JP7253798B2 - LAMP HOLDING CASSETTE AND LIGHT SOURCE FOR EXPOSURE DEVICE USING THE SAME - Google Patents

LAMP HOLDING CASSETTE AND LIGHT SOURCE FOR EXPOSURE DEVICE USING THE SAME Download PDF

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JP7253798B2
JP7253798B2 JP2019208327A JP2019208327A JP7253798B2 JP 7253798 B2 JP7253798 B2 JP 7253798B2 JP 2019208327 A JP2019208327 A JP 2019208327A JP 2019208327 A JP2019208327 A JP 2019208327A JP 7253798 B2 JP7253798 B2 JP 7253798B2
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lamp
body portion
main body
lamps
holding cassette
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JP2021081560A (en
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弘 松本
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Phoenix Electric Co Ltd
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Phoenix Electric Co Ltd
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Priority to KR1020200142069A priority patent/KR20210060313A/en
Priority to TW109138736A priority patent/TW202121068A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Description

本発明は、例えば露光装置用光源として使用される、複数のランプをひとまとめにして保持するランプ保持用カセットに関する。 The present invention relates to a lamp-holding cassette for collectively holding a plurality of lamps, which is used, for example, as a light source for an exposure apparatus.

例えば露光装置に使用される光源など大きな光量が必要な光源に対して、従来は大型の放電灯等のランプをひとつ設けるのが主流であったが、当該ランプが故障すると光源が失光してしまい露光装置全体を停止しなければならなくなることや、メンテナンスの困難性等の問題から、近年では、小型の放電灯等のランプを複数並べて配置することにより、必要な光量を放射できる光源を構成する技術が開発されている。 For example, for a light source that requires a large amount of light, such as a light source used in an exposure apparatus, conventionally, it was common to provide a single lamp such as a large discharge lamp. Due to problems such as the need to stop the entire exposure apparatus and the difficulty of maintenance, in recent years, a light source capable of emitting the required amount of light has been configured by arranging a plurality of lamps such as small discharge lamps side by side. technology has been developed to

例えば特許文献１には、複数のランプを並べて所望の位置に容易に配置できるように、これらランプを個々に保持する複数の凹所を備えるカセットを用いる技術が開示されている。 For example, Patent Document 1 discloses a technique using a cassette having a plurality of recesses for individually holding a plurality of lamps so that the lamps can be arranged side by side and easily arranged at desired positions.

特開２０１６－２００７５１号公報JP 2016-200751 A

しかしながら、特許文献１に開示されたランプ保持用カセットにも改善すべき点があった。 However, the lamp holding cassette disclosed in Patent Document 1 also has some points to be improved.

複数のランプを使用する露光装置用光源では、例えば図９および図１０に示すように、各ランプＬからの光の利用効率を向上させるために、各ランプＬが互いに密に配置される。このため、ひとつのランプＬをカセットＣに取り付けようとする際、近傍のランプＬやそのランプＬへの配線Ｘが邪魔になってしまい、ランプＬの取り付け作業が困難になり、悪くすると、適切な位置にランプＬが取り付けられないことが考えられた。 In a light source for an exposure apparatus using a plurality of lamps, the lamps L are arranged closely to each other in order to improve the utilization efficiency of the light from each lamp L, as shown in FIGS. 9 and 10, for example. Therefore, when one lamp L is to be attached to the cassette C, the neighboring lamp L and the wiring X to the lamp L become an obstacle, making it difficult to attach the lamp L. It was considered that the lamp L could not be installed at a position where

ランプＬの取り付け作業が困難になると、ひとつの露光装置用光源に複数のランプＬを取り付ける作業時間が長くなり、露光装置全体のメンテナンスコストを押し上げる要因となる。また、適切な位置にランプＬが取り付けられない場合は、露光面における照度が低下して露光品質の低下を招くおそれがあった。 If the work of mounting the lamps L becomes difficult, the work time required to mount a plurality of lamps L on one light source for the exposure apparatus becomes longer, which is a factor in increasing the maintenance cost of the entire exposure apparatus. Also, if the lamp L is not mounted at an appropriate position, the illuminance on the exposed surface may decrease, leading to deterioration in exposure quality.

本発明は、前述した課題に鑑みてなされたものであり、その目的は、複数のランプが互いに密に配置される場合であっても、近傍のランプやそのランプへの配線が邪魔になり難く、ランプの取り付け作業を容易にして、適切な位置にランプが取り付けられないおそれを低減できるランプ保持用カセットおよびそれを用いた露光装置用光源を提供することにある。 The present invention has been made in view of the above-mentioned problems, and its object is to prevent adjacent lamps and wiring to the lamps from becoming an obstacle even when a plurality of lamps are arranged closely together. Another object of the present invention is to provide a cassette for holding a lamp and a light source for an exposure apparatus using the same, which facilitates lamp mounting work and reduces the possibility that the lamp will not be mounted in an appropriate position.

本発明の一局面によれば、
少なくとも第１本体部および第２本体部を備えており、
前記第１本体部および前記第２本体部には、それぞれ複数のランプが取り付けられる複数のランプ取付凹所が形成されており、
前記第１本体部における第１側面は、前記第２本体部における第２側面と組み合わせて互いに接合できるようになっており、
前記第１本体部における前記第１側面の一方端部は、前記第２本体部における前記第２側面の一方端部に対して円柱状のピンで取り付けられており、
前記第１本体部は、前記第２本体部に対して、前記ピンを中心として回動可能となっている
ランプ保持用カセットが提供される。
According to one aspect of the invention,
comprising at least a first body portion and a second body portion;
a plurality of lamp mounting recesses to which a plurality of lamps are mounted respectively are formed in the first body portion and the second body portion;
The first side surface of the first main body can be combined with the second side surface of the second main body and joined together ,
one end of the first side surface of the first body is attached to one end of the second side of the second body with a columnar pin,
The first body portion is rotatable about the pin with respect to the second body portion.
A lamp holding cassette is provided.

好適には、
前記ランプ取付凹所の内側面には、前記内側面から突設された突部が形成されており、
前記突部は、前記ランプ取付凹所に取り付けられる前記ランプが正しい位置にない場合において前記ランプに当たるようになっている。 Preferably,
A protrusion projecting from the inner surface is formed on the inner surface of the lamp mounting recess,
The projection is adapted to hit the lamp when the lamp mounted in the lamp mounting recess is not in the correct position.

本発明の他の局面によれば、
上述したランプ保持用カセットを備える
露光装置用光源が提供される。 According to another aspect of the invention,
A light source for an exposure apparatus is provided comprising a lamp holding cassette as described above.

本発明に係るランプ保持用カセットによれば、当該ランプ保持用カセットは少なくとも第１本体部と第２本体部とに分けて構成されており、第１本体部における第１側面は、第２本体部における第２側面と組み合わせて互いに接合できるようになっている。 According to the lamp holding cassette according to the present invention, the lamp holding cassette is divided into at least the first main body portion and the second main body portion, and the first side surface of the first main body portion faces the second main body portion. It is adapted to be joined together in combination with the second side surface of the part.

これにより、第１本体部のランプ取付凹所における所定の位置にランプを取り付けるとともに当該ランプに対する配線を済ませておき、第２本体部についても同様に済ませておいた後、第１本体部および第２本体部を互いに組み合わせてランプ保持用カセットを完成させることができるので、複数のランプが互いに密に配置される場合であっても、近傍のランプやそのランプへの配線が邪魔になり難くなり、ランプの取り付け作業が容易になるとともに、適切な位置にランプが取り付けられなくなるおそれを低減できる。 As a result, the lamp is mounted at a predetermined position in the lamp mounting recess of the first main body, and the wiring for the lamp is completed. Since the lamp holding cassette can be completed by combining the two main bodies, even when a plurality of lamps are closely arranged, adjacent lamps and wiring to the lamps are less likely to get in the way. In addition, the lamp mounting work is facilitated, and the possibility that the lamp cannot be mounted at a proper position can be reduced.

本発明が適用された、実施形態に係るランプ保持用カセット１０（開いた状態）を示す正面図である。1 is a front view showing a lamp holding cassette 10 (open state) according to an embodiment to which the present invention is applied; FIG. 本発明が適用された、実施形態に係るランプ保持用カセット１０（ランプＬを取り付けて開いた状態）を示す斜視図である。1 is a perspective view showing a lamp holding cassette 10 according to an embodiment to which the present invention is applied (open state with lamps L attached); FIG. 本発明が適用された、実施形態に係るランプ保持用カセット１０（ランプＬおよび配線Ｘを取り付けて開いた状態）を示す正面図である。1 is a front view showing a lamp holding cassette 10 according to an embodiment (opened with lamps L and wires X attached) to which the present invention is applied; FIG. 本発明が適用された、実施形態に係るランプ保持用カセット１０（閉じた状態）を示す正面図である。1 is a front view showing a lamp holding cassette 10 (closed state) according to an embodiment to which the present invention is applied; FIG. Ｖ－Ｖ矢視による断面図である。It is a cross-sectional view taken along the line VV. ＶＩ－ＶＩ部分の拡大図である。It is an enlarged view of the VI-VI portion. 変形例１に係るランプ保持用カセット１０（ランプＬを取り付けて開いた状態）を示す斜視図である。FIG. 11 is a perspective view showing a lamp holding cassette 10 according to Modification 1 (with lamps L attached and opened); 変形例２に係るランプ保持用カセット１０（ランプＬを取り付けて開いた状態）を示す斜視図である。FIG. 11 is a perspective view showing a lamp holding cassette 10 according to Modification 2 (in a state in which the lamp L is attached and opened); 従来技術を示す図である。It is a figure which shows a prior art. 従来技術を示す図である。It is a figure which shows a prior art.

（ランプ保持用カセット１０の構成）
以下、図面を用いて、本発明に係るランプ保持用カセット１０の構成について説明する。 (Structure of Lamp Holding Cassette 10)
The configuration of the lamp holding cassette 10 according to the present invention will be described below with reference to the drawings.

図１から図３に示すように、ランプ保持用カセット１０は、大略、第１本体部１２と、第２本体部１４と、ピン１６とで構成されている。 As shown in FIGS. 1 to 3, the lamp holding cassette 10 generally comprises a first main body portion 12, a second main body portion 14, and a pin 16. As shown in FIG.

第１本体部１２は、複数のランプＬが取り付けられる部材であり、これらランプＬを取り付けるためのランプ取付凹所２０が複数形成されている。 The first body portion 12 is a member to which a plurality of lamps L are attached, and a plurality of lamp attachment recesses 20 for attaching the lamps L are formed.

なお、本実施形態では、ランプＬとしてリフレクター付きの放電灯が使用されているが、ランプＬの種類はこれに限定されるものではなく例えば白熱灯やＬＥＤであってもよいし、リフレクターの有無についても限定されない。 In this embodiment, a discharge lamp with a reflector is used as the lamp L, but the type of lamp L is not limited to this, and may be, for example, an incandescent lamp or an LED. is also not limited.

また、本実施形態では、第１本体部１２にはランプ取付凹所２０が２列に形成されており、１列当り５箇所のランプ取付凹所２０が形成されていることから、合計で１０箇所のランプ取付凹所２０が形成されている。ランプ取付凹所２０の列数は特に限定されるものではないが、ランプＬに対する配線作業のしやすさに鑑みると２列に形成するのが好適である。また、１列当りのランプ取付凹所２０の個数も特に限定されない。 In addition, in the present embodiment, the lamp mounting recesses 20 are formed in two rows in the first main body portion 12, and five lamp mounting recesses 20 are formed in each row. A lamp mounting recess 20 is formed at a location. Although the number of rows of the lamp mounting recesses 20 is not particularly limited, it is preferable to form them in two rows in view of ease of wiring work for the lamps L. FIG. Also, the number of lamp mounting recesses 20 per row is not particularly limited.

図４から図６に示すように、各ランプ取付凹所２０には、１つのランプＬにおけるリフレクターＲの開口Ｏ側が嵌め込まれるようになっている。また、各ランプ取付凹所２０の内側面Ｓにおける底端部からは、リフレクターＲにおける開口Ｏ側の開口端部Ｔにおける端縁面Ｈが当接するランプ当接部２２が形成されており、リフレクターＲの端縁面Ｈを当該ランプ当接部２２に当接させることにより、ランプ保持用カセット１０に対するランプＬの位置決めが正しくできるようになっている。 As shown in FIGS. 4 to 6, each lamp mounting recess 20 is adapted to fit the opening O side of the reflector R of one lamp L. As shown in FIGS. Further, from the bottom end of the inner surface S of each lamp mounting recess 20, there is formed a lamp abutting portion 22 with which the edge surface H of the opening end T of the reflector R on the opening O side abuts. By bringing the R edge surface H into contact with the lamp contact portion 22, the lamp L can be correctly positioned with respect to the lamp holding cassette 10. As shown in FIG.

さらに、各ランプ取付凹所２０の内側面Ｓには、当該内側面Ｓから突設された突部２４が形成されている。この突部２４は、上述したようにランプＬにおけるリフレクターＲの端縁面Ｈをランプ当接部２２に当接させることによって当該ランプＬを正しく位置決めした状態で、リフレクターＲの開口端部Ｔにおける端縁面Ｈとは反対側の端縁背面Ｆに当接するか、あるいは、当該端縁背面Ｆの近傍に位置するように設定されている。これにより、ランプＬがランプ取付凹所２０に対してずれたとき、つまり、ランプＬがランプ取付凹所２０に対して正しい位置にない場合において、突部２４がリフレクターＲの端縁背面Ｆに当たるようになり、ランプＬがランプ取付凹所２０の正しい位置から不所望にずれるのを回避できるようになっている。 Further, a protrusion 24 is formed on the inner side surface S of each lamp mounting recess 20 so as to protrude from the inner side surface S of the lamp mounting recess 20 . The protrusion 24 is formed at the opening end T of the reflector R in a state in which the lamp L is correctly positioned by bringing the edge surface H of the reflector R of the lamp L into contact with the lamp contact portion 22 as described above. It is set so as to abut on the edge back surface F on the opposite side of the edge surface H, or to be positioned in the vicinity of the edge back surface F. As a result, when the lamp L is displaced with respect to the lamp mounting recess 20, that is, when the lamp L is not in the correct position with respect to the lamp mounting recess 20, the projection 24 hits the rear edge F of the reflector R. Thus, the lamp L can be prevented from being undesirably displaced from the correct position in the lamp mounting recess 20. As shown in FIG.

なお、この突部２４は本件発明の必須構成要素ではないので、突部２４を設けることなくランプ保持用カセット１０を構成してもよい。 Since the projecting portion 24 is not an essential component of the present invention, the lamp holding cassette 10 may be configured without the projecting portion 24 .

図１から図３に戻り、第２本体部１４も、基本的に第１本体部１２と同じ構成であり、ここまでの第１本体部１２に関する説明を第２本体部１４の説明として援用する。 Returning to FIG. 1 to FIG. 3 , the second main body portion 14 has basically the same configuration as the first main body portion 12 , and the description of the first main body portion 12 so far is used as the description of the second main body portion 14 . .

本実施形態に係るランプ保持用カセット１０において、第１本体部１２における第１側面２６の一方端部は、第２本体部１４における第２側面２８の一方端部に対して円柱状のピン１６で取り付けられており、第１本体部１２が第２本体部１４に対してピン１６を中心として回動可能となっている。 In the lamp holding cassette 10 according to this embodiment, one end of the first side surface 26 of the first main body portion 12 is connected to one end of the second side surface 28 of the second main body portion 14 by the cylindrical pin 16 . , and the first main body portion 12 is rotatable about the pin 16 with respect to the second main body portion 14 .

これにより、第１本体部１２における第１側面２６は、第２本体部１４における第２側面２８に対して近接離間可能になっており、当該第２側面２８と組み合わせて互いに接合できるようになっている。また、本実施形態では、第１本体部１２における第１側面２６の他方端部にラッチ金具２７が取り付けられている。第１本体部１２と第２本体部１４とが組み合わされて互いに接合した状態で当該ラッチ金具２７を第２本体部１４における第２側面２８の他方端部に形成された係合部２９と係合させることにより、第１本体部１２と第２本体部１４とが互いに接合された状態を維持できる。 As a result, the first side surface 26 of the first main body portion 12 can be moved toward and away from the second side surface 28 of the second main body portion 14, and can be joined together in combination with the second side surface 28. ing. Further, in the present embodiment, a latch metal fitting 27 is attached to the other end of the first side surface 26 of the first body portion 12 . When the first main body portion 12 and the second main body portion 14 are combined and joined together, the latch fitting 27 is engaged with the engaging portion 29 formed on the other end portion of the second side surface 28 of the second main body portion 14 . By joining them together, it is possible to maintain the state in which the first main body portion 12 and the second main body portion 14 are joined to each other.

なお、本実施形態において、ピン１６は第１本体部１２および第２本体部１４から独立した別個の部材となっているが、当該ピン１６を第１本体部１２あるいは第２本体部１４と一体に形成してもよい。 In this embodiment, the pin 16 is a separate member independent of the first main body portion 12 and the second main body portion 14, but the pin 16 is integrated with the first main body portion 12 or the second main body portion 14. can be formed to

また、本実施形態に係るランプ保持用カセット１０には、第２本体部１４における第２側面２８からガイドピン４０が突設されており、第１本体部１２における第１側面２６の対応する位置には、当該ガイドピン４０が挿入されるガイドピン挿入穴４２が形成されている。第１側面２６と第２側面２８とを組み合わせ互いに接合する際、ガイドピン４０をガイドピン挿入穴４２に挿入することにより、ずれが生じることなく正しい位置で第１本体部１２と第２本体部１４とを接合することができる。 Further, in the lamp holding cassette 10 according to the present embodiment, a guide pin 40 is provided protruding from the second side surface 28 of the second main body portion 14 , and the guide pin 40 is provided at a position corresponding to the first side surface 26 of the first main body portion 12 . is formed with a guide pin insertion hole 42 into which the guide pin 40 is inserted. When the first side surface 26 and the second side surface 28 are assembled and joined together, by inserting the guide pin 40 into the guide pin insertion hole 42, the first main body portion 12 and the second main body portion are positioned in the correct positions without any misalignment. 14 can be joined.

（ランプ保持用カセット１０の特徴）
本実施形態に係るランプ保持用カセット１０によれば、当該ランプ保持用カセット１０が第１本体部１２と第２本体部１４とに分けて構成されており、第１本体部１２が第２本体部１４に対してピン１６を中心として回動可能となっていることにより、第１本体部１２における第１側面２６は、第２本体部１４における第２側面２８と組み合わせて互いに接合させたり、互いに離間させたりできるようになっている。 (Characteristics of Lamp Holding Cassette 10)
According to the lamp holding cassette 10 according to this embodiment, the lamp holding cassette 10 is divided into the first main body portion 12 and the second main body portion 14, and the first main body portion 12 is the second main body portion. By being rotatable about the pin 16 with respect to the portion 14, the first side surface 26 of the first body portion 12 is combined with the second side surface 28 of the second body portion 14 to be joined together, They can be separated from each other.

これにより、第１本体部１２のランプ取付凹所２０における所定の位置にランプＬを取り付けるとともに当該ランプＬに対する配線Ｘを済ませておき、第２本体部１４についても同様に済ませておいた後、第１本体部１２および第２本体部１４を互いに組み合わせてランプ保持用カセット１０を完成させることができるので、複数のランプＬが互いに密に配置される場合であっても、近傍のランプＬやそのランプＬへの配線Ｘが邪魔になり難くなり、ランプＬの取り付け作業が容易になるとともに、適切な位置にランプＬが取り付けられなくなるおそれを低減できる。 As a result, the lamp L is mounted at a predetermined position in the lamp mounting recess 20 of the first body portion 12, and the wiring X for the lamp L is completed. Since the lamp holding cassette 10 can be completed by combining the first main body portion 12 and the second main body portion 14 with each other, even when a plurality of lamps L are closely arranged, the neighboring lamps L or The wiring X to the lamp L is less likely to be an obstacle, which facilitates the work of mounting the lamp L and reduces the possibility that the lamp L will not be mounted at an appropriate position.

（変形例１）
上述した実施形態では、ピン１６を中心として第１本体部１２を第２本体部１４に対して回動可能にしていたが、これに代えて、図７に示すように、第１本体部１２における第１側面２６と第２本体部１４における第２側面２８とが互いに対向した状態で、第１本体部１２と第２本体部１４との間隔を平行に広げたり狭めたりできるガイド部材３０を設けてもよい。 (Modification 1)
In the above-described embodiment, the first body portion 12 is rotatable with respect to the second body portion 14 about the pin 16. Alternatively, as shown in FIG. A guide member 30 capable of widening or narrowing the distance between the first main body portion 12 and the second main body portion 14 in parallel with the first side face 26 and the second side face 28 of the second main body portion 14 facing each other. may be provided.

ランプ保持用カセット１０には、このガイド部材３０が２本一組で使用されている。各ガイド部材３０は、それぞれ、第１本体部１２における第１側面２６に直交するスライド面３２と、第２本体部１４における第２側面２８に直交するスライド面３４との間に架設されている。また、各スライド面３２，３４は、ガイド部材３０に対して摺動自在になっている。 A set of two guide members 30 is used in the lamp holding cassette 10 . Each guide member 30 is installed between a slide surface 32 orthogonal to the first side surface 26 of the first body portion 12 and a slide surface 34 orthogonal to the second side surface 28 of the second body portion 14. . Further, each slide surface 32 , 34 is slidable with respect to the guide member 30 .

これにより、上述した実施形態に係るランプ保持用カセット１０と同じく、第１本体部１２における第１側面２６を、第２本体部１４における第２側面２８と組み合わせて互いに接合させたり、互いに離間させたりできるようになっている。 Accordingly, as in the lamp holding cassette 10 according to the embodiment described above, the first side surface 26 of the first main body portion 12 is combined with the second side surface 28 of the second main body portion 14 to be joined together or separated from each other. It is designed to be able to

（変形例２）
さらに言えば、図８に示すように、第１本体部１２と第２本体部１４とを完全に分離させて構成してもよい。この場合も第１本体部１２における第１側面２６と第２本体部１４における第２側面２８とが組み合わされて互いに接合した状態で、第１側面２６の両端に設けられたラッチ金具２７を第２本体部１４における第２側面２８の両端に形成された係合部２９と係合させることにより、第１本体部１２と第２本体部１４とが互いに接合された状態を維持できる。 (Modification 2)
Furthermore, as shown in FIG. 8, the first body portion 12 and the second body portion 14 may be completely separated from each other. In this case as well, the first side surface 26 of the first main body portion 12 and the second side surface 28 of the second main body portion 14 are combined and joined together, and the latch metal fittings 27 provided at both ends of the first side surface 26 are engaged with each other. By engaging with the engaging portions 29 formed at both ends of the second side surfaces 28 of the two main body portions 14, the state in which the first main body portion 12 and the second main body portion 14 are joined to each other can be maintained.

（変形例３）
また、第１本体部１２や第２本体部１４の面形状は、実施形態のような長方形状（矩形状）に限定されるものではなく、多角形状やＬ字状など、どのような形状であってもよい。 (Modification 3)
Further, the surface shape of the first main body portion 12 and the second main body portion 14 is not limited to a rectangular shape (rectangular shape) as in the embodiment, and may be any shape such as a polygonal shape or an L-shape. There may be.

（変形例４）
ここまでに説明した各実施形態では、ランプ保持用カセット１０は、第１本体部１２および第２本体部１４の大略２つの部材で構成されていたが、例えば、第２本体部１４における第２側面２８に対向する側面に組み合わされる第３本体部をさらに設けて、ランプ保持用カセット１０を大略３つの部材で構成してもよい。さらに、大略４つ以上の部材でランプ保持用カセット１０を構成してもよい。 (Modification 4)
In each of the embodiments described so far, the lamp holding cassette 10 is generally composed of two members, the first main body portion 12 and the second main body portion 14 . The lamp holding cassette 10 may be composed of approximately three members by further providing a third main body portion combined with the side surface facing the side surface 28 . Further, the lamp holding cassette 10 may be composed of approximately four or more members.

今回開示された実施形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した説明ではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 It should be considered that the embodiments disclosed this time are illustrative in all respects and not restrictive. The scope of the present invention is indicated by the scope of the claims rather than the above description, and is intended to include all modifications within the scope and meaning equivalent to the scope of the claims.

１０…ランプ保持用カセット、１２…第１本体部、１４…第２本体部、１６…ピン
２０…ランプ取付凹所、２２…ランプ当接部、２４…突部、２６…（第１本体部１２の）第１側面、２７…ラッチ金具、２８…（第２本体部１４の）第２側面、２９…係合部
３０…ガイド部材、３２…スライド面、３４…スライド面
４０…ガイドピン、４２…ガイドピン挿入穴
Ｌ…ランプ、Ｘ…配線、Ｒ…リフレクター、Ｏ…（リフレクターＲの）開口、Ｔ…（リフレクターＲの）開口端部、Ｈ…（開口Ｏ側の）端縁面、Ｓ…内側面、Ｆ…端縁背面、Ｃ…（従来の）カセット
DESCRIPTION OF SYMBOLS 10... Cassette for lamp holding, 12... 1st main-body part, 14... 2nd main-body part, 16... Pin 20... Lamp mounting recess, 22... Lamp contact part, 24... Protrusion, 26... (1st main-body part 12) first side surface, 27... latch fitting, 28... second side surface (of the second body portion 14), 29... engaging portion 30... guide member, 32... slide surface, 34... slide surface 40... guide pin, 42... Guide pin insertion hole L... Lamp, X... Wiring, R... Reflector, O... Opening (of reflector R), T... Opening end (of reflector R), H... Edge surface (on the side of opening O), S... inside surface, F... edge rear surface, C... (conventional) cassette

Claims (3)

少なくとも第１本体部および第２本体部を備えており、
前記第１本体部および前記第２本体部には、それぞれ複数のランプが取り付けられる複数のランプ取付凹所が形成されており、
前記第１本体部における第１側面は、前記第２本体部における第２側面と組み合わせて互いに接合できるようになっており、
前記第１本体部における前記第１側面の一方端部は、前記第２本体部における前記第２側面の一方端部に対して円柱状のピンで取り付けられており、
前記第１本体部は、前記第２本体部に対して、前記ピンを中心として回動可能となっている
ランプ保持用カセット。 comprising at least a first body portion and a second body portion;
a plurality of lamp mounting recesses to which a plurality of lamps are mounted respectively are formed in the first body portion and the second body portion;
The first side surface of the first main body can be combined with the second side surface of the second main body and joined together ,
one end of the first side surface of the first body is attached to one end of the second side of the second body with a columnar pin,
The first body portion is rotatable about the pin with respect to the second body portion.
Cassette for holding lamps. 前記ランプ取付凹所の内側面には、前記内側面から突設された突部が形成されており、
前記突部は、前記ランプ取付凹所に取り付けられる前記ランプが正しい位置にない場合において前記ランプに当たるようになっている
請求項１に記載のランプ保持用カセット。 A protrusion projecting from the inner surface is formed on the inner surface of the lamp mounting recess,
2. The cassette for lamp holding according to claim 1 , wherein the protrusion is adapted to hit the lamp when the lamp mounted in the lamp mounting recess is not in the correct position. 請求項１または２に記載のランプ保持用カセットを備える
露光装置用光源。
A light source for an exposure apparatus, comprising the lamp holding cassette according to claim 1 or 2 .
JP2019208327A 2019-11-18 2019-11-18 LAMP HOLDING CASSETTE AND LIGHT SOURCE FOR EXPOSURE DEVICE USING THE SAME Active JP7253798B2 (en)

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KR1020200142069A KR20210060313A (en) 2019-11-18 2020-10-29 Lamp holding cassette and light source for exposure device using the same
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