JP2007333965A - Illumination device for exposure - Google Patents

Illumination device for exposure Download PDF

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JP2007333965A
JP2007333965A JP2006164901A JP2006164901A JP2007333965A JP 2007333965 A JP2007333965 A JP 2007333965A JP 2006164901 A JP2006164901 A JP 2006164901A JP 2006164901 A JP2006164901 A JP 2006164901A JP 2007333965 A JP2007333965 A JP 2007333965A
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Prior art keywords
lamp
voltage
lighting
lamps
exposure
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Gunji Mizutani
谷 軍 司 水
Hiroyuki Imai
井 洋 之 今
Tadahiro Toki
樹 忠 博 東
Gen Orito
戸 弦 折
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Adtec Engineering Co Ltd
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Adtec Engineering Co Ltd
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Priority to JP2006164901A priority Critical patent/JP2007333965A/en
Priority to TW096111741A priority patent/TWI388920B/en
Priority to KR1020070033203A priority patent/KR20070119487A/en
Priority to CN2007101038171A priority patent/CN101089732B/en
Publication of JP2007333965A publication Critical patent/JP2007333965A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H01L21/0275—Photolithographic processes using lasers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an illumination device for exposure having a plurality of lamps in which each lamp state can be monitored. <P>SOLUTION: A power supply module 2 is provided in each lamp 1 and a plurality of the power supply modules 2 are controlled by a controller 3 to turn on each lamp 1. The power supply module 2 has a lighting circuit 20, and the lighting circuit 20 includes a lighting detector 21, which sends a signal indicating a lighting or non-lighting state of each lamp 1 to the controller 3 to display the result on a display device 4. A voltage detecting device 22 is connected to the lighting circuit 20 and detects a voltage upon lighting each lamp 1. A voltage judging device 23 judges whether the lamp is lighted at a rated specification voltage or not. The upper and lower reference voltages in the voltage judging device 23 are arbitrarily set by an upper and lower limit reference voltage setting device 5, and the qualification reference of the lamp voltage is variable according to the characteristics of the lamp 1 or exposure conditions. The judgment result by the voltage judging device 23 is sent to the controller 3 and displayed and notified on the display device 4. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明は、露光用照明装置に関する。   The present invention relates to an exposure illumination device.

半導体回路やプリント配線基板を製作するに際して、フォトレジストを施した基板に露光装置により回路パターンなどを焼き付けることが行われる。
露光装置の露光用照明には、一般に紫外線が用いられ、そのための照明ランプとして、一般的に高圧水銀ランプが用いられている。
このような露光用照明装置として、多数のランプを使用した特開２００４−３６１７４６号に示すようなマルチランプシステムが知られている。 When a semiconductor circuit or a printed wiring board is manufactured, a circuit pattern or the like is printed on the substrate on which a photoresist is applied by an exposure apparatus.
In general, ultraviolet light is used for exposure illumination of the exposure apparatus, and a high-pressure mercury lamp is generally used as the illumination lamp.
As such an exposure illumination apparatus, a multi-lamp system as shown in Japanese Patent Application Laid-Open No. 2004-361746 using a large number of lamps is known.

特開２００４−３６１７４６号JP 2004-361746 A

上記マルチランプシステムの場合、高出力が得られる利点があるが、構成する複数のランプの個々が定格仕様電圧で点灯しているかを検出する機能はなく、また全てのランプが所定の照度で点灯している事を目視で把握することは困難である。
また、ランプの寿命判定にはランプの積算点灯時間が用いられ、ランプの明るさに関係なく積算点灯時間が寿命と設定される時間を過ぎれば寿命を迎えたとしており、ランプの使用効率が悪いなどの問題がある。
本発明は上記従来技術の問題を解決することを目的とする。 The multi-lamp system has the advantage that high output can be obtained, but there is no function to detect whether each of the multiple lamps is lit at the rated voltage, and all the lamps are lit at a predetermined illuminance. It is difficult to visually grasp what is being done.
In addition, the lamp's cumulative lighting time is used to determine the lamp's life, and the lamp is said to have reached the end of its life if the cumulative lighting time has passed the set time regardless of the brightness of the lamp. There are problems such as.
The object of the present invention is to solve the problems of the prior art.

上記目的を達成するために、本発明は複数のランプを有する露光用照明装置であって、ランプの点灯回路と、各ランプが点灯したことを個々に検出する点灯検出手段と、各ランプ点灯時の点灯電圧を個々に検出する電圧検出手段と、該検出したランプの点灯電圧が所定の電圧範囲にあることを判定する電圧判定手段と、前記点灯検出手段による検出結果と電圧判定手段の判定結果とを告知する手段と、を備えたことを特徴とする。
以上のように各ランプの点灯及び電圧を検出することにより、不点灯のランプや電圧不適当のランプを認識することができ、不適合ランプの数や位置などの把握も可能になる。
また前記点灯検出手段による検出結果と電圧判定手段の判定結果とから不適合ランプ数を算出し、該不適合ランプ数が所定数以上の時に、露光不可と判断する手段、を更に備えることにより露光可及び不可の自動的な判断も可能になる。
また、前記電圧判定手段の判定結果に基づいて、ランプの寿命を判別することも可能である。
前記複数のランプは、同一の仕様でなく、異なる仕様のランプを含んでも良い。この場合、各ランプ毎にその仕様に適合する前記ランプの点灯回路と、点灯検出手段と、電圧検出手段と、電圧判定手段とを備えることにより対応可能である。
前記複数のランプは使用条件により全てのランプを使用しても良いし、一部のランプを使用しても良い。この場合、複数ランプの各ランプについて任意に使用または不使用を選定する手段を備えることにより対応可能である。
また、前記複数のランプの各ランプの積算点灯時間を平均化するように、前記複数のランプの各ランプについて使用、不使用を選定する手段、を更に備え、この手段によりランプの交換周期を延長する、ことも可能である。この場合、複数の点灯パターンを予め設定しておき、ランプ点灯時にパターンを切り替えるように構成するのが望ましい。
この構成により、各ランプの積算点灯時間を平均化できランプの使用可能期間（交換周期）を延長することが可能となる。 In order to achieve the above object, the present invention is an exposure illumination apparatus having a plurality of lamps, a lamp lighting circuit, lighting detection means for individually detecting that each lamp is lit, and each lamp lighting time. Voltage detection means for individually detecting the lighting voltage of the lamp, voltage determination means for determining that the detected lighting voltage of the lamp is within a predetermined voltage range, detection results by the lighting detection means and determination results of the voltage determination means And a means for notifying that.
By detecting the lighting and voltage of each lamp as described above, it is possible to recognize a non-lighted lamp or a lamp with an inappropriate voltage, and it is also possible to grasp the number and position of non-conforming lamps.
Further, a means for calculating the number of non-conforming lamps from the detection result by the lighting detection means and the judgment result of the voltage determining means, and further comprising means for judging that exposure is impossible when the number of non-conforming lamps is a predetermined number or more. Automatic determination of the impossibility is also possible.
It is also possible to determine the lamp life based on the determination result of the voltage determination means.
The plurality of lamps may include lamps having different specifications instead of the same specification. In this case, each lamp can be dealt with by including a lamp lighting circuit, lighting detection means, voltage detection means, and voltage determination means that meet the specifications.
As the plurality of lamps, all lamps may be used or some lamps may be used depending on use conditions. This case can be dealt with by providing means for arbitrarily selecting use or non-use for each of the plurality of lamps.
The lamp further includes means for selecting use or non-use of each of the plurality of lamps so as to average the integrated lighting time of each of the plurality of lamps, and this means extends a lamp replacement period. It is also possible to do. In this case, it is desirable to set a plurality of lighting patterns in advance and switch the patterns when the lamp is lit.
With this configuration, the integrated lighting time of each lamp can be averaged, and the usable period (replacement cycle) of the lamp can be extended.

本発明の露光用照明装置によれば、不点灯ランプを検出でき、また個々のランプの点灯電圧が検出できる。そのため、照明装置の照度が基準以上か否かの判別が可能になり、露光の適否や露光開始のタイミングを知ることができる。
また、個々のランプの電圧から点灯中のランプの劣化を判定でき、初期照度より著しく暗くなる前に、ランプ交換の時期を知ることができる。更に、仕様の異なるランプを混在させることが可能になる等の効果がある。 According to the exposure illumination device of the present invention, a non-lighting lamp can be detected, and a lighting voltage of each lamp can be detected. Therefore, it is possible to determine whether or not the illuminance of the illuminating device is equal to or higher than the reference, and it is possible to know the suitability of exposure and the timing of starting exposure.
In addition, it is possible to determine the deterioration of the lamp being lit from the voltage of each lamp, and to know the lamp replacement time before it becomes significantly darker than the initial illuminance. Furthermore, there is an effect that lamps having different specifications can be mixed.

以下本発明の実施の形態を図面に基づいて説明する。
図１において、本発明の露光用照明装置は、複数のランプ１と複数の電源モジュール２を有しており、各ランプ１毎に電源モジュール２が設けられている。この電源モジュール２を制御装置３により制御して、各ランプ１の点灯を行わせるように構成されている。 Embodiments of the present invention will be described below with reference to the drawings.
In FIG. 1, the exposure illumination device of the present invention has a plurality of lamps 1 and a plurality of power supply modules 2, and a power supply module 2 is provided for each lamp 1. The power supply module 2 is controlled by a control device 3 so that each lamp 1 is turned on.

電源モジュール２には、制御装置３に制御される点灯回路２０が設けられており、この点灯回路２０に点灯検出器２１が付属して、各ランプ１の点灯不点灯の信号を制御装置３に送るようになっている。この点灯不点灯の検出結果は表示装置４に表示され、使用者に告知される。
点灯回路２０にはまた電圧検出装置２２が接続し、各ランプ１の点灯電圧を検出するように構成されている。 The power supply module 2 is provided with a lighting circuit 20 that is controlled by the control device 3, and a lighting detector 21 is attached to the lighting circuit 20, and a signal indicating that the lamp 1 is not lit is supplied to the control device 3. To send. The detection result of this lighting / non-lighting is displayed on the display device 4 and notified to the user.
A voltage detection device 22 is also connected to the lighting circuit 20 so as to detect the lighting voltage of each lamp 1.

制御装置３は各ランプの点灯回路２に信号を出し、全てのランプ１を点灯しても良いし、或いはあらかじめ任意に選出されたランプ１を点灯しても良い。これについては後述する。   The control device 3 may send a signal to the lighting circuit 2 of each lamp to turn on all the lamps 1 or turn on the lamps 1 that are arbitrarily selected in advance. This will be described later.

図３にランプ１の電圧特性を示す。前記したように露光照明装置に用いられるランプ１には一般的に高圧水銀ランプが用いられ、このランプは電源オンから電圧が安定するまで所定の時間を要する。この電圧が安定する領域を露光動作適正動作領域とし、各ランプ１の電圧がこの領域に達した時が露光適正時期である。
また、該ランプは積算点灯時間が長くなると、徐々に安定時の電圧が高くなり、同時に照度が低下する。従って、ランプ１の電圧により、該ランプ１の寿命の到来を事前に知ることが可能になり、早目にランプ交換を行える。 FIG. 3 shows the voltage characteristics of the lamp 1. As described above, a high-pressure mercury lamp is generally used as the lamp 1 used in the exposure illumination apparatus, and this lamp requires a predetermined time from when the power is turned on until the voltage is stabilized. The region where this voltage is stable is defined as an appropriate operation region for exposure operation, and the time when the voltage of each lamp 1 reaches this region is the proper exposure time.
In addition, as the cumulative lighting time of the lamp increases, the voltage at the time of stabilization gradually increases and the illuminance decreases at the same time. Therefore, it becomes possible to know in advance the end of the life of the lamp 1 by the voltage of the lamp 1, and the lamp can be replaced quickly.

電圧検出装置２２は、各ランプ１のランプ点灯時の電圧を検出し、電圧判定装置２３は更に該点灯電圧からランプが定格仕様電圧で点灯しているか否かを判別する。
電圧判定装置２３には図３に示す定格仕様電圧の上限と下限の基準電圧が設定され、ランプ点灯した後、定格仕様電圧下限を越えると露光可能と判断するように構成されている。また一定時間経過後、定格仕様電圧範囲からはずれるランプが存在する場合、該ランプが定格仕様電圧にない旨の信号を出力する。
この電圧判定装置２３における上限と下限の基準電圧は、上下限基準電圧設定装置５により使用者が任意に設定できるようになっており、ランプ１の特性や露光の条件などに応じてランプ電圧の適否基準を変更できるようになっている。 The voltage detection device 22 detects the voltage of each lamp 1 when the lamp is lit, and the voltage determination device 23 further determines whether or not the lamp is lit at the rated specification voltage from the lighting voltage.
The upper and lower reference voltages of the rated specification voltage shown in FIG. 3 are set in the voltage determination device 23. After the lamp is turned on, it is determined that exposure is possible when the lower limit of the rated specification voltage is exceeded. If a lamp deviates from the rated specification voltage range after a certain time has elapsed, a signal indicating that the lamp is not within the rated specification voltage is output.
The upper and lower reference voltages in the voltage determination device 23 can be arbitrarily set by the user using the upper / lower reference voltage setting device 5, and the lamp voltage can be set according to the characteristics of the lamp 1 and the exposure conditions. Applicability criteria can be changed.

電圧判定装置２３による判定結果は制御装置３に送られ、表示装置４に表示され、告知されるように構成されている。
即ち、各ランプ１が前記上限と下限の間の適正電圧範囲内に入ったこと、及び所定時間後も該適正電圧範囲内にないランプ１を表示するように構成されている。 The determination result by the voltage determination device 23 is sent to the control device 3, displayed on the display device 4, and notified.
That is, the lamp 1 is configured to display that the lamp 1 is within the proper voltage range between the upper limit and the lower limit, and that the lamp 1 that is not within the proper voltage range after a predetermined time is displayed.

上記表示装置４の表示により、使用者は、不点灯のランプ１の数、及び適正電圧にないランプ１の数を把握することができ、露光動作を継続するか、もしくは露光中止にするかを、判断することが可能になる。   The display of the display device 4 allows the user to know the number of unlit lamps 1 and the number of lamps 1 that are not at an appropriate voltage, and whether to continue the exposure operation or stop the exposure. It becomes possible to judge.

この実施形態では、更に制御装置３は点灯検出器２１からの不点灯ランプ数と電圧判定装置２３からの非適正電圧範囲のランプ数が所定数以上か否か判別し、露光可か露光不可かを判断する構成を備えている。この構成により、自動的に露光の適否を判断することが可能になる。   In this embodiment, the control device 3 further determines whether or not the number of unlit lamps from the lighting detector 21 and the number of lamps in the inappropriate voltage range from the voltage determination device 23 are equal to or greater than a predetermined number, and whether exposure is possible or not possible. It has a configuration for judging. With this configuration, it is possible to automatically determine whether exposure is appropriate.

図２により動作を説明する。
使用者などからランプ点灯操作がなされると、制御装置３は点灯回路２０にランプ点灯指令を出力し（ステップＳ１）、同時にランプ番号Ｎに１を置く（ステップＳ２）。そして、電圧安定時間が経過後（ステップＳ３）、点灯検出器２１からの信号により、ランプ不点灯の場合には（ステップＳ４）、表示装置４にその旨の表示を行わせる（ステップＳ５）。ランプが点灯している場合には（ステップＳ４）、電圧判定装置２３からの信号により電圧が上限を超える場合には（ステップＳ６）、ランプ１の寿命が近いことを表示装置４に表示する（ステップＳ７）。上限値以下であり、下限値以下の場合（ステップＳ８）、低電圧である旨を表示装置４に表示する（ステップＳ９）。 The operation will be described with reference to FIG.
When a lamp lighting operation is performed by a user or the like, the control device 3 outputs a lamp lighting command to the lighting circuit 20 (step S1), and simultaneously puts 1 in the lamp number N (step S2). Then, after the voltage stabilization time has elapsed (step S3), in the case where the lamp is not lit (step S4), the display device 4 is displayed (step S5). When the lamp is lit (step S4), when the voltage exceeds the upper limit due to a signal from the voltage determination device 23 (step S6), it is displayed on the display device 4 that the lifetime of the lamp 1 is near ( Step S7). If it is less than or equal to the upper limit value and less than or equal to the lower limit value (step S8), the fact that the voltage is low is displayed on the display device 4 (step S9).

ステップＳ５、７、９の場合は、いずれもランプ不良と判断し、制御装置３は不良数をカウントする（ステップＳ１０）。
そして、上記ステップＳ４からＳ１０までを各ランプについて実行し（ステップＳ１１，１２）、不良数Ｄが基準値以内か判断する（ステップＳ１３）。基準値以内であれば露光可と判断し、表示装置４に表示する（ステップＳ１４）。基準値以上であれば露光不可と判断し、その旨の表示を行う（ステップＳ１５）。
使用者は表示装置４の表示に基づいて種々の判断を行うことができる。 In Steps S5, S7 and S9, all are determined to be lamp failures, and the control device 3 counts the number of failures (Step S10).
Then, the above steps S4 to S10 are executed for each lamp (steps S11 and S12), and it is determined whether the number of defects D is within the reference value (step S13). If it is within the reference value, it is determined that exposure is possible, and is displayed on the display device 4 (step S14). If it is equal to or greater than the reference value, it is determined that exposure is impossible, and a message to that effect is displayed (step S15).
The user can make various determinations based on the display on the display device 4.

なお、前記したように制御装置３は全てのランプ１を点灯することも、或いは任意のランプ１を点灯することも可能である。
例えば、図４の例では、７×６個のランプ１の中、外周部分のランプ１’を点灯せずに、残りの中央部分のランプ１のみを点灯させている。このように選択的に点灯させることにより、全体の照度の調整や、照明の位置の調整などが可能になる。 As described above, the control device 3 can light all the lamps 1 or can light any lamp 1.
For example, in the example of FIG. 4, among the 7 × 6 lamps 1, the lamp 1 ′ at the outer peripheral portion is not turned on, and only the lamp 1 at the remaining central portion is turned on. By selectively lighting in this way, it is possible to adjust the overall illuminance, adjust the position of the illumination, and the like.

この実施形態では、更に図１に示すように点灯パターン選定装置６を備えている。点灯パターン選定装置６は予め決められた点灯パターンを記憶しておき、該パターンを選択し、選択したパターンに従ってランプ１を点灯するものである。
図５と図６に実施例を示す。図５と図６では市松模様にランプ１を点灯不点灯としてあり、図５と図６では互い違いに点灯させるようになっている。このように点灯パターンを切り替えることにより、各ランプの積算点灯時間を平均化できランプの使用可能期間（交換周期）を延長することが可能になる。 In this embodiment, a lighting pattern selection device 6 is further provided as shown in FIG. The lighting pattern selection device 6 stores a predetermined lighting pattern, selects the pattern, and lights the lamp 1 according to the selected pattern.
5 and 6 show an embodiment. In FIGS. 5 and 6, the lamp 1 is turned off in a checkered pattern, and in FIGS. 5 and 6, the lamp 1 is turned on alternately. By switching the lighting pattern in this way, the integrated lighting time of each lamp can be averaged, and the usable period (replacement cycle) of the lamp can be extended.

本発明の一実施形態を示す機能ブロック図。The functional block diagram which shows one Embodiment of this invention. 本発明の一実施形態の動作を示すフローチャート図。The flowchart figure which shows operation | movement of one Embodiment of this invention. ランプの電圧の変化と露光動作適正範囲を示すグラフ。The graph which shows the change of the voltage of a lamp | ramp, and exposure operation appropriate range. ランプを選択的に点灯不点灯としたパターンの一例を示す説明図。Explanatory drawing which shows an example of the pattern which made the lamp | ramp selectively turn on and off. 予め決められた点灯パターンの一例を示す説明図。Explanatory drawing which shows an example of the lighting pattern decided beforehand. 予め決められた点灯パターンの他の例を示す説明図。Explanatory drawing which shows the other example of the lighting pattern decided beforehand.

符号の説明Explanation of symbols

１：ランプ、２：電源モジュール、３：制御装置、４：表示装置、５：上下限基準電圧設定装置、６：点灯パターン選定装置、２０：点灯回路、２１：点灯検出器、２２：電圧検出装置、２３：電圧判定装置、２４：外部出力装置。
1: lamp, 2: power supply module, 3: control device, 4: display device, 5: upper / lower reference voltage setting device, 6: lighting pattern selection device, 20: lighting circuit, 21: lighting detector, 22: voltage detection Device, 23: voltage determination device, 24: external output device.

Claims (6)

複数のランプを有する露光用照明装置であって、
ランプの点灯回路と、
各ランプが点灯したことを個々に検出する点灯検出手段と、
各ランプ点灯時の点灯電圧を個々に検出する電圧検出手段と、
該検出したランプの点灯電圧が所定の電圧範囲にあることを判定する電圧判定手段と、
前記点灯検出手段による検出結果と電圧判定手段の判定結果とを告知する手段と、
を備えたことを特徴とする露光用照明装置。 An exposure illumination apparatus having a plurality of lamps,
Lamp lighting circuit,
Lighting detection means for individually detecting that each lamp is lit,
Voltage detection means for individually detecting the lighting voltage when each lamp is lit,
Voltage determining means for determining that the detected lamp lighting voltage is within a predetermined voltage range;
Means for notifying the detection result of the lighting detection means and the determination result of the voltage determination means;
An illumination device for exposure, comprising: 前記点灯検出手段による検出結果と電圧判定手段の判定結果とから不適合ランプ数を算出し、該不適合ランプ数が所定数以上の時に、露光不可と判断する手段、
を更に備えた請求項１の露光用照明装置。 Means for calculating the number of non-conforming lamps from the detection result of the lighting detection means and the determination result of the voltage determination means, and determining that exposure is impossible when the number of non-conforming lamps is a predetermined number or more;
The illumination device for exposure according to claim 1, further comprising: 前記電圧判定手段の判定結果に基づいて、ランプの寿命を判別する手段、
を更に備えた請求項１の露光用照明装置。 Means for determining the life of the lamp based on the determination result of the voltage determination means;
The illumination device for exposure according to claim 1, further comprising: 前記複数のランプが仕様の異なるランプを含み、
各ランプ毎にその仕様に適合する前記ランプの点灯回路と、点灯検出手段と、電圧検出手段と、電圧判定手段とを備えた、
請求項１又は２又は３の露光用照明装置。 The plurality of lamps include lamps having different specifications;
The lamp lighting circuit that conforms to the specifications for each lamp, a lighting detection means, a voltage detection means, and a voltage determination means,
The illumination device for exposure according to claim 1, 2 or 3. 前記複数のランプの各ランプについて使用、不使用を任意に選定する手段、
を更に備えた請求項１の露光用照明装置。 Means for arbitrarily selecting use or non-use of each of the plurality of lamps;
The illumination device for exposure according to claim 1, further comprising: 前記複数のランプの各ランプの積算点灯時間を平均化するように、前記複数のランプの各ランプについて使用、不使用を選定する手段、を更に備え、
該手段によりランプの交換周期を延長する、
請求項１の露光用照明装置。
Means for selecting use or non-use for each lamp of the plurality of lamps so as to average the integrated lighting time of each lamp of the plurality of lamps;
Extending the lamp replacement cycle by the means,
The exposure illumination device according to claim 1.
JP2006164901A 2006-06-14 2006-06-14 Illumination device for exposure Pending JP2007333965A (en)

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KR1020070033203A KR20070119487A (en) 2006-06-14 2007-04-04 Lighting device exposure
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