TW201708971A - Exposure device and method for inspecting the same - Google Patents

Abstract

An exposure device 100 includes: one or a plurality of light source devices 4 each being composed of a discharge lamp 1, an incandescent lamp 2, and a reflector housing 3; a frame 5 on which the light source devices 4 are mounted; a constant-current power supply 8 which supplies a current to the incandescent lamp 2; a switch 10 which tums on and off the current supplied from the constant-current power supply 8; a controller 9 which turns on and off the switch 10 for a predetermined period; a measurement unit 11 which measures voltage between both ends of the incandescent lamp 2; a comparator 12 which compares the voltage between the both ends with a predetermined voltage range; a determination unit 13 which determines whether the discharge lamp 1 is a genuine product by using the result of the comparison; and a display unit 14.

Description

Exposure device and inspection method thereof

The present invention relates to an exposure apparatus for use in exposure to a printed circuit board or the like, and an exposure apparatus including an incandescent lamp for detecting whether or not a discharge lamp as a light source is a pure genuine product, and an inspection method therefor.

In order to attach a member to an electronic device, a printed circuit board in which a wiring pattern is formed of a metal such as copper on a substrate such as a resin or a glass epoxy material is used. The formation of wiring patterns on such printed circuit boards is by photolithography. In this case, the metal layer to be wired is formed on the entire surface of the substrate, and the photoresist of the photosensitive agent is applied, and the irradiation light from the exposure device is irradiated by the same mask as the wiring pattern. In terms of photoresist, there are a negative photoresist which reduces the solubility of the photoresist due to irradiation of light, and a positive photoresist which in turn increases the solubility of the photoresist due to the irradiation of light. The photoresist portion which is relatively increased in solubility due to irradiation with light is chemically removed, and when the exposed metal layer is removed by etching, only the metal layer remaining under the portion where the photoresist remains is removed, and the photoresist is removed. The wiring pattern is formed on the substrate. The light resistance of either the positive or negative type is illuminated by light. In the case of irradiation, in order to ensure a uniform exposure amount over the entire surface of the irradiation surface, it is necessary to irradiate a stable irradiation light for a certain period of time under uniform illumination.

On the other hand, in the printed circuit board, in order to increase the efficiency of the process, the printed circuit board is increased in size, and after the substrate is completed, it is divided and reduced in size, and used in a desired electronic device. With the increase in size of printed circuit boards, exposure device manufacturers intend to increase the size of discharge lamps that are light sources to high illumination, or to ensure uniform exposure with multiple lamps that use multiple low-illuminance small discharge lamps. . For example, instead of using a light source of one 8 kW high pressure discharge lamp, four light sources of a 2 kW high pressure discharge lamp or the like are used. The low-illumination discharge lamp is superior to the high-illumination discharge lamp in terms of manufacturing difficulty, manufacturing cost, and the like, and most of the exposure devices having a multi-lamp light source are sold.

However, as the light source is multi-lit, it becomes more important to ensure the uniformity of the exposure amount from the uniformity of the plurality of discharge lamps. Therefore, in order to stabilize the performance of the exposure apparatus and to manufacture a printed circuit board with high reliability, it is necessary to use only a purely genuine discharge lamp made of the same material and the same method by the same manufacturer, and it is necessary to identify whether the discharge lamp is pure or not. Equipment and inspection methods.

In the optical device, there is known a method of recognizing a discharge lamp, a light source, and the like used (for example, Japanese Patent Application Laid-Open No. Hei 7-52677 (Patent Document 1), Japanese Patent Laid-Open Publication No. 2010-527504 (Patent Document 2), and Japanese Patent Laid-Open Publication No. SHO 62-43059 (Patent Document 3). For example, in The lamp abnormality detecting device disclosed in Patent Document 1 is configured to supply a predetermined voltage to an incandescent bulb using a filament such as a halogen lamp, and to compare a current value when the filament is in a half-off state and a current value when the filament is normal, and detect an abnormal lamp. . However, by this, even if the life of the lamp can be detected, it is difficult to recognize whether the lamp is a genuine product.

Further, for example, in Patent Document 2, a circuit in which a resistor and a capacitor are connected is connected in parallel with a light source such as an incandescent lamp or a fluorescent lamp, and a time constant (resistance value and time) when a predetermined voltage is supplied to both ends of the light source is measured. The product of the capacitance value) and the detection source is an incandescent lamp or a fluorescent lamp. However, by this, even if the difference in the time constant can be detected (the incandescent lamp and the fluorescent lamp system have very different time constants), it is difficult to recognize whether it is a pure genuine product under the same incandescent lamp. Further, for example, in Patent Document 3, a plurality of filaments in a bulb enclosed with the same incandescent bulb are irradiated with ultraviolet rays, and a discharge start voltage between the filaments is measured to detect a defective product. However, it is difficult to recognize whether the lamp is a genuine product even if a defective product can be detected.

It is necessary to identify a purely authentic light source with a light source of a similar product manufactured by another manufacturer. For example, Patent Documents 1 and 3 recognize whether or not the light source is defective, or if, for example, Patent Document 2 identifies whether it is a different kind of light source, higher precision is required. Identification device. In addition, it is also necessary to simultaneously solve the inspection time of the plurality of light sources not significantly exceeding the startup time of the exposure device, and is not large This increases the cost of the overall exposure device.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide an exposure apparatus for exposure to a printed circuit board or the like, which is provided with high precision and shortness for providing a discharge lamp for a light source. An exposure device for an incandescent lamp for identification and a low cost, and an inspection method thereof.

In order to solve the above problems, the invention according to the first aspect of the invention is as follows, for example, as shown in Fig. 1, and the first exposure apparatus 100 is configured as follows. In other words, the first exposure apparatus 100 includes a discharge lamp 1 that is a light source, an incandescent lamp 2 that detects whether the discharge lamp 1 is a genuine product, and a reflector container that mounts the discharge lamp 1 and the incandescent lamp 2 described above. 3 to a plurality of light source devices; a frame 5 for mounting the light source device 4 toward the object to be irradiated; a constant current power source 8 for supplying current to the incandescent lamp 2; and the current from the constant current source 8 a switch 10 for turning on/off; a control unit 9 that turns on/off the switch 10 to turn on the incandescent lamp 2 at a predetermined time in the lighting of the discharge lamp 1; and measures the incandescent lamp in the lighting The measuring unit 11 of the voltage at both ends of the two ends; a comparison unit that compares the voltage between the two-terminal voltage measured by the measuring unit 11 and the predetermined upper limit value and the lower limit value for determining whether the discharge lamp 1 is correct or not When receiving the signal from the comparison unit 12 and the voltage between the two ends is within the voltage range of the predetermined upper limit value and the lower limit value, it is determined that the discharge lamp to be inspected is a genuine product, and the voltage at both ends is When the voltage range outside the predetermined upper limit value and the lower limit value is outside, the determination unit 13 that determines that the discharge lamp to be inspected is an impure product is determined, and the display unit 14 that displays the determination result.

Further, as in the invention of claim 2, for example, as shown in Fig. 1, the second exposure apparatus 101 is configured as follows. In other words, the second exposure apparatus 101 includes a discharge lamp 1 that is a light source, an incandescent lamp 2 that detects whether the discharge lamp 1 is a genuine product, and a reflector container that mounts the discharge lamp 1 and the incandescent lamp 2 described above. 3 to a plurality of light source devices; a frame 5 for mounting the light source device 4 toward the object to be irradiated; a constant current power source 8 for supplying current to the incandescent lamp 2; and the current from the constant current source 8 a switch 10 for turning on/off; a control unit 9 for turning on/off the switch 10 to turn on the incandescent lamp 2 at a predetermined time in the lighting of the discharge lamp 1; for the incandescent lamp in the lighting The measurement unit 15 that measures the voltage at both ends of the two ends at a predetermined time; the difference between the voltage at the first measurement of the incandescent lamp 2 and the voltage at the second measurement, and the discharge The comparison unit 16 for determining the voltage difference range between the predetermined upper limit value and the lower limit value for determining whether the lamp is correct or not; receiving the signal from the comparison unit 16, the voltage during the first measurement, and the time during the second measurement The difference in voltage is at the aforementioned upper and lower limit values In the case of the voltage difference range, it is determined that the discharge lamp to be inspected is a genuine product, and the voltage between the voltage at the first measurement and the voltage at the second measurement is at the predetermined upper limit and lower limit voltage. When the difference is outside the range, the determination unit 17 that determines that the discharge lamp to be inspected is a non-pure product is determined; and the display unit 14 that displays the determination result.

Further, the invention of the third aspect of the invention is related to the inspection method of the discharge lamp 1 described above, the apparatus 1 for arranging the discharge lamp 1 as a light source, the incandescent lamp 2 for detecting whether the discharge lamp 1 is a genuine product, and the loading. The plurality of the light source devices 4 of the discharge lamp 1 and the reflector container 3 of the incandescent lamp 2, the exposure device 100 of the first aspect of the patent application, or the exposure device 101 of the second application of the patent scope, the aforementioned The control unit 9 sequentially turns on/off the incandescent lamp 2 in the lighting of the discharge lamp 1, and sequentially checks whether the discharge lamp 1 is correct or not.

According to the invention of the first application of the patent application, in the discharge lamp and the incandescent lamp housed in the same reflector container, the discharge lamp is used as the light source, and the incandescent lamp is used to generate whether the identification discharge lamp is pure or not. Intrinsic voltage resistance device. Before the incandescent lamp is placed in the reflector vessel, a constant current is supplied to the incandescent lamp unit, and the voltage across the incandescent lamp after a predetermined period of time is measured. The voltage across the plurality of incandescent lamps is measured under the same conditions to determine the voltage distribution range. Thereafter, the discharge lamp and the incandescent lamp housed in the same reflector container are compared with the voltages at both ends of the incandescent lamp measured under the same conditions and the voltage distribution range described above, and the measured voltage is within the voltage distribution range. It can be recognized that the measured incandescent lamp and the discharge lamp in the same reflector container are purely genuine. In the above-described exposure apparatus, the above-described comparison determination is sequentially performed for all the discharge lamps, and it is possible to recognize whether or not the discharge lamp is a pure genuine product in a short time, at low cost, and with high precision. In addition, in In the above invention, it is possible to identify whether it is a pure genuine product by measuring the voltage of both ends of the incandescent lamp once.

In the case of a general incandescent lamp used in the exposure apparatus of the present invention, the material of the filament is tungsten or the like, and the resistance value of the filament exhibits an inherent temperature variation depending on the heat generated by the filament. For this reason, immediately after the constant current is supplied to the incandescent lamp, the resistance value is very small (a few ohms) when the temperature of the filament is still low, and the voltage across the incandescent lamp at this time is measured, and then the temperature of the filament is sufficiently raised. At the time (600 degrees Celsius or more), the resistance value is increased by several times, and the voltage at this time is measured, and when the difference between the voltages of the two is measured, the voltage difference inherent to the filament is obtained.

According to the invention described in the second paragraph of the patent application, the voltage difference due to the temperature inherent to the filament is utilized, so that the pure product can be further recognized with high precision. Before charging the incandescent lamp into the reflector vessel, a constant current is supplied to the incandescent lamp unit, first determining the voltage across the incandescent lamp immediately after the temperature of the filament is low after the start of the constant current supply to the incandescent lamp, and then at a predetermined time After the lapse, the voltage at both ends when the temperature of the filament was sufficiently increased was measured, and the voltage difference between the two was measured. The voltage across the plurality of incandescent lamps is measured under the same conditions to determine the voltage difference distribution range. Thereafter, the discharge lamp and the incandescent lamp housed in the same reflector container are compared with the voltage difference between the incandescent lamp measured under the same conditions and the voltage difference distribution range described above, and the measured voltage difference is in the voltage difference distribution range. In the meantime, it can be recognized that the incandescent lamp and the discharge lamp in the same reflector container are purely genuine. In the above-described exposure apparatus, the above-described comparison determination is sequentially performed for all the discharge lamps, and it is possible to recognize whether or not the discharge lamp is a pure genuine product in a short time, at low cost, and with higher precision.

In the above invention, the voltage across the incandescent lamp is measured twice, and the voltage difference between the first and second temperatures is compared. Therefore, instead of the incandescent lamp, the filament having the same connection as the incandescent lamp is connected. When the optical device of the non-pure genuine discharge lamp such as a fixed resistance of the resistance value is compared and judged, the voltage difference due to the temperature of the fixed resistor or the like is still largely different from that of the incandescent lamp, so that the discharge of the optical device can be recognized. The lamp is not purely genuine.

1‧‧‧discharge lamp

1a‧‧‧Internal space

1b‧‧‧Lighting Department

1c‧‧‧ Sealing Department

1d‧‧‧Light tube

1e‧‧‧electrode

1f‧‧‧Power supply line

2‧‧‧ incandescent lamps

2a‧‧‧filament

2b‧‧‧Power supply line

3‧‧‧ reflector container

3a‧‧‧reflecting surface

3b‧‧‧ base

3c‧‧‧ Cover

3d‧‧‧ insertion hole

3e‧‧‧Binder

3f‧‧‧ insertion hole

3g‧‧‧ accommodating space

4‧‧‧Light source device

5‧‧‧ box

6‧‧‧Light source department

7‧‧‧Lighting circuit

8‧‧‧Constant current source

9‧‧‧Control Department

10‧‧‧ switch

11‧‧‧Determination Department

11a‧‧‧resistance

12‧‧‧Comparative Department

13‧‧‧Decision Department

14‧‧‧Display Department

15‧‧‧Determination Department

15a‧‧‧resistance

16‧‧‧Comparative Department

17‧‧‧Decision Department

30‧‧‧resistance

100‧‧‧Exposure device

101‧‧‧Exposure device

Fig. 1 is a schematic view showing an exposure apparatus according to an embodiment of the present invention.

Fig. 2 is a plan view showing a light source unit according to an embodiment of the present invention.

Fig. 3 is a cross-sectional view showing a light source device according to an embodiment of the present invention.

Fig. 4 is a timing chart showing the timing of turning on/off the switch of the embodiment 1 of the present invention and measuring the voltage across the incandescent lamp.

Fig. 5 is a timing chart showing the timing of turning on/off the switch of the embodiment 2 of the present invention and measuring the voltage across the incandescent lamp.

Hereinafter, the present invention will be described with reference to Figs. In addition, in each symbol, the above concept indicates that each part is not added with the branch number of the letter but only by the Arabic numeral, and it is necessary to distinguish each part. In the case of the case (that is, the case indicated by the following concept), the branch number of the lowercase letter is attached to the Arabic numeral for distinction. In the description of the drawings, the same reference numerals are attached to the same elements, and the description thereof will not be repeated.

Fig. 3 is a cross-sectional view showing a light source device 4 according to an embodiment of the present invention. The discharge lamp 1 includes a light-emitting portion 1b having an internal space 1a in which a light-emitting substance such as mercury is sealed, and an arc tube 1d having a pair of seal portions 1c that seal the internal space 1a of the light-emitting portion 1b, and the light-emitting portion 1b. A pair of electrodes 1e arranged to face each other and a pair of power supply lines 1f for supplying power. The incandescent lamp 2 is a general incandescent lamp, and in the case of the filament 2a, a tungsten or the like is processed into a coil shape. The resistance value of tungsten is very small at normal temperature, but the heating of the filament (above 600 degrees Celsius) makes the resistance value become several times larger. In the material of the reflector container 3, glass, aluminum, or the like is considered, and a reflecting surface 3a having a paraboloid of revolution is formed inside. The reflector container 3 is covered with a base portion 3b on the outer side of the bowl-shaped bottom portion, and the joint portion is fixed by the adhesive 3e. Further, the bottom portion of the base portion 3b is covered with a lid portion 3c, and the joint portion is fixed by a metal interface structure. The base portion 3b and the lid portion 3c are formed of a material having a housing space 3g for accommodating the incandescent lamp 2, and are formed of a material having high insulation and thermal conductivity.

One of the sealing portions 1c of the discharge lamp 1 is inserted into the insertion hole 3f formed in the bowl-shaped bottom portion of the reflector container 3, and is fixed to the insertion hole 3f by an adhesive or the like. Further, one of the sealing portions 1c is disposed so as to penetrate the insertion hole 3d of the base portion 3b and reach the internal space of the lid portion 3c. The incandescent lamp 2 is disposed in a receiving space formed by the base portion 3b and the lid portion 3c. 3g. The light source device 4 is connected to a total of four power supply lines of a pair of power supply lines 1f of the discharge lamp 1 and a pair of power supply lines 2b of the incandescent lamp 2.

Fig. 2 is a plan view showing a light source unit 6 according to an embodiment of the present invention. In the frame 5, the light source device 4 is mounted in four rows in the vertical direction and six columns in the horizontal direction to constitute the light source unit 6.

1 is a schematic view showing an exposure apparatus according to Embodiments 1 and 2 of the present invention, in which a plurality of light source devices 4 are attached to a light source unit 6 that illuminates an object to be irradiated with light, in each light source device. 4. A lighting circuit 7 that supplies electric power to the discharge lamp 1 and a constant current power supply 8 that supplies a constant current to the incandescent lamp 2 are connected. Between the constant current power source 8 and the incandescent lamp 2, a switch 10 for turning on/off the constant current is connected in series, and the switch 10 is turned on/off by the control unit 9. Further, between the constant current power source 8 and the incandescent lamp 2, the resistor 30 is connected in series, and in the case where the incandescent lamp 2 is short-circuited, the constant current source 8 is protected. Both ends of the incandescent lamp 2 are connected to the measuring unit 11 in order to measure the voltage, and the resistor 11a indicates the internal resistance of the measuring unit 11, and is sufficiently larger than the resistance value of the filament 2a of the incandescent lamp 2 (million megaohms). To this extent, the measuring unit 11 can accurately measure the voltage generated in the filament 2a.

The comparison unit 12 registers in advance a voltage distribution range of a plurality of incandescent lamps for pure genuine detection measured under predetermined conditions, and the determination unit 13 determines whether or not the discharge lamp is a genuine product based on the comparison result of the comparison unit 12, and the display unit 14 The result of this determination is displayed. In FIG. 1, the measurement unit 15, the comparison unit 16, the determination unit 17, and the exposure apparatus 101, which are written in parentheses, are in the second embodiment, and the measurement unit 11 and the comparison unit 12 in the first embodiment. Each of the determination units 13 is used in the same configuration, and indicates that the exposure apparatus 101 is in this case. The comparison unit 16 registers in advance the distribution range of the voltage difference when the incandescent lamps for a plurality of pure genuine detections are measured twice at predetermined time intervals under predetermined conditions.

[Example 1]

In FIG. 1, when the power switch of the exposure apparatus 100 is turned on, the lighting circuit 7 supplies electric power to all of the discharge lamps 1. In general, it takes several minutes for the discharge lamp 1 to completely rise. Immediately after the power switch of the exposure apparatus 100 is turned on, the control unit 9 turns on the first switch 10 of the first incandescent lamp 2 connected to the light source device 4, and supplies a constant current from the constant current source 8. After a predetermined time from the conduction of the first switch 10, for example, the measurement unit 11 measures the voltage across the first incandescent lamp 2, and sends the result to the comparison unit 12, and the comparison unit 12 compares the result with the pre-registration. The voltage distribution range of the plurality of incandescent lamps for the pure genuine detection in the comparison unit 12 is sent to the determination unit 13 within the registration voltage range, and the determination unit 13 determines that the corresponding discharge lamp 1 is genuine. When it is outside the registration range, it is determined that the corresponding discharge lamp 1 is a non-pure genuine product, and the determination result is displayed on the display unit 14. The inspection from the measurement to the display is automatically performed and ends in a very short time.

After the voltage measurement of the first incandescent lamp 2 is completed, the control unit 9 turns off the first switch 10 connected to the first incandescent lamp 2, and turns on the second switch 10 connected to the second incandescent lamp 2. The constant current source 8 supplies a constant current. After that, it is determined as the case of the first incandescent lamp 2 Whether the discharge lamp 1 is pure or not, the same inspection is performed until the inspection of all the incandescent lamps 2 is completed.

When the light source unit 6 is configured by a 24-lamp discharge lamp, it consumes 10 seconds per lamp, and in this case, the inspection is completed in 240 seconds (4 minutes). For this reason, the general rise time of the discharge lamp is several minutes, and when the total start-up time of the exposure apparatus is usually about 10 minutes, the inspection can be completed in a sufficiently short time.

In this case, when the voltage of the incandescent lamp 2 is outside the registration voltage range, and the determination unit 13 determines that the corresponding discharge lamp 1 is a non-pure genuine product, it is preferable that the display unit 14 displays a display indicating information indicating the position of the discharge lamp. And the discharge lamp is a non-pure genuine product, and the control unit 9 temporarily interrupts the inspection, and after checking by the operator or the like, the inspection can be resumed. Further, in the case of other countermeasures, it is more preferable to perform the inspection of all the discharge lamps without interrupting the inspection in the case where the discharge lamp of the non-pure quality is detected, and the inspection result will be the same as that displayed on the display unit 14. The information is stored in a memory device, etc., and after the inspection of all the discharge lamps is completed, the position information of the discharge lamp of the non-pure genuine product can be collectively displayed.

FIG. 4 shows the relationship between the timing at which the switch 10 is turned on/off and the timing of measurement by the measuring unit 11. FIG. 4 shows that the voltage of both ends of the first incandescent lamp 2 is measured after a predetermined time when the first switch 10 connected to the first incandescent lamp 2 is turned on, and is connected to the first incandescent lamp 2 immediately after the measurement. The first switch 10 is turned off, and the second switch 10 connected to the second incandescent lamp 2 is turned on. The voltage across the second incandescent lamp 2 is measured after a predetermined period of time, and then all the incandescent lamps 2 are measured in the same manner. Voltage at both ends. In the above-described configuration, the constant current power source 8, the switch 10, the control unit 9, the measuring unit 11, the comparing unit 12, the determining unit 13, and the display unit 14 are added to the conventional multi-lamp type exposure apparatus, and in particular, the control unit 9 The comparison unit 12 and the determination unit 13 can be realized by one microcomputer or the like, and the cost of the exposure apparatus is not greatly increased.

[Embodiment 2]

In FIG. 1, elements different from the first embodiment are the measurement unit 15 (internal resistance-type resistor 15a), the comparison unit 16, and the determination unit 17, and the other elements are the same. The same elements as those in the first embodiment are omitted. Immediately after the power switch of the exposure device 101 is turned on, the first switch 10 connected to the first incandescent lamp 2 in the light source device 4 is turned on and a constant current is supplied from the constant current source 8. Immediately thereafter, the measuring unit 15 performs the first measurement on the voltages of both ends of the first incandescent lamp 2, and sends the result to the comparing unit 16. Then, after the predetermined time of the first measurement, for example, after 10 seconds, the measurement unit 15 performs the second measurement on the voltages of both ends of the first incandescent lamp 2, and sends the result to the comparison unit 16, and the comparison unit 16 The voltage difference between the voltages of the secondary measurement voltages and the voltage difference distribution range of the plurality of incandescent lamps for the pure genuine detection previously registered in the comparison unit 16 are compared, and whether or not the voltage difference range is registered is sent to the determination unit. The determination unit 17 determines that the corresponding discharge lamp 1 is a genuine product, and determines that the corresponding discharge lamp 1 is a non-pure genuine product, and displays the determination result on the display unit 14. The inspection from the measurement to the display is automatically performed and ends in a very short time.

After the second voltage measurement of the first incandescent lamp 2 is completed, the control unit 9 turns off the first switch 10 connected to the first incandescent lamp 2, and turns on the second switch 10 connected to the second incandescent lamp 2. Turned on, a constant current is supplied from the constant current source 8. Thereafter, it is determined whether or not the corresponding discharge lamp 1 is a genuine one as in the case of the first incandescent lamp 2, and the same inspection is performed until the inspection of all the incandescent lamps is completed.

FIG. 5 shows the relationship between the timing of turning on/off the switch 10 and the measuring timing of the measuring unit 15. In FIG. 5, after the first switch 10 connected to the first incandescent lamp 2 is turned on, the voltage of both ends of the first incandescent lamp 2 is measured, and the second time is performed after a predetermined time. The voltage measurement at both ends of the first incandescent lamp 2 is such that the first switch 10 connected to the first incandescent lamp 2 is turned off immediately after the second measurement, and the second switch 10 connected to the second incandescent lamp 2 is turned off. When it is turned on, the voltage measurement at both ends of the second incandescent lamp 2 is performed immediately thereafter, and the voltage measurement at both ends of the second incandescent lamp 2 is performed after a predetermined time, and immediately after the second After the second measurement, the second switch 10 connected to the second incandescent lamp 2 was turned off, and thereafter, the voltages across the incandescent lamps 2 were measured twice in the same manner.

In the second embodiment, the voltage measurement time of the first and second times is set, and the time zone in which the switch 10 is in the on state can be set at any time. When the voltage difference of the incandescent lamp is outside the range of the registered voltage difference, and the determination unit 17 determines that the corresponding discharge lamp 1 is a non-pure genuine product, it is preferable to take a countermeasure as in the case of the first embodiment. Further, in the first embodiment, the control unit 9, the measuring unit 11, the comparing unit 12, the determining unit 13, and the like are not required. The second embodiment can be realized by changing the computer program to be controlled by the display unit 14 to change the hardware configuration.

In the exposure apparatus 100 (101) of the present invention, the number of the light source devices 4 is large, and when the inspection time of the incandescent lamps 2 greatly exceeds the startup time of the exposure apparatus 100 (101), the control unit 9 is provided. The constant current power source 8, the measuring unit 11 (15), the comparing unit 12 (16), the determining unit 13 (17), and the display unit 14 add the number of units required for the inspection of the incandescent lamp 2, and the parallel operation is performed in parallel. The inspection of the incandescent lamp 2 makes it possible to check the increase in the number of the light source devices 4 without increasing the inspection time.

The present invention is an exposure apparatus for an exposure program that forms not only a wiring pattern on a printed circuit board, but also a plurality of lamps, such as a liquid crystal display panel for a discharge lamp, an appearance inspection device for a semiconductor device, and the like. The light source device can be used for a device that requires a purely genuine discharge lamp.

1‧‧‧discharge lamp

4‧‧‧Light source device

5‧‧‧ box

6‧‧‧Light source department

7‧‧‧Lighting circuit

8‧‧‧Constant current source

9‧‧‧Control Department

10‧‧‧ switch

11(15)‧‧‧Determination Department

11a (15a) ‧ ‧ resistance

12(16)‧‧‧Comparative Department

13(17)‧‧‧Decision Department

14‧‧‧Display Department

15‧‧‧Determination Department

30‧‧‧resistance

100(101)‧‧‧Exposure device

Claims (3)

An exposure apparatus comprising: a discharge lamp that is a light source, an incandescent lamp that detects whether the discharge lamp is a genuine product, and one or more light sources that are configured to mount the discharge lamp and the reflector container of the incandescent lamp a device for mounting the light source device toward the object to be irradiated; a constant current power source for supplying current to the incandescent lamp; a switch for turning on/off the current from the constant current power source; at a point of the discharge lamp a control unit that turns on and off the switch to turn on the incandescent lamp at a predetermined time; a measuring unit that measures a voltage between the two ends of the incandescent lamp in the lighting; and compares the two ends measured by the measuring unit a comparison unit of a voltage and a predetermined upper limit value and a lower limit voltage range for determining whether the discharge lamp is correct or not; receiving a signal from the comparison unit, wherein the two-terminal voltage is the predetermined upper limit value and the lower limit value In the case of the voltage range of the value, it is determined that the discharge lamp to be inspected is a genuine product, and the voltage at both ends is outside the voltage range of the predetermined upper limit value and the lower limit value. Under conditions, is determined based inspection target discharge lamp a non genuine product determination unit; and a display unit displaying the determination result. An exposure apparatus characterized by having: a plurality of light source devices configured to be a discharge lamp that is a light source, an incandescent lamp that detects whether the discharge lamp is a genuine product, and a reflector container that mounts the discharge lamp and the incandescent lamp; and the light source device is irradiated toward the light source device a frame mounted on the object; a constant current power source for supplying current to the incandescent lamp; a switch for turning on/off the current from the constant current power source; and turning on/off the switch in the lighting of the discharge lamp a control unit that turns off the incandescent lamp at a predetermined time; a measurement unit that measures the voltage at both ends of the incandescent lamp twice in the lighting for a predetermined time; and compares the first time of the incandescent lamp in the measuring unit a comparison unit of a difference between a voltage at the time of measurement and a voltage at the second measurement, and a voltage difference range between a predetermined upper limit value and a lower limit value for determining whether the discharge lamp is correct or not; and receiving a signal from the comparison unit When the difference between the voltage at the time of the first measurement and the voltage at the second measurement is within the range of the voltage difference between the predetermined upper limit value and the lower limit value, it is determined that the discharge lamp to be inspected is In the case where the difference between the voltage at the time of the first measurement and the voltage at the second measurement is outside the range of the voltage difference between the predetermined upper limit value and the lower limit value, it is determined that the discharge lamp to be inspected is not purely genuine. a determination unit; and a display unit that displays the determination result. A method for inspecting a discharge lamp, comprising: arranging the discharge lamp as a light source, detecting the incandescent lamp as to whether the discharge lamp is genuine, and mounting the discharge lamp and the incandescent lamp; In the exposure apparatus according to the first or second aspect of the invention, the control unit is configured to sequentially turn on/off the incandescent lamp in the lighting of the discharge lamp. The correctness of the aforementioned discharge lamp is checked in turn.