device 100 is judged as an antique product, the method of judging the antique product is also the same as that in Embodiment 1, so the procedure for judging the antique products in Embodiment 1 described above is used. and omit explanation.

(Modification 5)

In the above-mentioned embodiments and modifications, although the determination circuit 200 is housed in the reflector container 151, the arrangement position of the determination circuit 200 is not limited to this; for example, it may be arranged in a reflection mirror container 151. The outer side of the mirror container 151 (Fig. 11); it may also be arranged outside (the back side) of the reflecting mirror 150 (Fig. 12).

The implementation forms disclosed this time should be understood as being illustrative in all respects and not restrictive. The scope of the present invention is not limited to the above description, but is intended to include what is shown in the claimed scope, as well as all changes within the meaning and scope that are equivalent to the claimed scope.

100:Light source device

110:Discharge lamp

112: Luminous tube department

114:Sealing part

150:Reflector

151:Reflector container

152: Reflective surface

154:Open your mouth

155: Bottom neck

156:Sealing part insertion hole

170:Insulated base

172: Reflector insertion hole

174:Inside space

176:Power cable insertion hole

200:Judgement circuit

210:Incandescent lamp

212: Resistor

214:Capacitor

220:Fuse

Claims (10)

A light source device, which is a light source device provided with: a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are installed; wherein the circuit for determination has: A fuse used to detect whether the aforementioned discharge lamp is a genuine incandescent lamp, and a fuse connected in series to the aforementioned incandescent lamp to determine whether the aforementioned discharge lamp is a new product; and the aforementioned incandescent lamp flows a constant current; the aforementioned fuse will The wire is broken due to the current flowing greater than the aforementioned constant current. A light source device, which is a light source device provided with: a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are installed; wherein the circuit for determination has: for detecting Determine whether the aforementioned discharge lamp is a genuine incandescent lamp, and a fuse connected in parallel to the aforementioned incandescent lamp to determine whether the aforementioned discharge lamp is a new product; and the aforementioned incandescent lamp flows a constant current; the aforementioned fuse will cause the flow to be greater than the aforementioned constant current And disconnected. A light source device provided with: a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are installed; wherein The circuit for determination includes: an incandescent lamp for detecting whether the discharge lamp is a genuine product; and a diode connected in series to the incandescent lamp for determining whether the discharge lamp is a new product; and the incandescent lamp is a circulating product. Constant current; the aforementioned diode will be disconnected due to a flow greater than the aforementioned constant current. A light source device, which is a light source device provided with: a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are installed; wherein the circuit for determination has: for detecting Check whether the aforementioned discharge lamp is a genuine incandescent lamp, and a diode connected in parallel to the aforementioned incandescent lamp to determine whether the aforementioned discharge lamp is a new product; and the aforementioned incandescent lamp flows a constant current; the aforementioned diode will cause the current to be greater than The aforementioned constant current causes disconnection. A light source device, which is a light source device provided with: a discharge lamp as a light source, a circuit for determination, and a reflector container in which the discharge lamp and the circuit for determination are installed; wherein the circuit for determination is provided with: a gas A sealed container with a tight internal space, a filament arranged in the aforementioned internal space, and a corrosive gas sealed in the aforementioned internal space. The light source device according to any one of claims 1 to 5, wherein the determination circuit is housed in the reflector container. The light source device according to claim 1 or 2, wherein the fuse is a thermal fuse. The light source device according to claim 5, wherein the corrosive gas system contains oxygen. An exposure device provided with: the light source device according to claim 1, a frame for mounting the light source device toward an object to be irradiated, and a constant current for supplying current to the determination circuit. A power supply, a switch for turning on and off the current from the constant current power supply, a control unit for turning the switch on and off to energize the judging circuit at a predetermined time, and measuring the energization of the judging circuit. A predetermined upper limit for measuring the voltage between both ends at least twice, used to compare the difference between the voltage between the two ends during the first measurement and the voltage across the two ends during the second measurement, and to determine whether the discharge lamp is genuine. The comparison part of the voltage range of the value and the lower limit value receives the signal from the comparison part, and when the difference between the voltages of the two ends is within the predetermined voltage range, it is determined that the discharge lamp to be inspected is a genuine product; When the difference between the voltages between the two terminals is outside the predetermined voltage range, the determination unit determines that the discharge lamp to be inspected is not a genuine product. After determining whether the discharge lamp is a genuine product, it supplies current to the determination unit. A constant current power supply for neutrality determination in the circuit, a switch for turning on and off the current coming from the constant current power supply for medieval determination, and a switch for turning on and off the middle age determination switch to turn on and off the neutrality determination switch. Control unit for determining the duration of circuit energization, A measuring unit for measuring the voltage across the circuit for determination during energization, and determining whether the discharge lamp is the discharge lamp based on whether the measured voltage across the circuit is within a voltage range of a predetermined upper limit value and a lower limit value. New product or used product judgment department. A method for determining a light source device, which includes: energizing the aforementioned determination circuit of the light source device as described in claim 1 for a predetermined time; measuring the voltage across both ends of the aforementioned determination circuit at least twice during the energization; and comparing the second The difference between the voltage at both ends during the first measurement and the voltage at both ends at the second measurement, and the predetermined upper and lower limit voltage range for determining whether the discharge lamp is genuine; in the voltage at both ends If the difference between the two terminals is within the predetermined voltage range, the discharge lamp will be judged to be a genuine product; if the difference between the voltages at both ends is outside the predetermined voltage range, the discharge lamp will be judged as genuine. The discharge lamp is determined to be non-genuine; further, after determining whether the discharge lamp is genuine, the circuit for determination is energized; the voltage at both ends of the circuit for determination is measured while the circuit is energized; and the measured voltage at both ends is If it is within the voltage range of the predetermined upper limit and lower limit, then the aforementioned discharge lamp will be judged as a new product; if it is outside the voltage range of the predetermined upper limit and lower limit, then The above-mentioned discharge lamp which is the object of determination is determined to be a second-hand product.