JP2016200751A - Light source device, exposure device and inspection method for the same - Google Patents
Light source device, exposure device and inspection method for the same Download PDFInfo
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- 229920002120 photoresistant polymer Polymers 0.000 description 9
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- 229910052721 tungsten Inorganic materials 0.000 description 3
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- 239000011521 glass Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/24—Testing of discharge tubes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
- H05B47/20—Responsive to malfunctions or to light source life; for protection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/7065—Defects, e.g. optical inspection of patterned layer for defects
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Circuit Arrangement For Electric Light Sources In General (AREA)
Abstract
Description
本発明は、プリント配線基板等の露光に用いる露光装置において、光源となる放電灯が純正品であるか否かを検出するための白熱灯を備えた光源装置及びその光源装置を用いた露光装置とその検査方法に関する。 The present invention relates to a light source device having an incandescent lamp for detecting whether or not a discharge lamp as a light source is a genuine product in an exposure device used for exposure of a printed wiring board or the like, and an exposure device using the light source device And the inspection method.
従来、電子機器に部品を実装するために樹脂やガラスエポキシ材の基板上に銅等の金属で配線パターンを形成したプリント配線基板が用いられている。これらのプリント配線基板上への配線パターンの形成にはフォトエッチング技術が用いられている。これは、配線となる金属層が全面に形成された基板上全面に、感光性の薬剤であるフォトレジストを塗布し、これに配線パターンと同一のフォトマスクを通して露光装置からの照射光を照射する。フォトレジストには、照射光によりフォトレジストの溶解性が低下するネガ型フォトレジストと、逆に照射光によりフォトレジストの溶解性が増大するポジ型フォトレジストがある。照射光により溶解性が相対的に増大したフォトレジスト部分を化学処理して取り除き、露出した金属層をエッチングにより除去するとフォトレジストが残った部分の下にある金属層だけが残り、フォトレジストを除去することで配線パターンが基板上に形成される。ポジ型、ネガ型いずれのフォトレジストに照射光を照射する場合でも、照射面全面に亘って均一な露光量を確保するために、均一な照度で一定の時間、安定した照射光の照射が必要である。 2. Description of the Related Art Conventionally, a printed wiring board in which a wiring pattern is formed of a metal such as copper on a substrate made of resin or glass epoxy material has been used for mounting components on an electronic device. Photo-etching technology is used to form wiring patterns on these printed wiring boards. This is because a photoresist, which is a photosensitive agent, is applied to the entire surface of a substrate on which a metal layer to be a wiring is formed on the entire surface, and irradiated with light irradiated from an exposure apparatus through the same photomask as the wiring pattern. . There are negative photoresists in which the solubility of the photoresist is reduced by irradiation light and positive photoresists in which the solubility of the photoresist is increased by irradiation light. The photoresist portion whose solubility has been relatively increased by irradiation light is removed by chemical treatment, and when the exposed metal layer is removed by etching, only the metal layer under the portion where the photoresist remains is left, and the photoresist is removed. Thus, a wiring pattern is formed on the substrate. Whether irradiating positive or negative photoresist with irradiation light, stable irradiation light is required for a certain period of time with uniform illuminance to ensure a uniform exposure across the entire irradiation surface. It is.
一方、プリント配線基板において、製造工程の効率化のためにプリント配線基板を大型化し、基板完成後に分割して小型化し、所望の電子機器に使用することが行われている。
プリント配線基板の大型化に伴い、露光装置メーカーは光源である放電灯を高照度に大型化するか、または複数の低照度の小型の放電灯を用いた多灯の光源として均一な露光量を確保しようとしている。例えば、８ｋＷの高圧放電灯の光源を１灯使用する代わりに２ｋＷの高圧放電灯の光源を４灯使用するなどである。低照度の放電灯は高照度の放電灯に比して、製造難易度や製造コストにおいて優位であり、多灯の光源を有する露光装置が多数販売されている。
On the other hand, in a printed wiring board, the printed wiring board is increased in size in order to increase the efficiency of the manufacturing process, and is divided and reduced in size after completion of the substrate, and used for a desired electronic device.
As printed circuit boards increase in size, manufacturers of exposure equipment either increase the size of the discharge lamp, which is the light source, to a high illuminance, or provide a uniform exposure amount as a multiple-lamp light source using multiple small discharge lamps with low illuminance. Trying to secure. For example, instead of using one light source of an 8 kW high pressure discharge lamp, four light sources of a 2 kW high pressure discharge lamp are used. A low illuminance discharge lamp is superior to a high illuminance discharge lamp in manufacturing difficulty and manufacturing cost, and many exposure apparatuses having multiple light sources are on the market.
しかしながら、光源の多灯化に伴って、均一な露光量の確保の必要性から複数の放電灯同士の均質性がより重要となってきている。そのため、露光装置の性能を安定させ、信頼性の高いプリント配線基板を製造するには、同一メーカーによって、同一材料、同一工法で製作された純正品の放電灯だけを使用することが必要となり、放電灯が純正品かどうか識別する装置及び検査方法が必要となっている。 However, with the increase in the number of light sources, the homogeneity among a plurality of discharge lamps has become more important due to the necessity of ensuring a uniform exposure amount. Therefore, in order to stabilize the performance of the exposure apparatus and manufacture a highly reliable printed wiring board, it is necessary to use only genuine discharge lamps manufactured by the same manufacturer with the same material and method, There is a need for an apparatus and an inspection method for identifying whether a discharge lamp is a genuine product.
露光装置に限らず光学装置において、使用されている放電灯や光源を識別する方法はいくつか知られている（例えば、特許文献１から３参照。）。例えば、特許文献１に記載のランプ異常検出装置では、ハロゲンランプなどフィラメントを使用した白熱電球に所定の電圧を供給し、フィラメントが半切れ状態時の電流値と、フィラメントが正常時の電流値とを比較して異常のあるランプを検出するとしている。しかしながら、これでは、ランプの寿命は検出できても、ランプが純正品か否かを識別することは困難である。 Several methods are known for identifying discharge lamps and light sources used in optical apparatuses as well as exposure apparatuses (see, for example, Patent Documents 1 to 3). For example, in the lamp abnormality detection device described in Patent Document 1, a predetermined voltage is supplied to an incandescent bulb using a filament such as a halogen lamp, and the current value when the filament is half-cut and the current value when the filament is normal Are detected and an abnormal lamp is detected. However, even if the life of the lamp can be detected, it is difficult to identify whether the lamp is a genuine product.
また、例えば特許文献２では、白熱灯あるいは蛍光灯といった光源と並列に抵抗及びコンデンサーが接続された回路を接続し、この光源の両端に所定の電圧を供給した時の時定数（抵抗値と容量値の積）を測定して光源が白熱灯か蛍光灯かを検出するとしている。しかしながら、これでは、時定数の大きな違い（白熱灯と蛍光灯では時定数は大きく異なる。）は検出できても、同じ白熱灯間での純正品か否かを識別することは困難である。また、例えば特許文献３では、同一白熱電球のバルブ内に封入された複数のフィラメントに紫外線を放射しつつ、それらフィラメント間の放電開始電圧を測定し、不良品を検出するとしている。しかしながら、これでは不良品は検出できても、ランプが純正品か否かを識別することは困難である。 For example, in Patent Document 2, a circuit in which a resistor and a capacitor are connected in parallel with a light source such as an incandescent lamp or a fluorescent lamp is connected, and a time constant (resistance value and capacitance) when a predetermined voltage is supplied to both ends of the light source. Value product) to detect whether the light source is an incandescent lamp or a fluorescent lamp. However, in this case, even if a large difference in time constant (the time constant is greatly different between incandescent lamps and fluorescent lamps) can be detected, it is difficult to discriminate whether it is a genuine product between the same incandescent lamps. Further, for example, in Patent Document 3, it is assumed that a defective product is detected by measuring the discharge start voltage between the filaments while radiating ultraviolet rays to a plurality of filaments enclosed in the bulb of the same incandescent bulb. However, even if a defective product can be detected, it is difficult to identify whether the lamp is a genuine product.
純正品の光源を他のメーカーによって製造された類似品の光源と識別するためには特許文献１及び３のように、光源が不良か否か、あるいは特許文献２のように異種の光源であるか否かを識別するよりも、さらに精度の高い識別装置が必要である。また、複数の光源の検査時間が露光装置の起動時間を大きく超えないことと、露光装置全体のコストを大きく増やさないことという課題も同時に解決する必要がある。 In order to distinguish a genuine light source from a similar light source manufactured by another manufacturer, as in Patent Documents 1 and 3, it is determined whether the light source is defective or a different light source as in Patent Document 2. It is necessary to have an identification device with higher accuracy than the identification. In addition, it is necessary to simultaneously solve the problems that the inspection times of a plurality of light sources do not greatly exceed the start-up time of the exposure apparatus and that the cost of the entire exposure apparatus is not greatly increased.
本発明は、前述した課題に鑑みてなされたものであり、その目的は、プリント配線基板等の露光に用いる露光装置において、光源となる放電灯が純正品であるか否かを高精度、短時間かつ低コストで識別するための白熱灯を備えた光源装置及びその光源装置を用いた露光装置とその検査方法を提供することにある。 The present invention has been made in view of the above-described problems, and an object of the present invention is to determine whether or not a discharge lamp as a light source is a genuine product in an exposure apparatus used for exposure of a printed wiring board or the like. It is an object of the present invention to provide a light source device including an incandescent lamp for identifying at low cost and an exposure apparatus using the light source device and an inspection method thereof.
上記課題を解決するため、本発明における請求項１に記載の発明は、例えば図３に示すように、光源装置４を次のように構成した。すなわち、光源装置４は、
光源となる放電灯１と、前記放電灯１が純正品であるかどうかを検出する白熱灯２と、前記放電灯１及び前記白熱灯２が装着されたリフレクター容器３とで構成され、前記白熱灯２は、前記放電灯１の点灯中に点灯され、該白熱灯２の電圧が、所定の上限値及び下限値の電圧範囲内であるか否かを検出することにより、前記放電灯１が純正品であるか否かの判定手段であることを特徴とする。
In order to solve the above problems, the invention according to claim 1 of the present invention is configured as follows, for example, as shown in FIG. That is, the light source device 4
A discharge lamp 1 serving as a light source; an incandescent lamp 2 for detecting whether the discharge lamp 1 is a genuine product; and a reflector container 3 to which the discharge lamp 1 and the incandescent lamp 2 are attached. The lamp 2 is turned on while the discharge lamp 1 is lit, and the discharge lamp 1 is detected by detecting whether or not the voltage of the incandescent lamp 2 is within a voltage range of a predetermined upper limit value and lower limit value. It is a means for determining whether or not it is a genuine product.
また、請求項２に記載の発明は、例えば図１に示すように、第１の露光装置１００を次のように構成した。すなわち、第１の露光装置１００は、
請求項１に記載の複数の前記光源装置４と、前記光源装置４を被照射物に向けて装着するフレーム５と、前記白熱灯２に電流を供給する定電流電源８と、前記定電流電源８からの前記電流をオン・オフするスイッチ１０と、前記放電灯１の点灯中に前記スイッチ１０をオン・オフして前記白熱灯２を所定の時間点灯する制御部９と、点灯中の前記白熱灯２の両端電圧を測定する測定部１１と、前記測定部１１にて測定された前記両端電圧と放電灯１の正否を判定する前記所定の上限値及び下限値の電圧範囲とを比較する比較部１２と、
前記比較部１２からの信号を受け、前記両端電圧が前記所定の上限値及び下限値の電圧範囲内の場合は、検査対象放電灯が純正品であると判定し、前記両端電圧が前記所定の上限値及び下限値の電圧範囲外の場合は、検査対象放電灯が非純正品であると判定する判定部１３と、判定結果を表示する表示部１４とを備えることを特徴とする。
According to the second aspect of the present invention, as shown in FIG. 1, for example, the first exposure apparatus 100 is configured as follows. That is, the first exposure apparatus 100 is
2. The plurality of light source devices 4 according to claim 1, a frame 5 for mounting the light source device 4 toward an irradiated object, a constant current power source 8 for supplying current to the incandescent lamp 2, and the constant current power source A switch 10 for turning on / off the current from 8, a control unit 9 for turning on / off the switch 10 during lighting of the discharge lamp 1 and lighting the incandescent lamp 2 for a predetermined time, and the lighting of the lamp The measurement unit 11 that measures the voltage across the incandescent lamp 2 compares the voltage across the voltage measured by the measurement unit 11 with the voltage range of the predetermined upper limit value and lower limit value that determine whether the discharge lamp 1 is right or wrong. A comparison unit 12;
When the signal from the comparison unit 12 is received and the voltage at both ends is within the voltage range of the predetermined upper limit value and the lower limit value, it is determined that the discharge lamp to be inspected is a genuine product, and the voltage at both ends is the predetermined voltage. When it is outside the voltage range of the upper limit value and the lower limit value, a determination unit 13 that determines that the discharge lamp to be inspected is a non-genuine product and a display unit 14 that displays the determination result are provided.
また、請求項３に記載の発明は、例えば図１に示すように、第２の露光装置１０１を次のように構成した。すなわち、第２の露光装置１０１は、
請求項１に記載の複数の前記光源装置４と、前記光源装置４を被照射物に向けて装着する前記フレーム５と、前記白熱灯２に電流を供給する前記定電流電源８と、前記定電流電源８からの前記電流をオン・オフする前記スイッチ１０と、前記放電灯１の点灯中に前記スイッチ１０をオン・オフして前記白熱灯２を所定の時間点灯する前記制御部９と、点灯中の前記白熱灯２の両端電圧を２回、各々所定の時間に測定する測定部１５と、前記測定部１５にて該白熱灯２の前記１回目測定時の電圧と前記２回目測定時の電圧との差と、放電灯の正否を判定する所定の上限値及び下限値の電圧範囲とを比較する比較部１６と、前記比較部１６からの信号を受け、前記両端電圧の差が前記所定の上限値及び下限値の電圧範囲内の場合は、検査対象放電灯が純正品であると判定し、前記両端電圧の差が前記所定の上限値及び下限値の電圧範囲外の場合は、検査対象放電灯が非純正品であると判定する判定部１７と、判定結果を表示する前記表示部１４とを備えることを特徴とする。
In the invention described in claim 3, for example, as shown in FIG. 1, the second exposure apparatus 101 is configured as follows. That is, the second exposure apparatus 101
2. The plurality of light source devices 4 according to claim 1, the frame 5 for mounting the light source device 4 toward an irradiated object, the constant current power source 8 for supplying a current to the incandescent lamp 2, and the constant current source. The switch 10 for turning on and off the current from the current power supply 8, and the control unit 9 for turning on and off the switch 10 during lighting of the discharge lamp 1 and lighting the incandescent lamp 2 for a predetermined time; A measurement unit 15 that measures the voltage across the incandescent lamp 2 that is lit twice at a predetermined time, and the measurement unit 15 uses the voltage for the first measurement and the second measurement for the incandescent lamp 2. The comparison unit 16 that compares the difference between the voltage and the voltage range of the predetermined upper limit value and lower limit value for determining whether the discharge lamp is correct or not, receives a signal from the comparison unit 16, and the difference between the voltages at both ends is If it is within the specified upper and lower limit voltage range, Is determined to be a genuine product, and if the difference between the voltages at both ends is outside the voltage range between the predetermined upper limit value and the lower limit value, the determination unit 17 determines that the discharge lamp to be inspected is a non-genuine product, The display unit 14 for displaying a result is provided.
また、請求項４に記載の発明は、前記放電灯１の検査方法に関し、
請求項１に記載の複数の光源装置４が装備された請求項２に記載の露光装置１００及び請求項３に記載の露光装置１０１において、前記制御部９は、前記放電灯１の点灯中に前記白熱灯２を順次オン・オフして前記放電灯１の正否を順次検査することを特徴とする。
The invention according to claim 4 relates to a method for inspecting the discharge lamp 1,
In the exposure apparatus 100 according to claim 2 and the exposure apparatus 101 according to claim 3, wherein the plurality of light source devices 4 according to claim 1 are equipped, the control unit 9 is configured to turn on the discharge lamp 1. The incandescent lamp 2 is sequentially turned on and off to sequentially check whether the discharge lamp 1 is correct or not.
請求項２に記載の発明によれば、同一のリフレクター容器に収納された放電灯と白熱灯において、放電灯は光源として、白熱灯は放電灯が純正であるかどうかを識別するための固有の電圧を発生する抵抗装置のように利用される。白熱灯をリフレクター容器に組み込む前に、白熱灯単体に定電流を供給し、所定時間経過後の白熱灯の両端の電圧を測定する。同じ条件で複数個の白熱灯の両端の電圧を測定し、電圧分布範囲を確定する。その後、同一のリフレクター容器に収納された放電灯と白熱灯において、上記と同じ条件で測定した白熱灯の両端の電圧と上記の電圧分布範囲とを比較し、測定した電圧がその電圧分布範囲内であれば、測定した白熱灯と同一のリフレクター容器内の放電灯は純正品であると識別することができる。上記の光源装置及び露光装置においては、上記の比較判定を全ての放電灯について順次行っていき、短時間、低コストかつ高精度で放電灯が純正品か否かを識別することができる。また、上記の発明では、白熱灯の両端の電圧を１回測定すれば純正品か否かの識別が可能である。 According to the invention described in claim 2, in the discharge lamp and the incandescent lamp housed in the same reflector container, the discharge lamp is used as a light source, and the incandescent lamp is used to identify whether the discharge lamp is genuine. It is used like a resistance device that generates voltage. Before incorporating the incandescent lamp into the reflector container, a constant current is supplied to the incandescent lamp alone, and the voltage across the incandescent lamp after a predetermined time has elapsed is measured. Measure the voltage across the incandescent lamps under the same conditions to determine the voltage distribution range. Then, in the discharge lamp and the incandescent lamp housed in the same reflector container, the voltage at both ends of the incandescent lamp measured under the same conditions as described above is compared with the above voltage distribution range, and the measured voltage is within the voltage distribution range. If so, the discharge lamp in the same reflector container as the measured incandescent lamp can be identified as a genuine product. In the above light source device and exposure apparatus, the above comparison and determination are sequentially performed for all the discharge lamps, and it is possible to identify whether the discharge lamp is a genuine product in a short time, at low cost and with high accuracy. Moreover, in said invention, if the voltage of the both ends of an incandescent lamp is measured once, it can identify whether it is a genuine product.
本発明の光源装置で使用するのは通常の白熱灯であり、そのフィラメントの材質はタングステン等でフィラメントが発する熱によってフィラメントの抵抗値は固有の温度変化を示す。そのため、白熱灯に定電流を供給直後で、まだフィラメントの温度が低い時はその抵抗値は非常に小さく（数オーム程度）、このときの白熱灯の両端の電圧を測定し、次にフィラメントの温度が十分に上昇した時（摂氏６００度以上）には、その抵抗値は数倍に増加しており、このときの電圧を測定して、両者の電圧の差を測定するとフィラメントに固有の電圧差となる。 The light source device of the present invention uses a normal incandescent lamp, and the filament material is tungsten or the like, and the resistance value of the filament shows a specific temperature change due to heat generated by the filament. Therefore, immediately after supplying a constant current to the incandescent lamp, when the filament temperature is still low, the resistance value is very small (several ohms), the voltage at both ends of the incandescent lamp at this time is measured, and then the filament When the temperature rises sufficiently (600 degrees Celsius or higher), the resistance value increases several times. When the voltage at this time is measured and the difference between the two voltages is measured, the voltage inherent to the filament It makes a difference.
請求項３に記載の発明によれば、上記のフィラメントに固有の温度による電圧差を利用することにより、さらに高精度で純正品を識別することが可能である。白熱灯をリフレクター容器に組み込む前に、白熱灯単体に定電流を供給し、まず白熱灯への定電流供給開始直後でフィラメントの温度が低い時の白熱灯の両端の電圧を測定し、次に所定時間経過後でフィラメントの温度が十分に上昇した時の両端の電圧を測定して、両者の電圧差を測定する。同じ条件で複数個の白熱灯の両端の電圧を測定し、電圧差分布範囲を確定する。その後、同一のリフレクター容器に収納された放電灯と白熱灯において、上記と同じ条件で測定した白熱灯の電圧差と上記の電圧差分布範囲と比較し、測定した電圧差がその電圧差分布範囲内であれば、白熱灯と同一のリフレクター容器内の放電灯は純正品であると識別することができる。上記の光源装置及び露光装置においては、上記の比較判定を全ての放電灯について順次行っていき、短時間、低コストかつより高精度で放電灯が純正品か否かを識別することができる。 According to the third aspect of the present invention, it is possible to identify a genuine product with higher accuracy by utilizing the voltage difference due to the temperature inherent to the filament. Before installing the incandescent lamp in the reflector container, supply a constant current to the incandescent lamp alone, first measure the voltage across the incandescent lamp when the filament temperature is low immediately after the constant current supply to the incandescent lamp starts, and then The voltage at both ends when the filament temperature rises sufficiently after a predetermined time has elapsed is measured, and the voltage difference between the two is measured. Measure the voltage across the incandescent lamps under the same conditions to determine the voltage difference distribution range. After that, in the discharge lamp and the incandescent lamp housed in the same reflector container, the voltage difference of the incandescent lamp measured under the same conditions as described above is compared with the above voltage difference distribution range, and the measured voltage difference is the voltage difference distribution range. If it is inside, the discharge lamp in the same reflector container as the incandescent lamp can be identified as a genuine product. In the above light source device and exposure apparatus, the above comparison and determination are sequentially performed for all the discharge lamps, and it is possible to identify whether the discharge lamp is a genuine product in a short time, at low cost and with high accuracy.
上記の発明では、白熱灯の両端の電圧を２回測定し、１回目と２回目の温度による電圧差を測定して比較するため、白熱灯の代わりに、白熱灯のフィラメントと同様な抵抗値を有する固定抵抗器等が接続された純正品ではない放電灯を備えた光学装置を比較判定した場合でも、固定抵抗器等の温度による電圧差が白熱灯とは大きく異なるため、その光学装置の放電灯は純正品ではないと識別することができる。 In the above invention, the voltage across the incandescent lamp is measured twice, and the voltage difference due to the first and second temperatures is measured and compared. Therefore, instead of the incandescent lamp, the same resistance value as the filament of the incandescent lamp is used. Even when comparing and determining an optical device with a non-genuine discharge lamp to which a fixed resistor or the like having a connection is made, the voltage difference due to the temperature of the fixed resistor or the like is significantly different from that of an incandescent lamp. It can be identified that the discharge lamp is not genuine.
以下、本発明を図１から５によって説明する。なお、各符号において、各部位を上位概念で示す場合にはアルファベットの枝番をつけずアラビア数字のみで示し、各部位を区別する必要がある場合(すなわち下位概念で示す場合)にはアルファベット小文字の枝番をアラビア数字に付して区別する。また、図面の説明においては、同一要素に対しては同一符号を付し、重複する説明を省略する。 The present invention will be described below with reference to FIGS. In addition, in each code, when each part is indicated by a superordinate concept, it is indicated by only Arabic numerals without adding an alphabet branch number, and when it is necessary to distinguish each part (that is, when indicated by a subordinate concept) The branch numbers are distinguished by adding Arabic numerals. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.
図３は、本発明にかかる一実施例の光源装置４を示す断面図である。放電灯１は、水銀等の発光物質が封入された内部空間１ａを有する発光部１ｂ及び発光部１ｂの内部空間１ａを封止する一対の封止部１ｃを有する発光管１ｄと、発光部１ｂ内に互いに対向して配置された一対の電極１ｅと、給電に用いられる一対の給電ワーヤー１ｆを有する。白熱灯２は通常の白熱灯であり、フィラメント２ａにはタングステン等をコイル状に加工したものが用いられる。タングステンの抵抗値は常温では非常に小さいが、フィラメントの発熱（摂氏６００度以上）により、抵抗値が数倍に大きくなる。リフレクター容器３の材質としては、ガラスあるいはアルミニウム等が考えられ、内側には回転放物面を有する反射面３ａが形成される。リフレクター容器３は、椀状底部の外側にベース部３ｂが被せられ、その接合部は接着剤３ｅで固着される。またベース部３ｂの底部はカバー部３ｃで覆われ、その接合部は口金構造で固定される。ベース部３ｂ及びカバー部３ｃは、内部に白熱灯２を収容する収容空間３ｇを有する部材であり、絶縁性及び熱伝導性の高い材料で形成するのが好適である。 FIG. 3 is a cross-sectional view showing a light source device 4 according to an embodiment of the present invention. The discharge lamp 1 includes a light-emitting tube 1d having a light-emitting portion 1b having an internal space 1a in which a light-emitting substance such as mercury is enclosed, and a pair of sealing portions 1c for sealing the internal space 1a of the light-emitting portion 1b, and a light-emitting portion 1b. A pair of electrodes 1e disposed opposite to each other and a pair of power feeders 1f used for power feeding are provided. The incandescent lamp 2 is a normal incandescent lamp, and the filament 2a is made of tungsten or the like processed into a coil shape. Although the resistance value of tungsten is very small at room temperature, the resistance value increases several times due to the heat generated by the filament (600 degrees Celsius or more). As a material of the reflector container 3, glass, aluminum, or the like is conceivable, and a reflection surface 3a having a paraboloid of revolution is formed inside. The reflector container 3 is covered with a base portion 3b on the outside of the bowl-shaped bottom portion, and the joint portion is fixed with an adhesive 3e. Further, the bottom of the base portion 3b is covered with a cover portion 3c, and the joint portion is fixed with a base structure. The base part 3b and the cover part 3c are members having an accommodation space 3g for accommodating the incandescent lamp 2 therein, and are preferably formed of a material having high insulation and thermal conductivity.
放電灯１はリフレクター容器３の椀状底部に形成された挿入孔３ｆに封止部１ｃの一方が挿入され、挿入孔３ｆとは接着剤等で固着されている。また、封止部１ｃの一方は、ベース部３ｂの挿入孔３ｄを貫通してカバー部３ｃの内部空間に到達するように配置される。白熱灯２は、ベース部３ｂとカバー部３ｃによって形成される収容空間３ｇに配置される。
光源装置４には、放電灯１の一対の給電ワイヤー１ｆと白熱灯２の一対の給電ワーヤー２ｂの合計４本の給電ワーヤーが接続されている。
In the discharge lamp 1, one of the sealing portions 1c is inserted into an insertion hole 3f formed in the bowl-shaped bottom of the reflector container 3, and is fixed to the insertion hole 3f with an adhesive or the like. Moreover, one side of the sealing part 1c is arrange | positioned so that the insertion hole 3d of the base part 3b may be penetrated and the internal space of the cover part 3c may be reached. The incandescent lamp 2 is disposed in an accommodation space 3g formed by the base portion 3b and the cover portion 3c.
The light source device 4 is connected to a total of four power supply wires, that is, a pair of power supply wires 1 f of the discharge lamp 1 and a pair of power supply wires 2 b of the incandescent lamp 2.
図２は、本発明にかかる一実施例の光源部６の平面図である。フレーム５に光源装置４が縦方向に４列、横方向に６列ずつ、それぞれ装着され、光源部６を構成している。 FIG. 2 is a plan view of the light source unit 6 according to an embodiment of the present invention. The light source device 4 is mounted on the frame 5 in four rows in the vertical direction and six rows in the horizontal direction, respectively, thereby constituting the light source unit 6.
図１は、本発明の実施例１及び２の露光装置を示す概略図であり、被照射物に照射光を照射する光源部６には、複数の光源装置４が装着され、各々の光源装置４には、放電灯１に電力を供給する点灯回路７及び白熱灯２に定電流を供給する定電流電源８が接続されている。定電流電源８と白熱灯２の間には、定電流をオン・オフするスイッチ１０が直列に接続され、このスイッチ１０は制御部９によりオン・オフされる。また、定電流電源８と白熱灯２の間には、直列に抵抗３０が接続され、白熱灯２が短絡故障した場合、定電流電源８を保護する。白熱灯２の両端は電圧が測定できるように測定部１１にも接続され、抵抗１１ａは測定部１１の内部抵抗を示しており、白熱灯のフィラメント２ａの抵抗値に比べて十分に大きな抵抗値（数メガオーム程度）であり、そのため測定部１１はフィラメント２ａで発生する電圧を正確に測定することができる。 FIG. 1 is a schematic view showing an exposure apparatus according to Embodiments 1 and 2 of the present invention. A plurality of light source devices 4 are mounted on a light source unit 6 that irradiates an irradiation object with irradiation light. 4, a lighting circuit 7 that supplies power to the discharge lamp 1 and a constant current power source 8 that supplies a constant current to the incandescent lamp 2 are connected. A switch 10 for turning on and off the constant current is connected in series between the constant current power source 8 and the incandescent lamp 2, and the switch 10 is turned on and off by the control unit 9. In addition, a resistor 30 is connected in series between the constant current power supply 8 and the incandescent lamp 2, and the constant current power supply 8 is protected when the incandescent lamp 2 is short-circuited. Both ends of the incandescent lamp 2 are also connected to the measuring unit 11 so that the voltage can be measured, and the resistor 11a indicates the internal resistance of the measuring unit 11, and the resistance value is sufficiently larger than the resistance value of the filament 2a of the incandescent lamp. Therefore, the measuring unit 11 can accurately measure the voltage generated in the filament 2a.
比較部１２には予め所定の条件で測定された複数の純正品検出用の白熱灯の電圧分布範囲が登録されており、判定部１３は比較部１２の比較結果で放電灯が純正品か否かを判定し、表示部１４はその判定結果を表示する。図１において、参照番号がカッコ書きとなっている測定部１５、比較部１６、判定部１７及び露光装置１０１は、実施例２において、実施例１の測定部１１、比較部１２、判定部１３と各々同様の構成で用いられ、その場合には露光装置１０１であることを示している。比較部１６には予め所定の条件で測定された複数の純正品検出用の白熱灯を所定の時間間隔で２回測定した際の電圧差の分布範囲が登録されている。 A voltage distribution range of a plurality of incandescent lamps for detecting a genuine product, which is measured in advance under a predetermined condition, is registered in the comparison unit 12, and the determination unit 13 determines whether the discharge lamp is a genuine product based on the comparison result of the comparison unit 12. The display unit 14 displays the determination result. In FIG. 1, the measurement unit 15, the comparison unit 16, the determination unit 17, and the exposure apparatus 101 whose reference numbers are in parentheses are the measurement unit 11, the comparison unit 12, and the determination unit 13 of the first embodiment. In this case, the exposure apparatus 101 is used. The comparison unit 16 registers a distribution range of voltage differences when a plurality of incandescent lamps for detecting genuine products, which are measured in advance under predetermined conditions, are measured twice at predetermined time intervals.
図１において、露光装置１００の電源スイッチが投入されると、点灯回路７は全ての放電灯１に電力を供給する。通常、放電灯１が完全に立ち上るには数分を要する。露光装置１００の電源スイッチ投入の直後に制御部９は、光源装置４内の第１の白熱灯２に接続された第１のスイッチ１０をオンとし、定電流電源８から定電流を供給する。第１のスイッチのオン時から所定時間後、例えば１０秒後に第１の白熱灯２の両端電圧を測定部１１が測定し、その結果を比較部１２に送り、比較部１２はその結果と比較部１２に予め登録された複数の純正品検出用の白熱灯の電圧分布範囲とを比較し、登録電圧範囲内か否かを判定部１３に送り、登録電圧範囲内であれば判定部は純正品と判定し、登録範囲外であれば非純正品と判定し、その判定結果を表示部１４に表示する。測定から表示までの検査は、自動で行われるためごく短時間で終了する。 In FIG. 1, when the power switch of the exposure apparatus 100 is turned on, the lighting circuit 7 supplies power to all the discharge lamps 1. Usually, it takes several minutes for the discharge lamp 1 to stand up completely. Immediately after the power switch of the exposure apparatus 100 is turned on, the control unit 9 turns on the first switch 10 connected to the first incandescent lamp 2 in the light source device 4 and supplies a constant current from the constant current power supply 8. The measurement unit 11 measures the voltage across the first incandescent lamp 2 after a predetermined time from, for example, 10 seconds after the first switch is turned on, and sends the result to the comparison unit 12, which compares the result with the result. The voltage distribution range of a plurality of incandescent lamps for detecting genuine products registered in the unit 12 is compared, and whether or not the voltage is within the registered voltage range is sent to the determination unit 13. If it is out of the registration range, it is determined as a non-genuine product, and the determination result is displayed on the display unit 14. Since the inspection from measurement to display is performed automatically, it is completed in a very short time.
第１の白熱灯２の電圧測定終了後、制御部９は、第１の白熱灯２に接続された第１のスイッチ１０をオフとし、第２の白熱灯２に接続された第２のスイッチ１０をオンとし、定電流電源８から定電流を供給する。以降は、第１の白熱灯２の場合と同様に純正品か否かを判定し、全ての白熱灯２の検査を終了するまで同様の検査を行う。 After the voltage measurement of the first incandescent lamp 2 is completed, the control unit 9 turns off the first switch 10 connected to the first incandescent lamp 2 and the second switch connected to the second incandescent lamp 2. 10 is turned on, and a constant current is supplied from the constant current power source 8. Thereafter, it is determined whether or not it is a genuine product as in the case of the first incandescent lamp 2, and the same inspection is performed until the inspection of all the incandescent lamps 2 is completed.
光源部６が２４灯の放電灯で構成されている場合は、１灯当り例えば１０秒かかり、この場合は２４０秒（４分）で検査を終了する。そのため、一般的な放電灯の立ち上り時間が数分程度であり、露光装置全体の起動時間が通常１０分程度であることを考慮すれば、十分に短い時間で検査を終了することができる。 When the light source unit 6 is composed of 24 discharge lamps, it takes 10 seconds per lamp, for example. In this case, the inspection is completed in 240 seconds (4 minutes). Therefore, considering that the rise time of a general discharge lamp is about several minutes and the start-up time of the entire exposure apparatus is usually about 10 minutes, the inspection can be completed in a sufficiently short time.
このとき、白熱灯２の電圧が登録電圧範囲外であり、判定部１３が非純正品と判定した場合は、表示部１４が該当する放電灯の位置を特定する情報の表示及びその放電灯が非純正品である旨を表示して、制御部９が検査を一旦中断し、その後、オペレータ等による確認後、検査を再スタートできるようにすることが好ましい。また、別の対応として、非純正品の放電灯を検出した場合も検査を中断することなく全ての放電灯の検査を行い、検査結果を表示部１４で表示する場合と同様の情報を別途、記憶装置等に格納し、全ての放電灯の検査終了後、非純正品の放電灯の位置情報等を一括して表示できるようにすることがより好ましい。 At this time, when the voltage of the incandescent lamp 2 is out of the registered voltage range and the determination unit 13 determines that it is a non-genuine product, the display unit 14 displays information for specifying the position of the corresponding discharge lamp and the discharge lamp It is preferable to display that the product is a non-genuine product, so that the control unit 9 temporarily stops the inspection, and then allows the inspection to be restarted after confirmation by an operator or the like. Also, as another measure, even when a non-genuine discharge lamp is detected, all discharge lamps are inspected without interrupting the inspection, and the same information as when the inspection result is displayed on the display unit 14 is separately provided. More preferably, the information is stored in a storage device or the like, and the position information and the like of non-genuine discharge lamps can be collectively displayed after the inspection of all the discharge lamps is completed.
図４には、スイッチ１０のオン・オフのタイミングと測定部１１での測定タイミングの関係を示している。図４では第１の白熱灯２に接続された第１のスイッチ１０がオンとなった時から所定の時間後に第１の白熱灯２の両端の電圧が測定され、測定直後に第１の白熱灯２に接続された第１のスイッチ１０がオフとなり、第２の白熱灯２に接続された第２のスイッチ１０がオンとなり、所定の時間後に第２の白熱灯２の両端の電圧が測定され、以降同様に全ての白熱灯２の両端電圧が測定されることを示している。上記の構成は、従来の多灯タイプの露光装置に、定電流電源８、スイッチ１０、制御部９、測定部１１、比較部１２、判定部１３、表示部１４を追加した構成であり、特に制御部９、比較部１２、判定部１３は１台のマイクロコンピュータ等でも実現可能であり、露光装置のコストを大きく増やすものではない。 FIG. 4 shows the relationship between the on / off timing of the switch 10 and the measurement timing in the measurement unit 11. In FIG. 4, the voltage across the first incandescent lamp 2 is measured after a predetermined time from when the first switch 10 connected to the first incandescent lamp 2 is turned on, and the first incandescent lamp is measured immediately after the measurement. The first switch 10 connected to the lamp 2 is turned off, the second switch 10 connected to the second incandescent lamp 2 is turned on, and the voltage across the second incandescent lamp 2 is measured after a predetermined time. In the same manner, the voltage across both incandescent lamps 2 is measured thereafter. The above configuration is a configuration in which a constant current power supply 8, a switch 10, a control unit 9, a measurement unit 11, a comparison unit 12, a determination unit 13, and a display unit 14 are added to a conventional multi-lamp type exposure apparatus. The control unit 9, the comparison unit 12, and the determination unit 13 can be realized by a single microcomputer or the like, and do not significantly increase the cost of the exposure apparatus.
図１において、実施例１と異なる要素は、測定部１５（内部抵抗は抵抗１５ａ）、比較部１６、判定部１７であり、他の要素は同じである。実施例１と同じ要素は説明を省略する。露光装置１０１の電源スイッチ投入の直後に、光源装置４内の第１の白熱灯２に接続された第１のスイッチ１０をオンとし定電流電源８から定電流を供給する。その直後に第１の白熱灯２の両端電圧を測定部１５が１回目の測定をし、その結果を比較部１６に送る。次に１回目の測定から所定時間後、例えば１０秒後に第１の白熱灯２の両端電圧を測定部１５が２回目の測定をし、その結果を比較部１６に送り、比較部１６は２回の測定電圧の差の電圧と、比較部１６に予め登録された複数の純正品検出用の白熱灯の電圧差分布範囲とを比較し、登録した電圧差範囲内か否かを判定部１７に送り、登録範囲内であれば判定部１７は純正品と判定し、登録範囲外であれば非純正品と判定し、その判定結果を表示部１４に表示する。測定から表示までの検査は、自動で行われるためごく短時間で終了する。 In FIG. 1, elements different from the first embodiment are a measurement unit 15 (internal resistance is a resistor 15 a), a comparison unit 16, and a determination unit 17, and other elements are the same. The description of the same elements as those in the first embodiment is omitted. Immediately after the power switch of the exposure apparatus 101 is turned on, the first switch 10 connected to the first incandescent lamp 2 in the light source device 4 is turned on to supply a constant current from the constant current power supply 8. Immediately thereafter, the measurement unit 15 measures the voltage across the first incandescent lamp 2 for the first time and sends the result to the comparison unit 16. Next, after a predetermined time from the first measurement, for example, 10 seconds later, the measurement unit 15 measures the voltage across the first incandescent lamp 2 for the second time, and sends the result to the comparison unit 16. The voltage of the difference between the measured voltages is compared with the voltage difference distribution range of a plurality of incandescent lamps for detecting genuine products registered in the comparison unit 16 in advance, and it is determined whether or not it is within the registered voltage difference range. If it is within the registration range, the determination unit 17 determines that it is a genuine product, and if it is outside the registration range, determines that it is a non-genuine product, and displays the determination result on the display unit 14. Since the inspection from measurement to display is performed automatically, it is completed in a very short time.
第１の白熱灯２の２回の電圧測定終了後、制御部９は、第１の白熱灯２に接続された第１のスイッチ１０をオフとし、第２の白熱灯２に接続された第２のスイッチ１０をオンとし、定電流電源８から定電流を供給する。以降は、第１の白熱灯２の場合と同様に純正品か否かを判定し、全ての白熱灯の検査を終了するまで同様の検査を行う。 After the voltage measurement of the first incandescent lamp 2 is completed twice, the control unit 9 turns off the first switch 10 connected to the first incandescent lamp 2 and the second incandescent lamp 2 connected to the second incandescent lamp 2. 2 switch 10 is turned on, and a constant current is supplied from constant current power supply 8. Thereafter, it is determined whether or not it is a genuine product as in the case of the first incandescent lamp 2, and the same inspection is performed until the inspection of all incandescent lamps is completed.
図５には、スイッチ１０のオン・オフのタイミングと測定部１５での測定タイミングの関係を示している。図５では第１の白熱灯２に接続された第１のスイッチ１０がオンとなった直後に１回目の第１の白熱灯２の両端の電圧測定が行われ、さらに所定の時間後に２回目の第１の白熱灯２の両端の電圧測定が行われ、２回目の測定直後に第１の白熱灯２に接続された第１のスイッチ１０がオフとなり、第２の白熱灯２に接続された第２のスイッチ１０がオンとなり、その直後に１回目の第２の白熱灯２の両端の電圧測定が行われ、さらに所定の時間後に２回目の第２の白熱灯２の両端の電圧測定が行われ、２回目の測定直後に第２の白熱灯２に接続された第２のスイッチ１０がオフとなり、以降同様に全ての白熱灯２の両端電圧が２回ずつ測定されることを示している。 FIG. 5 shows the relationship between the on / off timing of the switch 10 and the measurement timing in the measurement unit 15. In FIG. 5, immediately after the first switch 10 connected to the first incandescent lamp 2 is turned on, the voltage across the first incandescent lamp 2 is measured for the first time, and then the second time after a predetermined time. The voltage at both ends of the first incandescent lamp 2 is measured, and immediately after the second measurement, the first switch 10 connected to the first incandescent lamp 2 is turned off and connected to the second incandescent lamp 2. The second switch 10 is turned on, and immediately after that, the voltage across the first incandescent lamp 2 is measured for the first time, and the voltage across the second incandescent lamp 2 is measured for the second time after a predetermined time. Immediately after the second measurement, the second switch 10 connected to the second incandescent lamp 2 is turned off, and thereafter, both end voltages of all the incandescent lamps 2 are measured twice each. ing.
実施例２では、１回目及び２回目の電圧測定時間の設定は、スイッチ１０がオン状態である時間帯は、どの時間でも設定可能である。白熱灯の電圧差が登録した電圧差範囲外であり、判定部１７が非純正品と判定した場合は、実施例１の場合と同様の対応をとることが好ましい。また、実施例１において、制御部９、測定部１１、比較部１２、判定部１３、表示部１４をコントロールするコンピュータプログラムの変更でハードウェア構成を変更することなく、実施例２を実現することも可能である。 In the second embodiment, the first and second voltage measurement times can be set at any time in the time zone in which the switch 10 is on. When the voltage difference of the incandescent lamp is outside the registered voltage difference range and the determination unit 17 determines that it is a non-genuine product, it is preferable to take the same action as in the first embodiment. In the first embodiment, the second embodiment can be realized without changing the hardware configuration by changing the computer program for controlling the control unit 9, the measurement unit 11, the comparison unit 12, the determination unit 13, and the display unit 14. Is also possible.
本発明の露光装置１００（１０１）では、光源装置４の台数が多く、それらの白熱灯２の検査時間が露光装置１００（１０１）の起動時間を大きく超えるような場合には、制御部９、定電流電源８、測定部１１（１５）、比較部１２（１６）、判定部１３（１７）、表示部１４を白熱灯２の検査に必要な台数分を増設し、これらを並列に稼働させ、白熱灯２の検査を並行して行うことにより、検査時間を増加させることなく光源装置４の台数増加に対応して検査をすることができる。 In the exposure apparatus 100 (101) of the present invention, when the number of light source devices 4 is large and the inspection time of those incandescent lamps 2 greatly exceeds the startup time of the exposure apparatus 100 (101), the control unit 9, The number of the constant current power supply 8, the measurement unit 11 (15), the comparison unit 12 (16), the determination unit 13 (17), and the display unit 14 are increased by the number necessary for the inspection of the incandescent lamp 2, and these are operated in parallel. By performing the inspection of the incandescent lamp 2 in parallel, it is possible to perform the inspection corresponding to the increase in the number of the light source devices 4 without increasing the inspection time.
本発明は、プリント配線基板上に配線パターンを形成する露光工程用の露光装置だけでなく、放電灯を利用した液晶表示パネル用、半導体デバイス用など、全ての露光装置と部品の外観検査装置など複数のランプを有する光源装置において、純正品の放電灯が必要な装置に利用可能である。 The present invention is not only an exposure apparatus for an exposure process for forming a wiring pattern on a printed wiring board, but also a liquid crystal display panel using a discharge lamp, a semiconductor device, etc. In a light source device having a plurality of lamps, a genuine discharge lamp can be used for a device that requires it.
１：放電灯、１ａ：内部空間、１ｂ：発光部、１ｃ：封止部、１ｄ：発光管、１ｅ：電極、１ｆ：給電ワーヤー、２：白熱灯、２ａ：フィラメント、２ｂ：給電ワイヤー、３：リフレクター容器、３ａ：反射面、３ｂ：ベース部、３ｃ：カバー部、３ｄ：挿入孔、３ｅ：接着剤、３ｆ：挿入孔、３ｇ：収容空間、４：本発明の光源装置、５：フレーム、６：光源部、７：点灯回路、８：定電流電源、９：制御部、１０：スイッチ、１１：測定部、１１ａ：抵抗（測定部の内部抵抗）、１２：比較部、１３：判定部、１４：表示部、１５：測定部、１５ａ：抵抗（測定部の内部抵抗）、１６：比較部、１７：判定部、３０：抵抗、１００：本発明の露光装置、１０１：本発明の露光装置。 1: discharge lamp, 1a: internal space, 1b: light emitting part, 1c: sealing part, 1d: arc tube, 1e: electrode, 1f: feeding wire, 2: incandescent lamp, 2a: filament, 2b: feeding wire, 3 : Reflector container, 3a: reflecting surface, 3b: base part, 3c: cover part, 3d: insertion hole, 3e: adhesive, 3f: insertion hole, 3g: accommodation space, 4: light source device of the present invention, 5: frame , 6: light source unit, 7: lighting circuit, 8: constant current power source, 9: control unit, 10: switch, 11: measurement unit, 11a: resistance (internal resistance of the measurement unit), 12: comparison unit, 13: determination Part: 14: display part, 15: measurement part, 15a: resistance (internal resistance of the measurement part), 16: comparison part, 17: determination part, 30: resistance, 100: exposure apparatus of the present invention, 101: of the present invention Exposure device.
上記課題を解決するため、本発明における請求項１に記載の発明は、例えば図１に示すように、第１の露光装置１００を次のように構成した。すなわち、第１の露光装置１００は、
複数の前記光源装置４と、前記光源装置４を被照射物に向けて装着するフレーム５と、前記白熱灯２に電流を供給する定電流電源８と、前記定電流電源８からの前記電流をオン・オフするスイッチ１０と、前記放電灯１の点灯中に前記スイッチ１０をオン・オフして前記白熱灯２を所定の時間点灯する制御部９と、点灯中の前記白熱灯２の両端電圧を測定する測定部１１と、前記測定部１１にて測定された前記両端電圧と放電灯１の正否を判定する前記所定の上限値及び下限値の電圧範囲とを比較する比較部１２と、
前記比較部１２からの信号を受け、前記両端電圧が前記所定の上限値及び下限値の電圧範囲内の場合は、検査対象放電灯が純正品であると判定し、前記両端電圧が前記所定の上限値及び下限値の電圧範囲外の場合は、検査対象放電灯が非純正品であると判定する判定部１３と、判定結果を表示する表示部１４とを備えることを特徴とする。
In order to solve the above-mentioned problems, according to the first aspect of the present invention , as shown in FIG. 1, for example, the first exposure apparatus 100 is configured as follows. That is, the first exposure apparatus 100 is
A plurality of the light source devices 4 , a frame 5 for mounting the light source devices 4 toward the irradiated object, a constant current power source 8 for supplying a current to the incandescent lamp 2, and the current from the constant current power source 8. A switch 10 that is turned on / off, a control unit 9 that turns on / off the switch 10 while the discharge lamp 1 is lit and lights the incandescent lamp 2 for a predetermined time, and a voltage across the incandescent lamp 2 that is lit A comparison unit 12 that compares the voltage range of the predetermined upper limit value and the lower limit value that determine the correctness of the discharge lamp 1 with the both-end voltage measured by the measurement unit 11;
When the signal from the comparison unit 12 is received and the voltage at both ends is within the voltage range of the predetermined upper limit value and the lower limit value, it is determined that the discharge lamp to be inspected is a genuine product, and the voltage at both ends is the predetermined voltage. When it is outside the voltage range of the upper limit value and the lower limit value, a determination unit 13 that determines that the discharge lamp to be inspected is a non-genuine product and a display unit 14 that displays the determination result are provided.
また、請求項２に記載の発明は、例えば図１に示すように、第２の露光装置１０１を次のように構成した。すなわち、第２の露光装置１０１は、
複数の前記光源装置４と、前記光源装置４を被照射物に向けて装着する前記フレーム５と、前記白熱灯２に電流を供給する前記定電流電源８と、前記定電流電源８からの前記電流をオン・オフする前記スイッチ１０と、前記放電灯１の点灯中に前記スイッチ１０をオン・オフして前記白熱灯２を所定の時間点灯する前記制御部９と、点灯中の前記白熱灯２の両端電圧を２回、各々所定の時間に測定する測定部１５と、前記測定部１５にて該白熱灯２の前記１回目測定時の電圧と前記２回目測定時の電圧との差と、放電灯の正否を判定する所定の上限値及び下限値の電圧範囲とを比較する比較部１６と、前記比較部１６からの信号を受け、前記両端電圧の差が前記所定の上限値及び下限値の電圧範囲内の場合は、検査対象放電灯が純正品であると判定し、前記両端電圧の差が前記所定の上限値及び下限値の電圧範囲外の場合は、検査対象放電灯が非純正品であると判定する判定部１７と、判定結果を表示する前記表示部１４とを備えることを特徴とする。
In the invention described in claim 2 , for example, as shown in FIG. 1, the second exposure apparatus 101 is configured as follows. That is, the second exposure apparatus 101
A plurality of the light source devices 4 , the frame 5 for mounting the light source devices 4 toward the irradiated object, the constant current power source 8 for supplying current to the incandescent lamp 2, and the constant current power source 8 The switch 10 for turning on / off current, the control unit 9 for turning on / off the switch 10 during lighting of the discharge lamp 1 and lighting the incandescent lamp 2 for a predetermined time, and the incandescent lamp being lit A measurement unit 15 that measures the voltage at both ends of the lamp twice at a predetermined time, and a difference between the voltage at the first measurement of the incandescent lamp 2 and the voltage at the second measurement by the measurement unit 15; The comparison unit 16 that compares a voltage range of a predetermined upper limit value and a lower limit value for determining whether the discharge lamp is correct or not, receives a signal from the comparison unit 16, and the difference between the both-end voltages is the predetermined upper limit value and the lower limit value If the value is within the voltage range, the discharge lamp to be inspected is genuine. If the difference between the voltages at both ends is outside the predetermined upper limit value and lower limit voltage range, the determination unit 17 determines that the discharge lamp to be inspected is a non-genuine product, and the display for displaying the determination result And a unit 14.
また、請求項３に記載の発明は、前記放電灯１の検査方法に関し、
複数の前記光源装置４が装備された請求項１に記載の露光装置１００及び請求項２に記載の露光装置１０１において、前記制御部９は、前記放電灯１の点灯中に前記白熱灯２を順次オン・オフして前記放電灯１の正否を順次検査することを特徴とする。
The invention according to claim 3 relates to an inspection method for the discharge lamp 1,
In exposure apparatus 101 according to the exposure apparatus 100 and claim 2 of claim 1 in which a plurality of the light source device 4 is equipped with, the control unit 9, the incandescent lamp 2 in the discharge lamp 1 lights The discharge lamps 1 are sequentially checked for correctness by sequentially turning on and off.
請求項１に記載の発明によれば、同一のリフレクター容器に収納された放電灯と白熱灯において、放電灯は光源として、白熱灯は放電灯が純正であるかどうかを識別するための固有の電圧を発生する抵抗装置のように利用される。白熱灯をリフレクター容器に組み込む前に、白熱灯単体に定電流を供給し、所定時間経過後の白熱灯の両端の電圧を測定する。同じ条件で複数個の白熱灯の両端の電圧を測定し、電圧分布範囲を確定する。その後、同一のリフレクター容器に収納された放電灯と白熱灯において、上記と同じ条件で測定した白熱灯の両端の電圧と上記の電圧分布範囲とを比較し、測定した電圧がその電圧分布範囲内であれば、測定した白熱灯と同一のリフレクター容器内の放電灯は純正品であると識別することができる。上記の光源装置及び露光装置においては、上記の比較判定を全ての放電灯について順次行っていき、短時間、低コストかつ高精度で放電灯が純正品か否かを識別することができる。また、上記の発明では、白熱灯の両端の電圧を１回測定すれば純正品か否かの識別が可能である。 According to the first aspect of the present invention, in the discharge lamp and the incandescent lamp housed in the same reflector container, the discharge lamp is used as a light source, and the incandescent lamp is used to identify whether the discharge lamp is genuine. It is used like a resistance device that generates voltage. Before incorporating the incandescent lamp into the reflector container, a constant current is supplied to the incandescent lamp alone, and the voltage across the incandescent lamp after a predetermined time has elapsed is measured. Measure the voltage across the incandescent lamps under the same conditions to determine the voltage distribution range. Then, in the discharge lamp and the incandescent lamp housed in the same reflector container, the voltage at both ends of the incandescent lamp measured under the same conditions as described above is compared with the above voltage distribution range, and the measured voltage is within the voltage distribution range. If so, the discharge lamp in the same reflector container as the measured incandescent lamp can be identified as a genuine product. In the above light source device and exposure apparatus, the above comparison and determination are sequentially performed for all the discharge lamps, and it is possible to identify whether the discharge lamp is a genuine product in a short time, at low cost and with high accuracy. Moreover, in said invention, if the voltage of the both ends of an incandescent lamp is measured once, it can identify whether it is a genuine product.
請求項２に記載の発明によれば、上記のフィラメントに固有の温度による電圧差を利用することにより、さらに高精度で純正品を識別することが可能である。白熱灯をリフレクター容器に組み込む前に、白熱灯単体に定電流を供給し、まず白熱灯への定電流供給開始直後でフィラメントの温度が低い時の白熱灯の両端の電圧を測定し、次に所定時間経過後でフィラメントの温度が十分に上昇した時の両端の電圧を測定して、両者の電圧差を測定する。同じ条件で複数個の白熱灯の両端の電圧を測定し、電圧差分布範囲を確定する。その後、同一のリフレクター容器に収納された放電灯と白熱灯において、上記と同じ条件で測定した白熱灯の電圧差と上記の電圧差分布範囲と比較し、測定した電圧差がその電圧差分布範囲内であれば、白熱灯と同一のリフレクター容器内の放電灯は純正品であると識別することができる。上記の光源装置及び露光装置においては、上記の比較判定を全ての放電灯について順次行っていき、短時間、低コストかつより高精度で放電灯が純正品か否かを識別することができる。 According to the second aspect of the present invention, it is possible to identify a genuine product with higher accuracy by using the voltage difference due to the temperature inherent to the filament. Before installing the incandescent lamp in the reflector container, supply a constant current to the incandescent lamp alone, first measure the voltage across the incandescent lamp when the filament temperature is low immediately after the constant current supply to the incandescent lamp starts, and then The voltage at both ends when the filament temperature rises sufficiently after a predetermined time has elapsed is measured, and the voltage difference between the two is measured. Measure the voltage across the incandescent lamps under the same conditions to determine the voltage difference distribution range. After that, in the discharge lamp and the incandescent lamp housed in the same reflector container, the voltage difference of the incandescent lamp measured under the same conditions as described above is compared with the above voltage difference distribution range, and the measured voltage difference is the voltage difference distribution range. If it is inside, the discharge lamp in the same reflector container as the incandescent lamp can be identified as a genuine product. In the above light source device and exposure apparatus, the above comparison and determination are sequentially performed for all the discharge lamps, and it is possible to identify whether the discharge lamp is a genuine product in a short time, at low cost and with high accuracy.
Claims (4)
前記白熱灯は、前記放電灯の点灯中に点灯され、該白熱灯の電圧が、所定の上限値及び下限値の電圧範囲内であるか否かを検出することにより、前記放電灯が純正品であるか否かを判定するものであることを特徴とする光源装置。 A discharge lamp that is a light source, an incandescent lamp that detects whether the discharge lamp is a genuine product, and a reflector container equipped with the discharge lamp and the incandescent lamp,
The incandescent lamp is turned on while the discharge lamp is lit, and the discharge lamp is genuine by detecting whether the voltage of the incandescent lamp is within a predetermined upper limit value and lower limit voltage range. It is what determines whether it is. The light source device characterized by the above-mentioned.
前記光源装置を被照射物に向けて装着するフレームと、
前記白熱灯に電流を供給する定電流電源と、
前記定電流電源からの前記電流をオン・オフするスイッチと、
前記放電灯の点灯中に前記スイッチをオン・オフして前記白熱灯を所定の時間点灯する制御部と、
点灯中の前記白熱灯の両端電圧を測定する測定部と、
前記測定部にて測定された前記両端電圧と放電灯の正否を判定する前記所定の上限値及び下限値の電圧範囲とを比較する比較部と、
前記比較部からの信号を受け、前記両端電圧が前記所定の上限値及び下限値の電圧範囲内の場合は、検査対象放電灯が純正品であると判定し、前記両端電圧が前記所定の上限値及び下限値の電圧範囲外の場合は、検査対象放電灯が非純正品であると判定する判定部と、
判定結果を表示する表示部とを備えることを特徴とする露光装置。 One or more light source devices according to claim 1;
A frame for mounting the light source device toward the irradiated object;
A constant current power source for supplying current to the incandescent lamp;
A switch for turning on and off the current from the constant current power source;
A controller that turns on and off the switch during lighting of the discharge lamp and lights the incandescent lamp for a predetermined time; and
A measuring unit for measuring a voltage across the incandescent lamp that is lit;
A comparison unit that compares the voltage between both ends measured by the measurement unit and the voltage range of the predetermined upper limit value and lower limit value for determining whether the discharge lamp is correct or not;
When the signal from the comparison unit is received and the voltage at both ends is within the voltage range of the predetermined upper limit value and the lower limit value, it is determined that the discharge lamp to be inspected is a genuine product, and the voltage at both ends is the predetermined upper limit value. A determination unit that determines that the discharge lamp to be inspected is a non-genuine product when it is outside the voltage range of the value and the lower limit,
An exposure apparatus comprising: a display unit that displays a determination result.
前記光源装置を被照射物に向けて装着する前記フレームと、
前記白熱灯に電流を供給する前記定電流電源と、
前記定電流電源からの前記電流をオン・オフする前記スイッチと、
前記放電灯の点灯中に前記スイッチをオン・オフして前記白熱灯を所定の時間点灯する前記制御部と、
点灯中の前記白熱灯の両端電圧を２回、各々所定の時間に測定する測定部と、
前記測定部にて該白熱灯の１回目測定時の電圧と２回目測定時の電圧との差と、放電灯の正否を判定する所定の上限値及び下限値の電圧範囲とを比較する比較部と、
前記比較部からの信号を受け、前記両端電圧の差が前記所定の上限値及び下限値の電圧範囲内の場合は、検査対象放電灯が純正品であると判定し、前記両端電圧の差が前記所定の上限値及び下限値の電圧範囲外の場合は、検査対象放電灯が非純正品であると判定する判定部と、
判定結果を表示する前記表示部とを備えることを特徴とする露光装置。 One or more light source devices according to claim 1;
The frame for mounting the light source device toward the irradiated object;
The constant current power source for supplying current to the incandescent lamp;
The switch for turning on and off the current from the constant current power supply;
The control unit for turning on and off the switch during lighting of the discharge lamp and lighting the incandescent lamp for a predetermined time;
A measuring unit for measuring the voltage across the incandescent lamp being lit twice, each at a predetermined time;
A comparison unit that compares the difference between the voltage at the time of the first measurement and the voltage at the time of the second measurement of the incandescent lamp and a voltage range of a predetermined upper limit value and a lower limit value for determining whether the discharge lamp is correct or not in the measurement unit. When,
When the signal from the comparison unit is received and the difference between the voltages at both ends is within the voltage range of the predetermined upper limit value and the lower limit value, it is determined that the discharge lamp to be inspected is a genuine product, and the difference between the voltages at both ends is When the predetermined upper limit value and the lower limit value are outside the voltage range, a determination unit that determines that the discharge lamp to be inspected is a non-genuine product,
An exposure apparatus comprising: the display unit that displays a determination result.
前記制御部は、前記放電灯の点灯中に前記白熱灯を順次オン・オフして前記放電灯の正否を順次検査することを特徴とする前記放電灯の検査方法。 The exposure apparatus according to claim 2 or 3, wherein a plurality of light source devices according to claim 1 are provided.
The control unit is configured to inspect the correctness of the discharge lamp by sequentially turning on and off the incandescent lamp while the discharge lamp is turned on.
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| JP2015081773A JP5869713B1 (en) | 2015-04-13 | 2015-04-13 | Light source apparatus, exposure apparatus, and inspection method thereof |
| TW106131956A TWI639899B (en) | 2015-04-13 | 2016-03-08 | Light source device |
| TW105107036A TWI609249B (en) | 2015-04-13 | 2016-03-08 | Exposure device and method for inspecting discharge lamp |
| KR1020160044876A KR101804755B1 (en) | 2015-04-13 | 2016-04-12 | Exposure device and method for inspecting the same |
| CN201610225945.2A CN106061077B (en) | 2015-04-13 | 2016-04-13 | Exposure device and its inspection method |
| CN201710673011.XA CN107478976B (en) | 2015-04-13 | 2016-04-13 | Light source device |
| KR1020170130254A KR20170118003A (en) | 2015-04-13 | 2017-10-11 | Light source device |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |