CN110249267B

CN110249267B - High voltage discharge lamp

Info

Publication number: CN110249267B
Application number: CN201880009946.0A
Authority: CN
Inventors: 原田智纪; 川岛洋德; 榎本芳幸; 吉本芳幸; 富樫工
Original assignee: V Technology Co Ltd
Current assignee: Phoenix Motor Co ltd
Priority date: 2017-02-02
Filing date: 2018-01-31
Publication date: 2021-09-03
Anticipated expiration: 2038-01-31
Also published as: CN113791521A; JP6457162B2; JPWO2018143300A1; TWI765960B; WO2018143300A1; KR20190111045A; CN110249267A; KR102483865B1; TW201832268A

Abstract

The insulator (30) has an open section (34) that communicates with the outside through a space(s) formed between the other side tube section (15) of the arc tube (10) and the insertion hole (23) of the reflector (20), and the length (L1) of the one side tube section (14) is longer than the length (L2) of the other side tube section (15). Thus, a high-pressure discharge lamp capable of improving cooling efficiency and improving illumination intensity is provided.

Description

High voltage discharge lamp

Technical Field

The present invention relates to a high-pressure discharge lamp, and more particularly, to a high-pressure discharge lamp constituting a multi-lamp light source section of an exposure apparatus.

Background

In recent years, in an exposure apparatus used for manufacturing a color filter or a printed wiring board of a flat panel display device, since an increase in an exposure range is required, an increase in an output of a light source unit is also required. Therefore, various techniques are known in which a light source unit is configured by using a plurality of high-pressure discharge lamps having relatively low luminous intensity, which are advantageous in terms of manufacturing cost and the like (for example, see patent document 1).

As shown in fig. 8, a conventional high-pressure discharge lamp 100 mainly includes: a light emitting tube 110 that discharges and emits light; a reflector 120 for emitting the light emitted from the light emitting tube 110 with directivity; an insulator 130 for fixing the light emitting tube 110 and the reflector 120; and a wire harness 140 electrically connected to the light emitting tube 110. The light emitting tube 110 includes: a light emitting section 111 having an internal space in which a halogen gas, mercury, starting argon gas, or the like is sealed; a pair of

sealing parts

112, 113 for sealing the internal space of the light emitting part 111; and a pair of

electrodes

114 and 115 arranged to face each other in the light-emitting section 111.

In the light source device described in patent document 1, an incandescent lamp 131 is provided inside an insulator 130 so that whether or not the discharge lamp 100 is a genuine product can be checked with high accuracy, in a short time, and at low cost.

In the light irradiation device described in patent document 2, it is described that, in a configuration in which a plurality of lamps are positioned in a case and used, a cooling path for cooling each lamp is formed in a base member of each lamp.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2016-200751

Patent document 2: japanese patent laid-open publication No. 2012-113269

Disclosure of Invention

Technical problem to be solved by the invention

However, in the high-pressure discharge lamp, it is also desired that the light intensity of each lamp is increased. Therefore, since energy at bright spots within the light emitting section increases, further improvement in cooling efficiency is required.

The present invention has been made in view of the above problems, and an object thereof is to provide a high-pressure discharge lamp capable of improving cooling efficiency and increasing illumination intensity.

Means for solving the problems

The above object of the present invention is achieved by the following configuration.

(1) A high-pressure discharge lamp, comprising:

a light emitting tube made of glass, the light emitting tube having: a pair of electrodes arranged opposite to each other, and an elliptical or spherical light emitting tube portion; and a pair of side tube portions connected to both end portions of the light emitting tube portion and extending along the longitudinal axes of the pair of electrodes;

a reflector having: an opening portion provided on one side in the longitudinal direction and through which one of the side tube portions protrudes; a parabolic reflective surface formed about the long axis; and an insertion hole formed on the other side in the longitudinal direction and into which the other side tube portion can be inserted with a gap; and

an insulator fixing the light emitting tube and the reflector, respectively,

the insulator has an open portion that communicates a space formed between the other side tube portion and the insertion hole of the reflector with the outside,

the length of the one side tube portion is longer than the length of the other side tube portion.

(2) The high-pressure discharge lamp according to (1), wherein the one side tube part is arranged in a dead space of the lamp.

(3) The high-pressure discharge lamp according to (1) or (2), wherein the reflector is provided with a flat surface adjacent to the opening and perpendicular to the longitudinal direction, and a distance L3 from the flat surface of the reflector to the one side tube portion is 0.2 × L4 ≦ L3 ≦ 1.0 × L4, where L4 is a distance from the center of the light emitting tube portion to the flat surface of the reflector in the longitudinal direction.

Effects of the invention

According to the high-pressure discharge lamp of the present invention, the insulator has the opening portion that communicates the space formed between the other side tube portion of the arc tube and the insertion hole of the reflector with the outside, and the length of the one side tube portion is longer than the length of the other side tube portion. From this, can improve the cooling efficiency of two side tube portions department of luminotron to realize the promotion of the illumination intensity of lamp self.

Drawings

Fig. 1 is a perspective view of a high-pressure discharge lamp according to an embodiment of the present invention.

Fig. 2 is a side view of the high-pressure discharge lamp shown in fig. 1.

Fig. 3 is a cross-sectional view of the high-pressure discharge lamp shown in fig. 1.

Fig. 4 is a cross-sectional view of the high-pressure discharge lamp shown in fig. 1 taken at a position orthogonal to fig. 3.

Fig. 5(a) is a diagram showing the orientation distribution of light emitted from bright spots, and (b) is a diagram showing the orientation distribution of light reflected by the reflecting surface of the reflector and the dead zone.

Fig. 6 is a perspective view showing a state in which the high-pressure discharge lamp of the present embodiment is mounted on a lamp holder.

Fig. 7 is a diagram showing a circuit for managing the life time of the lamp.

Fig. 8 is a sectional view showing a conventional high-pressure discharge lamp.

Description of the symbols

1 high-pressure discharge lamp

10 luminous tube

11. 12 electrodes

13 luminous tube part

14. 15 side pipe part

20 reflector

21 opening part

22 reflective surface

23 inserting into the hole

25 flat surface

30 insulator

34 open part

A dead zone

s space

Length of one side tube part of L1

Length of the other side tube part of L2

Detailed Description

Hereinafter, a high-pressure discharge lamp according to an embodiment of the present invention will be described in detail with reference to fig. 1 to 6.

As shown in fig. 1, a high-pressure discharge lamp 1 of the present embodiment mainly includes: a glass light emitting tube 10 that emits light by discharging; a reflector 20 for emitting the light emitted from the light-emitting tube 10 with directivity; an insulator 30 for fixing the arc tube 10 and the reflector 20; and wire harnesses 16 and 17 electrically connected to the arc tube 10 (see fig. 4).

As shown in fig. 3, the light emitting tube 10 includes: an elliptical light-emitting tube 13 having a pair of

electrodes

11 and 12 arranged to face each other; and a pair of

side tube portions

14 and 15 connected to both ends of the light emitting tube portion 13 and extending along the longitudinal axis X of the pair of

electrodes

11 and 12. In addition, halogen gas, mercury, argon for starting, and the like are sealed in the inner space of the light emitting tube portion 13, and the inner space of the light emitting tube portion 13 is sealed by the pair of

side tube portions

14 and 15. The shape of the light emitting tube portion 13 may be a spherical surface.

The reflector 20 is provided on one side in the long axis X direction, and has: an opening 21 through which the side pipe 14 protrudes; a parabolic reflecting surface 22 formed around the long axis X; and an insertion hole 23 formed on the other side in the longitudinal axis X direction and into which the other side tube 15 can be inserted with a gap g.

The arc tube 10 has one electrode 11 extending in one side tube portion 14 as an anode (anode) and the other electrode 12 extending in the other side tube portion 15 as a Cathode (Cathode). In general, in a dc discharge lamp, the size of the tip shape of an electrode is smaller (cathode) than (anode), and therefore, the angle at which light emitted by discharge is blocked on the anode side is larger than the angle at which light is blocked on the cathode side. In contrast, the reflector 20 needs to be made deeper in order to increase the angle at which light is received on the opening 21 side of the reflector 20. Therefore, by providing the anode having a large angle of shielding light on the opening 21 side of the reflector 20, the reflector 20 can be reduced in size as compared with the case where the cathode is provided on the opening 21 side.

The wires extending from the distal end portion of the one side tube portion 14 and the proximal end portion of the other side tube portion 15 are connected to a pair of wire harnesses 16, 17 for supplying power, respectively. The wire harness 16 connected to the one side tube portion 14 is led out to the outside through the base 24 attached to the reflector 20.

The reflector 20 has a base 31 of the insulator 30 covering the outside of the bottom of the bowl shape, and its joint is fixed with an adhesive (see fig. 4). The cylindrical central portion of the base portion 31 of the insulator 30 includes a holding portion 32, and the holding portion 32 holds the proximal end portion of the other side tube portion 15 inserted into the insertion hole 23 of the reflector 20. The other side tube 15 is fixed to the insulator 30 by an adhesive at the holding portion 32.

Therefore, the reflector 20 and the other side tube part 15 of the light emitting tube 10 are fixed to the insulator 30, respectively, the reflector 20 and the light emitting tube 10 are not bonded, and a space s is formed by a gap between the other side tube part 15 and the insertion hole 23 of the reflector 20.

The insulator 30 includes the base 31 and a lid 33 including a holding portion 32 and covering the base 31 from the rear. The bottom portion 33a of the lid portion 33 is formed flat.

Therefore, the lamp 1 may be fixed to the lamp holder 40 by bringing a lamp cover, not shown, into contact with the flat bottom portion 33a and coupling the lamp cover to the lamp holder 40 shown in fig. 6.

Returning to fig. 3, the base 31 of the insulator 30 has 2 open portions 34 that communicate the space s between the other side tube portion 15 and the insertion hole 23 of the reflector 20 with the outside and open the other side tube portion 15 to the outside. As shown in fig. 6, in a state where the lamp 1 is mounted on the lamp holder 40, air is sucked and discharged from the rear of the lamp holder 40, and the air sucked from the front of the lamp 1 passes through the space s and the opening portion 34 to cool the arc tube 10. Thus, the space s and the opening portion 34 form a cooling path.

As shown in fig. 4, an incandescent lamp 35 as a resistor is disposed in the housing space between the base 31 and the lid 33 of the insulator 30, and is connected to an external power feeding harness 36. Since the filament 35a of the incandescent lamp 35 is a resistor, the resistance value changes under the influence of the ambient temperature. Note that the power supply harness 36 is connected to a power supply of a system different from the harnesses 16, 17. In addition, the incandescent lamp 35 is disposed in the accommodation space so as not to be cooled by the air passing through the cooling path. For example, the temperature and the cooling state of the lamp can be managed by supplying a current to the incandescent lamp 35, measuring a voltage across both ends of the filament 35a of the incandescent lamp 35, and comparing the voltage with a database of voltages and temperatures studied in advance. Alternatively, a sufficiently large current is supplied to the incandescent lamp 35, and the filament 35a of the incandescent lamp 35 is fused. The presence or absence of the fuse can be confirmed by a judgment circuit, and the use history can be managed.

In addition to the incandescent lamp 35, the resistor may be a metal film resistor, a carbon resistor, a wire harness, a thermocouple, a bimetal, or the like, and may be used for life management and temperature management.

The incandescent lamp 35 may be located inside the insulator 30 of the lamp 1, or may be disposed outside the insulator 30 and connected to the feeder harness 36.

The outer edge of the opening 21 of the reflector 20 is formed into a substantially square shape with its corners chamfered, but one of the 4 corners is formed into a shape different from the 3 corners as the cutout 26 for alignment. Thus, when the lamps 1 are mounted to the lamp holder 40, the lamps 1 are all aligned in the same orientation.

Since the temperature of the portion of the arc tube 10 located on the upper side becomes high, the cooling efficiency increases when the amount of air passing through the upper side is large.

Therefore, in the lighting device in which the lamp holder 40 is assembled, it is preferable that the lamp 1 is aligned and mounted on the lamp holder 40 so that the 2 open portions 34 formed in the insulator 30 are positioned in the vertical direction.

Further, the shape of the insulator 30 may be formed asymmetrically so that the opening area of the opening portion 34 positioned on the upper side is larger than the opening area of the opening portion 34 positioned on the lower side, thereby further improving the cooling efficiency. For example, in the present embodiment, as shown in fig. 1, the opening gap g of the opening portion 34 is defined by 2 planes passing through the long axis X, and by changing the angle formed by the 2 planes, the opening gap g, and thus the opening area, can be changed.

Here, in the lamp 1 of the present embodiment, in order to increase the illumination intensity, the energy at the light emitting tube portion 13 is increased, and accordingly, the temperature at the light emitting tube portion 13 becomes higher than that in the related art. On the other hand, the connecting portions of the wires and the wire harnesses 16, 17 extending from the one side tube portion 14 and the other side tube portion 15 need to be relatively lowered in temperature from the viewpoint of heat resistance.

Therefore, in the present embodiment, the length L1 of the one side tube portion 14 is designed to be longer than the length L2 of the other side tube portion 15. That is, the other side tube portion 15 is exposed to the air passing through the cooling path, and therefore has a higher heat radiation effect than the one side tube portion 14. In contrast, by providing one side tube portion 14 to be longer than the other side tube portion 15, the distance from the light emitting tube portion 13 to the connection portion of the electric wire from the one side tube portion 14 and the wire harness 16 becomes longer, and the temperature at the connection portion is further reduced. Therefore, the cooling efficiency at the both

side tube portions

14, 15 of the arc tube 10 can be improved.

Specifically, in the present embodiment, the length L1 of the one side tube part 14 is set to be 1.1 to 1.4 times the length L2 of the other side tube part 15.

As shown in fig. 4, the one side tube portion 14 is disposed in the dead space a of the lamp 1 so as not to block the light emitted from the lamp 1.

As shown in fig. 5(a), in the light-emitting tube portion 13, light generated at the bright point P by the discharge between the pair of

electrodes

11, 12 is radially widened, and since the

electrodes

11, 12 are present, the light orientation distribution forms a shadow in the direction in which the

electrodes

11, 12 extend, like the hatched portion B.

As shown in fig. 5(b), the reflector 20 is a paraboloid, and the bright point P of the arc tube 10 is arranged at the focal point of the paraboloid. Therefore, the light beam emitted from the bright point P is reflected on the reflecting surface 22 of the reflector 20 as indicated by the one-dot chain line to become parallel light. However, since there is a deviation of the bright point P from the focal point and the bright point P has a limited size, light rays as shown by a dotted line are actually included, and thus not all are parallel light. When the direction of all the rays including the parallel light is considered, the light reflected by the reflector 20 further passes through all the diagonal line portions C shown in fig. 5 (b). On the other hand, if the dead zone a is defined as a position where all the reflected light does not pass, the one side tube part 14 is disposed in the dead zone a of the lamp 1 as shown in fig. 4, and therefore the light reflected by the reflector 20 is not obstructed. The dead zone a may be formed by designing the shape of the paraboloid of the reflector 20.

Therefore, although the reflector 20 is provided with the flat surface 25 that is adjacent to the opening 21 and defines one end of the emitter 20 in the axial direction and is perpendicular to the long axis X direction, the length of the projection of the one side tube portion 14 from the flat surface 25 is increased. That is, as shown in FIG. 3, when the distance from the center of the light-emitting tube portion 13 to the flat surface 25 of the reflector 20 in the long axis X direction is L4, the distance L3 from the flat surface 25 of the reflector 20 to the tip of the one side tube portion 14 is set to 0.2 XL 4L 3L 4 1.0 XL 4.

The tube diameters of the

side tube parts

14, 15 are set to be thick enough to ensure strength with respect to the lengths L1, L2 of the

side tube parts

14, 15, and one side tube part 14 does not protrude from the dead space A of the lamp 1.

Here, as shown in FIG. 3, the pipe diameters of the

side pipe portions

14 and 15 are set to D1, and D1 is set to 0.4 XL 1 with respect to the length L1 of one side pipe portion 14.

The one side tube portion 14 and the other side tube portion 15 are each formed in a cylindrical shape, and the tube diameters thereof are the same as D1. The

side tube portions

14 and 15 are connected to the light emitting tube portion 13, and the light emitting tube portion 13 is connected to the wire harnesses 16 and 17 via the

side tube portions

14 and 15. The temperature of the light emitting tube portion 13 is very high, but the temperature of the wire harnesses 16, 17 needs to be lowered to prevent oxidation, and the temperature of the wire harnesses 16, 17 is lowered by forming a temperature gradient in each of the

side tube portions

14, 15.

By setting the pipe diameters D1 of the

side pipe portions

14 and 15 to be the same, the temperature gradient in the vicinity of the connection with the light-emitting pipe portion 13 can be easily set to be the same at both the electrodes. On the other hand, if the temperature gradient difference between the two electrodes of the light emitting tube portion 13 becomes large, strain is accumulated in the glass, which causes cracking.

In the reflector 20, the opening diameter is D2, and when the focal point position of the virtual paraboloid PA is f1, D2/f1 is preferably set to 7 to 10. By setting the light collection position to be substantially 1m or more, light can be efficiently collected in the fly-eye lens.

As shown in fig. 6, the high-pressure discharge lamp 1 configured as above is mounted on a lamp holder 40 in plural numbers in the longitudinal and transverse directions, respectively, and is used as a light source section for an exposure apparatus. Further, by discharging air on the back side of the lamp holder 40 by an exhaust device not shown, air from the front side of the lamp holder 40 is introduced into the lamp 1 with the space s of each high-pressure discharge lamp 1 as a cooling path, thereby cooling each lamp 1. The back surface side of the lamp holder 40 may form a sealed space together with the lamp cover, and air may be discharged from the sealed space.

As described above, according to the high-pressure discharge lamp of the present embodiment, the insulator 30 has the open portion 34 that communicates the space s formed between the other side tube portion 15 of the arc tube 10 and the insertion hole 23 of the reflector 20 with the outside, and the length L1 of the one side tube portion 14 is longer than the length L2 of the other side tube portion 15. This improves the cooling efficiency in the

side tube parts

14 and 15 of the arc tube 10, and improves the illumination intensity of the lamp itself.

The present invention is not limited to the above-described embodiments, and modifications, improvements, and the like can be appropriately made.

For example, in the present invention, the method of connecting the light-emitting tube and the wire harness and the structure of the inside of the light-emitting tube are not limited to the embodiments of the present invention, and any conventional form may be applied.

In the present invention, the life time may be managed using a circuit as shown in fig. 7. That is, n series of resistors Ri and fuses Fi (each i is 1, 2 … … n; n is 1, preferably an integer of 2 or more) are arranged in parallel. The resistance values of the resistors Ri are different from each other, and the current values at which the fuses Fi are cut are different from each other. When the life time is managed, the fuses Fi are cut off after a predetermined time elapses by passing different currents from the power supply unit 50. In addition, r of the power supply unit 50 represents an internal resistance of the power supply.

Further, the service life may be managed by controlling the voltage of the power supply unit 50 to sequentially cut off the fuses Fi.

The specification of the lamp 1 can be determined by determining the total resistance value of all the resistors Ri and the fuses Fi by the determination circuit. In this case, even when the lamps 1 of different specifications are turned on, the life can be managed, and the lamps can be turned on normally and safely.

In the circuit, a plurality of resistors Ri having different resistance values may be arranged in parallel without providing the fuse Fi, and the resistors Ri may be blown out sequentially after a predetermined time period elapses by different currents flowing from the power supply unit 50.

The resistor may be inside the insulator of the lamp 1 or may be connected to a connection portion, not shown, that electrically contacts the power supply harness 36 with the outside. In this case, the resistor needs to be connected to a power supply of a system different from the harnesses 16, 17 that supply power to the lamp electrodes.

The invention is based on the Japanese patent application (Japanese application 2017-017856) applied in 2/2 in 2017, the content of which is referred to and adopted in the specification.

Claims

1. A high-pressure discharge lamp, comprising:

a reflector having: an opening portion provided on one side in the longitudinal direction and through which one of the side tube portions protrudes; a parabolic reflective surface formed about the long axis; and an insertion hole formed on the other side in the longitudinal direction and into which the other of the side tube portions can be inserted with a gap; and

an insulator fixing the light emitting tube and the reflector, respectively,

the length of one of the side tube portions is longer than the length of the other side tube portion,

the insulator has two open portions that communicate a space formed between the other of the side tube portions and the insertion hole of the reflector with the outside and open the other of the side tube portions to the outside,

the opening areas of the two open portions are different from each other.

2. A high-pressure discharge lamp as claimed in claim 1,

the one side tube portion is arranged in a dead space of the lamp.

3. A high-pressure discharge lamp as claimed in claim 1 or 2,

the reflector is provided with a flat surface which is adjacent to the opening and is perpendicular to the long axis direction,

when a distance from the center of the light emitting tube portion to the flat surface of the reflector is L4 in the longitudinal direction, a distance L3 from the flat surface of the reflector to the one side tube portion is 0.2 × L4 ≦ L3 ≦ 1.0 × L4.