CN107478976B - Light source device - Google Patents
Light source device Download PDFInfo
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- CN107478976B CN107478976B CN201710673011.XA CN201710673011A CN107478976B CN 107478976 B CN107478976 B CN 107478976B CN 201710673011 A CN201710673011 A CN 201710673011A CN 107478976 B CN107478976 B CN 107478976B
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- lamp
- incandescent lamp
- discharge lamp
- incandescent
- voltage
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
- H05B47/20—Responsive to malfunctions or to light source life; for protection
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/24—Testing of discharge tubes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/7065—Defects, e.g. optical inspection of patterned layer for defects
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Circuit Arrangement For Electric Light Sources In General (AREA)
Abstract
The present invention relates to a light source device. The light source device includes a discharge lamp serving as a light source, an incandescent lamp for detecting whether the discharge lamp is a genuine product, and a reflector vessel in which the discharge lamp and the incandescent lamp are mounted, wherein the incandescent lamp is turned on during the turning on of the discharge lamp, and whether the discharge lamp is a genuine product is determined by detecting whether the voltage of the incandescent lamp is within a voltage range of a predetermined upper limit value and a predetermined lower limit value.
Description
The present application is a divisional application of an invention patent application having an application number of 201610225945.2, an application date of 2016, 4 and 13, and an invention name of "exposure apparatus and inspection method thereof".
Technical Field
The present invention relates to an exposure apparatus for exposing a printed circuit board or the like, which includes an incandescent lamp for detecting whether or not a discharge lamp as a light source is genuine, and an inspection method thereof.
Background
Conventionally, printed wiring boards in which wiring patterns are formed of a metal such as copper on a substrate made of resin or glass epoxy have been used for mounting components on electronic devices. Photolithography is used to form wiring patterns on these printed wiring boards. The entire surface of a substrate on which a metal layer to be a wiring is formed is coated with a photoresist as a photosensitive agent, and the photoresist is irradiated with irradiation light from an exposure device through a photomask similar to the wiring pattern. Among the photoresists, there are a negative type photoresist in which the solubility of the photoresist is reduced by irradiation light and a positive type photoresist in which the solubility of the photoresist is increased by irradiation light. When a photoresist portion, the solubility of which is relatively increased by irradiation with light, is removed by chemical treatment and the exposed metal layer is removed by etching, only the metal layer located under the portion where the photoresist remains is left, and the photoresist is removed, thereby forming a wiring pattern on the substrate. When irradiation light is irradiated to a positive or negative photoresist, stable irradiation light must be irradiated for a fixed time with uniform illuminance in order to ensure a uniform exposure amount over the entire surface of the irradiated surface.
On the other hand, printed wiring boards are used in desired electronic devices, because they are made larger in size for the purpose of increasing the efficiency of the manufacturing process, and are made smaller by being divided after the completion of the board. With the increase in size of printed wiring boards, manufacturers of exposure apparatuses are trying to increase the size of discharge lamps as light sources to a high illuminance or to ensure uniform exposure as light sources for a plurality of lamps using a plurality of small discharge lamps with low illuminance. For example, instead of using 1 light source of 8kW high-pressure discharge lamps, 4 light sources of 2kW high-pressure discharge lamps are used. Low-intensity discharge lamps are superior to high-intensity discharge lamps in terms of manufacturing difficulty and manufacturing cost, and a large number of exposure apparatuses having a multi-lamp light source are sold.
However, as the number of light sources increases, the uniformity of the plurality of discharge lamps becomes more important because of the necessity of ensuring a uniform exposure amount. Therefore, in order to stabilize the performance of the exposure apparatus and manufacture a highly reliable printed wiring board, it is necessary to use only a discharge lamp that is a genuine product manufactured by the same manufacturer from the same material and by the same process, and an apparatus and an inspection method for identifying whether or not the discharge lamp is a genuine product are required.
There are known several methods for identifying a discharge lamp or a light source used in an optical apparatus without being limited to an exposure apparatus (see, for example, japanese patent publication No. 7-52677 (patent document 1), japanese patent application publication No. 2010-527504 (patent document 2), and japanese patent application publication No. 62-43059 (patent document 3)). For example, in the lamp abnormality detection device described in patent document 1, a predetermined voltage is supplied to an incandescent lamp using a filament, such as a halogen lamp, and a current value in a filament half-cut state and a current value in a filament normal state are compared to detect a lamp having an abnormality. However, with this method, it is difficult to recognize whether or not the lamp is genuine even if the life of the lamp can be detected.
In patent document 2, for example, a light source such as an incandescent lamp or a fluorescent lamp is connected to a circuit in which a resistor and a capacitor are connected in parallel, and a time constant (product of a resistance value and a capacitance value) when a predetermined voltage is applied to both ends of the light source is measured to detect whether the light source is an incandescent lamp or a fluorescent lamp. However, with this method, even if a large difference in time constant (time constant is largely different between an incandescent lamp and a fluorescent lamp) can be detected, it is difficult to identify whether or not the incandescent lamp is genuine between the same incandescent lamps. For example, in patent document 3, a defective product is detected by emitting ultraviolet rays to a plurality of filaments sealed in a bulb of the same incandescent bulb and measuring a discharge start voltage between the filaments. However, it is difficult to identify whether or not the lamp is genuine even if defective products can be detected by this method.
Disclosure of Invention
In order to identify a light source of a genuine product from a light source of a similar product manufactured by another manufacturer, a more accurate identification device is required than the identification of whether the light source is defective as in patent documents 1 and 3 or the identification of whether the light source is a different type of light source as in patent document 2. Further, there is a need to solve the problem that the inspection time of the plurality of light sources does not greatly exceed the start-up time of the exposure apparatus and the cost of the entire exposure apparatus does not greatly increase.
The present invention has been made in view of the above-described problems, and an object thereof is to provide an exposure apparatus for exposing a printed circuit board or the like, which includes an incandescent lamp for identifying whether or not a discharge lamp serving as a light source is genuine in a short time with high accuracy and at low cost, and an inspection method thereof.
In order to solve the above problem, the invention according to claim 1 of the present invention is configured as follows, for example, as shown in fig. 1, in a 1 st exposure apparatus 100. That is, the 1 st exposure apparatus 100 is characterized by comprising:
1 or a plurality of light source devices 4 each including a discharge lamp 1 serving as a light source, an incandescent lamp 2 for detecting whether or not the discharge lamp 1 is genuine, and a reflector container 3 to which the discharge lamp 1 and the incandescent lamp 2 are attached; a frame 5 for mounting the light source device 4 to an object to be irradiated; a constant current power supply 8 for supplying current to the incandescent lamp 2; a switch 10 for turning on/off the current from the constant current power supply 8; a control unit 9 that turns on and off the switch 10 to turn on the incandescent lamp 2 for a predetermined time during lighting of the discharge lamp 1; a measuring unit 11 that measures a voltage across the incandescent lamp 2 being lit; a comparison unit 12 that compares the both-end voltage measured by the measurement unit 11 with a voltage range of a predetermined upper limit value and a predetermined lower limit value for determining whether or not the discharge lamp 1 is a genuine product; a determination unit 13 that receives the signal from the comparison unit 12, determines that the discharge lamp to be inspected is genuine when the voltages at both ends are within the voltage ranges of the predetermined upper limit value and lower limit value, and determines that the discharge lamp to be inspected is non-genuine when the voltages at both ends are outside the voltage ranges of the predetermined upper limit value and lower limit value; and a display unit 14 for displaying the determination result.
The invention according to claim 2 is configured as follows, for example, as shown in fig. 1, and the 2 nd exposure apparatus 101 is configured. That is, the 2 nd exposure apparatus 101 is characterized by comprising:
1 to a plurality of light source devices 4 each including a discharge lamp 1 serving as a light source, an incandescent lamp 2 for detecting whether or not the discharge lamp 1 is genuine, and a reflector container 3 to which the discharge lamp 1 and the incandescent lamp 2 are attached; a frame 5 for mounting the light source device 4 to an object to be irradiated; a constant current power supply 8 for supplying current to the incandescent lamp 2; a switch 10 for turning on/off the current from the constant current power supply 8; a control unit 9 for turning on and off the switch 10 to light the incandescent lamp 2 for a predetermined time during lighting of the discharge lamp 1; a measuring unit 15 for measuring the voltages across the incandescent lamp 2 during lighting for 2 times at a predetermined time; a comparison unit 16 for comparing a difference between the voltage at the 1 st measurement of the incandescent lamp 2 and the voltage at the 2 nd measurement by the measurement unit 15 with a voltage difference range of a predetermined upper limit value and a predetermined lower limit value for determining whether or not the discharge lamp is genuine; a determination unit 17 that receives the signal from the comparison unit 16, determines that the discharge lamp to be inspected is genuine when the difference between the voltage at the time of the 1 st measurement and the voltage at the time of the 2 nd measurement is within the voltage difference range between the predetermined upper limit value and the predetermined lower limit value, and determines that the discharge lamp to be inspected is non-genuine when the difference between the voltage at the time of the 1 st measurement and the voltage at the time of the 2 nd measurement is outside the voltage difference range between the predetermined upper limit value and the predetermined lower limit value; and a display unit 14 for displaying the determination result.
Further, the invention described in claim 3 relates to an inspection method of the discharge lamp 1,
characterized in that, in the exposure apparatus 100 according to claim 1 or the exposure apparatus 101 according to claim 2, which is provided with the discharge lamp 1 serving as a light source, the incandescent lamp 2 for detecting whether or not the discharge lamp 1 is a genuine product, and the plurality of light source devices 4 including the reflector vessel 3 in which the discharge lamp 1 and the incandescent lamp 2 are installed, the control unit 9 sequentially turns on and off the incandescent lamp 2 during lighting of the discharge lamp 1 to sequentially check whether or not the discharge lamp 1 is a genuine product.
According to the invention described in claim 1, the discharge lamp and the incandescent lamp accommodated in the same reflector vessel are used as a light source, and the incandescent lamp is used as a resistance device for generating a natural voltage for identifying whether the discharge lamp is pure positive. Before the incandescent lamp was mounted in the reflector vessel, a constant current was supplied to the incandescent lamp cell, and the voltage across the incandescent lamp was measured after a prescribed time. The voltage across the multiple incandescent lamps was measured under the same conditions to determine the voltage distribution range. Then, the voltage across the incandescent lamp measured under the same conditions as described above is compared with the voltage distribution range described above between the discharge lamp and the incandescent lamp accommodated in the same reflector vessel, and if the measured voltage is within the voltage distribution range, it can be recognized that the discharge lamp in the same reflector vessel as the measured incandescent lamp is genuine. In the exposure apparatus, the comparison and determination are sequentially performed for all the discharge lamps, and the discharge lamps can be recognized as genuine products in a short time at low cost and with high accuracy. In the above invention, if the voltage across the incandescent lamp is measured 1 time, it can be recognized whether the lamp is genuine.
In the exposure apparatus of the present invention, a general incandescent lamp is used, the material of the filament is tungsten or the like, and the resistance value of the filament shows a specific temperature change due to heat generated by the filament. Therefore, when the temperature of the filament is low immediately after the constant current is supplied to the incandescent lamp, the resistance value is very small (about several ohms), the voltage across both ends of the incandescent lamp at that time is measured, and when the temperature of the filament rises sufficiently (600 degrees celsius or more), the resistance value increases by several times, the voltage at that time is measured, and when the difference between the two voltages is measured, the voltage difference inherent to the filament is obtained.
According to the invention of claim 2, the genuine product can be identified with higher accuracy by using the voltage difference due to the temperature inherent to the filament. Before the incandescent lamp is mounted in the reflector vessel, a constant current is supplied to the incandescent lamp itself, and first, immediately after the constant current supply to the incandescent lamp is started, the voltage across both ends of the incandescent lamp is measured when the temperature of the filament is low, and then, after a predetermined time has elapsed, the voltage across both ends is measured when the temperature of the filament has sufficiently increased, and the voltage difference between both ends is measured. The voltage across the plurality of incandescent lamps was measured under the same conditions, and the voltage difference distribution range was determined. Then, the voltage difference of the incandescent lamp measured under the same condition as described above is compared with the voltage difference distribution range described above between the discharge lamp and the incandescent lamp accommodated in the same reflector vessel, and if the measured voltage difference is within the voltage difference distribution range, it can be recognized that the discharge lamp in the same reflector vessel as the incandescent lamp is genuine. In the exposure apparatus, the comparison and determination are sequentially performed for all the discharge lamps, and it is possible to recognize whether or not the discharge lamp is a genuine product in a short time at low cost and with higher accuracy.
In the above-described invention, since the voltage across the incandescent lamp is measured 2 times, and the voltage difference due to the temperatures of the 1 st time and the 2 nd time is measured and compared, even in the case of an optical device that is determined to be equipped with a discharge lamp that is not genuine and that is connected to a fixed resistor having the same resistance value as the filament of the incandescent lamp instead of the incandescent lamp, the voltage difference due to the temperature of the fixed resistor or the like is significantly different from that of the incandescent lamp, and therefore it is possible to recognize that the discharge lamp of the optical device is not genuine.
Drawings
Fig. 1 is a schematic view showing an exposure apparatus according to an embodiment of the present invention.
Fig. 2 is a plan view showing a light source unit according to an embodiment of the present invention.
Fig. 3 is a sectional view showing a light source device according to an embodiment of the present invention.
Fig. 4 is a timing chart showing the on/off of the switch and the timing of the voltage measurement across the incandescent lamp in example 1 of the present invention.
Fig. 5 is a timing chart showing the on/off of the switch and the timing of the voltage measurement across the incandescent lamp in example 2 of the present invention.
Detailed Description
The present invention will be described below with reference to fig. 1 to 5. In each symbol, when each part is expressed in terms of a higher-order part, it is expressed only as an arabic numeral without a sub-number of a letter, and when each part needs to be distinguished (that is, when it is expressed in terms of a lower-order part), it is distinguished by adding a sub-number of a lower case letter to the arabic numeral. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description thereof will be omitted.
Fig. 3 is a sectional view showing a light source device 4 according to an embodiment of the present invention. The discharge lamp 1 has: an arc tube 1d including a light emitting section 1b having an internal space 1a in which a light emitting substance such as mercury is sealed, and a pair of sealing sections 1c for sealing the internal space 1a of the light emitting section 1 b; a pair of electrodes 1e disposed opposite to each other in the light emitting section 1 b; and a pair of power supply lines 1f for supplying power. The incandescent lamp 2 is a normal incandescent lamp, and a filament obtained by processing tungsten or the like into a coil shape is used as the filament 2 a. The resistance value of tungsten is very small at normal temperature, but the resistance value becomes several times larger due to heat generation of the filament (600 degrees celsius or more). As a material of the reflector container 3, glass, aluminum, or the like is considered, and a reflecting surface 3a having a paraboloid of revolution is formed inside. The reflector container 3 is covered with a base portion 3b on the outside of the bowl-shaped bottom portion, and the joint portion thereof is fixed with an adhesive 3 e. The bottom of the base 3b is covered with a lid 3c, and the joint is fixed by a cap (cap) structure. The base portion 3b and the lid portion 3c are members having a housing space 3g for housing the incandescent lamp 2 therein, and are preferably formed of a material having high insulation properties and high thermal conductivity.
One of the sealing portions 1c of the discharge lamp 1 is inserted into an insertion hole 3f formed in the bowl-shaped bottom of the reflector container 3, and is fixed to the insertion hole 3f by an adhesive or the like. One of the sealing portions 1c is disposed so as to pass through the insertion hole 3d of the base portion 3b and reach the inner space of the lid portion 3 c. The incandescent lamp 2 is disposed in a housing space 3g formed by the base 3b and the cover 3 c. The light source device 4 is connected to a total of four feeder wires 1f of the discharge lamp 1 and a pair of feeder wires 2b of the incandescent lamp 2.
Fig. 2 is a plan view of the light source unit 6 according to the embodiment of the present invention. The light source devices 4 are attached to the frame 5 in 4 rows in the vertical direction and 6 rows in the horizontal direction, respectively, to constitute a light source unit 6.
Fig. 1 is a schematic diagram showing an exposure apparatus according to embodiments 1 and 2 of the present invention, in which a plurality of light source devices 4 are mounted in a light source unit 6 for irradiating irradiation light to an irradiation target, and a lighting circuit 7 for supplying power to a discharge lamp 1 and a constant current power supply 8 for supplying a constant current to an incandescent lamp 2 are connected to each of the light source devices 4. A switch 10 for turning on and off a constant current is connected in series between the constant current source 8 and the incandescent lamp 2, and the switch 10 is turned on and off by the control unit 9. Further, a resistor 30 is connected in series between the constant current power supply 8 and the incandescent lamp 2, and the constant current power supply 8 is protected in the case where a short-circuit failure occurs in the incandescent lamp 2. The filament lamp 2 is also connected at both ends to the measuring unit 11 so as to be able to measure a voltage, and the resistance 11a represents the internal resistance of the measuring unit 11 and is a resistance value (about several megaohms) sufficiently larger than the resistance value of the filament 2a of the filament lamp 2, so that the measuring unit 11 can accurately measure the voltage generated by the filament 2 a.
The comparison unit 12 registers a plurality of voltage distribution ranges of incandescent lamps for quality detection measured under predetermined conditions, the determination unit 13 determines whether or not the discharge lamp is a good product based on the comparison result of the comparison unit 12, and the display unit 14 displays the determination result. In fig. 1, the exposure apparatus 101 is shown in the case where the measurement unit 15, the comparison unit 16, the judgment unit 17, and the exposure apparatus 101, which are indicated by parentheses, have the same configurations as those of the measurement unit 11, the comparison unit 12, and the judgment unit 13 of example 1 in example 2. The comparison unit 16 registers, under predetermined conditions, the distribution range of the voltage difference when a plurality of incandescent lamps for quality detection are measured 2 times at predetermined time intervals.
[ example 1]
In fig. 1, when the power switch of the exposure apparatus 100 is turned on, the lighting circuit 7 supplies power to all the discharge lamps 1. Usually, it takes several minutes for the discharge lamp 1 to start completely. Immediately after the exposure apparatus 100 turns on the power switch, the control unit 9 turns on the 1 st switch 10 connected to the 1 st incandescent lamp 2 in the light source apparatus 4, and supplies a constant current from the constant current power supply 8. After a predetermined time (for example, after 10 seconds) from the turn-on of the 1 st switch 10, the voltage across the 1 st incandescent lamp 2 is measured by the measuring unit 11, the result is sent to the comparing unit 12, the comparing unit 12 compares the result with the voltage distribution ranges of the plurality of incandescent lamps for genuine product detection registered in advance in the comparing unit 12, and sends whether or not the result is within the registered voltage range to the determining unit 13, and if the result is within the registered voltage range, the determining unit 13 determines that the corresponding discharge lamp 1 is a genuine product, and if the result is outside the registered range, the corresponding discharge lamp 1 is determined to be a non-genuine product, and the determination result is displayed on the display unit 14. The inspection from the measurement to the display is automatically performed, and therefore, is finished in a very short time.
After the voltage measurement of the 1 st incandescent lamp 2 is completed, the control unit 9 turns off the 1 st switch 10 connected to the 1 st incandescent lamp 2 and turns on the 2 nd switch 10 connected to the 2 nd incandescent lamp 2, thereby supplying a constant current from the constant current power supply 8. Subsequently, it is determined whether or not the corresponding discharge lamp 1 is a genuine product as in the case of the 1 st incandescent lamp 2, and the same inspection is performed until the inspection of all the incandescent lamps 2 is completed.
In the case where the light source unit 6 is constituted by 24 discharge lamps, it takes 10 seconds per lamp, for example, and in this case, the inspection is finished in 240 seconds (4 minutes). Therefore, if it is considered that the start-up time of a general discharge lamp is about several minutes and the start-up time of the entire exposure apparatus is usually about 10 minutes, the inspection can be finished in a sufficiently short time.
At this time, when the voltage of the incandescent lamp 2 is outside the registered voltage range and the determination unit 13 determines that the corresponding discharge lamp 1 is a non-genuine product, it is preferable that the display unit 14 displays information for specifying the position of the corresponding discharge lamp and the fact that the discharge lamp is a non-genuine product, and the control unit 9 can temporarily suspend the inspection, thereafter, confirm it by an operator or the like, and then restart the inspection. As another coping method, it is more preferable that, even when the non-genuine discharge lamp is detected, the detection is not interrupted and all the discharge lamps are inspected, and the same information as that in the case where the inspection result is displayed on the display unit 14 is separately stored in the storage device or the like, and after the inspection of all the discharge lamps is completed, the positional information of the non-genuine discharge lamps and the like can be collectively displayed.
Fig. 4 shows a relationship between the timing of on/off of the switch 10 and the measurement timing of the measurement unit 11. Shown in fig. 4: the voltage across the 1 st incandescent lamp 2 is measured after a predetermined time from when the 1 st switch 10 connected to the 1 st incandescent lamp 2 is turned on, the 1 st switch 10 connected to the 1 st incandescent lamp 2 is turned off immediately after the measurement, the 2 nd switch 10 connected to the 2 nd incandescent lamp 2 is turned on, the voltage across the 2 nd incandescent lamp 2 is measured after a predetermined time, and then the voltages across all the incandescent lamps 2 are measured in the same manner. The above-described configuration is a configuration in which the constant current power supply 8, the switch 10, the control unit 9, the measurement unit 11, the comparison unit 12, the determination unit 13, and the display unit 14 are added to the conventional multi-lamp type exposure apparatus, and particularly, the control unit 9, the comparison unit 12, and the determination unit 13 can be realized by 1 microcomputer or the like without greatly increasing the cost of the exposure apparatus.
[ example 2]
In fig. 1, the elements different from those of example 1 are a measuring unit 15 (the internal resistance is a resistance 15a), a comparing unit 16, and a determining unit 17, and the other elements are the same. Descriptions of the same elements as in embodiment 1 are omitted. Immediately after the exposure device 101 turns on the power switch, the 1 st switch 10 connected to the 1 st incandescent lamp 2 in the light source device 4 is turned on to supply a constant current from the constant current power supply 8. Immediately after that, the 1 st measurement of the voltage across the 1 st incandescent lamp 2 is performed by the measuring unit 15, and the result is sent to the comparing unit 16. Subsequently, after a predetermined time (for example, after 10 seconds) from the 1 st measurement, the 2 nd measurement of the voltages across the 1 st incandescent lamp 2 is performed by the measurement unit 15, the result is sent to the comparison unit 16, the comparison unit 16 compares the voltage of the difference between the 2 nd measurement voltages with the voltage difference distribution ranges of the plurality of incandescent lamps for quality detection registered in advance in the comparison unit 16, and sends whether or not the voltage difference distribution ranges are within the registered voltage difference ranges to the determination unit 17, and if the voltage difference distribution ranges are within the registered voltage difference ranges, the determination unit 17 determines that the corresponding discharge lamp 1 is a quality product, and if the voltage difference distribution ranges are outside the registered ranges, determines that the corresponding discharge lamp 1 is a non-quality product, and displays the determination result on the display unit 14. The inspection from the measurement to the display is automatically performed, and therefore, is finished in a very short time.
After 2 voltage measurements of the 1 st incandescent lamp 2 are completed, the control unit 9 turns off the 1 st switch 10 connected to the 1 st incandescent lamp 2 and turns on the 2 nd switch 10 connected to the 2 nd incandescent lamp 2, thereby supplying a constant current from the constant current power supply 8. Subsequently, the corresponding discharge lamp 1 is determined to be a genuine product in the same manner as in the case of the 1 st incandescent lamp 2, and the same inspection is performed until the inspection of all the incandescent lamps is completed.
Fig. 5 shows a relationship between the on/off timing of the switch 10 and the measurement timing of the measurement unit 15. Shown in fig. 5: the voltage measurement of both ends of the 1 st incandescent lamp 2 is performed 1 st time immediately after the 1 st switch 10 connected to the 1 st incandescent lamp 2 is turned on, then the voltage measurement of both ends of the 1 st incandescent lamp 2 is performed 2 nd time after a predetermined time, the 1 st switch 10 connected to the 1 st incandescent lamp 2 is turned off immediately after the 2 nd measurement, the 2 nd switch 10 connected to the 2 nd incandescent lamp 2 is turned on, then the voltage measurement of both ends of the 2 nd incandescent lamp 2 is performed 1 st time immediately after the 2 nd measurement, then the voltage measurement of both ends of the 2 nd incandescent lamp 2 is performed 2 nd time after a predetermined time, the 2 nd switch 10 connected to the 2 nd incandescent lamp 2 is turned off immediately after the 2 nd measurement, and then the voltages of both ends of all the incandescent lamps 2 are measured 2 times similarly.
In embodiment 2, in the setting of the voltage measurement time at the 1 st time and the 2 nd time, the time period during which the switch 10 is in the on state can be set to any time. When the voltage difference of the incandescent lamp is out of the registered voltage difference range and the determination unit 17 determines that the corresponding discharge lamp 1 is a non-genuine product, it is preferable to take the same measures as those in embodiment 1. In embodiment 1, embodiment 2 can also be realized without changing the hardware configuration by changing the computer programs of the control unit 9, the measurement unit 11, the comparison unit 12, the determination unit 13, and the display unit 14.
In the exposure apparatus 100(101) of the present invention, when the number of the light source devices 4 is large and the inspection time of the incandescent lamps 2 greatly exceeds the start time of the exposure apparatus 100(101), the control unit 9, the constant current power supply 8, the measurement unit 11(15), the comparison unit 12(16), the determination unit 13(17), and the display unit 14 are increased by the number corresponding to the number of the incandescent lamps 2 required for inspection, and they are operated in parallel to perform the inspection of the incandescent lamps 2 in parallel, whereby the inspection can be performed in response to the increase in the number of the light source devices 4 without increasing the inspection time.
The present invention can be used not only in an exposure apparatus for an exposure process for forming a wiring pattern on a printed wiring board, but also in an apparatus requiring a genuine discharge lamp in a light source apparatus having a plurality of lamps, such as an exposure apparatus for a liquid crystal display panel using a discharge lamp, an appearance inspection apparatus for semiconductor devices, and the like.
Claims (2)
1. A light source device, comprising:
a discharge lamp which is supplied with power from the lighting circuit and serves as a light source of the exposure apparatus;
an incandescent lamp connected to a measuring unit that measures a voltage of the incandescent lamp after a predetermined time has elapsed since a switch was turned on when a constant current is supplied from a constant current power supply, and that detects whether or not the discharge lamp is genuine; and
a reflector vessel in which the discharge lamp and the incandescent lamp are installed,
the incandescent lamp is turned on during a start time when the discharge lamp is turned on, and whether or not the discharge lamp is a genuine lamp is determined by detecting whether or not a voltage of the incandescent lamp is within a voltage range of a predetermined upper limit value and a predetermined lower limit value of a voltage distribution of a plurality of incandescent lamps for genuine product detection registered by measuring a plurality of incandescent lamps used together with the discharge lamp in advance, the discharge lamp being connected to a power supply line from a lighting circuit, and the incandescent lamp being connected to a power supply line from a constant current power supply.
2. The light source device according to claim 1,
the reflector container has: a reflecting surface having a paraboloid of revolution on the inner side;
a bowl-shaped bottom;
the base part is coated on the outer side of the bowl-shaped bottom part; and
a cover portion covering a bottom portion of the base portion,
the base and the cover have a space for accommodating an incandescent lamp therein.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015081773A JP5869713B1 (en) | 2015-04-13 | 2015-04-13 | Light source apparatus, exposure apparatus, and inspection method thereof |
| JP2015-081773 | 2015-04-13 | ||
| CN201610225945.2A CN106061077B (en) | 2015-04-13 | 2016-04-13 | Exposure device and its inspection method |
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| CN201610225945.2A Division CN106061077B (en) | 2015-04-13 | 2016-04-13 | Exposure device and its inspection method |
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| CN107478976A CN107478976A (en) | 2017-12-15 |
| CN107478976B true CN107478976B (en) | 2020-05-19 |
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| CN201610225945.2A Active CN106061077B (en) | 2015-04-13 | 2016-04-13 | Exposure device and its inspection method |
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| JP (1) | JP5869713B1 (en) |
| KR (3) | KR101804755B1 (en) |
| CN (2) | CN107478976B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110249267B (en) | 2017-02-02 | 2021-09-03 | 株式会社V技术 | High voltage discharge lamp |
| WO2019039427A1 (en) * | 2017-08-23 | 2019-02-28 | フェニックス電機株式会社 | Light source device, exposure device, and determination method for light source device |
| JP6951740B2 (en) * | 2017-09-11 | 2021-10-20 | フェニックス電機株式会社 | Light source device, irradiation device equipped with it, and lighting method of light source device |
| JPWO2019054250A1 (en) * | 2017-09-16 | 2020-10-15 | フェニックス電機株式会社 | Light source device, exposure device, and method for determining the light source device |
| WO2019176600A1 (en) * | 2018-03-13 | 2019-09-19 | フェニックス電機株式会社 | Light source device including discharge lamp, illuminating device, and determination method for discharge lamp |
| JP7060244B2 (en) * | 2018-12-12 | 2022-04-26 | フェニックス電機株式会社 | A light source for an exposure device, an exposure device using the light source, and an exposure method for a resist. |
| JP7253798B2 (en) | 2019-11-18 | 2023-04-07 | フェニックス電機株式会社 | LAMP HOLDING CASSETTE AND LIGHT SOURCE FOR EXPOSURE DEVICE USING THE SAME |
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| KR20160122086A (en) | 2016-10-21 |
| TWI609249B (en) | 2017-12-21 |
| KR20180103785A (en) | 2018-09-19 |
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| KR20170118003A (en) | 2017-10-24 |
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