WO2013147052A1 - Lighting device provided with discharge lamp - Google Patents
Lighting device provided with discharge lamp Download PDFInfo
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- WO2013147052A1 WO2013147052A1 PCT/JP2013/059327 JP2013059327W WO2013147052A1 WO 2013147052 A1 WO2013147052 A1 WO 2013147052A1 JP 2013059327 W JP2013059327 W JP 2013059327W WO 2013147052 A1 WO2013147052 A1 WO 2013147052A1
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- illuminance
- power
- discharge lamp
- discharge lamps
- discharge
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/26—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc
- H05B41/28—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters
- H05B41/288—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters with semiconductor devices and specially adapted for lamps without preheating electrodes, e.g. for high-intensity discharge lamps, high-pressure mercury or sodium lamps or low-pressure sodium lamps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
Definitions
- the present invention relates to an illuminating device used for an exposure apparatus or the like, and more particularly to lighting at a constant illuminance of an illuminating device provided with a discharge lamp.
- a discharge lamp is generally used as a light source for exposing a substrate, and recently, a multi-lighting type illumination apparatus having a plurality of discharge lamps is used.
- a multi-lighting type illumination apparatus having a plurality of discharge lamps is used.
- constant illuminance lighting is performed to illuminate the substrate uniformly with a constant illuminance.
- an illuminometer that measures the illuminance of the discharge lamp is provided in the exposure apparatus, detects the illuminance before the exposure operation, and adjusts the output of the discharge lamp so that the illuminance on the substrate matches the target illuminance value.
- an illuminometer that measures the illuminance of the discharge lamp is provided in the exposure apparatus, detects the illuminance before the exposure operation, and adjusts the output of the discharge lamp so that the illuminance on the substrate matches the target illuminance value.
- the lamp illuminance changes irregularly depending on the halogen cycle.
- this halogen cycle is also affected by the lamp temperature, the lamp illuminance follows a more unstable locus.
- the illumination light emitted from a plurality of discharge lamps is detected by a single illuminance detection unit and power adjustment is performed for a plurality of discharge lamps at once, the illuminance change condition of each lamp is individually different, The detected illuminance follows a very unstable trajectory.
- the illuminating device of the present invention can be installed in an exposure apparatus or the like, and a plurality of discharge lamps, an illuminance detecting unit that detects the illuminance of illumination light emitted from the plurality of discharge lamps, and the illuminance of the detected discharge lamp. And an illuminance controller that adjusts input power to the plurality of discharge lamps.
- the illuminance detection unit may be composed of a plurality of illuminance detection sensors or the like so as to detect the illuminance of each of the plurality of discharge lamps. Furthermore, each discharge lamp to which one illuminance detection unit is assigned can be configured from a plurality of lamp groups. In any case, the illuminance control unit can perform power adjustment on a plurality of discharge lamps in a batch rather than separately.
- the illuminance control unit is determined between the allowable threshold value and the reference illuminance value for a discharge lamp having an illuminance value that exceeds an allowable threshold value determined based on the reference illuminance value among the plurality of discharge lamps.
- the power is adjusted so that the illuminance changes toward a threshold value (here, referred to as a robust threshold value).
- the standard illuminance value is a reference illuminance value capable of obtaining the most appropriate exposure amount, and is determined by the sensitivity characteristics of the photosensitive material, the characteristics of the discharge lamp, and the like.
- the allowable threshold indicates the limit value of the illuminance range that can be exposed and follows the sensitivity characteristic of the photosensitive material.
- the robust threshold value indicates a threshold value within a range in which stable illuminance can be secured for exposure even if there is a difference in illuminance from the reference illuminance value, and follows the characteristics of the discharge lamp, the photosensitive material, and the like.
- the control of “changing illuminance toward a robust threshold” can be realized by various control methods, and feedback, feedforward control, and the like can be applied.
- the control target value can be set as the robust threshold value, or the vicinity of the robust threshold value can be set as the illuminance target range. What is necessary is just to perform electric power adjustment suitably in the range which is not controlled toward a reference
- the illuminance control unit can adjust the power according to a predetermined amount of power change per unit time. By taking time for the power change, the illuminance change becomes gentle. Alternatively, the illuminance control unit can instantaneously adjust the power. When the illuminance is relatively not deviated from the reference illuminance value, the constant illuminance lighting control can be completed quickly.
- the illuminance control unit adjusts the power over a predetermined adjustment time so that the illuminance changes toward the robust threshold for the main adjustment discharge lamp having the largest illuminance difference from the allowable threshold.
- the illuminance control unit can adjust the power within the adjustment time of the main adjustment discharge lamp with respect to the discharge lamp that is determined to require power adjustment among other discharge lamps.
- the illuminance control unit adjusts the power over the discharge lamps determined to require power adjustment among other discharge lamps over the same time as the adjustment time of the main adjustment discharge lamp. It is possible. An unstable change in illuminance can be suppressed by ensuring a sufficient power adjustment time for a discharge lamp having a relatively small illuminance difference, or by suppressing the amount of power change per unit time.
- the illuminance control unit can prevent power adjustment for a discharge lamp having an illuminance value equal to or less than an allowable threshold among other discharge lamps.
- the illuminance control unit can also adjust the power so that the illuminance value falls below the allowable threshold for discharge lamps having an illuminance value exceeding the allowable threshold among other discharge lamps.
- the illuminance control unit can adjust the power so that the illuminance changes toward the reference illuminance value with respect to a discharge lamp having an illuminance at least equal to or less than the robust threshold among other discharge lamps.
- the illuminance control unit adjusts the power of the other discharge lamps determined to require power adjustment by the same amount of power change as the power change amount per unit time determined in advance in the main adjustment discharge lamp. It is possible.
- the illuminance control unit can perform power adjustment for a plurality of discharge lamps when the exposure is on standby and the exposure standby time is longer than the exposure period.
- the lighting device adjusts the input power to the plurality of discharge lamps based on the discharge lamp, the illuminance detection unit that detects the illuminance of the illumination light emitted from the discharge lamp, and the detected illuminance of the discharge lamp.
- the illuminance control unit performs power adjustment on the plurality of discharge lamps when the exposure is on standby and the exposure standby time is longer than the exposure period.
- the lighting device it is possible to provide a light source unit that houses a predetermined number (one or a plurality) of discharge lamps.
- the light source unit is discharged in a state in which the discharge lamp penetrates through a reflector disposed around each discharge lamp, a fan disposed on the opposite side of the discharge lamp of the unit housing, and a partition formed in the light source unit.
- a lamp holding portion for holding the lamp.
- the lighting device includes a light source unit that stores a predetermined number (one or more) of discharge lamps, and the light source unit includes a reflector disposed around each discharge lamp and a discharge lamp on the opposite side of the unit housing. And a lamp holder that holds the discharge lamp in a state where the discharge lamp penetrates the partition formed in the light source unit, and the lamp holder is formed with the partition interposed therebetween.
- a vent hole is provided for communicating the discharge lamp side space and the fan side space.
- An exposure apparatus includes an illuminance detection unit that detects an illuminance of illumination light emitted from each of the plurality of discharge lamps, and an input to the plurality of discharge lamps based on the detected illuminance of each discharge lamp.
- the illuminance control means functions so as to adjust the power so that the illuminance changes toward a robust threshold defined between the two.
- An illumination method detects the illuminance of illumination light emitted from each of the plurality of discharge lamps, and adjusts input power to the plurality of discharge lamps based on the detected illuminance of each discharge lamp.
- a lighting method for a discharge lamp having an illuminance value that exceeds an allowable threshold value determined based on a reference illuminance value among a plurality of discharge lamps, with a robust threshold value defined between the allowable threshold value and the reference illuminance value Adjust the power so that the illuminance changes.
- FIG. 1 is a perspective view schematically showing an exposure apparatus according to the first embodiment.
- An exposure apparatus (drawing apparatus) 10 is an exposure apparatus that forms a pattern by projecting illumination light onto a substrate SW on which a photosensitive material such as a photoresist is applied or pasted, and includes a gate-like structure 12 and a base 14.
- An XY stage drive mechanism (not shown here) that supports the drawing table 18 is mounted on the base 14, and a substrate SW is placed on the drawing table 18.
- the drawing apparatus 10 includes an exposure control unit (not shown here), and an exposure operation is executed and controlled by the drawing control unit.
- the gate-like structure 12 is provided with an exposure head 20 that forms a pattern on the surface of the substrate SW, and is attached to a support member (not shown).
- an illumination device 16 is disposed on the gate-shaped structure 12.
- the illumination light emitted from the illumination device 16 is guided to the exposure head 20 via an illumination optical system (not shown).
- the exposure head 20 includes a DMD (Digital Micro-mirror Device), and minute rectangular micromirrors are two-dimensionally arranged in a matrix. Each micromirror is ON / OFF controlled based on drawing data.
- DMD Digital Micro-mirror Device
- each micromirror is ON / OFF controlled at a predetermined exposure pitch.
- FIG. 2 is a diagram showing components of the lighting device.
- FIG. 3 is a diagram schematically showing the internal configuration of the light source unit. The lighting device will be described with reference to FIGS.
- the illumination device 16 includes a light source unit 19 provided with two short arc discharge lamps 32A and 32B (hereinafter referred to as a first discharge lamp and a second discharge lamp).
- a first discharge lamp and a second discharge lamp are short arc discharge lamps 32A and 32B.
- an ultrahigh pressure mercury lamp in which a mercury amount of 0.15 (mg / mm 3 ) or more is enclosed is used as a discharge lamp.
- Reflectors 34A and 34B serving as reflectors are disposed around the first and second discharge lamps 32A and 32B.
- the first and second discharge lamps 32A and 32B are located near one focal point of the reflectors 34A and 34B, respectively.
- the illumination optical system 35 is located at the other focal point of the reflectors 34A and 34B on the optical path. Therefore, the illumination light emitted from the first and second discharge lamps 32A and 32B is condensed on the illumination optical system 35 by the reflection of the elliptical mirrors 34A and 34B via the folding mirror 33.
- the illumination light emitted from each of the first and second discharge lamps 32A and 32B is synthesized by an illumination optical system 35 such as a fly-eye lens and becomes illumination light having a uniform intensity and a spatially uniform light beam. .
- the light emitted from the illumination optical system 35 is corrected to parallel light by the folding mirror 36 and guided in the direction of the DMD provided in the exposure head 20.
- the light source unit 19 has an internal structure in which first and second discharge lamps 32A and 32B are arranged in parallel in a housing 19H, and internal spaces 19S1 and 19S2 are partitioned by a partition wall 45. .
- the first and second discharge lamps 32A and 32B are arranged such that the light emission direction faces the opening of the housing 19H.
- the partition wall 45 is formed with through holes for allowing the first and second discharge lamps 32A and 32B to pass therethrough.
- the holding portions 17A and 17B attached and fixed to the partition wall 45 project rearward from the through holes. The first and second discharge lamps 32A and 32B are held.
- An exhaust fan 19A is attached to the rear portion (here, the rear end surface) of the housing 19H.
- the exhaust fan 19A may be disposed on the rear side surface of the housing 19H.
- air flows in the light emission direction or through the vent 19D of the housing 19H, and passes through the gap between the reflectors 34A, 34B and the discharge lamps 32A, 32B and the through hole of the partition wall 45.
- the air on the discharge lamp side flows into the space 19S2 in the housing 19H.
- vent holes 47A and 47B are formed along the partition wall surface direction.
- the exhaust fan 19A rotates, air flows through the vents 47A and 47B to the fan side.
- cooling air hits the entire bottom surface of the holding portions 17A and 17B, and turbulence is generated.
- there is no bias in heat discharge of the discharge lamp and the entire discharge lamp can be cooled uniformly. This results in a uniform lamp life.
- FIG. 4 is a block diagram of a control unit related to the lighting device.
- the controller 42 controls the illumination operation during the exposure operation, and adjusts the illuminance of the illumination light of each of the first and second discharge lamps 32A and 32B and the illuminance of the entire illumination light irradiated on the substrate SW.
- the ROM of the control unit 42 stores a program related to lighting control in advance.
- the lamp power supplies 44A and 44B supply power to the first and second discharge lamps 32A and 32B, respectively.
- the illuminance meters 46A and 46B detect the illuminance of the illumination light emitted from the first and second discharge lamps 32A and 32B, respectively.
- the controller 42 starts supplying power to the first and second discharge lamps 32A and 32B. Then, the supplied power is adjusted and controlled based on the supplied power value and the detected illuminance value.
- the first and second discharge lamps 32A and 32B may be configured as a lamp group including a plurality of lamps, respectively, and power adjustment may be performed collectively for each lamp group.
- the illuminance meters 46A and 46B detect the illuminance of illumination light emitted from each lamp group corresponding to the first and second discharge lamps 32A and 32B, respectively.
- FIG. 5 is a flowchart showing constant illuminance lighting control executed in the control unit.
- FIG. 6 is a diagram illustrating a change in illuminance due to power adjustment. The constant illuminance lighting control will be described with reference to FIGS.
- the illuminance of each discharge lamp 32A, 32B is measured to adjust the illuminance before the exposure starts (S101, S104). Then, it is determined whether or not the measured illuminance is illuminance that requires power adjustment (S105).
- a reference illuminance value RL suitable for exposure is determined according to the sensitivity of the photosensitive material formed on the substrate surface.
- two threshold values TN and TM are set.
- Threshold values TM1 and TM2 represent an upper limit value and a lower limit value of an illuminance range that can be exposed even if there is an illuminance difference from the reference illuminance value RL (hereinafter referred to as an allowable threshold value).
- the allowable illuminance values TM1 and TM2 are determined according to the light intensity of the discharge lamp, the photosensitive characteristics of the photosensitive material, the required pattern resolution, and the like.
- TM1 and TM2 may be simply referred to as an allowable threshold value TM.
- TN1 is a threshold value determined between the reference illuminance value RL and the allowable threshold value TM1
- TN2 is a threshold value determined between the reference illuminance value RL and the allowable threshold value TM2.
- the threshold values TN1 and TN2 are set in order to perform power adjustment that can realize a stable illuminance change (hereinafter referred to as a robust threshold value).
- TN1 and TN2 may be simply referred to as a robust threshold value TN.
- the temperature of the discharge lamp does not change immediately due to power fluctuation, and there is a time lag until the effect of power fluctuation appears as illuminance. Further, in the case of a discharge lamp in which a halogen substance such as mercury is enclosed, irregular illuminance fluctuations occur due to the halogen cycle, and the halogen cycle also fluctuates due to a change in lamp temperature.
- the illuminance that changes due to various factors changes in an unstable manner, and even if the power is changed substantially linearly, the illuminance fluctuation becomes irregular and there is a wobble. Therefore, it is difficult to predict the change in illuminance according to the amount of power fluctuation and incorporate this into the control.
- a robust threshold value TN is set as follows. The robust threshold value TN is determined according to empirical and / or qualitative theory according to the characteristics of the discharge lamp used.
- the measured illuminance value is within the range between the robust threshold value TN and the allowable threshold value TM or less than or equal to the robust threshold value TN, if the power adjustment is performed, there is a high possibility that the fluctuation width of the illuminance fluctuation exceeds the allowable threshold value TM. . Even if the power fluctuation is not performed, the illuminance value is equal to or smaller than the allowable threshold value TM, so that the exposure is not affected.
- step S105 it is determined whether or not to change the power depending on whether or not the measured illuminance value exceeds the allowable threshold value TM. The same determination is made when the illuminance value is smaller than the reference illuminance value RL. If there is a discharge lamp whose measured illuminance value exceeds the allowable threshold value TM, power adjustment is performed in step S106.
- step S106 power is increased or decreased with the robust threshold TN as a target value, and the power is changed substantially linearly over a predetermined time J.
- the amount of power change per unit time is determined according to the difference between the robust threshold value TN and the measured illuminance value.
- the predetermined time J is determined by determining the amount of change.
- FIG. 6 shows the measured illuminance value P1 of the discharge lamp 32A and illuminance value P2 of the discharge lamp 32B.
- the illuminance of the discharge lamp 32A deviates from the allowable threshold value TM due to a change over time.
- the illuminance of the discharge lamp 32B has an illuminance difference that exceeds the robust threshold TN with respect to the reference illuminance value RL, but the difference is within the allowable threshold TM.
- power adjustment (power reduction in FIG. 6) is performed over a predetermined time J so that the illuminance changes toward the robust threshold TN for the discharge lamp 32A.
- power adjustment for the discharge lamp 32B is not performed. The same applies to the case where the illuminance value of the discharge lamp 32B is equal to or less than the robust threshold value TN as indicated by the broken line P '.
- FIG. 6 shows the illuminance fluctuation caused by the power drop. Irregular illuminance changes to some extent, but the fluctuation range of illuminance is relatively small because the robust threshold value TN is set as a target value and the electric power is changed at a constant change rate over a predetermined time J. Therefore, the illuminance value after power adjustment does not transiently exceed the reference illuminance value RL or exceed the allowable threshold value TM.
- the change in illuminance of the discharge lamp 32A shown in FIG. 6 is an example, and the change in illuminance varies depending on the usage conditions and the like. However, any illuminance change does not exceed the allowable threshold TM during the illuminance change process.
- step S105 When power adjustment is performed for a predetermined time J in order to perform feedback control, the process returns to step S105 again to perform power adjustment. Then, the power adjustment is continued until both the illuminances of the discharge lamps 32A and 32B are equal to or less than the allowable threshold value TM (S105, S106).
- the power adjustment is not performed until the end of exposure (S107).
- the exposure period varies depending on the use status of the exposure apparatus, such as an operation period for continuously manufacturing one substrate or the same type of substrate.
- a standby state is entered until the next exposure operation is started (S101).
- the illuminance of the discharge lamps 32A and 32B is measured, and it is determined whether or not the measured illuminance of each discharge lamp exceeds the allowable threshold TM. Is done. If it is determined that the allowable threshold value TM is exceeded, the power adjustment is performed over a predetermined time J in accordance with the determined power change amount per unit time.
- the power adjustment is not limited to directly adjusting the lamp input power itself, but can be adjusted by the current value.
- the allowable threshold value and the robust threshold value may be set as appropriate in consideration of usage conditions and the like. And about illumination intensity measurement, you may measure the illumination intensity of two discharge lamps with one illumination meter.
- the robust threshold value may not be directly set as the target value, and parameter control may be performed so that the change in illuminance occurs toward the robust threshold value (not aiming at the reference illuminance value).
- the power fluctuation is adjusted instantaneously.
- “instantaneous” means that the power is adjusted in a period of less than a few seconds regardless of a predetermined amount of power change per unit time.
- Other configurations are substantially the same as those in the first embodiment.
- FIG. 7 is a diagram showing a change in illuminance due to power adjustment in the second embodiment.
- the power is instantaneously changed for the discharge lamp that needs to be adjusted.
- This power change is performed in a very short time.
- the illuminance fluctuation range is increased to some extent, the illuminance is decreased toward the robust threshold, so that the illuminance change that exceeds the allowable threshold TM does not occur even if there is an irregular illuminance change.
- the power adjustment can be completed in a short time for a discharge lamp having a large illuminance difference.
- FIG. 8 is a flowchart showing constant illuminance lighting control in the third embodiment.
- FIG. 9 is a diagram showing a change in illuminance due to power adjustment in the third embodiment.
- the same parts as those in the first embodiment such as processing in the exposure standby state are omitted.
- five discharge lamps and illuminance meters are arranged.
- each discharge lamp When the illuminance of each discharge lamp is measured (S201), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S202). When there is a discharge lamp having an illuminance value exceeding the allowable threshold value TM, it is determined whether or not there is a lamp having an illuminance value larger than the robust threshold value TN (S203).
- FIG. 9 shows measured illuminance values P1 to P5 for five discharge lamps.
- a discharge lamp having illuminance values P1 and P5 power adjustment similar to that of the first embodiment is performed. That is, the power is varied using the robust threshold value TN as a target value.
- the predetermined period J in which the power adjustment is performed that is, the amount of power change per unit time is determined based on the discharge lamp having the illuminance value P1 having the largest illuminance difference.
- the amount of power change per unit time for the discharge lamp having the illuminance value P5 is determined according to the predetermined time J previously determined. Therefore, the amount of power change in the discharge lamp with the illuminance value P5 is smaller than the amount of power fluctuation for the discharge lamp with the illuminance value P1. As a result, the illuminance change is also relatively gradual.
- the illuminance value is on the reference illuminance value RL side from the allowable threshold value TM, but the power adjustment is performed on the discharge lamps P2 and P4 that are on the allowable threshold value TM side from the robust threshold value TN.
- the power change amount per unit time is determined according to the predetermined time J previously determined, and the power is changed according to the gradual power change amount. The power adjustment is not performed for the discharge lamp having the illuminance value P3.
- the power change amount becomes more gradual and the illuminance fluctuation also becomes gradual.
- the illuminance value of each discharge lamp approaches the reference illuminance value by power adjustment, it is not necessary to make a large power change at the next constant illuminance lighting control.
- the fourth embodiment when there are a plurality of discharge lamps whose illuminance value exceeds the allowable threshold value, the illuminance is gradually changed except for the discharge lamp having the maximum illuminance difference.
- the illuminance is gradually changed except for the discharge lamp having the maximum illuminance difference.
- it is substantially the same as 1st Embodiment.
- FIG. 10 is a flowchart showing constant illuminance lighting control in the fourth embodiment.
- FIG. 11 is a diagram showing a change in illuminance due to power adjustment in the fourth embodiment. Here, it is assumed that four discharge lamps are arranged.
- each discharge lamp When the illuminance of each discharge lamp is measured (S301), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S302). When there is no discharge lamp having an illuminance value exceeding the allowable threshold value TM, power adjustment is not performed.
- the same power adjustment as in the first embodiment is performed on the discharge lamp having the illuminance value P1 having the maximum illuminance difference.
- power adjustment is performed over a predetermined time J so that the illuminance falls within the allowable threshold value TM without setting the robust threshold value TM as a target ( S305).
- the power change amount per unit time at this time is set to a relatively small change amount. Therefore, the power fluctuation amount is sufficiently smaller than a value set with the robust threshold value TN as a target. As a result, the change in illuminance of the discharge lamp having the illuminance value P4 is very gradual compared to the discharge lamp having the illuminance value P1.
- the power adjustment can be completed in a short period of time by giving the illuminance fluctuation range to only one discharge lamp and making the illuminance change gentle otherwise.
- FIG. 12 is a flowchart showing constant illuminance lighting control in the fifth embodiment.
- FIG. 13 is a diagram illustrating a change in illuminance due to power adjustment in the fifth embodiment. Here, it is assumed that three discharge lamps are arranged.
- each discharge lamp When the illuminance of each discharge lamp is measured (S401), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S402). When there is a discharge lamp having an illuminance value exceeding the allowable threshold TM, it is determined whether or not there is a lamp exceeding the robust threshold TN for the remaining discharge lamps (S403). If there is a lamp exceeding the robust threshold TN, power adjustment is performed toward the robust threshold TN (S404).
- FIG. 13 shows changes in illuminance for the discharge lamps having illuminance values P1, P2, and P3.
- the power adjustment is performed for any of the discharge lamps, and the illuminance change becomes gentler as the illuminance difference from the reference illuminance value becomes smaller.
- FIG. 14 is a diagram showing a change in illuminance due to power adjustment in the sixth embodiment.
- the power adjustment is performed over a predetermined period J based on a predetermined amount of power change per unit time for the discharge lamp with illuminance P1. At the same time, power adjustment is performed on the discharge lamps with illuminances P2 and P3 according to the same amount of power change.
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Circuit Arrangement For Electric Light Sources In General (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
This discharge lamp is provided with: a plurality of discharge lamps; a plurality of illuminance detection units that detect the illuminance of illuminating light irradiated by the plurality of discharge lamps; and an illuminance control unit that adjusts the input electric power for the plurality of discharge lamps on the basis of the discharge lamp illuminance that is detected. The illuminance control unit adjusts the electric power such that illuminance changes for discharge lamps having illuminance values that exceed an allowable threshold value determined on the basis of a reference illuminance value, out of the plurality of discharge lamps, toward a robust threshold value determined between the allowable threshold value and the reference illuminance value.
Description
本発明は、露光装置等に使用される照明装置に関し、特に、放電ランプを備えた照明装置の定照度点灯に関する。
The present invention relates to an illuminating device used for an exposure apparatus or the like, and more particularly to lighting at a constant illuminance of an illuminating device provided with a discharge lamp.
露光装置には、基板を露光するための光源として放電ランプが一般的に使用されており、最近では、複数の放電ランプを設置したマルチ点灯方式の照明装置が利用されている。照度調整に関しては、高解像度パターンを基板全体に形成するため、基板を一定照度でムラなく照明する定照度点灯を行う。
In an exposure apparatus, a discharge lamp is generally used as a light source for exposing a substrate, and recently, a multi-lighting type illumination apparatus having a plurality of discharge lamps is used. Regarding the illuminance adjustment, in order to form a high resolution pattern on the entire substrate, constant illuminance lighting is performed to illuminate the substrate uniformly with a constant illuminance.
そのため、放電ランプの照度を測定する照度計が露光装置に設けられており、露光動作前に照度を検出し、基板に対する照度が目標となる照度値と一致するように、放電ランプの出力調整を行う(例えば、特許文献1参照)。
For this reason, an illuminometer that measures the illuminance of the discharge lamp is provided in the exposure apparatus, detects the illuminance before the exposure operation, and adjusts the output of the discharge lamp so that the illuminance on the substrate matches the target illuminance value. (For example, refer to Patent Document 1).
電力調整のためランプ電力の変更を繰り返すと、電極先端部の損耗が増加して電極スパッタ現象が生じ、放電ランプの寿命が低下する。これを防ぐ点灯方式として、単位時間当たりの電力値の増加、減少量を所定値以下に抑えながらランプ電力を変化させる方法が知られている(特許文献2参照)。
¡If the lamp power is changed repeatedly for power adjustment, wear of the electrode tip increases, electrode sputtering occurs, and the life of the discharge lamp decreases. As a lighting method for preventing this, there is known a method of changing lamp power while suppressing an increase or decrease in power value per unit time to a predetermined value or less (see Patent Document 2).
水銀等の金属を封入した放電ランプの場合、電力変動によって生じるランプ放電空間内の温度変化は瞬間的なものではなく、ランプ温度に従う封入金属の蒸発量は、時間差をもって変化する。そのため、ランプ電力を変更しても、直ちに照度変化が生じるわけでない。そのため照度は、電力調整直後不安定となる。
In the case of a discharge lamp enclosing a metal such as mercury, the temperature change in the lamp discharge space caused by power fluctuations is not instantaneous, and the evaporation amount of the encapsulated metal according to the lamp temperature changes with a time difference. Therefore, even if the lamp power is changed, the illuminance change does not occur immediately. Therefore, the illuminance becomes unstable immediately after power adjustment.
さらに、ハロゲン物質が封入された放電ランプの場合、ハロゲンサイクルによってランプ照度が不規則に変化する。なおかつ、このハロゲンサイクルもランプ温度に影響されるため、ランプ照度はより一層不安定な軌跡を辿る。加えて、複数の放電ランプから照射される照明光を一つの照度検出部で検出し、複数の放電ランプに対して電力調整を一括で行なった場合、各ランプの照度変化具合は個別に異なり、検出される照度は非常に不安定な軌跡を辿る。
Furthermore, in the case of a discharge lamp in which a halogen substance is enclosed, the lamp illuminance changes irregularly depending on the halogen cycle. In addition, since this halogen cycle is also affected by the lamp temperature, the lamp illuminance follows a more unstable locus. In addition, when the illumination light emitted from a plurality of discharge lamps is detected by a single illuminance detection unit and power adjustment is performed for a plurality of discharge lamps at once, the illuminance change condition of each lamp is individually different, The detected illuminance follows a very unstable trajectory.
このように様々な要因によって照度不安定になる放電ランプに対し、電力変動後の照度変化を予測してランプ電力を調整することは困難である。これは、ランプ電力を緩やかに段階調整しても同じことである。逆にこのような電力の段階的変更を繰り返すと、ランプ寿命を低下させるとともに、照度調整に時間が費やされる。特に、マルチ点灯方式では各放電ランプの照度調整を行うため、スループット向上を大きく妨げる。
It is difficult to adjust the lamp power by predicting the illuminance change after the power fluctuation for the discharge lamp whose illuminance becomes unstable due to various factors. This is the same even if the lamp power is gradually adjusted. On the other hand, when such stepwise change of electric power is repeated, the lamp life is shortened and time is required for adjusting the illuminance. In particular, in the multi-lighting method, since the illuminance adjustment of each discharge lamp is performed, improvement in throughput is greatly hindered.
したがって、定照度点灯制御において、不安定な照度変化を生じさせないように電力調整することが求められる。
Therefore, in constant illuminance lighting control, it is required to adjust the power so as not to cause unstable illuminance changes.
本発明の照明装置は、露光装置などに装備可能であり、複数の放電ランプと、複数の放電ランプから照射される照明光の照度を検出する照度検出部と、検出される放電ランプの照度に基づいて、複数の放電ランプに対する入力電力を調整する照度制御部とを備える。
The illuminating device of the present invention can be installed in an exposure apparatus or the like, and a plurality of discharge lamps, an illuminance detecting unit that detects the illuminance of illumination light emitted from the plurality of discharge lamps, and the illuminance of the detected discharge lamp. And an illuminance controller that adjusts input power to the plurality of discharge lamps.
照度検出部は、複数の放電ランプそれぞれの照度を検出するように、複数の照度検出センサなどから構成しても良く、あるいは単体で構成してもよい。さらに、1つの照度検出部が割り当てられる各放電ランプを、複数のランプ群から構成することも可能である。いずれの場合においても、照度制御部は、電力調整を複数の放電ランプに対し、別々ではなく一括で行うことが可能である。
The illuminance detection unit may be composed of a plurality of illuminance detection sensors or the like so as to detect the illuminance of each of the plurality of discharge lamps. Furthermore, each discharge lamp to which one illuminance detection unit is assigned can be configured from a plurality of lamp groups. In any case, the illuminance control unit can perform power adjustment on a plurality of discharge lamps in a batch rather than separately.
本発明では、照度制御部が、複数の放電ランプのうち、基準照度値に基づいて定められる許容閾値を超えた照度値をもつ放電ランプに対し、許容閾値と基準照度値との間に定められる閾値(ここでは、ロバスト閾値という)に向けて照度変化するように、電力調整する。
In the present invention, the illuminance control unit is determined between the allowable threshold value and the reference illuminance value for a discharge lamp having an illuminance value that exceeds an allowable threshold value determined based on the reference illuminance value among the plurality of discharge lamps. The power is adjusted so that the illuminance changes toward a threshold value (here, referred to as a robust threshold value).
ここで、基準照度値は、最も適切な露光量を得ることが可能な参照となる照度値であり、感光材の感度特性、放電ランプの特性等によって定められる。また、許容閾値は、感光可能な照度範囲の限界値を示し、感光材の感度特性等に従う。一方、ロバスト閾値は、基準照度値と照度差があっても露光にとって安定した照度を確保できる範囲の閾値を示し、放電ランプ、感光材の特性等に従う。
Here, the standard illuminance value is a reference illuminance value capable of obtaining the most appropriate exposure amount, and is determined by the sensitivity characteristics of the photosensitive material, the characteristics of the discharge lamp, and the like. Further, the allowable threshold indicates the limit value of the illuminance range that can be exposed and follows the sensitivity characteristic of the photosensitive material. On the other hand, the robust threshold value indicates a threshold value within a range in which stable illuminance can be secured for exposure even if there is a difference in illuminance from the reference illuminance value, and follows the characteristics of the discharge lamp, the photosensitive material, and the like.
ロバスト閾値をベースにした照度変化になるため、ある程度照度値が不安定な軌跡になったとしても許容閾値を途中で超えるようなことはなく、迅速かつ適正な照度値に落ち着く。なお、「ロバスト閾値に向けて照度変化させる」制御は、様々な制御方法によって実現可能であり、フィードバック、フィードフォワード制御などが適用可能である。制御目標値をロバスト閾値として設定することが可能であり、あるいは、ロバスト閾値近傍を照度目標範囲に設定することも可能である。基準照度値に向けて制御されない範囲で適宜電力調整を行えばよい。
Since the illuminance change is based on the robust threshold value, even if the illuminance value becomes unstable to some extent, the allowable threshold value is not exceeded on the way, and the illuminance value quickly and appropriately settles down. Note that the control of “changing illuminance toward a robust threshold” can be realized by various control methods, and feedback, feedforward control, and the like can be applied. The control target value can be set as the robust threshold value, or the vicinity of the robust threshold value can be set as the illuminance target range. What is necessary is just to perform electric power adjustment suitably in the range which is not controlled toward a reference | standard illumination value.
照度制御部は、あらかじめ定められた単位時間当たりの電力変化量に従って、電力調整することが可能である。電力変化に時間を掛けることにより、照度変化が緩やかになる。あるいは、照度制御部は、瞬間的に電力調整することも可能である。比較的照度が基準照度値から外れていない場合、定照度点灯制御を速やかに完了することができる。
The illuminance control unit can adjust the power according to a predetermined amount of power change per unit time. By taking time for the power change, the illuminance change becomes gentle. Alternatively, the illuminance control unit can instantaneously adjust the power. When the illuminance is relatively not deviated from the reference illuminance value, the constant illuminance lighting control can be completed quickly.
複数の放電ランプを電力調整する際、特定の放電ランプをメインにして電力調整し、この電力調整にあわせて他の残りの放電ランプについて電力調整することが可能である。例えば、照度制御部は、許容閾値からの照度差が最も大きい主調整放電ランプに対し、ロバスト閾値に向けて照度変化するように、所定の調整時間をかけて電力調整する。そして、照度制御部は、他の放電ランプのうち電力調整が必要と決められた放電ランプに対し、主調整放電ランプの調整時間内で電力調整することが可能である。
When adjusting the power of a plurality of discharge lamps, it is possible to adjust the power with a specific discharge lamp as the main, and adjust the power of other remaining discharge lamps in accordance with this power adjustment. For example, the illuminance control unit adjusts the power over a predetermined adjustment time so that the illuminance changes toward the robust threshold for the main adjustment discharge lamp having the largest illuminance difference from the allowable threshold. The illuminance control unit can adjust the power within the adjustment time of the main adjustment discharge lamp with respect to the discharge lamp that is determined to require power adjustment among other discharge lamps.
他の放電ランプの電力調整時間に関しては、照度制御部は、他の放電ランプのうち電力調整必要と決められた放電ランプに対し、主調整放電ランプの調整時間と同じ時間をかけて電力調整することが可能である。照度差が比較的小さい放電ランプに対して十分な電力調整時間の確保、あるいは、単位時間当たりの電力変化量の抑制を実現することによって、不安定な照度変化を抑えることが可能である。
Regarding the power adjustment time of other discharge lamps, the illuminance control unit adjusts the power over the discharge lamps determined to require power adjustment among other discharge lamps over the same time as the adjustment time of the main adjustment discharge lamp. It is possible. An unstable change in illuminance can be suppressed by ensuring a sufficient power adjustment time for a discharge lamp having a relatively small illuminance difference, or by suppressing the amount of power change per unit time.
照度制御部は、他の放電ランプのうち、許容閾値以下の照度値をもつ放電ランプに対しては、電力調整を行わないようにすることができる。また、照度制御部が、他の放電ランプのうち、許容閾値を超える照度値をもつ放電ランプに対し、照度値が許容閾値以下に収まるように、電力調整することも可能である。
The illuminance control unit can prevent power adjustment for a discharge lamp having an illuminance value equal to or less than an allowable threshold among other discharge lamps. The illuminance control unit can also adjust the power so that the illuminance value falls below the allowable threshold for discharge lamps having an illuminance value exceeding the allowable threshold among other discharge lamps.
その一方で、定照度点灯制御を精度よく実行することも可能である。例えば、照度制御部は、他の放電ランプのうち、少なくともロバスト閾値以下の照度をもつ放電ランプに対し、基準照度値に向けて照度変化するように、電力調整することができる。
On the other hand, it is also possible to execute constant illumination lighting control with high accuracy. For example, the illuminance control unit can adjust the power so that the illuminance changes toward the reference illuminance value with respect to a discharge lamp having an illuminance at least equal to or less than the robust threshold among other discharge lamps.
また、照度制御部は、他の放電ランプのうち電力調整必要と決められた放電ランプに対し、主調整放電ランプにおいてあらかじめ定められた単位時間当たりの電力変化量と同じ電力変化量によって電力調整することが可能である。
In addition, the illuminance control unit adjusts the power of the other discharge lamps determined to require power adjustment by the same amount of power change as the power change amount per unit time determined in advance in the main adjustment discharge lamp. It is possible.
ところで、露光待機時間が長いと、その間に経時変化等によって照度が大きく変化している可能性が高い。そのため、照度制御部は、露光待機中であって、露光期間よりも露光待機時間が長い場合、複数の放電ランプに対して電力調整を実行することが可能である。
By the way, if the exposure waiting time is long, there is a high possibility that the illuminance changes greatly due to changes over time. Therefore, the illuminance control unit can perform power adjustment for a plurality of discharge lamps when the exposure is on standby and the exposure standby time is longer than the exposure period.
この構成に着目すると、電力調整を制御する構成に関しては、様々な制御内容を任意に適宜設定可能である。この場合、照明装置は、放電ランプと、放電ランプから照射される照明光の照度を検出する照度検出部と、検出される放電ランプの照度に基づいて、前記複数の放電ランプに対する入力電力を調整する照度制御部とを備え、照度制御部は、露光待機中であって、露光期間よりも露光待機時間が長い場合、複数の放電ランプに対して電力調整を実行する。
Focusing on this configuration, various control contents can be arbitrarily set as appropriate for the configuration for controlling the power adjustment. In this case, the lighting device adjusts the input power to the plurality of discharge lamps based on the discharge lamp, the illuminance detection unit that detects the illuminance of the illumination light emitted from the discharge lamp, and the detected illuminance of the discharge lamp. The illuminance control unit performs power adjustment on the plurality of discharge lamps when the exposure is on standby and the exposure standby time is longer than the exposure period.
照明装置の構成としては、所定数(1つもしくは複数)の放電ランプを収納する光源ユニットを設けることが可能である。例えば、光源ユニットは、各放電ランプの周囲に配置されるリフレクターと、ユニットハウジングの放電ランプ反対側に配置されるファンと、光源ユニット内に形成された隔壁に放電ランプを貫通させた状態で放電ランプを保持するランプ保持部とを有する。
As a configuration of the lighting device, it is possible to provide a light source unit that houses a predetermined number (one or a plurality) of discharge lamps. For example, the light source unit is discharged in a state in which the discharge lamp penetrates through a reflector disposed around each discharge lamp, a fan disposed on the opposite side of the discharge lamp of the unit housing, and a partition formed in the light source unit. A lamp holding portion for holding the lamp.
このような光源ユニットの場合、ユニット内にランプからの放熱が溜まり、冷却が不十分に成る恐れがある。特に、複数の放電ランプをユニット内に装着させた場合、顕著となる。そこで、ランプ保持部に、前記隔壁を間に挟んで形成される放電ランプ側空間とファン側空間とを連通させる通気口を設けることが可能である。
In the case of such a light source unit, heat from the lamp is accumulated in the unit, and cooling may be insufficient. This is particularly noticeable when a plurality of discharge lamps are mounted in the unit. In view of this, it is possible to provide a vent hole in the lamp holding portion for communicating the discharge lamp side space and the fan side space formed with the partition wall therebetween.
この構成に着目すると、電力調整を制御する構成に関しては、様々な制御内容を任意に適宜設定可能である。この場合、照明装置は、所定数(1つもしくは複数)の放電ランプを収納する光源ユニットを有し、光源ユニットは、各放電ランプの周囲に配置されるリフレクターと、ユニットハウジングの放電ランプ反対側に配置されるファンと、光源ユニット内に形成された隔壁に放電ランプを貫通させた状態で放電ランプを保持するランプ保持部とを有し、ランプ保持部が、隔壁を間に挟んで形成される放電ランプ側空間とファン側空間とを連通させる通気口を設ける。
Focusing on this configuration, various control contents can be arbitrarily set as appropriate for the configuration for controlling the power adjustment. In this case, the lighting device includes a light source unit that stores a predetermined number (one or more) of discharge lamps, and the light source unit includes a reflector disposed around each discharge lamp and a discharge lamp on the opposite side of the unit housing. And a lamp holder that holds the discharge lamp in a state where the discharge lamp penetrates the partition formed in the light source unit, and the lamp holder is formed with the partition interposed therebetween. A vent hole is provided for communicating the discharge lamp side space and the fan side space.
本発明の他の局面における露光装置は、複数の放電ランプ各々から照射される照明光の照度を検出する照度検出手段と、検出される各放電ランプの照度に基づいて、複数の放電ランプに対する入力電力を調整する照度制御手段として機能させるプログラムであって、複数の放電ランプのうち、基準照度値に基づいて定められる許容閾値を超えた照度値をもつ放電ランプに対し、許容閾値と基準照度値との間に定められるロバスト閾値に向けて照度変化するよう電力調整するように、照度制御手段として機能させる。
An exposure apparatus according to another aspect of the present invention includes an illuminance detection unit that detects an illuminance of illumination light emitted from each of the plurality of discharge lamps, and an input to the plurality of discharge lamps based on the detected illuminance of each discharge lamp. A program for functioning as an illuminance control means for adjusting electric power, and among a plurality of discharge lamps, an allowable threshold value and a reference illuminance value for a discharge lamp having an illuminance value exceeding an allowable threshold value determined based on a reference illuminance value The illuminance control means functions so as to adjust the power so that the illuminance changes toward a robust threshold defined between the two.
本発明の他の局面における照明方法は、複数の放電ランプ各々から照射される照明光の照度を検出し、検出される各放電ランプの照度に基づいて、複数の放電ランプに対する入力電力を調整する照明方法であって、複数の放電ランプのうち、基準照度値に基づいて定められる許容閾値を超えた照度値をもつ放電ランプに対し、許容閾値と基準照度値との間に定められるロバスト閾値に向けて照度変化するように電力調整する。
An illumination method according to another aspect of the present invention detects the illuminance of illumination light emitted from each of the plurality of discharge lamps, and adjusts input power to the plurality of discharge lamps based on the detected illuminance of each discharge lamp. A lighting method for a discharge lamp having an illuminance value that exceeds an allowable threshold value determined based on a reference illuminance value among a plurality of discharge lamps, with a robust threshold value defined between the allowable threshold value and the reference illuminance value Adjust the power so that the illuminance changes.
本発明によれば、照明装置において、不安定な照度変化を生じさせないように、定照度点灯制御を行うことができる。
According to the present invention, it is possible to perform constant illuminance lighting control so that an unstable illuminance change does not occur in the lighting device.
以下では、図面を参照して本発明の実施形態について説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図1は、第1の実施形態である露光装置を模式的に示した斜視図である。
FIG. 1 is a perspective view schematically showing an exposure apparatus according to the first embodiment.
露光装置(描画装置)10は、フォトレジストなどの感光材料を塗布あるいは貼り付けた基板SWに対し、照明光を投影してパターンを形成する露光装置であって、ゲート状構造体12、基台14を備える。基台14には、描画テーブル18を支持するX-Yステージ駆動機構(ここでは、図示せず)が搭載され、描画テーブル18上に基板SWが設置されている。
An exposure apparatus (drawing apparatus) 10 is an exposure apparatus that forms a pattern by projecting illumination light onto a substrate SW on which a photosensitive material such as a photoresist is applied or pasted, and includes a gate-like structure 12 and a base 14. An XY stage drive mechanism (not shown here) that supports the drawing table 18 is mounted on the base 14, and a substrate SW is placed on the drawing table 18.
描画装置10は、露光制御部(ここでは図示せず)を備えており、描画制御部によって露光動作が実行、制御される。ゲート状構造体12には、基板SWの表面にパターンを形成する露光ヘッド20が設けられ、支持部材(図示せず)に取り付けられている。また、ゲート状構造体12の上部には、照明装置16が配置されている。
The drawing apparatus 10 includes an exposure control unit (not shown here), and an exposure operation is executed and controlled by the drawing control unit. The gate-like structure 12 is provided with an exposure head 20 that forms a pattern on the surface of the substrate SW, and is attached to a support member (not shown). In addition, an illumination device 16 is disposed on the gate-shaped structure 12.
照明装置16から放射された照明光は、照明光学系(図示せず)を介して露光ヘッド20に導かれる。露光ヘッド20は、DMD(Digital Micro-mirror Device)を備えており、微小矩形状マイクロミラーがマトリクス状に2次元配列されている。各マイクロミラーは、描画データに基づいてON/OFF制御される。
The illumination light emitted from the illumination device 16 is guided to the exposure head 20 via an illumination optical system (not shown). The exposure head 20 includes a DMD (Digital Micro-mirror Device), and minute rectangular micromirrors are two-dimensionally arranged in a matrix. Each micromirror is ON / OFF controlled based on drawing data.
描画テーブル18が走査方向に沿って移動するのに伴って露光動作が実行され、所定の露光ピッチで各マイクロミラーがON/OFF制御される。基板SWを相対移動させながらラスタ走査を順に行うことにより、パターンが基板全体に形成されていく。
As the drawing table 18 moves along the scanning direction, an exposure operation is executed, and each micromirror is ON / OFF controlled at a predetermined exposure pitch. By performing raster scanning in order while relatively moving the substrate SW, a pattern is formed on the entire substrate.
図2は、照明装置の構成要素を示した図である。図3は、光源ユニットの内部構成を模式的に示した図である。図2、3を用いて、照明装置について説明する。
FIG. 2 is a diagram showing components of the lighting device. FIG. 3 is a diagram schematically showing the internal configuration of the light source unit. The lighting device will be described with reference to FIGS.
照明装置16は、2つのショートアーク型放電ランプ32A、32B(以下、第1放電ランプ、第2放電ランプという)を設けた光源ユニット19を備える。ここでは、水銀量が0.15(mg/mm3)以上封入されている超高圧型水銀ランプが放電ランプとして使用されている。
The illumination device 16 includes a light source unit 19 provided with two short arc discharge lamps 32A and 32B (hereinafter referred to as a first discharge lamp and a second discharge lamp). Here, an ultrahigh pressure mercury lamp in which a mercury amount of 0.15 (mg / mm 3 ) or more is enclosed is used as a discharge lamp.
第1、第2放電ランプ32A、32Bの周囲には、リフレクターとなるリフレクター34A、34Bが配置されている。第1、第2放電ランプ32A、32Bは、それぞれリフレクター34A、34Bの一方の焦点付近に位置する。
Reflectors 34A and 34B serving as reflectors are disposed around the first and second discharge lamps 32A and 32B. The first and second discharge lamps 32A and 32B are located near one focal point of the reflectors 34A and 34B, respectively.
照明光学系35は、光路上、リフレクター34A、34Bの他方の焦点に位置する。そのため、第1、第2放電ランプ32A、32Bから放射された照明光は、折り返しミラー33を介して、楕円ミラー34A、34Bの反射により照明光学系35に集光される。
The illumination optical system 35 is located at the other focal point of the reflectors 34A and 34B on the optical path. Therefore, the illumination light emitted from the first and second discharge lamps 32A and 32B is condensed on the illumination optical system 35 by the reflection of the elliptical mirrors 34A and 34B via the folding mirror 33.
第1、第2放電ランプ32A、32Bからそれぞれ放射された照明光は、フライアイレンズなどの照明光学系35によって合成され、均一の強度をもち、空間的に均一な光束から成る照明光となる。照明光学系35から射出された光は、折り返しミラー36によって平行光に修正され、露光ヘッド20内に設けられたDMDの方向へ導かれる。
The illumination light emitted from each of the first and second discharge lamps 32A and 32B is synthesized by an illumination optical system 35 such as a fly-eye lens and becomes illumination light having a uniform intensity and a spatially uniform light beam. . The light emitted from the illumination optical system 35 is corrected to parallel light by the folding mirror 36 and guided in the direction of the DMD provided in the exposure head 20.
図3に示すように、光源ユニット19は、ハウジング19H内に第1、第2放電ランプ32A、32Bを並列させた内部構造になっており、隔壁45によって内部空間19S1、19S2が区画されている。第1、第2放電ランプ32A、32Bは、その光放射方向がハウジング19Hの開口部を向くように配置されている。
As shown in FIG. 3, the light source unit 19 has an internal structure in which first and second discharge lamps 32A and 32B are arranged in parallel in a housing 19H, and internal spaces 19S1 and 19S2 are partitioned by a partition wall 45. . The first and second discharge lamps 32A and 32B are arranged such that the light emission direction faces the opening of the housing 19H.
隔壁45には、第1、第2放電ランプ32A、32Bを通すための貫通孔が形成されており、隔壁45に取り付け固定された保持部17A、17Bは、その貫通孔からハウジング後方側へ突出する第1、第2放電ランプ32A、32Bを保持する。
The partition wall 45 is formed with through holes for allowing the first and second discharge lamps 32A and 32B to pass therethrough. The holding portions 17A and 17B attached and fixed to the partition wall 45 project rearward from the through holes. The first and second discharge lamps 32A and 32B are held.
ハウジング19Hの後方部(ここでは、後端面である)には、排気用ファン19Aが取り付けられている。ただし、排気用ファン19Aは、ハウジング19Hの後方側面に配置してもよい。排気用ファン19Aが回転すると、光放射方向、あるいはハウジング19Hの通気口19Dを介して空気が流入し、リフレクター34A、34Bと放電ランプ32A、32Bとの隙間および隔壁45の貫通孔を通り抜ける。その結果、放電ランプ側の空気がハウジング19H内の空間19S2に流入する。
An exhaust fan 19A is attached to the rear portion (here, the rear end surface) of the housing 19H. However, the exhaust fan 19A may be disposed on the rear side surface of the housing 19H. When the exhaust fan 19A rotates, air flows in the light emission direction or through the vent 19D of the housing 19H, and passes through the gap between the reflectors 34A, 34B and the discharge lamps 32A, 32B and the through hole of the partition wall 45. As a result, the air on the discharge lamp side flows into the space 19S2 in the housing 19H.
保持部17A、17Bには、隔壁表面方向に沿った通気口47A、47Bが形成されている。排気用ファン19Aが回転すると、空気が通気口47A、47Bを通ってファン側へ流れる。その結果、保持部17A、17B底面全体に冷却風が当たり、乱流が生まれる。これによって、放電ランプの熱放出に偏りがなく、放電ランプ全体を均等に冷却することが可能となる。これは、ランプ寿命の均一化をもたらす。
In the holding portions 17A and 17B, vent holes 47A and 47B are formed along the partition wall surface direction. When the exhaust fan 19A rotates, air flows through the vents 47A and 47B to the fan side. As a result, cooling air hits the entire bottom surface of the holding portions 17A and 17B, and turbulence is generated. As a result, there is no bias in heat discharge of the discharge lamp, and the entire discharge lamp can be cooled uniformly. This results in a uniform lamp life.
図4は、照明装置に関連する制御部のブロック図である。
FIG. 4 is a block diagram of a control unit related to the lighting device.
制御部42は、露光作業中において照明動作を制御し、第1、第2放電ランプ32A、32B各々の照明光の照度、および基板SWに照射される照明光全体の照度を調整する。制御部42のROMには、照明制御に関するプログラムがあらかじめ格納されている。
The controller 42 controls the illumination operation during the exposure operation, and adjusts the illuminance of the illumination light of each of the first and second discharge lamps 32A and 32B and the illuminance of the entire illumination light irradiated on the substrate SW. The ROM of the control unit 42 stores a program related to lighting control in advance.
ランプ電源44A、44Bは、それぞれ第1、第2放電ランプ32A、32Bに電力を供給する。また、照度計46A、46Bは、それぞれ第1、第2放電ランプ32A、32Bから放射される照明光の照度を検出する。制御部42は、ランプ点灯の操作が行われると、第1、第2放電ランプ32A、32Bに電力供給を開始する。そして、供給電力の値、および検出された照度の値に基づき、供給電力を調整、制御する。
The lamp power supplies 44A and 44B supply power to the first and second discharge lamps 32A and 32B, respectively. The illuminance meters 46A and 46B detect the illuminance of the illumination light emitted from the first and second discharge lamps 32A and 32B, respectively. When the lamp lighting operation is performed, the controller 42 starts supplying power to the first and second discharge lamps 32A and 32B. Then, the supplied power is adjusted and controlled based on the supplied power value and the detected illuminance value.
第1、第2放電ランプ32A、32Bは、それぞれが複数のランプからなるランプ群として構成して、各ランプ群に対して一括して電力調整を行なってもよい。この場合は照度計46A、46Bは、それぞれ第1、第2放電ランプ32A、32Bに相当する各ランプ群から放射される照明光の照度を検出する。
The first and second discharge lamps 32A and 32B may be configured as a lamp group including a plurality of lamps, respectively, and power adjustment may be performed collectively for each lamp group. In this case, the illuminance meters 46A and 46B detect the illuminance of illumination light emitted from each lamp group corresponding to the first and second discharge lamps 32A and 32B, respectively.
図5は、制御部において実行される定照度点灯制御を示したフローチャートである。図6は、電力調整による照度変化を示した図である。図5、6を用いて、定照度点灯制御について説明する。
FIG. 5 is a flowchart showing constant illuminance lighting control executed in the control unit. FIG. 6 is a diagram illustrating a change in illuminance due to power adjustment. The constant illuminance lighting control will be described with reference to FIGS.
基板に対する露光動作(描画処理)開始の合図があると、露光開始前に照度調整するため、各放電ランプ32A、32Bの照度が計測される(S101、S104)。そして、計測された照度が、電力調整必要な照度であるか否かが判断される(S105)。
When there is a signal to start the exposure operation (drawing process) on the substrate, the illuminance of each discharge lamp 32A, 32B is measured to adjust the illuminance before the exposure starts (S101, S104). Then, it is determined whether or not the measured illuminance is illuminance that requires power adjustment (S105).
ここで、図6を用いながら照度判定について説明する。まず、基板表面に形成された感光材料の感度等に従い、感光するのに適切な基準照度値RLが決定される。この基準照度値RLに加え、2つの閾値TN、閾値TMが設定されている。
Here, the illuminance determination will be described with reference to FIG. First, a reference illuminance value RL suitable for exposure is determined according to the sensitivity of the photosensitive material formed on the substrate surface. In addition to the reference illuminance value RL, two threshold values TN and TM are set.
閾値TM1、TM2は、基準照度値RLから照度差があっても感光可能な照度範囲の上限値、下限値を表す(以下、許容閾値という)。この許容照度値TM1、TM2は、放電ランプの光強度、感光材の感光特性、必要とされるパターン解像度等に従って定められる。以下では、TM1、TM2を単に許容閾値TMと称する場合がある。
Threshold values TM1 and TM2 represent an upper limit value and a lower limit value of an illuminance range that can be exposed even if there is an illuminance difference from the reference illuminance value RL (hereinafter referred to as an allowable threshold value). The allowable illuminance values TM1 and TM2 are determined according to the light intensity of the discharge lamp, the photosensitive characteristics of the photosensitive material, the required pattern resolution, and the like. Hereinafter, TM1 and TM2 may be simply referred to as an allowable threshold value TM.
一方、閾値TN1、TN2については、TN1が、基準照度値RLと許容閾値TM1との間に定められる閾値であり、TN2が、基準照度値RLと許容閾値TM2との間に定められる閾値である。この閾値TN1、TN2は、安定した照度変化を実現可能な電力調整を行うために設定されている(以下、ロバスト閾値という)。以下では、TN1、TN2を単にロバスト閾値TNと称する場合がある。
On the other hand, for the threshold values TN1 and TN2, TN1 is a threshold value determined between the reference illuminance value RL and the allowable threshold value TM1, and TN2 is a threshold value determined between the reference illuminance value RL and the allowable threshold value TM2. . The threshold values TN1 and TN2 are set in order to perform power adjustment that can realize a stable illuminance change (hereinafter referred to as a robust threshold value). Hereinafter, TN1 and TN2 may be simply referred to as a robust threshold value TN.
一般的に、電力変動によって放電ランプの温度はすぐに変化せず、電力変動の効果が照度として現れるまでタイムラグがある。また、水銀などのハロゲン物質を封入した放電ランプの場合、ハロゲンサイクルによって不規則な照度変動が生じ、さらにこのハロゲンサイクルは、ランプ温度の変化によっても変動する。
Generally, the temperature of the discharge lamp does not change immediately due to power fluctuation, and there is a time lag until the effect of power fluctuation appears as illuminance. Further, in the case of a discharge lamp in which a halogen substance such as mercury is enclosed, irregular illuminance fluctuations occur due to the halogen cycle, and the halogen cycle also fluctuates due to a change in lamp temperature.
このように様々な要因によって変化する照度は、不安定に遷移するものであり、電力を実質的にリニアに変動させたとしても、照度変動は不規則なものとなり、ふらつきが存在する。したがって、電力変動量に応じた照度変化を予測し、これを制御に取り入れることは困難を伴う。
As described above, the illuminance that changes due to various factors changes in an unstable manner, and even if the power is changed substantially linearly, the illuminance fluctuation becomes irregular and there is a wobble. Therefore, it is difficult to predict the change in illuminance according to the amount of power fluctuation and incorporate this into the control.
そこで本実施形態では、電力変化に伴う照度の不安定な変動を考慮し、照度のふらつきがあっても露光可能な許容閾値TMを外れることがないように、厳格でない(ある程度大雑把な)目標値としてロバスト閾値TNを設定する。ロバスト閾値TNは、使用される放電ランプの特性等に従って経験的、および/あるいは定性的理論に従って定められる。
Therefore, in the present embodiment, in consideration of unstable fluctuations in illuminance due to power changes, a target value that is not strict (somewhat rough) so as not to deviate from the allowable threshold value TM that can be exposed even if there is fluctuation in illuminance. A robust threshold value TN is set as follows. The robust threshold value TN is determined according to empirical and / or qualitative theory according to the characteristics of the discharge lamp used.
また、計測照度値がロバスト閾値TNと許容閾値TMとの範囲内にある、あるいはロバスト閾値TN以下である場合、電力調整を実施すると、照度変動のふらつき幅が許容閾値TMを超える可能性が大きい。仮に、電力変動を実施しなくても、照度値が許容閾値TM以下であるため、感光には影響を及ぼさない。
In addition, when the measured illuminance value is within the range between the robust threshold value TN and the allowable threshold value TM or less than or equal to the robust threshold value TN, if the power adjustment is performed, there is a high possibility that the fluctuation width of the illuminance fluctuation exceeds the allowable threshold value TM. . Even if the power fluctuation is not performed, the illuminance value is equal to or smaller than the allowable threshold value TM, so that the exposure is not affected.
そのためステップS105では、計測された照度値が許容閾値TMを超えるか否かによって、電力変更するか否かを決定する。基準照度値RLよりも照度値が小さい場合についても同様に判定する。計測照度値が許容閾値TMを超える放電ランプが存在する場合、ステップS106において電力調整が行われる。
Therefore, in step S105, it is determined whether or not to change the power depending on whether or not the measured illuminance value exceeds the allowable threshold value TM. The same determination is made when the illuminance value is smaller than the reference illuminance value RL. If there is a discharge lamp whose measured illuminance value exceeds the allowable threshold value TM, power adjustment is performed in step S106.
ステップS106では、ロバスト閾値TNを目標値として電力増加、あるいは電力減少を行うとともに、所定時間Jかけて実質リニアに電力変化させる。単位時間当たりの電力変化量は、ロバスト閾値TNと計測された照度値との差に従って定められる。この変化量が定まることによって、所定時間Jが決まる。
In step S106, power is increased or decreased with the robust threshold TN as a target value, and the power is changed substantially linearly over a predetermined time J. The amount of power change per unit time is determined according to the difference between the robust threshold value TN and the measured illuminance value. The predetermined time J is determined by determining the amount of change.
図6では、計測された放電ランプ32Aの照度値P1、放電ランプ32Bの照度値P2が図示されている。放電ランプ32Aの照度は、経時変化などを原因として許容閾値TMから外れている。一方、放電ランプ32Bの照度は、基準照度値RLに対しロバスト閾値TNを超える照度差が存在するが、その差は許容閾値TM以下に収まっている。
FIG. 6 shows the measured illuminance value P1 of the discharge lamp 32A and illuminance value P2 of the discharge lamp 32B. The illuminance of the discharge lamp 32A deviates from the allowable threshold value TM due to a change over time. On the other hand, the illuminance of the discharge lamp 32B has an illuminance difference that exceeds the robust threshold TN with respect to the reference illuminance value RL, but the difference is within the allowable threshold TM.
そのため、放電ランプ32Aに対し、ロバスト閾値TNに向けて照度変化するように、電力調整(図6では電力低下)が所定時間Jに渡って行われる。一方、放電ランプ32Bに対する電力調整は行われない。放電ランプ32Bの照度値が、破線P’で示すようにロバスト閾値TN以下になる場合も同じである。
Therefore, power adjustment (power reduction in FIG. 6) is performed over a predetermined time J so that the illuminance changes toward the robust threshold TN for the discharge lamp 32A. On the other hand, power adjustment for the discharge lamp 32B is not performed. The same applies to the case where the illuminance value of the discharge lamp 32B is equal to or less than the robust threshold value TN as indicated by the broken line P '.
図6には、電力低下によって生じる照度変動の様子を示している。ある程度不規則な照度変化が起こるが、ロバスト閾値TNを目標値とし、さらに所定時間Jかけて一定の変化率で電力を変動するため、照度の変動幅は比較的小さい。よって、電力調整後の照度値が過渡的に基準照度値RLを超え、あるいは許容閾値TMを超えることもない。
FIG. 6 shows the illuminance fluctuation caused by the power drop. Irregular illuminance changes to some extent, but the fluctuation range of illuminance is relatively small because the robust threshold value TN is set as a target value and the electric power is changed at a constant change rate over a predetermined time J. Therefore, the illuminance value after power adjustment does not transiently exceed the reference illuminance value RL or exceed the allowable threshold value TM.
なお、図6で示す放電ランプ32Aの照度変化は一例であり、使用状況等によってその照度変化は様々である。しかしながら、いずれの照度変化であっても、照度変化の過程で許容閾値TMを超えることはない。
It should be noted that the change in illuminance of the discharge lamp 32A shown in FIG. 6 is an example, and the change in illuminance varies depending on the usage conditions and the like. However, any illuminance change does not exceed the allowable threshold TM during the illuminance change process.
フィードバック制御を実施するため、所定時間Jに渡る電力調整が行われると、再びステップS105に戻って電力調整が行われる。そして、放電ランプ32A、32Bの照度両方とも許容閾値TM以下となるまで電力調整が続けられる(S105、S106)。
When power adjustment is performed for a predetermined time J in order to perform feedback control, the process returns to step S105 again to perform power adjustment. Then, the power adjustment is continued until both the illuminances of the discharge lamps 32A and 32B are equal to or less than the allowable threshold value TM (S105, S106).
放電ランプ32A、32Bの照度が両方とも許容閾値TM以下になると、電力調整は露光終了まで行なわれない(S107)。露光期間は、1枚の基板、あるいは同じ種類の基板を連続して製造する作業期間など、露光装置の使用状況などに応じて様々である。露光終了になると、次の露光動作が開始されるまで待機状態となる(S101)。
When the illuminance of the discharge lamps 32A and 32B is both equal to or less than the allowable threshold value TM, the power adjustment is not performed until the end of exposure (S107). The exposure period varies depending on the use status of the exposure apparatus, such as an operation period for continuously manufacturing one substrate or the same type of substrate. When the exposure is completed, a standby state is entered until the next exposure operation is started (S101).
この露光待機状態が、露光期間よりも長い場合、露光動作が開始されなくても、電力調整が行われる(S102、S103)。これにより、露光待機時間が非常に長く、放電ランプの経時変化が生じたとしても、次回の電力調整時に大きく電力を増加、低減する必要がなく、電力調整時の照度変動幅を抑えることができる。
If the exposure standby state is longer than the exposure period, power adjustment is performed even if the exposure operation is not started (S102, S103). As a result, even if the exposure standby time is very long and the discharge lamp changes with time, it is not necessary to increase or decrease the power greatly during the next power adjustment, and the illuminance fluctuation range during the power adjustment can be suppressed. .
このように本実施形態によれば、定照度点灯制御を行う場合、放電ランプ32A、32Bの照度を測定し、各放電ランプの測定された照度が、許容閾値TMを超えているか否かが判断される。許容閾値TMを超えていると判断されると、定められた単位時間当たりの電力変化量に従い、所定時間Jをかけて電力調整が行われる。
As described above, according to the present embodiment, when performing constant illuminance lighting control, the illuminance of the discharge lamps 32A and 32B is measured, and it is determined whether or not the measured illuminance of each discharge lamp exceeds the allowable threshold TM. Is done. If it is determined that the allowable threshold value TM is exceeded, the power adjustment is performed over a predetermined time J in accordance with the determined power change amount per unit time.
これにより、電力変更後に照度が過渡的に不規則な変化となって、許容閾値TMを超える照度変動幅になることを抑止することができる。また、制御目標が緩やかであるため、実質的に1回の電力調整だけで定照度点灯制御を終えることが可能であり、ランプ電極の摩耗を抑えることができる。さらに、電力をリニアに変化させながら電力調整するため、ランプ温度が急激に変化せず、安定した照度変化をもたらすことを可能にし、その結果ランプ寿命が延びる。
This makes it possible to prevent the illuminance from transiently changing irregularly after the power change, resulting in an illuminance fluctuation range exceeding the allowable threshold TM. Further, since the control target is moderate, it is possible to finish the constant illuminance lighting control with substantially only one power adjustment, and the wear of the lamp electrode can be suppressed. Furthermore, since the electric power is adjusted while linearly changing the electric power, the lamp temperature does not change abruptly and it is possible to bring about a stable change in illuminance, resulting in an extended lamp life.
特に、各放電ランプが実際には複数の小ランプ群によって構成され、1つの照度計でランプ群全体から照射される光の照度を測定する場合、電力変動による照度変化はより複雑であり、予測は非常に困難である。しかしながら、本実施形態によれば、1つの照度計で複数の光源部から照射される光の照度を検出しても、適切な照度変化をさせることが可能であり、また、電力調整を一括で行うため、迅速かつ適切に電力調整することができる。
In particular, when each discharge lamp is actually composed of a plurality of small lamp groups and the illuminance of light emitted from the entire lamp group is measured with one illuminometer, the illuminance change due to power fluctuations is more complicated and predicted. Is very difficult. However, according to the present embodiment, even if the illuminance of light emitted from a plurality of light source units is detected by one illuminance meter, it is possible to change the illuminance appropriately, and power adjustment can be performed collectively. As a result, power can be adjusted quickly and appropriately.
なお、電力調整においては、ランプ入力電力自体を直接調整するのに限定されず、電流値によって調整することも可能である。そして、許容閾値、ロバスト閾値についても、使用条件等を勘案して適宜設定すればよい。そして、照度計測については、2つの放電ランプの照度を1つの照度計で計測しても良い。
It should be noted that the power adjustment is not limited to directly adjusting the lamp input power itself, but can be adjusted by the current value. The allowable threshold value and the robust threshold value may be set as appropriate in consideration of usage conditions and the like. And about illumination intensity measurement, you may measure the illumination intensity of two discharge lamps with one illumination meter.
また、制御方法についても、フィードバック制御、フィードフォワード制御両方とも可能である。さらに、ロバスト閾値を直接目標値とせず、照度変化がロバスト閾値に向けて生じるように(基準照度値までは照準していない)パラメータ制御してもよい。
Also, regarding the control method, both feedback control and feedforward control are possible. Furthermore, the robust threshold value may not be directly set as the target value, and parameter control may be performed so that the change in illuminance occurs toward the robust threshold value (not aiming at the reference illuminance value).
次に、図7を用いて、第2の実施形態である露光装置について説明する。第2の実施形態では、電力変動を瞬間的に調整する。ここで瞬間的とは、あらかじめ定められた単位時間当たりの電力変化量に関わらず、数秒未満の期間で電力を調整することをいう。それ以外の構成については、実質的に第1の実施形態と同じである。
Next, an exposure apparatus according to the second embodiment will be described with reference to FIG. In the second embodiment, the power fluctuation is adjusted instantaneously. Here, “instantaneous” means that the power is adjusted in a period of less than a few seconds regardless of a predetermined amount of power change per unit time. Other configurations are substantially the same as those in the first embodiment.
図7は、第2の実施形態における電力調整による照度変化を示した図である。
FIG. 7 is a diagram showing a change in illuminance due to power adjustment in the second embodiment.
第2の実施形態では、電力調整する必要がある放電ランプに対し、電力を瞬間的に変える。この電力変更は、極めて短時間で行なわれる。その結果、照度変動幅はある程度大きくなるが、ロバスト閾値に向けて照度低下させるため、不規則な照度変化があっても許容閾値TMを超えるような照度変化は生じない。これにより、照度差が大きい放電ランプに対しては、短時間で電力調整を終了させることが可能となる。
In the second embodiment, the power is instantaneously changed for the discharge lamp that needs to be adjusted. This power change is performed in a very short time. As a result, although the illuminance fluctuation range is increased to some extent, the illuminance is decreased toward the robust threshold, so that the illuminance change that exceeds the allowable threshold TM does not occur even if there is an irregular illuminance change. As a result, the power adjustment can be completed in a short time for a discharge lamp having a large illuminance difference.
次に、図8、9を用いて、第3の実施形態である露光装置について説明する。第3の実施形態では、照度値が許容照度値以下であってもロバスト閾値を超えている場合、電力調整を行う。それ以外の構成については、実質的に第1の実施形態と同じである。
Next, an exposure apparatus according to the third embodiment will be described with reference to FIGS. In the third embodiment, even when the illuminance value is equal to or less than the allowable illuminance value, power adjustment is performed when the robust threshold value is exceeded. Other configurations are substantially the same as those in the first embodiment.
図8は、第3の実施形態における定照度点灯制御を示したフローチャートである。図9は、第3の実施形態における電力調整による照度変化を示した図である。なお、図8のフローチャートでは、露光待機状態における処理等、第1の実施形態と同じ部分については省略している。また、放電ランプおよび照度計は、5つ配置されるものとする。
FIG. 8 is a flowchart showing constant illuminance lighting control in the third embodiment. FIG. 9 is a diagram showing a change in illuminance due to power adjustment in the third embodiment. In the flowchart of FIG. 8, the same parts as those in the first embodiment such as processing in the exposure standby state are omitted. In addition, five discharge lamps and illuminance meters are arranged.
各放電ランプの照度が計測されると(S201)、その中に許容閾値TM超えの照度値をもつ放電ランプが存在するか否かが判断される(S202)。許容閾値TM超えの照度値をもつ放電ランプが存在する場合、照度値がロバスト閾値TNよりも大きいランプが存在するか否かが判断される(S203)。
When the illuminance of each discharge lamp is measured (S201), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S202). When there is a discharge lamp having an illuminance value exceeding the allowable threshold value TM, it is determined whether or not there is a lamp having an illuminance value larger than the robust threshold value TN (S203).
照度値がロバスト閾値TNを超えている放電ランプが存在しない場合、すなわち、残りの放電ランプがロバスト閾値TN以下である場合、許容閾値超えの放電ランプのみ電力調整が行われる(S205)。一方、照度値がロバスト閾値TNを超えている放電ランプが存在する場合、ロバスト閾値TNに向けへ照度が変化するように電力調整が行われる(S204)。
When there is no discharge lamp whose illuminance value exceeds the robust threshold value TN, that is, when the remaining discharge lamps are equal to or less than the robust threshold value TN, power adjustment is performed only for the discharge lamps exceeding the allowable threshold value (S205). On the other hand, when there is a discharge lamp whose illuminance value exceeds the robust threshold value TN, power adjustment is performed so that the illuminance changes toward the robust threshold value TN (S204).
図9には、5つの放電ランプに対する計測照度値P1~P5を示している。照度値P1、P5をもつ放電ランプに対しては、第1の実施形態と同様の電力調整を行う。すなわち、ロバスト閾値TNを目標値として電力変動させる。
FIG. 9 shows measured illuminance values P1 to P5 for five discharge lamps. For a discharge lamp having illuminance values P1 and P5, power adjustment similar to that of the first embodiment is performed. That is, the power is varied using the robust threshold value TN as a target value.
ただし、電力調整を行う所定期間J、すなわち単位時間当たりの電力変化量は、相対的に照度差がもっとも大きい照度値P1の放電ランプに基づいて定められる。照度値P5の放電ランプに対する単位時間当たりの電力変化量は、先に定められた所定時間Jに従って決定される。そのため、照度値P5の放電ランプにおける電力変化量は、照度値P1の放電ランプに対する電力変動量よりも小さい。その結果、照度変化も比較的緩やかになる。
However, the predetermined period J in which the power adjustment is performed, that is, the amount of power change per unit time is determined based on the discharge lamp having the illuminance value P1 having the largest illuminance difference. The amount of power change per unit time for the discharge lamp having the illuminance value P5 is determined according to the predetermined time J previously determined. Therefore, the amount of power change in the discharge lamp with the illuminance value P5 is smaller than the amount of power fluctuation for the discharge lamp with the illuminance value P1. As a result, the illuminance change is also relatively gradual.
そして、照度値が許容閾値TMより基準照度値RL側であるが、ロバスト閾値TNより許容閾値TM側であるP2、P4の放電ランプに対し、電力調整が行われる。このときの電力変動に関しては、先に定められた所定時間Jに従って単位時間当たりの電力変化量を定め、その緩やかな電力変化量に従って電力を変更する。照度値P3の放電ランプについては、電力調整を行わない。
And, the illuminance value is on the reference illuminance value RL side from the allowable threshold value TM, but the power adjustment is performed on the discharge lamps P2 and P4 that are on the allowable threshold value TM side from the robust threshold value TN. Regarding the power fluctuation at this time, the power change amount per unit time is determined according to the predetermined time J previously determined, and the power is changed according to the gradual power change amount. The power adjustment is not performed for the discharge lamp having the illuminance value P3.
照度値P2、P4、P5の放電ランプに対し、照度値P1の放電ランプと同じ所定時間Jをかけて電力変化させるため、電力変化量はより一層緩やかなものとなり、照度変動も緩やかになる。また、電力調整によって各放電ランプの照度値が基準照度値に近づくため、次回の定照度点灯制御のとき、大きな電力変更をする必要がない。
Since the electric power is changed over the same predetermined time J as that of the discharge lamp having the illuminance value P1 with respect to the discharge lamps having the illuminance values P2, P4, and P5, the power change amount becomes more gradual and the illuminance fluctuation also becomes gradual. Moreover, since the illuminance value of each discharge lamp approaches the reference illuminance value by power adjustment, it is not necessary to make a large power change at the next constant illuminance lighting control.
次に、図10、11を用いて、第4の実施形態である露光装置について説明する。第4の実施形態では、照度値が許容閾値を超える放電ランプが複数ある場合、最大照度差の放電ランプ以外について、緩やかに照度変更する。それ以外の構成については、第1の実施形態と実質的に同じである。
Next, an exposure apparatus according to the fourth embodiment will be described with reference to FIGS. In the fourth embodiment, when there are a plurality of discharge lamps whose illuminance value exceeds the allowable threshold value, the illuminance is gradually changed except for the discharge lamp having the maximum illuminance difference. About another structure, it is substantially the same as 1st Embodiment.
図10は、第4の実施形態における定照度点灯制御を示したフローチャートである。図11は、第4の実施形態における電力調整による照度変化を示した図である。ここでは、4つの放電ランプが配置されているものとする。
FIG. 10 is a flowchart showing constant illuminance lighting control in the fourth embodiment. FIG. 11 is a diagram showing a change in illuminance due to power adjustment in the fourth embodiment. Here, it is assumed that four discharge lamps are arranged.
各放電ランプの照度が計測されると(S301)、その中に許容閾値TM超えの照度値をもつ放電ランプが存在するか否かが判断される(S302)。許容閾値TM超えの照度値をもつ放電ランプが存在しない場合、電力調整は行われない。
When the illuminance of each discharge lamp is measured (S301), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S302). When there is no discharge lamp having an illuminance value exceeding the allowable threshold value TM, power adjustment is not performed.
一方、許容閾値TM超えの照度値をもつ放電ランプが存在する場合、基準照度値RLに対して最大照度差をもつ放電ランプであるか否かが判断される(S303)。最大照度差のある放電ランプの場合、定められた電力変動量に従って電力調整が行われる(S304)。最大照度差ではない放電ランプに対しては、許容閾値TM以下に照度が治まるように、電力調整が行われる(S305)。
On the other hand, if there is a discharge lamp having an illuminance value exceeding the allowable threshold TM, it is determined whether or not the discharge lamp has a maximum illuminance difference with respect to the reference illuminance value RL (S303). In the case of a discharge lamp having a maximum illuminance difference, power adjustment is performed according to the determined power fluctuation amount (S304). For the discharge lamp that is not the maximum illuminance difference, power adjustment is performed so that the illuminance is reduced to the allowable threshold value TM or less (S305).
図11に示すように、最大照度差のある照度値P1の放電ランプに対し、第1の実施形態と同様の電力調整が行われる。一方、最大照度差をもたない照度値P4の放電ランプに対しては、ロバスト閾値TMを目標とせず、許容閾値TMに照度が収まるように、所定時間Jをかけて電力調整が行われる(S305)。
As shown in FIG. 11, the same power adjustment as in the first embodiment is performed on the discharge lamp having the illuminance value P1 having the maximum illuminance difference. On the other hand, for a discharge lamp having an illuminance value P4 having no maximum illuminance difference, power adjustment is performed over a predetermined time J so that the illuminance falls within the allowable threshold value TM without setting the robust threshold value TM as a target ( S305).
このときの単位時間当たりの電力変化量は比較的小さい変化量に設定される。したがって、電力変動量はロバスト閾値TNを目標として設定される値よりも、十分小さい。その結果、照度値P4の放電ランプの照度変化は、照度値P1の放電ランプと比較して非常に緩やかになる。
The power change amount per unit time at this time is set to a relatively small change amount. Therefore, the power fluctuation amount is sufficiently smaller than a value set with the robust threshold value TN as a target. As a result, the change in illuminance of the discharge lamp having the illuminance value P4 is very gradual compared to the discharge lamp having the illuminance value P1.
このように1つの放電ランプに対してのみ照度変動幅をもたせ、それ以外は照度変化を緩やかにすることにより、電力調整を短期間で終了することができる。
In this way, the power adjustment can be completed in a short period of time by giving the illuminance fluctuation range to only one discharge lamp and making the illuminance change gentle otherwise.
次に、図12、13を用いて、第5の実施形態である露光装置について説明する。第5の実施形態では、基準閾値との照度差を解消するように、各放電ランプに対して電力調整が行われる。それ以外の構成については、第1、2の実施形態と同じである。
Next, an exposure apparatus according to the fifth embodiment will be described with reference to FIGS. In the fifth embodiment, power adjustment is performed on each discharge lamp so as to eliminate the illuminance difference from the reference threshold. Other configurations are the same as those in the first and second embodiments.
図12は、第5の実施形態における定照度点灯制御を示したフローチャートである。図13は、第5の実施形態における電力調整による照度変化を示した図である。ここでは、3つの放電ランプが配置されているものとする。
FIG. 12 is a flowchart showing constant illuminance lighting control in the fifth embodiment. FIG. 13 is a diagram illustrating a change in illuminance due to power adjustment in the fifth embodiment. Here, it is assumed that three discharge lamps are arranged.
各放電ランプの照度が計測されると(S401)、その中に許容閾値TM超えの照度値をもつ放電ランプが存在するか否かが判断される(S402)。許容閾値TM超えの照度値をもつ放電ランプが存在する場合、残りの放電ランプについて、ロバスト閾値TN超えのランプが存在するか否かが判断される(S403)。そして、ロバスト閾値TN超えのランプが存在する場合、ロバスト閾値TNに向けて電力調整が行われる(S404)。
When the illuminance of each discharge lamp is measured (S401), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S402). When there is a discharge lamp having an illuminance value exceeding the allowable threshold TM, it is determined whether or not there is a lamp exceeding the robust threshold TN for the remaining discharge lamps (S403). If there is a lamp exceeding the robust threshold TN, power adjustment is performed toward the robust threshold TN (S404).
一方、ロバスト閾値TN以下の放電ランプについては、照度が基準照度値RLと一致するか否かが判断される(S405)。照度が基準照度値RLと一致しない場合、基準照度値RLに向けて照度変化するように電力調整が行われる(S406)。
On the other hand, for a discharge lamp having a robust threshold value TN or less, it is determined whether or not the illuminance matches the reference illuminance value RL (S405). When the illuminance does not match the reference illuminance value RL, power adjustment is performed so that the illuminance changes toward the reference illuminance value RL (S406).
図13では、照度値P1、P2、P3の放電ランプに対する照度変化を示している。いずれの放電ランプに対しても電力調整が行われており、基準照度値との照度差が小さくなるほど、照度変化が緩やかになる。このようにすべての放電ランプに対して電力調整を行うことにより、次回の定照度点灯制御のとき、大きく電力変動する必要がなくなる。
FIG. 13 shows changes in illuminance for the discharge lamps having illuminance values P1, P2, and P3. The power adjustment is performed for any of the discharge lamps, and the illuminance change becomes gentler as the illuminance difference from the reference illuminance value becomes smaller. By adjusting the power for all the discharge lamps in this way, it is not necessary to fluctuate the power greatly during the next constant illuminance lighting control.
次に、図14を用いて、第6の実施形態である露光装置について説明する。第6の実施形態では、すべての放電ランプに対し、同じ電力変化量に従って電力調整を行う。それ以外の構成については、第1、5の実施形態と実質的に同じである。
Next, an exposure apparatus according to the sixth embodiment will be described with reference to FIG. In the sixth embodiment, power adjustment is performed for all the discharge lamps according to the same amount of power change. Other configurations are substantially the same as those in the first and fifth embodiments.
図14は、第6の実施形態における電力調整による照度変化を示した図である。
FIG. 14 is a diagram showing a change in illuminance due to power adjustment in the sixth embodiment.
照度P1の放電ランプに対し、あらかじめ定められた単位時間当たりの電力変化量に基づき、所定期間Jをかけて電力調整が行われる。それと同時に、照度P2、P3の放電ランプに対しても、同じ電力変化量に従って電力調整が行われる。
The power adjustment is performed over a predetermined period J based on a predetermined amount of power change per unit time for the discharge lamp with illuminance P1. At the same time, power adjustment is performed on the discharge lamps with illuminances P2 and P3 according to the same amount of power change.
なお、第3~6の実施形態では、許容閾値TM超えの放電ランプが存在することを前提として、残りの放電ランプの電力調整を行うか否かを決定しているが、これを前提とせず放電ランプの電力調整をすることも可能である。
In the third to sixth embodiments, it is determined on the premise that there is a discharge lamp exceeding the allowable threshold value TM, and it is determined whether or not to adjust the power of the remaining discharge lamps. It is also possible to adjust the power of the discharge lamp.
本発明に関しては、添付されたクレームによって定義される本発明の意図および範囲から離れることなく、様々な変更、置換、代替が可能である。さらに、本発明では、明細書に記載された特定の実施形態のプロセス、装置、製造、構成物、手段、方法およびステップに限定されることを意図していない。当業者であれば、本発明の開示から、ここに記載された実施形態がもたらす機能と同様の機能を実質的に果たし、又は同等の作用、効果を実質的にもたらす装置、手段、方法が導かれることを認識するであろう。したがって、添付した請求の範囲は、そのような装置、手段、方法の範囲に含まれることが意図されている。
-Various changes, substitutions, and alternatives are possible with respect to the present invention without departing from the spirit and scope of the present invention as defined by the appended claims. Furthermore, the present invention is not intended to be limited to the specific embodiments of the processes, apparatus, manufacture, components, means, methods, and steps described in the specification. Those skilled in the art will appreciate from the disclosure of the present invention devices, means, and methods that perform substantially the same functions as those provided by the embodiments described herein, or that provide substantially the same operations and effects. You will recognize it. Accordingly, the appended claims are intended to be included within the scope of such devices, means, and methods.
本願は、日本出願(特願2012-077809号、2012年3月29日出願)を基礎出願として優先権主張する出願であり、基礎出願の明細書、図面およびクレームを含む開示内容は、参照することによって本願全体に組み入れられている。
This application claims the priority of a Japanese application (Japanese Patent Application No. 2012-0777809, filed on March 29, 2012) as a basic application, and the disclosure including the specification, drawings and claims of the basic application is referred to. Which is incorporated herein by reference in its entirety.
10 露光装置
16 照明装置
17A、17B 保持部
19 光源ユニット
20 露光ヘッド
32A、32B 放電ランプ
42 制御部
47A、47B 通気口
RL 基準照度値
TM 許容閾値
TN ロバスト閾値 DESCRIPTION OFSYMBOLS 10 Exposure apparatus 16 Illumination apparatus 17A, 17B Holding part 19 Light source unit 20 Exposure head 32A, 32B Discharge lamp 42 Control part 47A, 47B Vent RL Reference | standard illumination value TM Allowable threshold value TN Robust threshold value
16 照明装置
17A、17B 保持部
19 光源ユニット
20 露光ヘッド
32A、32B 放電ランプ
42 制御部
47A、47B 通気口
RL 基準照度値
TM 許容閾値
TN ロバスト閾値 DESCRIPTION OF
Claims (16)
- 複数の放電ランプと、
前記複数の放電ランプから照射される照明光の照度を検出する照度検出部と、
検出される放電ランプの照度に基づいて、前記複数の放電ランプに対する入力電力を調整する照度制御部とを備え、
前記照度制御部が、前記複数の放電ランプのうち、基準照度値に基づいて定められる許容閾値を超えた照度値をもつ放電ランプに対し、許容閾値と基準照度値との間に定められるロバスト閾値に向けて照度変化するように、電力調整することを特徴とする照明装置。 A plurality of discharge lamps;
An illuminance detector that detects the illuminance of illumination light emitted from the plurality of discharge lamps;
An illuminance control unit that adjusts input power to the plurality of discharge lamps based on the detected illuminance of the discharge lamp;
A robust threshold value determined between an allowable threshold value and a reference illuminance value for the discharge lamp having an illuminance value exceeding an allowable threshold value determined based on a reference illuminance value among the plurality of discharge lamps. The illumination device is characterized in that the power is adjusted so that the illuminance changes toward the light source. - 前記照度制御部が、あらかじめ定められた単位時間当たりの電力変化量に従って、電力調整することを特徴とする請求項1に記載の照明装置。 The illumination device according to claim 1, wherein the illuminance control unit adjusts the power according to a predetermined amount of power change per unit time.
- 前記照度制御部が、瞬間的に電力調整することを特徴とする請求項1に記載の照明装置。 The illumination device according to claim 1, wherein the illuminance control unit instantaneously adjusts the power.
- 前記照度制御部が、許容閾値からの照度差が最も大きい主調整放電ランプに対し、所定の調整時間をかけて電力調整し、また、
前記照度制御部が、他の放電ランプのうち電力調整が必要と決められた放電ランプに対し、主調整放電ランプの調整時間内で電力調整することを特徴とする請求項1乃至2のいずれかに記載の照明装置。 The illuminance control unit adjusts the power over a predetermined adjustment time for the main adjustment discharge lamp having the largest illuminance difference from the allowable threshold, and
3. The illuminance control unit performs power adjustment within an adjustment time of a main adjustment discharge lamp for a discharge lamp determined to require power adjustment among other discharge lamps. The lighting device described in 1. - 前記照度制御部が、他の放電ランプのうち、許容閾値以下の照度値をもつ放電ランプに対しては、電力調整を行わないことを特徴とする請求項4に記載の照明装置。 The illumination device according to claim 4, wherein the illuminance control unit does not adjust power for a discharge lamp having an illuminance value equal to or less than an allowable threshold among other discharge lamps.
- 前記照度制御部が、他の放電ランプのうち、ロバスト閾値を超える照度値をもつ放電ランプに対し、ロバスト閾値に向けて照度変化するように、電力調整することを特徴とする請求項4に記載の照明装置。 5. The power control unit according to claim 4, wherein the illuminance control unit adjusts power so that the illuminance changes toward a robust threshold for a discharge lamp having an illuminance value exceeding a robust threshold among other discharge lamps. Lighting equipment.
- 前記照度制御部が、他の放電ランプのうち、許容閾値を超える照度値をもつ放電ランプに対し、照度値が許容閾値以下に収まるように、電力調整することを特徴とする請求項4に記載の照明装置。 5. The power control unit according to claim 4, wherein the illuminance control unit adjusts electric power so that an illuminance value falls within an allowable threshold value for a discharge lamp having an illuminance value exceeding an allowable threshold value among other discharge lamps. Lighting equipment.
- 前記照度制御部が、他の放電ランプのうち、少なくともロバスト閾値以下の照度をもつ放電ランプに対し、基準照度値に向けて照度変化するように、電力調整することを特徴とする請求項4に記載の照明装置。 5. The power adjustment is performed according to claim 4, wherein the illuminance control unit adjusts the power so that the illuminance changes toward the reference illuminance value with respect to a discharge lamp having an illuminance at least equal to or less than a robust threshold among other discharge lamps. The lighting device described.
- 前記照度制御部が、他の放電ランプのうち電力調整必要と決められた放電ランプに対し、主調整放電ランプの調整時間と同じ時間をかけて電力調整することを特徴とする請求項4に記載の照明装置。 5. The power control unit according to claim 4, wherein the illuminance control unit performs power adjustment for a discharge lamp that is determined to require power adjustment among other discharge lamps over the same time as the adjustment time of the main adjustment discharge lamp. Lighting equipment.
- 前記照度制御部が、他の放電ランプのうち電力調整必要と決められた放電ランプに対し、主調整放電ランプにおいてあらかじめ定められた単位時間当たりの電力変化量と同じ電力変化量によって電力調整することを特徴とする請求項4に記載の照明装置。 The illuminance control unit adjusts the power with respect to a discharge lamp determined to require power adjustment among other discharge lamps by the same amount of power change as a predetermined power change amount per unit time in the main adjustment discharge lamp. The lighting device according to claim 4.
- 前記照度制御部が、前記複数の放電ランプに対して電力調整を一括で行うことを特徴とする請求項1に記載の照明装置。 The illumination device according to claim 1, wherein the illuminance control unit collectively adjusts power for the plurality of discharge lamps.
- 前記照度制御部が、露光待機中であって、露光期間よりも露光待機時間が長い場合、前記複数の放電ランプに対して電力調整を実行することを特徴とする請求項1に記載の照明装置。 2. The illumination device according to claim 1, wherein the illuminance control unit performs power adjustment on the plurality of discharge lamps when the exposure is on standby and the exposure standby time is longer than the exposure period. .
- 所定数の放電ランプを収納する光源ユニットを備え、
前記光源ユニットが、
各放電ランプの周囲に配置されるリフレクターと、
ユニットハウジングの放電ランプ反対側に配置されるファンと、
前記光源ユニット内に形成された隔壁に放電ランプを貫通させた状態で放電ランプを保持するランプ保持部とを有し、
前記ランプ保持部が、前記隔壁を間に挟んで形成される放電ランプ側空間とファン側空間とを連通させる通気口を有することを特徴とする請求項1に記載の照明装置。 A light source unit for storing a predetermined number of discharge lamps;
The light source unit is
A reflector arranged around each discharge lamp;
A fan disposed on the opposite side of the unit housing from the discharge lamp;
A lamp holding portion for holding the discharge lamp in a state where the discharge lamp is passed through the partition formed in the light source unit;
The lighting device according to claim 1, wherein the lamp holding portion has a vent hole that allows a discharge lamp side space and a fan side space formed with the partition wall interposed therebetween to communicate with each other. - 請求項1に記載された照明装置を備えたことを特徴とする露光装置。 An exposure apparatus comprising the illumination device according to claim 1.
- 露光装置を、
複数の放電ランプ各々から照射される照明光の照度を検出する照度検出手段と、
検出される各放電ランプの照度に基づいて、前記複数の放電ランプに対する入力電力を調整する照度制御手段として機能させるプログラムであって、
前記複数の放電ランプのうち、基準照度値に基づいて定められる許容閾値を超えた照度値をもつ放電ランプに対し、許容閾値と基準照度値との間に定められるロバスト閾値に向けて照度変化するよう電力調整するように、照度制御手段として機能させることを特徴とするプログラム。 Exposure equipment,
Illuminance detection means for detecting the illuminance of illumination light emitted from each of the plurality of discharge lamps;
A program that functions as illuminance control means for adjusting input power to the plurality of discharge lamps based on the illuminance of each detected discharge lamp,
Among the plurality of discharge lamps, with respect to a discharge lamp having an illuminance value exceeding an allowable threshold value determined based on a reference illuminance value, the illuminance changes toward a robust threshold value determined between the allowable threshold value and the reference illuminance value. A program characterized by functioning as illuminance control means so as to adjust power. - 複数の放電ランプ各々から照射される照明光の照度を検出し、
検出される各放電ランプの照度に基づいて、前記複数の放電ランプに対する入力電力を調整する照明方法であって、
前記複数の放電ランプのうち、基準照度値に基づいて定められる許容閾値を超えた照度値をもつ放電ランプに対し、許容閾値と基準照度値との間に定められるロバスト閾値に向けて照度変化するように電力調整することを特徴とする照明方法。
Detecting the illuminance of the illumination light emitted from each of the plurality of discharge lamps;
An illumination method for adjusting input power to the plurality of discharge lamps based on illuminance of each discharge lamp detected,
Among the plurality of discharge lamps, with respect to a discharge lamp having an illuminance value exceeding an allowable threshold value determined based on a reference illuminance value, the illuminance changes toward a robust threshold value defined between the allowable threshold value and the reference illuminance value. The lighting method is characterized by adjusting the power as described above.
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