CN107478976A - Light supply apparatus - Google Patents
Light supply apparatus Download PDFInfo
- Publication number
- CN107478976A CN107478976A CN201710673011.XA CN201710673011A CN107478976A CN 107478976 A CN107478976 A CN 107478976A CN 201710673011 A CN201710673011 A CN 201710673011A CN 107478976 A CN107478976 A CN 107478976A
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- CN
- China
- Prior art keywords
- lamp
- incandescent lamp
- discharge lamp
- voltage
- incandescent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
- H05B47/20—Responsive to malfunctions or to light source life; for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/24—Testing of discharge tubes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/7065—Defects, e.g. optical inspection of patterned layer for defects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Circuit Arrangement For Electric Light Sources In General (AREA)
Abstract
The present invention relates to a kind of light supply apparatus.The light supply apparatus includes the discharge lamp as light source, whether the detection discharge lamp is the incandescent lamp of certified products and is provided with the reflector container of the discharge lamp and the incandescent lamp, the incandescent lamp is lit in the lighting of the discharge lamp, by detect the incandescent lamp voltage whether be as defined in judge whether the discharge lamp is certified products in the voltage range of higher limit and lower limit.
Description
The application be Application No. 201610225945.2, the applying date be on April 13rd, 2016, it is entitled " exposure
The divisional application of the application for a patent for invention of device and its inspection method ".
Technical field
Possess the present invention relates to a kind of in the exposure device for the exposure of printed circuit board etc. for detecting conduct
The discharge lamp of light source whether be certified products incandescent lamp exposure device and its inspection method.
Background technology
In the past, used for installing component on an electronic device resin, glass epoxy material substrate on copper
The printed circuit board of wiring pattern is formd Deng metal.In order to be used to formation wiring pattern on these printed circuit boards
Photoetching technique.It is applied as the photic of photonasty medicament on the whole face of the substrate formed with the metal level as wiring of whole face
Resist, by irradiating the irradiation light from exposure device to it with wiring pattern identical photomask.In photoresist
In, negative type photoresist that the dissolubility that has photoresist is reduced due to irradiation light and on the contrary photoresist
The positive light anti-etching agent that dissolubility increases due to irradiation light.It is photic anti-when increasing relatively due to irradiation light dissolubility
Erosion agent part be chemically treated and removed and using etching to remove the metal level exposed when, only residual is positioned at residual
The metal level under the part of photoresist is left, removes photoresist, so as to which wiring pattern is formed on substrate.
In the case that certain photoresist of irradiation light into eurymeric, minus is irradiated, in order to true by entire surface throughout shadow surface
Protect uniform light exposure, it is also necessary to the irradiation light irradiation regular time that will stablize with uniform illumination.
On the other hand, in printed circuit board, printed circuit board is made to maximize for the high efficiency of manufacturing process,
Split after the completion of substrate and minimized, for desired electronic equipment.Along with the maximization of printed circuit board,
Exposure device manufacturer turns to high illumination or as having used the small of multiple low-light (level)s using as the discharge lamp of light source is large-scale
The light source of multiple lamps of type discharge lamp and ensure uniform light exposure.For example, the light of the high-pressure discharge lamp instead of using 1 8kW
Source but use 4 2kW light source of high-pressure discharge lamp etc..The discharge lamp of low-light (level) is manufacturing compared with the discharge lamp of high illumination
It is advantageous in difficulty, manufacturing cost, sell the exposure device of the largely light source with more lamps.
However, along with more lamps of light source, as it ensure that the necessity of uniform light exposure, multiple discharge lamps are mutual
Homogenieity becomes even more important.Therefore, in order to stablize the high printed circuit board of the performance of exposure device, manufacture reliability, need
Will be only using the discharge lamp of the certified products made by same manufacturer with same material, same technique, it is necessary to whether identify discharge lamp
For the device and inspection method of certified products.
Exposure device is not limited to, the known method (example for having discharge lamp used in several identifications, light source in Optical devices
Such as, with reference to Japanese Patent Publication 7-52677 publications (patent document 1), Japanese Unexamined Patent Application Publication 2010-527504 publication (patent documents
And Japanese Unexamined Patent Application 62-43059 publications (patent document 3) 2).).For example, in the lamp abnormality detection described in patent document 1
In device, to Halogen lamp LED etc. used the incandescent bulb of filament provide as defined in voltage, when comparing filament half cut-off state
Current value when current value and normal filament detects abnormal lamp.However, by this method, that is, allow to detect lamp
Life-span is also difficult to whether lamp is certified products.
In addition, for example in patent document 2, it is set to light source as incandescent lamp or fluorescent lamp and has been connected in parallel electricity
The circuit of resistance and capacitor is attached, and measures time constant (resistance during voltage as defined in being provided to the both ends of the light source
The product of value and capacitance) come to detect light source be incandescent lamp or fluorescent lamp.However, by this method, that is, allow to detect
Whether the larger difference (time constant varies considerably in incandescent lamp and fluorescent lamp) of time constant is also difficult to be identical
Certified products between incandescent lamp.In addition, for example in patent document 3, it is set to being sealing into the bulb of same incandescent bulb
The discharge ionization voltage between these filaments is measured to detect defective work while multiple filament transmitting ultraviolets.However, pass through
This method allows to detection defective work and is also difficult to whether lamp is certified products.
The content of the invention
In order to which the light source of similar product of the light source of certified products with being produced by other manufacturers is identified, with such as patent text
Offer 1 and 3 identify whether light source unqualified like that or identify whether to compare for xenogenesis light source as described in Patent Document 2, it is necessary to
The identification device of higher precision.In addition, it is also necessary to while solution never makes the review time of multiple light sources significantly exceed exposure device
Starting time, the cost that does not make exposure device overall such problem is significantly increased.
The present invention be in view of above-mentioned problem and make, its object is to provide one kind for printed circuit board etc.
Exposure exposure device in possess for high accuracy, the short time and at low cost identification as the discharge lamp of light source whether be just
The exposure device and its inspection method of the incandescent lamp of product.
In order to solve above-mentioned problem, the invention described in claim 1 in the present invention, such as formed as follows shown in Fig. 1
1st exposure device 100.That is, the 1st exposure device 100 is characterised by possessing：
One or more light supply apparatuses 4, including whether discharge lamp 1 as light source, the detection discharge lamp 1 are certified products
Incandescent lamp 2 and the reflector container 3 for being provided with the discharge lamp 1 and the incandescent lamp 2；Framework 5, pacify towards shone thing
Fill the light supply apparatus 4；Constant-current supply 8, electric current is provided to the incandescent lamp 2；Switch 10, to from the constant-current supply 8
The electric current carries out break-make；Control unit 9, the white heat is made to the progress of switch 10 break-makes in the lighting of the discharge lamp 1
Lamp 2 lights the defined time；Measurement portion 11, measure the both end voltage of the incandescent lamp 2 in lighting；Comparing section 12, compare by
The both end voltage that the measurement portion 11 is measured and judge discharge lamp 1 whether be certified products defined higher limit and lower limit
The voltage range of value；Determination unit 13, receive the signal from the comparing section 12, the both end voltage it is described it is defined on
Judge that check object discharge lamp is certified products in the case of in the voltage range of limit value and lower limit, in the both end voltage in institute
Judge that check object discharge lamp is non-certified products in the case that the voltage range of higher limit and lower limit as defined in stating is outer；It is and aobvious
Show portion 14, show result of determination.
In addition, the example described in claim 2 as shown in figure 1, form the 2nd exposure device 101 as follows.That is, the 2nd exposes
Electro-optical device 101 is characterised by possessing：
1~multiple light sources device 4, including whether discharge lamp 1 as light source, the detection discharge lamp 1 are certified products
Incandescent lamp 2 and the reflector container 3 for being provided with the discharge lamp 1 and the incandescent lamp 2；Framework 5, towards shone thing
The light supply apparatus 4 is installed；Constant-current supply 8, electric current is provided to the incandescent lamp 2；Switch 10, to from the constant-current supply 8
The electric current carry out break-make；Control unit 9, switch 10 makes 2 points of the incandescent lamp described in break-make in the lighting of the discharge lamp 1
Time as defined in bright；Measurement portion 15, the both end voltage of the incandescent lamp 2 in lighting is measured 2 times in the stipulated time respectively；Than
Compared with portion 16, difference in voltage when comparing voltage and the 2nd measurement when measuring the incandescent lamp 2 for the 1st time by the measurement portion 15 and
Judge discharge lamp whether be certified products defined higher limit and lower limit voltage difference scope；Determination unit 17, receiving come from institute
State the signal of comparing section 16, described 1st time measure when voltage and the 2nd time measurement when difference in voltage it is described it is defined on
Judge that check object discharge lamp is certified products in the case of in the range of the voltage difference of limit value and lower limit, in described 1st time measurement
When voltage and feelings of the difference in voltage outside the voltage difference scope of the defined higher limit and lower limit during the 2nd measurement
Judge that check object discharge lamp is non-certified products under condition；And display part 14, show result of determination.
In addition, the invention described in claim 3 is related to a kind of inspection method of discharge lamp 1,
Characterized in that, equipped with whether being just including the discharge lamp 1 as light source, the detection discharge lamp 1
The incandescent lamp 2 of product and be mounted with the discharge lamp 1 and the incandescent lamp 2 reflector container 3 multiple light sources device 4 power
Profit requires in the exposure device 101 described in exposure device 100 or claim 2 described in 1 that the control unit 9 is put described
Break-make is carried out to the incandescent lamp 2 to be examined in whether the discharge lamp 1 is certified products successively in the lighting of electric light 1.
Invention according to claim 1, in the discharge lamp and incandescent lamp for being received into same reflection body container, electric discharge
Lamp is utilized as light source, incandescent lamp as the resistance device for being used for identifying the whether pure inherent voltage of discharge lamp is produced.
Before incandescent lamp is installed into reflector container, constant current is provided to incandescent lamp monomer, is measured after the stipulated time
The voltage at the both ends of incandescent lamp.The voltage at the both ends of multiple incandescent lamps is measured under the same conditions, determines voltage's distribiuting scope.It
Afterwards, in the discharge lamp and incandescent lamp for being received into same reflection body container, compare with the white heat of conditioned measurement same as described above
The voltage at the both ends of lamp and above-mentioned voltage's distribiuting scope, if the voltage measured in the range of the voltage's distribiuting, can
Discharge lamp of the incandescent lamp for being identified as and measuring in same reflection body container is certified products.It is right in above-mentioned exposure device
Whole discharge lamps carry out successively it is above-mentioned compare to determine, can the short time, low cost and accurately identify discharge lamp for just
Product.In addition, in above-mentioned invention, it is able to recognise whether if the voltage at both ends of No. 1 incandescent lamp is measured as certified products.
Common incandescent lamp is used in the exposure device of the present invention, the material of its filament is tungsten etc., due to caused by filament
Heat, the resistance value of filament represent intrinsic temperature change.Therefore, the filament after and then constant current is provided to incandescent lamp
When temperature is also low, its resistance value is very small (several ohms), the voltage at the both ends of incandescent lamp now is measured, then in filament
Temperature when fully rising (more than 600 degree Celsius), its resistance value increases several times, measures voltage now, when measurement both
Difference in voltage when as the intrinsic voltage difference of filament.
Invention according to claim 2, by using due to voltage difference caused by the intrinsic temperature of above-mentioned filament,
Certified products can more precisely be identified.Before incandescent lamp is installed into reflector container, constant electricity is provided to incandescent lamp monomer
Stream, the electricity at the both ends of the incandescent lamp when temperature of measurement filament is low after and then starting constant current supply to incandescent lamp first
The voltage of pressure, the then both ends when the temperature that filament is measured after the stipulated time fully rises, measures both voltage
Difference.With the voltage at the both ends of the multiple incandescent lamps of identical conditioned measurement, voltage difference distribution is determined.Afterwards, it is being received into together
In the discharge lamp and incandescent lamp of one reflector container, compare the incandescent lamp gone out with conditioned measurement same as described above voltage difference and
Above-mentioned voltage difference distribution, if the voltage difference measured the voltage difference distribution in the range of, can be identified as with vain
Discharge lamp in vehement lamp same reflection body container is certified products.In above-mentioned exposure device, the discharge lamp of whole is carried out successively
Above-mentioned compares to determine, can the short time, low cost and more precisely identify discharge lamp whether be certified products.
In above-mentioned invention, the voltage at the both ends of No. 2 incandescent lamps is measured, measure is caused by the temperature of the 1st time and the 2nd time
Voltage difference and be compared, therefore possess instead of incandescent lamp and be connected to the filament with incandescent lamp even in comparing to determine
The fixed resister of identical resistance value etc. be not certified products the Optical devices of discharge lamp in the case of, by fixed resister etc.
Temperature caused by voltage difference it is significantly different from incandescent lamp, therefore can identify that the discharge lamps of the Optical devices is not certified products.
Brief description of the drawings
Fig. 1 is the synoptic diagram for the exposure device for representing one embodiment of the present of invention.
Fig. 2 is the top view in the light source portion for representing one embodiment of the present of invention.
Fig. 3 is the sectional view for the light supply apparatus for representing one embodiment of the present of invention.
Fig. 4 be represent embodiments of the invention 1 switch on-off with the both end voltage of incandescent lamp measurement timing when
Sequence figure.
Fig. 5 be represent embodiments of the invention 2 switch on-off with the both end voltage of incandescent lamp measurement timing when
Sequence figure.
Embodiment
Hereinafter, the present invention is illustrated according to Fig. 1~Fig. 5.In addition, in each mark, by each position with upper list of notion
Number and only represented with Arabic numerals without the secondary of letter in the case of showing, in the case where needing to distinguish each position (i.e. with
The situation that subordinate concept represents), the secondary numbering of lowercase is attached to Arabic numerals and distinguished.In addition, in accompanying drawing
In explanation, same tag is added to same key element, the repetitive description thereof will be omitted.
Fig. 3 is the sectional view for the light supply apparatus 4 for representing one embodiment of the present of invention.Discharge lamp 1 has：Luminous tube 1d,
Possess illuminating part 1b and the inner space 1a by illuminating part 1b with the inner space 1a for having enclosed the luminescent substances such as mercury
A pair of sealing 1c of sealing；A pair of electrodes 1e, configured opposed to each other in illuminating part 1b；And a pair of supply lines 1f, use
In power supply.Incandescent lamp 2 is common incandescent lamp, silk obtained from tungsten etc. is processed as coiled type by filament 2a uses.The resistance of tungsten
Value is very small at normal temperatures, but because the heating (more than 600 degree Celsius) of filament, resistance value become greatly several times.As reflection
The material of body container 3, consider glass or aluminium etc., the reflecting surface 3a with the paraboloid of revolution is formed in inner side.Reflector container 3
Base portion 3b is coated with the outside of bowl-shape bottom, its junction surface is fixed with bonding agent 3e.Other base portion 3b bottom partes tegmentalis 3c
Covering, its junction surface is fixed with cap (cap) structure.Base portion 3b and cap 3c is that internally have the collecting for housing incandescent lamp 2
Space 3g component, preferably formed with the high material of insulating properties and thermal conductivity.
The sealing 1c of discharge lamp 1 side is inserted into the patchhole 3f for the bowl-shape bottom for being formed at reflector container 3, with
Patchhole 3f is fixed by bonding agent etc..In addition, a sealing 1c side is configured to penetrate base portion 3b patchhole 3d and arrive
Up to cap 3c inner space.Incandescent lamp 2 is configured at the receiving space 3g formed by base portion 3b and cap 3c.Light supply apparatus 4 with
A pair of current supply line 1f of discharge lamp 1 and a pair of supply lines 2b of incandescent lamp 2 this amount to four supply lines and connect.
Fig. 2 is the top view in the light source portion 6 of one embodiment of the present of invention.In the longitudinal direction of framework 54 row, laterally 6 row respectively
Light supply apparatus 4 is mounted with, forms light source portion 6.
Fig. 1 is the synoptic diagram for the exposure device for representing embodiments of the invention 1 and 2, is irradiated to shone thing
Multiple light sources device 4 is installed in the light source portion 6 of light, each light supply apparatus 4 with the lighting circuit 7 of electric power is provided to discharge lamp 1 with
And connected to the constant-current supply 8 of the offer constant current of incandescent lamp 2.Being connected in series between constant-current supply 8 and incandescent lamp 2 will be constant
Electric current carries out the switch 10 of break-make, and the switch 10 is to carry out break-make by control unit 9.In addition, in constant-current supply 8 and white heat
Resistance 30 is connected in series between lamp 2, constant-current supply 8 is protected in the case where short trouble occurs for incandescent lamp 2.The two of incandescent lamp 2
End is also connected with measurement portion 11, and can measure voltage, resistance 11a represents the internal resistance of measurement portion 11, is and incandescent lamp 2
Filament 2a resistance value is compared to fully big resistance value (several megaohms or so), therefore measurement portion 11 can accurately measure filament 2a
Caused voltage.
The electricity of the incandescent lamp of the multiple certified products detections gone out with prespecified conditioned measurement is registered in comparing section 12
Distribution is pressed, determination unit 13 judges whether discharge lamp is certified products according to the comparative result of comparing section 12, and display part 14 shows it
Result of determination.In Fig. 1, measurement portion 15, comparing section 16, determination unit 17 and the exposure device 101 that reference has parantheses exist
Used in embodiment 2 and distinguish identical structure, such case following table with the measurement portion 11, comparing section 12, determination unit 13 of embodiment 1
Show it is exposure device 101.In comparing section 16 with prespecified condition register to the incandescent lamps of multiple certified products detections with
The distribution of voltage difference when predetermined time interval measures 2 times.
[embodiment 1]
In Fig. 1, when connecting the power switch of exposure device 100, the discharge lamp 1 of lighting circuit 7 to whole provides electricity
Power.Generally, discharge lamp 1 starts completely needs a few minutes.After exposure device 100 has just switched on power switch, control unit 9 will
The 1st switch 10 being connected with the 1st incandescent lamp 2 in light supply apparatus 4 is set to turn on, and constant current is provided from constant-current supply 8.From
(such as after 10 seconds) are measured the both ends electricity of the 1st incandescent lamp 2 by measurement portion 11 after stipulated time from during the conducting of the 1st switch 10
Pressure, the result is sent to comparing section 12, comparing section 12 compares the result and pre-registers multiple certified products in comparing section 12
The voltage's distribiuting scope of the incandescent lamp of detection, will whether registration voltage range in be sent to determination unit 13, if registered
In voltage range, then determination unit 13 judges that corresponding discharge lamp 1 is certified products, if outside registration scope, judges corresponding
Discharge lamp 1 be non-certified products, its result of determination is shown to display part 14.It is automatically to enter from inspection of the measurement untill display
Capable, therefore to terminate in very short time.
After the voltage measurement of the 1st incandescent lamp 2 terminates, the be connected with the 1st incandescent lamp 2 the 1st switch 10 is set to by control unit 9
Disconnect, the be connected with the 2nd incandescent lamp 2 the 2nd switch 10 is set to turn on, constant current is provided from constant-current supply 8.Later with the 1st
The situation of incandescent lamp 2 judges whether corresponding discharge lamp 1 is certified products in the same manner, carries out identical inspection until terminating whole
Untill the inspection of incandescent lamp 2.
In the case of being made up of in light source portion 6 discharge lamp of 24, each lamp needs such as 10 seconds, uses in this case
Terminate within (4 minutes) 240 seconds to check.Therefore, if it is considered that the startup time of in general discharge lamp is or so a few minutes, exposure device
The overall starting time is usually 10 minutes or so, then can terminate to check with the fully short time.
Now, incandescent lamp 2 voltage outside registration voltage range, determination unit 13 judge corresponding discharge lamp 1 to be non-
In the case of certified products, the preferably display of display part 14 determines that information and the discharge lamp of the position of corresponding discharge lamp are non-certified products
The meaning, control unit 9 can interrupt inspection temporarily, afterwards by starting again at inspection after the confirmation such as operator.In addition, answered as other
To mode, more preferably in the case of the discharge lamp of non-certified products is detected, the electric discharge of whole is carried out with also not interrupting detection
The inspection of lamp, by with showing that the situation identical information of inspection result is stored in storage device etc. in addition by display part 14,
The inspection of whole discharge lamps can show positional information of discharge lamp of non-certified products etc. in the lump after terminating.
The relation of the timing of the break-make of switch 10 and the measurement timing of measurement portion 11 is shown in Fig. 4.Figure 4 illustrates：
The both ends of the 1st incandescent lamp 2 are measured after the defined time from the 1st switch 10 being connected with the 1st incandescent lamp 2 turns into conducting
Voltage, the 1st switch 10 being connected after immediately measuring with the 1st incandescent lamp 2, which turns into, to be disconnected, the 2nd be connected with the 2nd incandescent lamp 2
Switch 10 turns into conducting, and the voltage at the both ends of the 2nd incandescent lamp 2 is measured after the defined time, similarly measures later all
Incandescent lamp 2 both end voltage.Above-mentioned structure be added in the exposure device of conventional more lamp types constant-current supply 8,
Structure after switch 10, control unit 9, measurement portion 11, comparing section 12, determination unit 13, display part 14, particularly control unit 9, compare
Portion 12, determination unit 13 can also be realized by 1 microcomputer etc., will not greatly increase the cost of exposure device.
[embodiment 2]
In Fig. 1, the key element different from embodiment 1 is measurement portion 15 (internal resistance is resistance 15a), comparing section 16, sentenced
Determine portion 17, other key elements are identical.Omit the explanation of key element same as Example 1.Just switch on power out in exposure device 101
After pass, the be connected with the 1st incandescent lamp 2 in light supply apparatus 4 the 1st switch 10 is set to conducting to provide perseverance from constant-current supply 8
Determine electric current.The 1st of the both end voltage of the 1st incandescent lamp 2 the measurement is being carried out by measurement portion 15 shortly after, the result is being sent out
Give comparing section 16.Then (such as after 10 seconds) carry out the 1st incandescent lamp by measurement portion 15 after the stipulated time from the 1st measurement
2nd measurement of 2 both end voltage, the result is sent to comparing section 16, comparing section 16 compares the electricity of 2 measurement difference in voltage
Press and pre-register the voltage difference distribution in the incandescent lamp of multiple certified products detections of comparing section 16, whether will stepped on
Determination unit 17 is sent in the range of the voltage difference of note, determination unit 17 judges corresponding discharge lamp 1 if in the range of registration
For certified products, judge that corresponding discharge lamp 1 is non-certified products if outside registration scope, the result of determination is shown to display part
14.Automatically carry out from inspection of the measurement untill display, therefore terminate in very short time.
After 2 voltage measurements of the 1st incandescent lamp 2 terminate, control unit 9 switchs 10 by the be connected with the 1st incandescent lamp 2 the 1st
It is set to disconnect, the be connected with the 2nd incandescent lamp 2 the 2nd switch 10 is set to turn on, constant current is provided from constant-current supply 8.Later with
The situation of 1st incandescent lamp 2 similarly judges that corresponding discharge lamp 1 is certified products, carries out identical inspection until the white heat of whole
Untill the inspection of lamp terminates.
The relation of the timing of the break-make of switch 10 and the measurement timing of measurement portion 15 is shown in Fig. 5.Figure 5 illustrates：Tightly
The 1st switch 10 being connected with the 1st incandescent lamp 2 is connect to survey as the voltage at the both ends for the 1st incandescent lamp 2 for carrying out the 1st time after conducting
Amount, the voltage measurement at the both ends of the 1st incandescent lamp 2 of the 2nd time is then carried out after the defined time, it is measured at immediately the 2nd time
The 1st switch 10 being connected afterwards with the 1st incandescent lamp 2, which turns into, to be disconnected, and the 2nd switch 10 being connected with the 2nd incandescent lamp 2 turns into conducting, tightly
Connect the voltage measurement at the both ends for the 2nd incandescent lamp 2 that the 1st time is carried out after it, then carried out after the defined time the 2nd time the
The voltage measurement at the both ends of 2 incandescent lamps 2, the 2nd switch 10 being connected after immediately the 2nd time measurement with the 2nd incandescent lamp 2 turn into disconnected
Open, similarly the both end voltage of the incandescent lamp 2 of whole is respectively measured 2 times later.
In example 2, in the setting of the 1st time and the voltage measurement time of the 2nd time, switch 10 is conducting state
Period can set random time.Incandescent lamp voltage difference for the voltage difference scope registered outside and determination unit 17 sentence
In the case that fixed corresponding discharge lamp 1 is non-certified products, preferably takes and tackled with the situation identical of embodiment 1.In addition, in reality
Apply in example 1, additionally it is possible to by the computer for changing control control unit 9, measurement portion 11, comparing section 12, determination unit 13, display part 14
Program realizes embodiment 2 with not changing hardware configuration.
In the exposure device 100 (101) of the present invention, more in the number of units of light supply apparatus 4 and these incandescent lamps 2 inspections
In the case of looking into the startup time that the time significantly exceedes exposure device 100 (101), by control unit 9, constant-current supply 8, measurement portion 11
(15), comparing section 12 (16), determination unit 13 (17), display part 14 set up count corresponding with the number of units needed for the inspection of incandescent lamp 2
Amount, makes them be operable to concurrently carry out the inspection of incandescent lamp 2 in parallel, thus, it is possible to tackle with not increasing the review time
The number of units of light supply apparatus 4 increases and checked.
The present invention can not only be used in the exposure dress for the exposure process-use that wiring pattern is formed on printed circuit board
Put, but also can be used in make use of the liquid crystal display panel of discharge lamp to use, all exposure devices such as semiconductor device
Have with the appearance inspection device of part etc. in the device of discharge lamp that certified products is needed in the light supply apparatus of multiple lamps.
Claims (2)
1. a kind of light supply apparatus, it is characterised in that including the discharge lamp as light source, detect whether the discharge lamp is certified products
Incandescent lamp and the reflector container for being provided with the discharge lamp and the incandescent lamp,
The incandescent lamp is lit in the lighting of the discharge lamp, by detect the incandescent lamp voltage whether be as defined on
Judge whether the discharge lamp is certified products in the voltage range of limit value and lower limit.
2. light supply apparatus according to claim 1, it is characterised in that
The reflector container has：There is the reflecting surface of the paraboloid of revolution in inner side；
Bowl-shape bottom；
It is coated on the base portion in the outside of the bowl-shape bottom；And
The cap of the bottom of the base portion is covered,
The base portion and the cap have the space for internally housing incandescent lamp.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-081773 | 2015-04-13 | ||
| JP2015081773A JP5869713B1 (en) | 2015-04-13 | 2015-04-13 | Light source apparatus, exposure apparatus, and inspection method thereof |
| CN201610225945.2A CN106061077B (en) | 2015-04-13 | 2016-04-13 | Exposure device and its inspection method |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610225945.2A Division CN106061077B (en) | 2015-04-13 | 2016-04-13 | Exposure device and its inspection method |
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| CN107478976A true CN107478976A (en) | 2017-12-15 |
| CN107478976B CN107478976B (en) | 2020-05-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610225945.2A Active CN106061077B (en) | 2015-04-13 | 2016-04-13 | Exposure device and its inspection method |
| CN201710673011.XA Active CN107478976B (en) | 2015-04-13 | 2016-04-13 | Light source device |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610225945.2A Active CN106061077B (en) | 2015-04-13 | 2016-04-13 | Exposure device and its inspection method |
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| Country | Link |
|---|---|
| JP (1) | JP5869713B1 (en) |
| KR (3) | KR101804755B1 (en) |
| CN (2) | CN106061077B (en) |
| TW (2) | TWI609249B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018143300A1 (en) | 2017-02-02 | 2018-08-09 | 株式会社ブイ・テクノロジー | High-pressure discharge lamp |
| KR102537954B1 (en) * | 2017-08-23 | 2023-05-30 | 페닉스덴키가부시키가이샤 | Light source device, exposure device, and determination method of light source device |
| JP6951740B2 (en) * | 2017-09-11 | 2021-10-20 | フェニックス電機株式会社 | Light source device, irradiation device equipped with it, and lighting method of light source device |
| JPWO2019054250A1 (en) * | 2017-09-16 | 2020-10-15 | フェニックス電機株式会社 | Light source device, exposure device, and method for determining the light source device |
| US11913985B2 (en) * | 2018-03-13 | 2024-02-27 | Phoenix Electric Co., Ltd | Light source device including discharge lamp, irradiation device and distinguishing method for discharge lamp |
| JP7060244B2 (en) * | 2018-12-12 | 2022-04-26 | フェニックス電機株式会社 | A light source for an exposure device, an exposure device using the light source, and an exposure method for a resist. |
| JP7253798B2 (en) | 2019-11-18 | 2023-04-07 | フェニックス電機株式会社 | LAMP HOLDING CASSETTE AND LIGHT SOURCE FOR EXPOSURE DEVICE USING THE SAME |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05315090A (en) * | 1992-05-13 | 1993-11-26 | Hitachi Medical Corp | X-ray device |
| KR19990031316U (en) * | 1997-12-30 | 1999-07-26 | 정몽규 | Head lamp power disconnect when using non-genuine head lamps |
| JP2001210490A (en) * | 2000-01-26 | 2001-08-03 | Matsushita Electric Works Ltd | Discharge lamp lighting device |
| CN101223829A (en) * | 2005-07-15 | 2008-07-16 | 松下电器产业株式会社 | High voltage discharge lamp operation method, operation device, light source device, and projection type image display device |
| WO2014167406A1 (en) * | 2013-04-09 | 2014-10-16 | 株式会社オーク製作所 | Light source device, and exposure device provided with light source device |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6243059A (en) | 1985-08-19 | 1987-02-25 | 東芝ライテック株式会社 | Defect detection of incandescent lamp |
| JPS62292548A (en) * | 1986-06-10 | 1987-12-19 | Koito Mfg Co Ltd | Headlight for vehicle |
| JP3214176B2 (en) | 1993-08-16 | 2001-10-02 | 日産自動車株式会社 | Differential limit torque control device |
| JP2007506239A (en) * | 2003-09-18 | 2007-03-15 | コニンクリユケ フィリップス エレクトロニクス エヌ．ブイ． | Mixed light lamp |
| JP4101269B2 (en) * | 2006-03-31 | 2008-06-18 | 株式会社オーク製作所 | Light source device |
| JP2007333965A (en) | 2006-06-14 | 2007-12-27 | Adtec Engineeng Co Ltd | Illumination device for exposure |
| WO2008078241A1 (en) * | 2006-12-20 | 2008-07-03 | Philips Intellectual Property & Standards Gmbh | White light emitting electric lamp assembly |
| JP4937808B2 (en) * | 2007-03-26 | 2012-05-23 | フェニックス電機株式会社 | Light source device and exposure apparatus using the same |
| JP4955436B2 (en) | 2007-03-26 | 2012-06-20 | フェニックス電機株式会社 | Light source device and exposure apparatus using the same |
| US7969100B2 (en) | 2007-05-17 | 2011-06-28 | Liberty Hardware Manufacturing Corp. | Bulb type detector for dimmer circuit and inventive resistance and short circuit detection |
| JP5247268B2 (en) * | 2008-07-08 | 2013-07-24 | 三洋電機株式会社 | Projection-type image display device |
| TWM409671U (en) * | 2010-12-29 | 2011-08-11 | Ecolumina Technologies Inc | Illumination control system |
| JP5069371B1 (en) * | 2011-12-16 | 2012-11-07 | フェニックス電機株式会社 | Light source device |
| CN104062099A (en) * | 2014-07-16 | 2014-09-24 | 苏州威盛视信息科技有限公司 | Testing device and method for LED light strips with side luminance |
-
2015
- 2015-04-13 JP JP2015081773A patent/JP5869713B1/en active Active
-
2016
- 2016-03-08 TW TW105107036A patent/TWI609249B/en active
- 2016-03-08 TW TW106131956A patent/TWI639899B/en active
- 2016-04-12 KR KR1020160044876A patent/KR101804755B1/en active IP Right Grant
- 2016-04-13 CN CN201610225945.2A patent/CN106061077B/en active Active
- 2016-04-13 CN CN201710673011.XA patent/CN107478976B/en active Active
-
2017
- 2017-10-11 KR KR1020170130254A patent/KR20170118003A/en active Search and Examination
-
2018
- 2018-09-06 KR KR1020180106232A patent/KR101962099B1/en active IP Right Grant
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05315090A (en) * | 1992-05-13 | 1993-11-26 | Hitachi Medical Corp | X-ray device |
| KR19990031316U (en) * | 1997-12-30 | 1999-07-26 | 정몽규 | Head lamp power disconnect when using non-genuine head lamps |
| JP2001210490A (en) * | 2000-01-26 | 2001-08-03 | Matsushita Electric Works Ltd | Discharge lamp lighting device |
| CN101223829A (en) * | 2005-07-15 | 2008-07-16 | 松下电器产业株式会社 | High voltage discharge lamp operation method, operation device, light source device, and projection type image display device |
| WO2014167406A1 (en) * | 2013-04-09 | 2014-10-16 | 株式会社オーク製作所 | Light source device, and exposure device provided with light source device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI609249B (en) | 2017-12-21 |
| JP5869713B1 (en) | 2016-02-24 |
| TWI639899B (en) | 2018-11-01 |
| KR20160122086A (en) | 2016-10-21 |
| JP2016200751A (en) | 2016-12-01 |
| TW201708971A (en) | 2017-03-01 |
| KR20180103785A (en) | 2018-09-19 |
| CN106061077B (en) | 2018-06-12 |
| CN107478976B (en) | 2020-05-19 |
| CN106061077A (en) | 2016-10-26 |
| KR101962099B1 (en) | 2019-03-27 |
| KR20170118003A (en) | 2017-10-24 |
| KR101804755B1 (en) | 2017-12-06 |
| TW201809908A (en) | 2018-03-16 |
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