WO2019039427A1

WO2019039427A1 - Light source device, exposure device, and determination method for light source device

Info

Publication number: WO2019039427A1
Application number: PCT/JP2018/030635
Authority: WO
Inventors: 池田　富彦; 弘一小谷; 哲也郷田
Original assignee: フェニックス電機株式会社
Priority date: 2017-08-23
Filing date: 2018-08-20
Publication date: 2019-02-28
Also published as: CN111033385A; TW201921141A; JPWO2019039427A1; KR20200043377A; TWI811234B; JP7141126B2; KR102537954B1; CN111033385B

Abstract

The present invention provides a light source device equipped with a determination circuit that quickly and inexpensively determines with high accuracy whether or not an electric-discharge lamp for use as a light source is an authentic product and whether the electric-discharge lamp is new or used in an exposure device used for exposing a printed circuit board or the like. A light source device 100 is constituted by an electric-discharge lamp 110 as a light source, a determination circuit 200, and a reflector container 151 to which the electric-discharge lamp 110 and the determination circuit 200 are attached. The determination circuit 200 is constituted by an incandescent lamp 210 for detecting whether or not the electric-discharge lamp 110 is an authentic product and a fuse 220 connected in series with the incandescent lamp 210 for determining whether or not the electric-discharge lamp 110 is new.

Description

Light source device, exposure apparatus, and determination method of light source device

According to the present invention, an exposure apparatus used for exposing a printed wiring board or the like includes a determination circuit for detecting whether a discharge lamp serving as a light source is a genuine product, and whether the discharge lamp is a new product or a used product. The present invention relates to a light source device, an exposure apparatus using the light source device, and a determination method of the light source device.

Conventionally, in order to mount components on an electronic device, a printed wiring board in which a wiring pattern is formed of a metal such as copper on a resin or glass epoxy substrate is used. Photo etching technology is used to form a wiring pattern on these printed wiring boards. In photoetching, a photoresist, which is a photosensitive agent, is coated on the entire surface of the substrate on which the metal layer to be the wiring is formed, and the irradiation light from the exposure device is irradiated through the same photomask as the wiring pattern. By doing.

As the photoresist, there are a negative photoresist in which the solubility of the photoresist is reduced by the irradiation light, and a positive photoresist in which the solubility of the photoresist is increased by the irradiation light. The photoresist portion whose solubility has been relatively increased by the irradiation light is chemically treated and removed, and when the exposed metal layer is removed by etching, only the metal layer under the portion where the photoresist remains remains, and the photoresist is removed. Thus, the wiring pattern is formed on the substrate. In the case of irradiating either positive or negative photoresist with irradiation light, stable irradiation of irradiation light for a constant time with uniform illuminance is necessary to ensure a uniform exposure over the entire irradiation surface. It is.

By the way, in the manufacture of a printed wiring board, one large-sized printed wiring board on which a plurality of circuits are formed for efficiency of the manufacturing process is manufactured, and the desired electronic device is obtained by dividing the board into individual circuits after completion of the board. It has been used for.

With the increase in size of printed wiring boards, exposure equipment manufacturers need to increase the size of the discharge lamp as a light source to obtain high illuminance, or as a light source for multiple lamps using a plurality of low-intensity small-sized discharge lamps. Trying to ensure a good illumination. For example, instead of using one light source of the 8 kW high-pressure discharge lamp, four light sources of the 2 kW high-pressure discharge lamp may be used. A low-intensity discharge lamp is superior to a high-intensity discharge lamp in terms of manufacturing difficulty and cost, and many exposure apparatuses having multiple light sources are sold.

However, with the increase in the number of light sources, the uniformity of a plurality of discharge lamps has become more important from the necessity of securing a uniform exposure amount. Therefore, in order to stabilize the performance of the exposure apparatus and manufacture a highly reliable printed wiring board, it is necessary to use only genuine discharge lamps manufactured by the same manufacturer and by the same method by the same manufacturer. There is a need for an apparatus and method for determining whether a discharge lamp is a genuine product.

Several methods are known for determining the discharge lamp and light source used in the optical apparatus as well as the exposure apparatus (see, for example, Patent Documents 1 to 3). For example, in the lamp abnormality detection device described in Patent Document 1, a predetermined voltage is supplied to an incandescent lamp using a filament such as a halogen lamp, and the current value when the filament is half-cut and the current value when the filament is normal To compare and detect an abnormal lamp. However, with this, although the lamp life can be detected, it is difficult to determine whether the lamp is a genuine product.

For example, in Patent Document 2, a circuit in which a resistor and a capacitor are connected in parallel to a light source such as an incandescent lamp or a fluorescent lamp is connected, and a time constant (resistance value and capacitance) when a predetermined voltage is supplied to both ends of the light source The product of the values is measured to detect whether the light source is an incandescent lamp or a fluorescent lamp. However, with this, although it is possible to detect a large difference in time constant (the time constant differs greatly between the incandescent lamp and the fluorescent lamp), it is difficult to determine whether or not it is a genuine product among the same incandescent lamps.

Further, for example, in Patent Document 3, it is supposed that a plurality of filaments enclosed in a bulb of the same incandescent lamp are irradiated with ultraviolet light, and a discharge start voltage between the filaments is measured to detect a defective product. However, although defective products can be detected with this, it is difficult to determine whether the lamp is a genuine product.

Japanese Examined Patent Publication 7-52677 Japanese Patent Publication No. 2010-527504 Japanese Patent Application Laid-Open No. 62-43059

In order to determine whether it is a genuine light source device or a similar light source device manufactured by another manufacturer, as in Patent Documents 1 and 3, whether the light source is defective or not, as in Patent Document 2 It is necessary to have a more accurate determination device than to identify whether or not different types of light sources. In addition, it is necessary to simultaneously solve the problems that the inspection time of the plurality of light sources does not greatly exceed the start-up time of the exposure apparatus and that the cost of the entire exposure apparatus is not significantly increased.

Furthermore, from the viewpoint of securing a uniform exposure amount, it is not preferable to mix and use a new and a second-hand product even with a genuine light source device from the same manufacturer. For this reason, there has been a demand for a light source device that can determine whether it is a used light source device that has been used even once.

The present invention has been made in view of the above-described problems, and an object of the present invention is to determine whether a discharge lamp serving as a light source is a genuine product or not, and an exposure apparatus used for exposing a printed wiring board or the like. It is an object of the present invention to provide a light source device provided with a determination circuit for identifying whether it is a used item or a second-hand product with high accuracy, short time and low cost, an exposure apparatus using the light source device, and a determination method thereof.

According to one aspect of the invention,
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The judgment circuit is connected in series to an incandescent lamp for detecting whether the discharge lamp is a genuine product and to the incandescent lamp for judging whether the discharge lamp is new. A light source device having a fuse is provided.

Also, according to another aspect of the present invention,
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The judgment circuit is connected in parallel to the incandescent lamp for detecting whether the discharge lamp is a genuine product and the incandescent lamp for judging whether the discharge lamp is new. A light source device having a fuse is provided.

Furthermore, according to another aspect of the present invention,
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The judgment circuit is connected in series to an incandescent lamp for detecting whether the discharge lamp is a genuine product and to the incandescent lamp for judging whether the discharge lamp is new. A light source device having a diode is provided.

Also, according to another aspect of the present invention,
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The judgment circuit is connected in parallel to the incandescent lamp for detecting whether the discharge lamp is a genuine product and the incandescent lamp for judging whether the discharge lamp is new. A light source device having a diode is provided.

Also, according to another aspect of the present invention,
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The determination circuit includes a sealed container having an airtight inner space, a filament disposed in the inner space, and a corrosive gas sealed in the inner space. A light source device is provided.

Preferably, the judgment circuit is accommodated in the reflector container.

Preferably, the fuse is a thermal fuse.

Preferably, the corrosive gas contains oxygen.

Also, according to another aspect of the present invention,
One or more of the above light source devices,
A frame for mounting the light source device toward the object to be irradiated;
A constant current power supply for supplying a current to the determination circuit;
A switch for turning on / off the current from the constant current source;
A control unit which turns on / off the switch to energize the determination circuit for a predetermined time;
A measurement unit that measures the voltage across the determination circuit at least twice during energization;
A comparison unit that compares the difference between the voltage across the first measurement and the voltage across the second measurement with a voltage range of a predetermined upper limit value and lower limit value that determines whether the discharge lamp is correct or not;
The signal from the comparison unit is received, and when the difference between the voltages at both ends is within a predetermined voltage range, it is determined that the discharge lamp to be inspected is a genuine product, and the difference between the voltages at both ends is outside the predetermined voltage range In this case, a determination unit that determines that the discharge lamp to be inspected is not a genuine product,
After determining whether the discharge lamp is a genuine product,
A second-use constant-current power supply for supplying current to the judgment circuit;
A used judgment switch for turning on / off the current from the second judgment constant current source;
A second determination control unit that turns on / off the second determination switch to energize the determination circuit;
A second-use determination measurement unit that measures the voltage across the determination circuit during energization;
A used determination unit that determines whether or not the discharge lamp is a used item based on whether or not the measured voltage across both ends is within a voltage range of predetermined upper limit value and lower limit value;
An exposure apparatus is provided that includes: a display unit that displays a determination result.

Energizing the determination circuit of the light source device for a predetermined time;
Measuring at least twice the voltage across the circuit for determination under energization;
Comparing the difference between the voltage across the first measurement and the voltage across the second measurement with a voltage range of predetermined upper and lower limits for determining whether the discharge lamp is correct or not;
When the difference between the voltages at both ends is within a predetermined voltage range, it is determined that the discharge lamp to be determined is a genuine product, and when the difference between the voltages at both ends is outside the predetermined voltage range, the discharge as an object to be determined It is determined that the light is not a genuine product,
Furthermore, after determining whether the discharge lamp is a genuine product,
Energize the judgment circuit,
Measuring the voltage across the circuit for judgment under energization;
When the measured voltage across both ends is within the voltage range of the predetermined upper limit value and lower limit value, it is determined that the discharge lamp to be determined is new, and when it is out of the voltage range of the predetermined upper limit value and lower limit value A method of determining a light source device, which determines that the target discharge lamp is a second-hand product.

According to the present invention, in an exposure apparatus used for exposing a printed wiring board etc., it is determined whether a discharge lamp serving as a light source is a genuine product, and whether it is a new product or a used product with high accuracy, short time and low cost. It has been possible to provide a light source device provided with a determination circuit for identifying the light source, an exposure apparatus using the light source device, and a determination method therefor.

It is a figure showing an example of exposure machine 10 to which the present invention was applied. It is a figure which shows an example of the exposure apparatus 50 to which this invention was applied. It is a top view which shows an example of the exposure apparatus 50 to which this invention was applied. It is sectional drawing which shows an example of the light source device 100 to which this invention was applied. FIG. 2 is a cross-sectional view showing an example of a discharge lamp 110. It is a figure which shows an example of the determination apparatus 57 to which this invention was applied. It is sectional drawing which shows an example of the light source device 100 which concerns on the modification 1 to which this invention was applied. It is sectional drawing which shows an example of the light source device 100 which concerns on the modification 2 to which this invention was applied. It is sectional drawing which shows an example of the light source device 100 which concerns on the modification 3 to which this invention was applied. It is sectional drawing which shows an example of the light source device 100 which concerns on the modification 4 to which this invention was applied. FIG. 14 is a cross-sectional view showing another embodiment regarding the arrangement position of the determination circuit 200. FIG. 14 is a cross-sectional view showing another embodiment regarding the arrangement position of the determination circuit 200.

Example 1
(Configuration of exposure machine 10)
FIG. 1 shows an exposure apparatus 10 according to a first embodiment to which the present invention is applied. The exposure apparatus 10 is generally configured by an exposure device 50, an integrator 12, a concave mirror 14, and an irradiation surface 16.

The exposure apparatus 50 emits light including a wavelength suitable for the exposure of the exposure object X. The details of the exposure apparatus 50 will be described after the configuration of the exposure apparatus 10 is described.

The integrator 12 has an incident surface 18 for receiving the light from the exposure device 50, and an emission surface 20 for emitting the light after improving the uniformity of the received light. A plurality of fly's eye lenses 21 are formed on the entrance surface 18 and the exit surface 20, respectively.

The concave mirror 14 has a reflective concave surface 22 inside thereof. The concave mirror 14 reflects the light emitted from the integrator 12 by the reflecting concave surface 22 into parallel light.

The irradiation surface 16 is light that receives parallel light from the concave mirror 14 and is disposed in a direction substantially orthogonal to the parallel light. An exposure object X is placed on the irradiation surface 16. For example, a photosensitizer is applied to the surface of the exposure object X. A desired circuit pattern or the like is formed on the surface of the exposure object X by the parallel light from the concave mirror 14 irradiating a desired region of the exposure object X.

(Configuration of Exposure Device 50)
FIG. 2 is a view showing an exposure apparatus 50 according to the first embodiment to which the present invention is applied. FIG. 3 is a plan view of the exposure apparatus 50. As shown in FIG. The exposure device 50 includes a plurality of light source devices 100, a frame 52, a lighting circuit 54, a switch 55, a constant current power supply 56, a judging device 57, a used current judging power supply 76, and a used judgment switch 78. And have. The switch 55 and the used determination switch 78, and the constant current power supply 56 and the used determination constant current power supply 76 may be set such that physically the same ones share functions, or they are physically different. You may prepare another one for

The light source device 100 emits light including a wavelength suitable for the exposure of the exposure object X. As shown in FIG. 4, the light source device 100 is generally configured of a discharge lamp 110, a reflector 150, an insulating base 170, and a determination circuit 200. The reflector 150 and the insulating base 170 may be collectively described as a reflector container 151.

As shown in FIG. 5, the discharge lamp 110 has a light emitting tube portion 112 and a pair of seal portions 114 extending from the light emitting tube portion 112. The light emitting tube portion 112 and the pair of seal portions 114 are integrally formed of quartz glass. Furthermore, an internal space 116 sealed by a seal portion 114 is formed in the light emitting tube portion 112.

In each seal portion 114 of the discharge lamp 110, a buried foil 118 made of molybdenum and one end connected to one end of the foil 118 and the other end made of tungsten disposed in the internal space 116 A pair of electrodes 120 and a pair of lead rods 122 each having one end connected to the other end of the foil 118 and the other end extending from the seal portion 114 to the outside are provided. In the inner space 116, predetermined amounts of mercury 124 and halogen (for example, bromine) are enclosed.

When a predetermined high voltage is applied to the pair of lead rods 122 provided in the discharge lamp 110, the glow discharge initiated between the pair of electrodes 120 provided in the internal space 116 of the arc tube portion 112 shifts to arc discharge, Light (mainly ultraviolet light) is emitted by the mercury 124 that is evaporated and excited by the arc.

Returning to FIG. 4, in the light source device 100 according to the present embodiment, one seal portion 114 is inserted into the seal portion insertion hole 156 of the reflector 150. The discharge lamp 110 may be for alternating current lighting or direct current lighting.

The reflector 150 has a bowl-shaped reflective surface 152 on its inner surface. The reflecting surface 152 reflects part of the light from the discharge lamp 110 disposed so that the light emitting tube 112 is positioned inside the reflector 150. In the present embodiment, the reflecting surface 152 is defined by a paraboloid of revolution. Further, the light emitting point in the discharge lamp 110 (generally, the central position of the arc formed between the pair of electrodes 120 in the internal space 116) coincides with the focal point of the paraboloid of revolution. Thus, the light emitted from the light emitting point of the discharge lamp 110 and reflected by the reflection surface 152 is substantially parallel light from the opening 154 of the reflector 150. Of course, the shape of the reflecting surface 152 is not limited to this, and may be a shape of an ellipsoid of revolution, another rotating surface, or a surface other than the rotating surface. Further, it is not essential to make the light emitting point coincide with the focal point, and the light emitting point may be shifted from the focal point if necessary.

In addition, a bottom neck portion 155 is provided to project from the side opposite to the opening 154 in the reflector 150. Furthermore, on the reflection surface 152 of the reflector 150, a seal portion insertion hole 156 in which one seal portion 114 of the discharge lamp 110 is inserted is formed. The seal portion insertion hole 156 is formed from the bottom of the reflective surface 152 to the tip of the bottom neck 155.

As shown in FIG. 1, by combining the reflector 150 with the discharge lamp 110, the light emitted from the discharge lamp 110 has a predetermined angle (opening angle) centered on the light traveling along the central axis CL of the reflecting surface 152. In the front of the reflector 150.

Returning to FIG. 4, the insulating base 170 is formed of an electrical insulator such as ceramic, and one seal portion of the discharge lamp 110 inserted in the bottom and neck portion 155 of the reflector 150 and the seal portion insertion hole 156 A reflector insertion hole 172 is formed in which 114 is inserted. By inserting the bottom and neck portion 155 and the seal portion 114 into the reflector insertion hole 172, the insulating base 170 covers the seal portion insertion hole 156 from the outside.

Further, an inner space 174 communicating with the above-described reflector insertion hole 172 is formed in the insulating base 170, and the power cable insertion hole through which the inner cable 174 and the outside communicate with each other and the power cable A is inserted. 176 are formed.

Further, the insulating base 170 and the discharge lamp 110 (in the case of the present embodiment, the judgment circuit 200) are fixed to each other by the inorganic adhesive C having electrical insulation and high thermal conductivity. Specifically, the end of the bottom neck 155 of the reflector 150 and one seal portion 114 of the discharge lamp 110 are inserted into the reflector insertion hole 172 of the insulating base 170, and the inner space 174 of the insulating base 170 is further inserted. In the state where the circuit 200 for determination and the power supply cable A are disposed, the inner space 174 is filled with the inorganic adhesive C.

In the case of the present embodiment, the determination circuit 200 includes an incandescent lamp 210 and a fuse 220. The fuse 220 is a component connected in series to the incandescent lamp 210. In the case of the present embodiment, the capacity of the fuse 220 does not break when a constant current for determining whether the discharge lamp 110 is a genuine product flows as described later, and after the genuine product determination, It is set so as to be disconnected when a current larger than the constant current flows by the fuse disconnection operating unit 67. Instead of this, a fuse 220 which is broken by heat from the discharge lamp 110 during lighting, that is, a "thermal fuse" may be used.

Returning to FIG. 3, the frame 52 is a substantially rectangular parallelepiped member in which a plurality of recesses 58 to which the plurality of light source devices 100 are attached are formed.

Referring back to FIG. 2, the lighting circuit 54 is a circuit that supplies necessary power to the discharge lamp 110 of each light source device 100 attached to the frame 52. The constant current power supply 56 and the second-judgment constant current power supply 76 are power supplies for supplying a DC constant current to the judgment circuit 200 of each light source device 100, and the switch 55 and the second-judgement switch 78 are judgment circuits 200. Turn on / off the DC constant current supplied to the The constant current for determination may be alternating current.

The determination device 57 is a device for determining whether each light source device 100 (discharge lamp 110) is a genuine product, and whether each light source device 100 (discharge lamp 110) is new or used. As generally shown, the control unit 60, the measurement unit 62, the comparison unit 64, the determination unit 66, the fuse disconnection operation unit 67, the second-use determination control unit 68, and the second-use determination measurement unit 70; It has the used judgment part 72. The control unit 60 and the second-use determination control unit 68, the measurement unit 62 and the second-use determination measurement unit 70, and the determination unit 66 and the second-use determination unit 72 are set such that the physically same ones share functions. You may prepare and you may prepare another thing, respectively.

The control unit 60 has a function of operating the switch 55 to turn on / off the current supplied from the constant current power supply 56 to the determination circuit 200.

The measuring unit 62 has a function of measuring the voltage across the determination circuit 200. In the case of the present embodiment, the measuring unit 62 measures the voltage across the determination circuit 200 during energization at least twice.

The comparison unit 64 determines whether the discharge lamp 110 is a genuine product or not, and the difference between the voltage at the first measurement of the determination circuit 200 measured by the measurement unit 62 and the voltage at the second measurement. The voltage range of the predetermined upper limit value and the lower limit value is compared. The voltage distribution ranges of a plurality of incandescent lamps for detecting a genuine product, which are measured under predetermined conditions, are recorded in the comparison section 64 in advance, and the comparison section 64 transmits the signal of the comparison result to the determination section 66. .

The determination unit 66 receives the signal of the result transmitted from the comparison unit 64, and determines that the discharge lamp 110 to be inspected is a genuine product if the voltage difference between both ends is within a predetermined voltage range, conversely, If the difference between the voltages at both ends is outside the predetermined voltage range, it is determined that the discharge lamp 110 to be inspected is not a genuine product.

After the determination unit 66 determines whether the discharge lamp 110 is a genuine product, the fuse breaking operation unit 67 applies a current larger than a constant current for determining a genuine product to the determination circuit 200. As a result, the fuse 220 is disconnected, the determination circuit 200 is opened, and the both-ends resistance value of the determination circuit 200 becomes infinite.

The second-use determination control unit 68 operates the second-use determination switch 78 after the operation by the fuse disconnection operation unit 67 to turn on / off the current supplied from the second-use determination constant current power supply 76 to the determination circuit 200. It has a function.

The second-use determination measurement unit 70 has a function of measuring the voltage across the determination circuit 200 during energization.

The used judgment unit 72 has a function of judging whether the discharge lamp 110 is new or used according to whether or not the both-ends voltage measured by the used judgment measurement unit 70 is within the voltage range of predetermined upper limit and lower limit. Have. That is, when the both-ends voltage measured by the second-hand determination measurement unit 70 is within the voltage range of the predetermined upper limit value and the lower limit value, the second-hand determination unit 72 determines that the discharge lamp 110 is new. Conversely, when the both-ends voltage measured by the second-hand determination measurement unit 70 is outside the voltage range of the predetermined upper limit value and lower limit value, the second-hand determination unit 72 determines that the discharge lamp 110 is a second-hand product.

(Operation of exposure apparatus 50)
When the power switch (not shown) of the exposure device 50 is turned on, the lighting circuit 54 supplies power to the discharge lamps 110 in all the light source devices 100 attached to the frame 52. Usually, several minutes are required for the discharge lamp 110 to fully rise.

For example, immediately after the power switch of the exposure apparatus 50 is turned on, the control unit 60 of the determination apparatus 57 turns on the switch 55 connected to the determination circuit 200 of any one light source apparatus 100 attached to the frame 52; The constant current source 56 supplies a constant current to the determination circuit 200. Of course, the timing at which the determination device 57 operates is not limited to this.

Immediately after the switch 55 is turned on for the first time, the measurement unit 62 measures the voltage across the determination circuit 200, and sends the result (first time) to the comparison unit 64. Next, a constant current is supplied again to the same determination circuit 200 after a predetermined time (for example, after 10 seconds) from the first measurement, and the measurement unit 62 measures the voltage across the determination circuit 200. The result (second time) is sent to the comparison unit 64.

The comparison unit 64 that has received the two-end voltage measurement result sends a determination signal indicating whether the difference between the two measurement voltages is within the voltage difference range recorded in advance to the determination unit 66. If the difference between the voltages at both ends is within the predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product, and conversely, if the difference between the voltages at both ends is outside the predetermined voltage range, The determination unit 66 determines that the discharge lamp 110 to be inspected is not a genuine product.

Generally, the incandescent lamp 210 tends to increase in resistance for a while (several seconds) after the current is supplied due to the characteristics of the filament contained therein. Therefore, when the light source device 100 is a genuine product, the voltage (for example, 8.5 V) of the circuit for determination 200 measured at the second time is larger than the voltage (for example, 2.0 V) measured at the first time Become. On the contrary, when it is not a genuine product, the second measurement result is the same as or almost the same as the first measurement result. Thereby, it is possible to determine whether the light source device 100 (discharge lamp 110) is a genuine product by the determination method described above. In addition, you may determine whether it is a genuine product by measuring the both-ends voltage only at the timing of the 2nd measurement mentioned above. In this case, whether or not the product is a genuine product is determined based on whether or not the measured value of the voltage at both ends is within a predetermined voltage range.

After the genuine product determination in the first light source device 100 is completed, the control unit 60 starts supply of constant current to the determination circuit 200 in the other light source device 100. Thereafter, the genuine product determination is performed in the same manner as in the first case described above, and the same determination is repeated until the determination of all the light source devices 100 is completed or until the inspection of the light source device 100 within a predetermined range is completed.

After the required genuine product determination is completed, the fuse break operating unit 67 in the determination device 57 supplies a current (for example, 30 V, 1.4 A) larger than the constant current for the genuine product determination to the determination circuit 200. . As a result, the fuse 220 is disconnected, the determination circuit 200 is opened, and the both-ends resistance value of the determination circuit 200 becomes infinite.

After that, the second-hand judgment control unit 68 in the judgment device 57 turns on the second-hand judgment switch 78 connected to the judgment circuit 200 in any one of the light source devices 100, and A constant current is supplied to the determination circuit 200. Immediately after the second determination switch 78 is turned on, the second determination measuring unit 70 measures the voltage across the determination circuit 200, and sends the result to the second determination unit 72.

The used determination unit 72 determines whether the discharge lamp 110 is new or used based on whether the measured voltage is within the voltage range of predetermined upper and lower limits.

In the case of the present embodiment, when the both-ends voltage measured by the second-hand determination measurement unit 70 is within the voltage range of the predetermined upper limit value and lower limit value, the second-hand determination unit 72 determines that the discharge lamp 110 is new. Conversely, when the both-ends voltage measured by the second-hand determination measurement unit 70 is outside the voltage range of the predetermined upper limit value and lower limit value, the second-hand determination unit 72 determines that the discharge lamp 110 is a second-hand product. When the light source device 100 is a genuine product and has been used even once (= used product), the fuse 220 in the determination circuit 200 is already disconnected by the fuse disconnection operating unit 67 as described above. Because of this, the determination circuit 200 is in the open (resistance value = infinity) state. Therefore, the maximum voltage of the second-use determination constant current power supply 76 is applied to the both-end voltage of the determination circuit 200. By setting the predetermined upper limit value to be smaller than the “maximum voltage of the second-use determination constant current power supply 76”, the second-use determination measurement unit 70 can determine the second-hand product for which the determination circuit 200 is open.

Up to this point, an example has been described in which second-hand product determination is started after performing genuine product determination on all the light source devices 100 attached to the exposure device 50. However, genuine product determination for one light source device 100 And after the second-hand product judgment is continuously performed, the genuine product judgment and the second-hand product judgment may be continued to the other light source devices 100 as well. Of course, a plurality of light source devices 100 may be grouped together to make a genuine product determination, and after that, a second-hand product determination may be made. This is the same in the following modifications. Furthermore, after performing the genuine product determination, the used product determination may be performed after about 2000 hours of use.

(Features of exposure device 50)
According to the present embodiment, the circuit 200 is provided with the determination circuit 200 for identifying whether the discharge lamp 110 serving as the light source is a genuine product, and whether it is a new product or a second-hand product with high accuracy, short time, and low cost. It is possible to provide the light source device 100, the exposure device 50 using the light source device 100, and the determination method thereof.

(Modification 1)
In the determination circuit 200 of the light source device 100 in the above-described embodiment, the fuse 220 is connected in series to the incandescent lamp 210, but as shown in FIG. 7, the fuse 220 is connected in parallel to the incandescent lamp 210. You may connect to

In this case, the genuine product determination of the light source device 100 is as follows. That is, after the control unit 60 operates the switch 55 to supply power from the constant current power supply 56 to the determination circuit 200, the measurement unit 62 measures the voltage across the determination circuit 200. At this time, since the current mainly flows through the fuse 220 in the case of a regular product, the voltage across the both ends is sufficiently small (for example, about 0.4 V).

Thereafter, the fuse break operating unit 67 is operated to flow a large current and voltage (for example, 30 V, 1.4 A) to the determination circuit 200 (mainly a fuse). As a result, the fuse 220 is disconnected, and the determination circuit 200 is substantially only the incandescent lamp 210. Of course, as in the first embodiment described above, the fuse 220 may be disconnected by the heat from the discharge lamp 110 being lit.

Next, the switch 55 is turned on again by the control unit 60, and a constant current is supplied from the constant current power supply 56 to the determination circuit 200. Immediately after the switch 55 is turned on for the first time, the measurement unit 62 measures the voltage across the determination circuit 200, and sends the result (first time) to the comparison unit 64. Next, a constant current is supplied again to the same determination circuit 200 after a predetermined time (for example, after 10 seconds) from the first measurement, and the measurement unit 62 measures the voltage across the determination circuit 200. The result (second time) is sent to the comparison unit 64.

The comparison unit 64 that has received the two-end voltage measurement result sends a determination signal indicating whether the difference between the two measurement voltages is within the voltage difference range recorded in advance to the determination unit 66. If the difference between the voltages at both ends is within the predetermined voltage range, the determination unit 66 determines that the discharge lamp 110 to be inspected is a genuine product, and conversely, if the difference between the voltages at both ends is outside the predetermined voltage range, The determination unit 66 determines that the discharge lamp 110 to be inspected is not a genuine product. The constant current for determination may be direct current or alternating current. In addition, it may be determined whether the product is a genuine product by measuring the voltage at both ends only at the timing of the second measurement described above. In this case, whether or not the product is a genuine product is determined based on whether or not the measured value of the voltage at both ends is within a predetermined voltage range.

The second-hand product judgment is as follows. That is, the second-use determination control unit 68 turns on the second-use determination switch 78 to supply a constant current from the second-use determination current source 76 to the determination circuit 200. Immediately after the second-use determination switch 78 is turned on for the first time, the second-use determination measurement unit 70 measures the voltage across the determination circuit 200, and sends the result (first time) to the second-use determination comparison unit 71. Next, constant current is supplied again to the same determination circuit 200 after a predetermined time (for example, after 10 seconds) from the first measurement, and the second determination measurement unit 70 measures the voltage across the determination circuit 200. The result (second time) is sent to the used judgment comparison section 71.

The second-hand determination comparator 71 that has received the two-end voltage measurement result sends a signal indicating whether the difference between the two measured voltages is within the voltage difference range recorded in advance to the second-hand determination unit 72. When the difference between both ends of the voltage is within the predetermined voltage range, the used determination unit 72 determines that the discharge lamp 110 to be inspected is a used item, and conversely, the difference between the both ends of the voltage is outside the predetermined voltage range The used determination unit 72 determines that the discharge lamp 110 to be inspected is new. The reason is the same as that described in the genuine product determination in the first embodiment.

When the light source device 100 is a brand new product, since the fuse 220 in the determination circuit 200 is connected in parallel to the incandescent lamp 210 as described above, the voltage across the determination circuit 200 is measured several times But it will be almost zero. As a result, the difference between the first and second measured values of the voltage between the first and second times is out of the predetermined voltage range (approximately the same = the difference is zero), so the determination circuit 200 is substantially only the incandescent lamp 210. The second-hand product can be determined by the second-use determination measurement unit 70. The constant current for determination may be direct current or alternating current. Alternatively, it may be determined whether the product is a new product or a used product by measuring the voltage at both ends only at the timing of the second measurement described above. In this case, whether the measured value of the voltage at both ends is within a predetermined voltage range (almost zero) or not is determined whether it is a new product or a used product.

(Modification 2)
The determination circuit 200 of the light source device 100 in the above-described embodiment is configured of the incandescent lamp 210 and the fuse 220, but as shown in FIG. It may be connected in series.

In this case, the regular product determination of the light source device 100 is the same as that of the first embodiment (note that the current supplied from the constant current power supply 56 to the determination circuit 200 is direct current of the diode 230 in the forward direction). The description of the genuine product determination procedure of the first embodiment is omitted.

Next, in the second modification, a reverse voltage application unit 80 is used in place of the fuse disconnection operation unit 67 in the first embodiment. The reverse voltage application unit 80 has a function of applying a reverse voltage (direct current) to the extent that the diode 230 is damaged to the diode 230 (determination circuit 200). After the genuine product determination of the light source device 100 is completed, the reverse voltage application unit 80 is operated to damage the diode 230 with a reverse voltage. As a result, the diode 230 internally short-circuits and loses its function, and the determination circuit 200 becomes the same as that configured only with the incandescent lamp 210.

As described above, when the light source device 100 is a regular product, the determination circuit 200 after the reverse voltage application unit 80 is activated is the same as that configured with only the incandescent lamp 210, and thus the light source according to the second modification. The second-hand product determination of the apparatus 100 is basically performed in the same manner as that described in the first modification. The direct current constant current supplied from the used constant current power supply 76 to the determination circuit 200 needs to flow in the reverse direction of the diode 230 in the normal case.

(Modification 3)
Also, as shown in FIG. 9, the diode 230 may be connected in parallel to the incandescent lamp 210. In this case, the regular product determination of the light source device 100 is the same as that of the first embodiment (note that the current supplied from the constant current power supply 56 to the determination circuit 200 is direct current in the reverse direction of the diode 230). The description of the genuine product determination procedure of the first embodiment is omitted.

After confirming that the light source device 100 is a regular product, a large reverse voltage (direct current) is applied to the diode 230 by the reverse voltage application unit 80, and the diode 230 internally shorts and loses its function, The circuit 200 is shorted.

After that, the second-use determination control unit 68 in the determination device 57 turns on the second-use determination switch 78 to supply a constant current from the second-use determination current source 76 to the determination circuit 200 (however, the second-use determination). Note that the current flowing from the constant current power supply 76 to the determination circuit 200 is direct current in the reverse direction of the diode 230). Immediately after the second determination switch 78 is turned on, the second determination measuring unit 70 measures the voltage across the determination circuit 200, and sends the result to the second determination unit 72.

The used determination unit 72 determines whether the discharge lamp 110 is new or used based on whether the measured voltage is within the voltage range of predetermined upper and lower limits. In the case of the present embodiment, when the both-ends voltage measured by the second-hand determination measurement unit 70 is within the voltage range of the predetermined upper limit value and lower limit value, the second-hand determination unit 72 determines that the discharge lamp 110 is new. Conversely, when the both-ends voltage measured by the second-hand determination measurement unit 70 is outside the voltage range of the predetermined upper limit value and lower limit value, the second-hand determination unit 72 determines that the discharge lamp 110 is a second-hand product.

When the light source device 100 is a genuine product, as described above, the diode 230 in the determination circuit 200 is already shorted by the reverse voltage application unit 80, so the determination circuit 200 is shorted (resistance value is very small ) Is in the state. Therefore, in the case of a second-hand product, the voltage across the determination circuit 200 is 1 V or less. If the light source device 100 is new, the current flows only through the incandescent lamp 210 because the diode 230 does not lose its function and no current flows in the opposite direction. That is, since the determination circuit 200 is in the same state as only the incandescent lamp 210, the voltage across the determination circuit 200 becomes larger than 1 V (for example, 2.0 V to 8.5 V). Thereby, second-hand determination of the light source device 100 can be performed.

(Modification 4)
Furthermore, as shown in FIG. 10, for determination using a sealed container 242 having an airtight internal space 240, a filament 244 disposed in the internal space 240, and a corrosive gas 246 enclosed in the internal space 240. The circuit 200 may be configured. As the corrosive gas 246, air containing oxygen is preferable in terms of availability and the like, but an excessive amount of halogen (eg, fluorine, chlorine, iodine, bromine) may be sealed.

In contrast to the corrosive gas which corrodes (burns) the filament in a general incandescent lamp envelope, there is not an enclosed but an appropriate amount of halogen which prevents the filament from burning out. Although the determination circuit 200 used in the fourth modification has a configuration close to a general incandescent lamp, the corrosive gas 246 is enclosed in the inner space 240 of the sealed container 242. It is different.

Therefore, when the filament 244 is energized, the filament 244 exhibits the same resistance value behavior as a general incandescent lamp for a predetermined time, and the corrosive gas 246 causes the filament 244 to burn out after the predetermined time passes. It has become. When the filament 244 burns out, the determination circuit 200 of the present modification 4 is in an open (resistance value = infinity) state.

Therefore, since the method of the genuine product determination of the light source device 100 performed until the filament 244 burns out is the same as that of the first embodiment, the procedure of the genuine product determination of the first embodiment is used and the description is omitted.

Next, in the fourth modification, the function of causing disconnection intentionally such as the fuse disconnection operation unit 67 and the reverse voltage application unit 80 described above or breaking the diode 230 is not essential. In the regular product determination, when the control unit 60 turns on the switch 55 and the constant current power supply 56 continues to supply the constant current to the determination circuit 200 and the predetermined time elapses, the filament 244 burns out as described above. This is because the determination circuit 200 is in an open (resistance value = infinity) state.

Thus, after the filament 244 burns out, the second-hand product determination of the light source device 100 is performed. Since the second-hand product determination method is the same as that of the first embodiment, the second-hand product determination procedure of the first embodiment is The description is omitted.

(Modification 5)
In the embodiment and the modification described above, the determination circuit 200 is accommodated in the reflector container 151, but the arrangement position of the determination circuit 200 is not limited to this. For example, the outside of the reflector container 151 It may be disposed laterally (FIG. 11), or may be disposed on the outside (rear side) of the reflector 150 (FIG. 12).

It should be understood that the embodiments disclosed herein are illustrative and non-restrictive in every respect. The scope of the present invention is indicated not by the above description but by the claims, and is intended to include all modifications within the meaning and scope equivalent to the claims.

DESCRIPTION OF SYMBOLS 10 ... Exposure machine, 12 ... Integrator, 14 ... Concave mirror, 16 ... Irradiation surface 50 ... Exposure apparatus, 52 ... Frame, 54 ... Lighting circuit, 55 ... Switch, 56 ... Constant current power supply, 57 ... Judgment apparatus, 58 ... Recess , 60: control unit, 62: measurement unit, 64: comparison unit, 66: determination unit, 67: fuse disconnection operation unit, 68: control unit for used determination, 70: measurement unit for used determination, 71: comparison for used determination Part, 72: Used judgment unit, 76: Constant current power supply for used judgment, 78: Switch for used judgment 80: Reverse voltage application unit 100: Light source device 110: Discharge lamp, 112: Light emitting tube part, 114: Seal part, 116 ... internal space, 118 ... foil, 120 ... electrode, 122 ... lead rod, 124 ... mercury 150 ... reflector, 151 ... reflector container, 152 ... reflective surface, 154 ... opening, 155 ... bottom neck, 156 ... seal portion Hole 170: Insulating base, 172: Reflector insertion hole, 174: Inner space, 176: Power cable insertion hole 200: Circuit for judgment 210: Incandescent light 220: Fuse 230: Diode 240: Internal space, 242: Sealed container, 244: Filament, 246: Corrosive gas

Claims

A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The judgment circuit is connected in series to an incandescent lamp for detecting whether the discharge lamp is a genuine product and to the incandescent lamp for judging whether the discharge lamp is new. A light source device having a fuse.
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The judgment circuit is connected in parallel to the incandescent lamp for detecting whether the discharge lamp is a genuine product and the incandescent lamp for judging whether the discharge lamp is new. A light source device having a fuse.
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The judgment circuit is connected in series to an incandescent lamp for detecting whether the discharge lamp is a genuine product and to the incandescent lamp for judging whether the discharge lamp is new. A light source device having a diode.
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The judgment circuit is connected in parallel to the incandescent lamp for detecting whether the discharge lamp is a genuine product and the incandescent lamp for judging whether the discharge lamp is new. A light source device having a diode.
A discharge lamp to be a light source,
A determination circuit,
A light source device comprising: a reflector container to which the discharge lamp and the determination circuit are attached,
The determination circuit includes a sealed container having an airtight inner space, a filament disposed in the inner space, and a corrosive gas sealed in the inner space. Light source device.
The light source device according to any one of claims 1 to 5, wherein the determination circuit is accommodated in the reflector container.
The light source device according to claim 1, wherein the fuse is a thermal fuse.
The light source device according to claim 5, wherein the corrosive gas contains oxygen.
A light source device according to claim 1;
A frame for mounting the light source device toward the object to be irradiated;
A constant current power supply for supplying a current to the determination circuit;
A switch for turning on / off the current from the constant current source;
A control unit which turns on / off the switch to energize the determination circuit for a predetermined time;
A measurement unit that measures the voltage across the determination circuit at least twice during energization;
A comparison unit that compares the difference between the voltage across the first measurement and the voltage across the second measurement with a voltage range of a predetermined upper limit value and lower limit value that determines whether the discharge lamp is correct or not;
The signal from the comparison unit is received, and when the difference between the voltages at both ends is within a predetermined voltage range, it is determined that the discharge lamp to be inspected is a genuine product, and the difference between the voltages at both ends is outside the predetermined voltage range In this case, a determination unit that determines that the discharge lamp to be inspected is not a genuine product,
After determining whether the discharge lamp is a genuine product,
A second-use constant-current power supply for supplying current to the judgment circuit;
A used judgment switch for turning on / off the current from the second judgment constant current source;
A second determination control unit that turns on / off the second determination switch to energize the determination circuit;
A second-use determination measurement unit that measures the voltage across the determination circuit during energization;
An exposure apparatus comprising: a used determination unit that determines whether the discharge lamp is new or used according to whether or not the measured voltage across both ends is within a voltage range of predetermined upper limit value and lower limit value.
A current is supplied to the judgment circuit of the light source device according to claim 1 for a predetermined time,
Measuring at least twice the voltage across the circuit for determination under energization;
Comparing the difference between the voltage across the first measurement and the voltage across the second measurement with a voltage range of predetermined upper and lower limits for determining whether the discharge lamp is correct or not;
When the difference between the voltages at both ends is within a predetermined voltage range, it is determined that the discharge lamp to be determined is a genuine product, and when the difference between the voltages at both ends is outside the predetermined voltage range, the discharge as an object to be determined It is determined that the light is not a genuine product,
Furthermore, after determining whether the discharge lamp is a genuine product,
Energize the judgment circuit,
Measuring the voltage across the circuit for judgment under energization;
When the measured voltage across both ends is within the voltage range of the predetermined upper limit value and lower limit value, it is determined that the discharge lamp to be determined is new, and when it is out of the voltage range of the predetermined upper limit value and lower limit value A method of determining a light source device, which determines that the target discharge lamp is a second-hand product.